CN112882962A - Data interaction system and method based on VPX architecture - Google Patents
Data interaction system and method based on VPX architecture Download PDFInfo
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- G06F13/42—Bus transfer protocol, e.g. handshake; Synchronisation
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Abstract
The invention provides a data interaction system and a method based on a VPX framework, wherein the data interaction system comprises a data control module, an I/O interface module, a data acquisition module and a model calculation module; the data control module is used for receiving a command of the upper computer, carrying out initialization operation on the whole system and controlling data interaction inside the whole system; the I/O interface module is used for realizing data interaction inside and outside the whole system and data intercommunication among all board cards inside the system; the data acquisition module is used for converting the received analog sampling data measured by the measurement subsystem into digital sampling data and sending the digital sampling data to the I/O interface module through the SRIO bus; the model calculation module is used for performing multi-core parallel calculation on the received digital sampling data sent by the data control module and sending the processed data to the I/O interface module through the SRIO bus for output. The invention improves the data transmission speed, reduces the data transmission delay and improves the data processing capability.
Description
Technical Field
The invention relates to the technical field of data interaction, in particular to a data interaction system and method based on a VPX framework.
Background
The lithography machine as a weighing machine of China is a key core device of the current chip production line. The core motion system workpiece table of the photoetching machine has the characteristics of high motion speed, high acceleration, large stroke range, ultraprecision and the like. The precision of the workpiece stage position measurement system directly influences the control performance of a servo system of the workpiece stage, so that the core indexes of the system resolution and the alignment precision of the photoetching machine are influenced. The design of a new generation of lithography machine with higher performance needs to further improve the control performance of a workpiece stage position measurement system and the accuracy of an algorithm, so that the parallel motion control of a plurality of workpiece stages is realized.
These technical requirements necessarily require the measurement system of the position of the stage of the lithography machine to have the characteristics of more complexity, more precision, high real-time performance and high reliability. At present, a control system based on a VME bus architecture is most commonly applied to a photoetching machine in China due to the advantages of high reliability and stability, but the control system based on the VME bus architecture has the defects of low data transmission speed, poor data processing capacity and the like, the requirements of the control system of a higher-performance workpiece table position measurement system with a more complex and huge internal and external data interaction system cannot be met, and a transmission bus with low time delay, high bandwidth and high reliability needs to be adopted to replace the conventional VME bus mechanism to realize complex model calculation and greatly improved data processing total quantity of the higher-performance workpiece table position measurement system so as to perform servo control on the workpiece table.
Disclosure of Invention
The invention aims to provide a data interaction system and method based on a VPX (virtual private network) architecture, which can solve the problems of low data transmission speed and poor data processing capability of the data interaction system and method based on a VME (virtual private network) bus architecture in the prior art.
In order to solve the technical problem, the invention provides a data interaction system based on a VPX architecture, which comprises a data control module, an I/O interface module, a data acquisition module and a model calculation module;
the data control module is used for receiving a command of the upper computer, carrying out initialization operation on the whole system and controlling data interaction in the whole system;
the I/O interface module is used for realizing data interaction inside and outside the whole system and data intercommunication among all board cards inside the system;
the data acquisition module is used for converting the received analog sampling data measured by the measurement subsystem into digital sampling data and sending the digital sampling data to the I/O interface module through an SRIO bus;
the model calculation module is used for performing multi-core parallel calculation on the received digital sampling data sent by the data control module, sending the processed data to the I/O interface module through an SRIO bus, and outputting the processed data by the I/O interface module.
Optionally, the data control module includes a data control unit, a command control unit, and a command management unit;
the data control unit is used for acquiring digital sampling data on an SRIO bus and sending the digital sampling data to the model calculation module;
the command management unit is used for receiving commands of the upper computer and analyzing, processing and packaging the received commands;
the command control unit is used for distributing the packed commands to the I/O interface module, the data acquisition module and the model calculation module.
Optionally, the data control module further includes a synchronization control unit, where the synchronization control unit is configured to generate a system synchronization reference clock, output an external synchronization clock, and receive synchronization status information of an external subsystem.
Optionally, the packed command includes a physical slot number of the command operation module, keyword information of the command operation module, and a call function operation address.
Optionally, the command control unit is further configured to receive feedback information about whether a command fed back by the I/O interface module, the data acquisition module, and the model calculation module reaches and whether the command is executed successfully.
Optionally, the measurement subsystem includes a planar grating module and a sensor module, the planar grating module is configured to convert a position variation of the workpiece stage into an analog optical signal, and the sensor module is configured to obtain analog temperature and pressure data outside the system;
the data acquisition module comprises a temperature and pressure detection board card and an optical signal detection board card, wherein the optical signal detection board card is used for converting analog optical signals into digital optical signals, and the temperature and pressure detection board card is used for converting analog temperature and pressure data into digital temperature and pressure data.
Optionally, the model calculation module includes at least one multi-core DSP board, each DSP board includes at least one multi-core DSP chip, and inter-core data interaction of the multi-core DSP chips is completed through a shared memory.
Optionally, each DSP board includes at least two multi-core DSP chips, each DSP chip integrates eight cores, inter-core data interaction of the eight cores is completed through a shared memory, each DSP chip divides the shared memory area into eight shared areas, and each shared area allows only one core to write data in.
Optionally, each of the cores includes a first port and a second port, where the first port is used to send data, and the second port is used to receive data.
Optionally, the shared memory area includes a model constant shared area and a diagnostic data shared area, the model constant shared area is used for storing a fixed and variable model constant, and the diagnostic data shared area is used for dynamically storing key intermediate data and result data in model calculation.
In order to solve the above technical problem, the present invention further provides a data interaction method based on a VPX architecture, including:
the data control module receives a command of an upper computer and performs initialization operation on the whole system;
the data acquisition module converts received analog sampling data measured by the measurement subsystem into digital sampling data and sends the digital sampling data to the I/O interface module through the SRIO bus;
the data control module acquires digital sampling data on the SRIO bus and sends the digital sampling data to the model calculation module; and
and the model calculation module performs multi-core parallel calculation on the received digital sampling data sent by the data control module, sends the processed data to the I/O interface module through an SRIO bus, and outputs the processed data by the I/O interface module.
Optionally, the data control module includes a data control unit, a command control unit, and a command management unit;
the data control module receives a command of the upper computer and performs initialization operation on the whole system, and the steps comprise:
the command management unit receives a command of the upper computer, and analyzes, processes and packages the received command; and
the command control unit distributes the packed commands to the I/O interface module, the data acquisition module and the model calculation module so as to initialize the whole system;
the step of acquiring the digital sampling data on the SRIO bus and sending the digital sampling data to the model calculation module by the data control module is specifically as follows:
and the data control unit acquires the digital sampling data on the SRIO bus and sends the digital sampling data to the model calculation module.
Optionally, the step of receiving the command of the upper computer by the data control module and performing initialization operation on the whole system further includes:
and the command control unit receives feedback information of whether the command fed back by the I/O interface module, the data acquisition module and the model calculation module arrives and whether the command is successfully executed, and if the received feedback information is command execution failure, the command control unit sends the packed command to the module with command execution failure again.
Optionally, the data control module further includes a synchronization control unit for sending out a synchronization control signal;
the data acquisition module comprises a temperature and pressure detection board card and an optical signal detection board card, the analog sampling data comprises analog optical signals and analog temperature and pressure data, and the digital sampling data comprises digital optical signals and digital temperature and pressure data;
the step of receiving the analog sampling data measured by the measurement subsystem by the data acquisition module specifically comprises the following steps:
the data acquisition module receives the analog optical signal and the analog temperature and pressure data measured by the measurement subsystem simultaneously according to the synchronous control signal sent by the synchronous control unit;
the step of the data control module controlling the digital sampling data on the SRIO bus and sending the digital sampling data to the model calculation module is specifically as follows:
and the data control unit simultaneously acquires the digital optical signal and the digital temperature and pressure data on the SRIO bus according to the synchronous control signal sent by the synchronous control unit and sends the digital optical signal and the digital temperature and pressure data to the model calculation module.
Compared with the prior art, the data interaction system and method based on the VPX architecture have the following advantages:
(1) the VPX framework is used as a system support, the system has the characteristics of high real-time performance and high reliability, the defects of the traditional VME framework are overcome, and the problems that the data interaction time is long, a double-workpiece-table plane grating ruler cannot be output with high frequency and high-precision position information at the same time, and the like in the conventional VME framework are solved;
(2) according to the invention, data interaction in the system is completed by adopting the high-speed serial bus SRIO, so that the data transmission speed is greatly improved, the data transmission delay among system modules is reduced, and the data processing capacity of the system is effectively improved;
(3) the model calculation module of the invention completes model calculation by adopting a multi-core DSP architecture, and data communication among the multiple cores is completed by utilizing a shared memory, thereby greatly improving data interaction and processing capacity, greatly improving model calculation efficiency and effectively improving model calculation precision;
(4) according to the method, the multi-core board card is adopted for model calculation, so that the calculation capacity of the system on the complex model is improved, and the system model can be reasonably disassembled and calculated in parallel, so that the model calculation time is shortened, and the timeliness of the system is improved;
(5) the invention expands a larger shared memory area by adopting the multi-core DSP, has a larger data memory function, can not only store fixed and unchangeable parameters in a partitioned area, but also store intermediate results and final results of model calculation for a user to call at any time, and has a powerful data diagnosis function;
(6) the invention adopts a multi-board card networking structure, has stronger expandability and applicability, can be applied to a plane grating measuring system, and can also be applied to focusing and leveling, workpiece table alignment, transmission and other systems;
(7) the invention can complete the initialization and command issuing of the board cards with different slot numbers in parallel, thereby realizing the communication among the board cards with different types;
(8) the invention can effectively compensate the data delay, the environmental temperature and pressure change and the error caused by the grating surface type in the system, and improves the whole machine control capability of the system;
(9) the invention can control the master control synchronous signal, improves the cooperative working capacity of each module of the system, effectively reduces the data transmission delay, reduces the asynchronism of data processing obtained from the outside, strengthens the high efficiency of data compensation during model calculation, and improves the data interaction and processing capacity of the whole system;
(10) the invention optimizes the space occupied by the chassis board card, improves the utilization rate of the chassis slot, improves the integration level of the chassis, enhances the heat dissipation performance of the chassis, and leads the whole system to be more flexible and have stronger expansibility.
Drawings
FIG. 1 is an architecture diagram of a data interaction system based on VPX architecture according to an embodiment of the present invention;
FIG. 2 is a diagram illustrating command issuing and receiving in a data interaction system based on VPX architecture according to an embodiment of the present invention;
fig. 3 is a schematic diagram illustrating a data flow between boards in a data interaction system based on a VPX architecture according to an embodiment of the present invention;
FIG. 4 is a diagram illustrating synchronization control in a data interaction system based on VPX architecture according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a data interaction mechanism of a multi-core DSP chip in a data interaction system based on a VPX architecture according to an embodiment of the present invention;
FIG. 6 is a flowchart of a data interaction method based on VPX architecture according to an embodiment of the present invention.
Wherein the reference numbers are as follows:
a data control module-100; an upper computer-200; I/O interface Module-300; a data acquisition module 400; model calculation module-500; a data control unit-110; command control unit-120; command management unit-130; a synchronization control unit-140; I/O interface board card-310; a planar grating module-610; a sensor module-620; a warm-pressing detection board card-410; an optical signal detection board card-420; a DSP board card-510; a DSP chip-511; core 0 shared region-512; core 7 shared region-513; model constant sharing area-514, diagnostic data sharing area-515, subsystem chassis-700.
Detailed Description
The data interaction system and method based on VPX architecture according to the present invention will be described in further detail with reference to FIGS. 1 to 6 and the following detailed description. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are all used in a non-precise scale for the purpose of facilitating and distinctly aiding in the description of the embodiments of the present invention. To make the objects, features and advantages of the present invention comprehensible, reference is made to the accompanying drawings. It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the implementation conditions of the present invention, so that the present invention has no technical significance, and any structural modification, ratio relationship change or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
As introduced in the background art, the existing control system based on the VME architecture has the disadvantages of low data transmission speed, poor data processing capability, and the like, and cannot meet the requirements of the control system of the higher-performance workpiece stage position measurement system with a more complex and huge internal and external data interaction system.
The core idea of the invention is to provide a data interaction system and method based on a VPX architecture, so as to solve the problems of low data transmission speed and poor data processing capability of the data interaction system and method based on a VME bus architecture in the prior art.
To achieve the foregoing idea, the present invention provides a VPX architecture-based data interaction system, please refer to fig. 1, which schematically shows an architecture diagram of a VPX architecture-based data interaction system according to an embodiment of the present invention, as shown in fig. 1, the VPX architecture-based data interaction system includes a data control module 100, an I/O interface module 300, a data collection module 400, and a model calculation module 500.
The control technology based on the VPX framework is mainly characterized in that: (1) the GbE gigabit Ethernet high-performance network switching capacity is realized, and 1000BASE-T network data transmission can be supported; (2) the high-speed serial bus SRIO can ensure that the data transmission speed of the system is up to 8 GB/s; (3) the system has super-strong I/O capability, and can realize the interaction of internal and external data by a plurality of board cards; (4) the method can support the realization of a topological structure among multiple board cards, for example: linear topology, star topology, network topology, etc. The data interaction system provided by the invention takes the VPX framework as the system support, so that the data interaction system has the characteristics of high real-time performance and high reliability, overcomes the defects of the traditional VME framework, and solves the problems that the data interaction time is long, a double-workpiece-table plane grating ruler cannot be finished to output high-precision position information at the same time at high frequency and the like in the conventional VME framework.
The data control module 100 is configured to receive a command from the upper computer 200, perform an initialization operation on the entire system, and control data interaction inside the entire system. The upper computer 200 not only can provide a human-computer interaction operation interface, record data diagnosis and error information, but also can obtain commands issued by an upper layer structure, and complete the interaction of internal and external commands of the system. Therefore, the data interaction system provided by the invention is a master-slave control structure, and the data control module 100 is used for acquiring the command of the upper computer 200 and then issuing other modules. Preferably, the data control module 100 issues the command to other modules through the GbE bus. Therefore, the data interaction capacity can be greatly improved by adopting the GbE bus, the initialization and command issuing of the board cards with different slot numbers can be completed in parallel, and the communication among the board cards with different types of the chassis is realized.
Preferably, please refer to fig. 1 and fig. 2, wherein fig. 2 schematically illustrates a schematic diagram of command issuing and receiving in a data interaction system based on a VPX architecture according to an embodiment of the present invention. As shown in fig. 1 and 2, the data control module 100 includes a data control unit 110, a command control unit 120, and a command management unit 130, where the command management unit 130 is configured to receive a command from the upper computer 200, and analyze, process, and package the received command; the command control unit 120 is configured to distribute the packed commands to the I/O interface module 300, the data collection module 400, and the model calculation module 500.
Specifically, after receiving the command from the upper computer 200, the command management unit 130 analyzes, processes, and packages the command according to the corresponding command based on the difference of the command functions, so that the packaged command to be sent includes information such as the physical slot number of the command operation module, the keyword information of the command operation module, and the call function operation address. Finally, the command control unit 120 distributes the packed information cmd/data to various modules except the data control module 100, that is, the I/O interface module 300, the data acquisition module 400 and the model calculation module 500, through GbE gigabit ethernet, and the command control unit 120 mainly distributes commands based on command IDs, and has multicast and broadcast functions.
For example, when the command management unit 130 receives an initialization command from the upper computer 200, where the initialization command includes parameters, the initialization command is analyzed, processed, and packaged, and then the packaged initialization command is distributed to the I/O interface module 300, the data acquisition module 400, and the model calculation module 500 through the GbE gigabit ethernet by the command control unit 120, so as to complete initialization configuration and parameter setting of each module of the system. Therefore, the invention can greatly improve the data interaction capacity of the system by adopting the GbE bus, can complete the initialization and command issuing of the board cards with different slot numbers in parallel and realizes the communication among the board cards with different types in the case.
Preferably, as shown in fig. 2, the command control unit 120 is further configured to receive feedback information about whether the command is reached and whether the command is successfully executed, where the feedback information is fed back by the I/O interface module 300, the data acquisition module 400, and the model calculation module 500. Other modules except the data control module 100 in the system receive the message from the GbE gigabit Ethernet, unpack the received message, firstly identify whether the physical slot number and the keyword information contained in the message header correspond to the information of the other modules after unpacking, and if so, identify key information such as command enumeration amount, corresponding function address, input data address and length, output data address and length and the like. If the command information is normal, return 1 to the command control unit 120 first, notifying the command control unit 120 that it has received a command; and then responding and executing in the corresponding module board card. If the command is successfully executed in the module, return 2 to the command control unit 120, wherein the return 2 contains data to be fed back, and notify the command control unit 120 that it has successfully executed the command; if the command was not successfully executed in this module, reply2 is also returned to the command control unit 120, where reply2 contains an error code, informing the command control unit 120 that it did not successfully execute the command. The command control unit 120 sends the command again according to the situation after receiving the error code, so as to ensure that the command can be executed normally. Therefore, the command interaction needs double verification, and the timeliness and the accuracy of the command interaction are improved.
Preferably, please refer to fig. 3, which schematically shows a data flow diagram between boards in a data interaction system based on a VPX architecture according to an embodiment of the present invention. As shown in fig. 3, the I/O interface module 300 is used to implement data interaction between inside and outside of the whole system and data intercommunication between all boards inside the system. The I/O interface module 300 of the present invention is a bridge for data interaction between the inside and outside of the system, and includes various internal and external data communication interfaces, such as: high-speed optical fiber interface, 485 interface, RJ45 RS-232 serial port, DB9 RS-422 serial port and the like. In the present invention, except for the data issued by the upper computer 200, all external input data of the system are converted into digital signals, and then sent to the model calculation module 500 through the SRIO bus, and after performing model calculation, system output signals are formed, and finally transmitted to the I/O interface module 300 through the SRIO bus, and output is performed through the external interface on the I/O interface module 300. Therefore, the data intercommunication among all board cards in the chassis can be realized through the I/O interface module 300, and any board card can read the data in the system.
Preferably, each I/O interface board 310 of the I/O interface module 300 has a data storage capacity of 8GB, so that the data interaction system provided by the present invention can implement a real-time data monitoring function.
As shown in fig. 3, the data acquisition module 400 is configured to convert the received analog sampling data measured by the measurement subsystem into digital sampling data, and send the digital sampling data to the I/O interface module 300 through the SRIO bus. Therefore, the data acquisition module 400 can acquire an analog signal external to the system, for example, analog sampling data measured by the measurement subsystem, convert the analog sampling data into a digital signal, and then send the digital signal to the I/O interface module 300 through the SRIO bus of the backplane.
Preferably, as shown in fig. 1, the measurement subsystem includes a planar grating module 610 and a sensor module 620, where the planar grating module 610 is configured to convert a position variation of a workpiece stage into an analog optical signal, and the sensor module 620 is configured to acquire analog temperature and pressure data outside the system; data acquisition module 400 includes warm-pressing detection integrated circuit board 410 and optical signal detection integrated circuit board 420, optical signal detection integrated circuit board 420 is used for turning into digital light signal with analog light signal, warm-pressing detection integrated circuit board 410 is used for turning into digital warm-pressing data with analog warm-pressing data. Therefore, the optical signal acquisition of the planar grating ruler can be completed by the optical signal detection board card 420, and the acquisition of the ambient temperature and the ambient pressure can be completed by the warm-pressing detection board card 410. Specifically, after the position of the workpiece table changes, the planar grating module 610 is configured to convert the position variation of the workpiece table into an optical signal variation, where the optical signal variation is transmitted to the optical signal detection board 420 through an optical fiber, and the optical signal detection board 420 performs photoelectric conversion to complete conversion from an analog signal to a digital signal. The sensor module 620 can acquire external ambient temperature and pressure data, the temperature and pressure data are transmitted to the temperature and pressure detection board card 410 through the I/O interface module 300, and the conversion from analog data to digital data is completed through the temperature and pressure detection board card 410. The temperature and pressure data and the optical signal data after analog-to-digital conversion are simultaneously controlled by the data control unit 110 through the SRIO bus, and are pushed to the model calculation module 500.
As shown in fig. 1 and fig. 3, the model computation module 500 is configured to perform multi-core parallel computation on received digital sampling data sent by the data control module 100, send the processed data to the I/O interface module 300 through an SRIO bus, and output the processed data by the I/O interface module 300. Therefore, after the model calculation module 500 receives the temperature and pressure data and the optical signal data, the data calculation is completed through the multi-core parallel, and finally, the I/O interface module 300 distributes the data after the model calculation to other subsystem cases 700 through the high-speed optical fiber. Specifically, the model calculation module 500 first obtains all machine constants required for model calculation through an initialization command, then obtains temperature and pressure data and optical signal data collected by the data acquisition module 400 through a backplane data bus at a fixed frequency, then calculates position information of the dual workpiece stages through an internal main process, thereby obtaining real-time position information of the dual workpiece stages, and finally sends the position information of the dual workpiece stages to a workpiece stage control system (subsystem chassis) through a high-speed optical fiber communication unit of the I/O interface module 300.
Preferably, please refer to fig. 4, which schematically shows a synchronization control diagram in a data interaction system based on a VPX architecture according to an embodiment of the present invention. As shown in fig. 4, the data control module 100 further includes a synchronization control unit 140, where the synchronization control unit 140 is configured to generate a system synchronization reference clock, perform external synchronization clock output, and receive synchronization status information of an external subsystem. Therefore, the synchronization control unit 140 can implement synchronization control among all boards in the VPX chassis. Specifically, the synchronization control unit 140 may send out multiple paths of synchronization control signals, so that the input signals of the optical signal detection board card 420 and the temperature and pressure detection board card 410 are signals at the same time, and the data of the optical signal detection board card 420 and the temperature and pressure detection board card 410 are obtained at the same time, thereby achieving the temperature and pressure compensation function at the same time. In addition, by using the synchronous control signal sent by the synchronous control unit 140, it can be ensured that the model input signal (digital optical signal) and the model compensation signal (digital temperature and pressure data) of different cores of the model calculation module 500 are in the same period, so as to improve the model calculation accuracy and realize the efficient data compensation function.
Preferably, the model calculation module 500 includes at least one multi-core DSP board 510, and each DSP board 510 includes at least one multi-core DSP chip 511. Therefore, by providing at least one multi-core DSP board 510 in the model calculation module 500, different types of model data can be calculated at the same time. In addition, because the multi-core DSP board 510 in the model computing module 500 in the present invention employs a multi-core chip, the problems of an over-full chassis slot, an under-voltage power supply and insufficient heat dissipation, and a difficult chassis expansion caused by requiring a plurality of single-core model computing boards to implement measurement and computation in the existing chassis of the lithography machine workpiece stage position measurement system are solved.
Preferably, the model calculation module 500 includes at least two multi-core DSP board cards 510, so that different DSP board cards 510 can complete calculation of different types of model data, thereby greatly improving the calculation speed and capability of the model calculation module 500. For example, in this embodiment, the model calculation module 500 includes two multi-core DSP boards 510, where one DSP board 510 may calculate the position information of one of the two workpiece stages, and the other DSP board 510 may calculate the position information of the other workpiece stage.
Preferably, the inter-core data interaction of the multi-core DSP chip 511 is completed through a shared memory. After the model calculation module 500 is initialized, the arrival of original data of position change carried by a plane grating is waited, after the data arrive, the data are quickly transferred to a shared memory, then the parallel calculation of the multi-core model is carried out, and after the data and time compensation are completed, the position data are sent to the I/O interface module 300 through a back plate SRIO bus. Therefore, by adopting a shared memory mechanism of the multi-core DSP board 510, the problem of time consumption of mass data transmission of the chassis backboard is solved, and the problem that the original single-core model calculation board cannot complete measurement calculation within a specific high frequency, such as a 10 mu s servo period, is solved.
Preferably, please refer to fig. 5, which schematically shows a data interaction mechanism diagram of the multi-core DSP chip 511 in the data interaction system based on the VPX architecture according to an embodiment of the present invention. As shown in fig. 5, the data interaction between the multi-core DSP board 510 and the data control module 100 in the present invention is a one-to-many-receive mechanism, when the data control module 100 issues a command and data interaction to the model calculation module 500, the data control module 100 issues the command and data interaction through ethernet GbE, and when the multi-core DSP board 510 receives a message command, there are two command response mechanisms: one is that only one core responds to a command; the other is that one command is responded by two or more cores of the same chip. The DSP board 510 completes responses to various commands through a mechanism of temporary command storage and timely feedback after receiving a message, when the multi-core DSP board 510 receives a command, the command is stored in a command temporary storage area, the command is identified in the area to obtain a core number for responding to the command, and then a corresponding core performs response and execution of a specific command.
Preferably, as shown in fig. 3 and fig. 5, each of the DSP boards 510 includes at least two multi-core DSP chips 511, and each of the multi-core DSP chips 511 integrates eight cores, which are core 0, core 1, core 2, core 3, core 4, core 5, core 6, and core 7. The data interaction among the eight cores is completed through a shared memory, each DSP chip 511 divides the shared memory area into eight shared areas, and each shared area allows only one core to write data. Therefore, by arranging at least two DSP chips 511 in each DSP board 510, the calculation speed and calculation capability of the model calculation module 500 can be further improved.
Preferably, as shown in fig. 5, each multi-core DSP chip 511 divides the shared memory into eight regions, which are: core 0 shared region 512, core 1 shared region, core 2 shared region, core 3 shared region, core 4 shared region, core 5 shared region, core 6 shared region, and core 7 shared region 513. Where each shared region allows only one core to write data on it, and the other cores can only read data.
Preferably, each of the cores includes a first port and a second port, the first port is used for sending data, and the second port is used for receiving data. Therefore, each of the multi-core DSP chips 511 segments the shared memory as required to refine the shared region between the source core and the target core, where the address and the length of the shared region are both specified and only can perform operations in a single direction, where the first port of the source core may point to the second ports of the multiple target cores, and the second port of the target core may receive data sent from the multiple source cores. By independently refining the address, the cross contamination of address data is avoided. In addition, each core comprises a first port for sending data and a second port for receiving data, so that the inter-core communication can follow a full-duplex communication mode, and the data interaction efficiency is greatly improved.
Preferably, as shown in fig. 5, the shared memory area includes a model constant sharing area 514 and a diagnostic data sharing area 515, the model constant sharing area 514 is used for storing fixed and variable model constants, and the diagnostic data sharing area 515 is used for dynamically storing key intermediate data and result data in model calculation. Therefore, the shared memory area has a function of storing extra-large data, and the fixed model constants can be divided into regions to be stored through the model constant shared area 514, so that data reading during multi-core parallel computation is facilitated; the diagnostic data sharing area 515 can be used for dynamic storage of key intermediate data and result data of model calculation, has a data memory function, and can facilitate a user to perform diagnostic analysis on data at any time.
Corresponding to the above data interaction system based on VPX architecture, the present invention further provides a data interaction method based on VPX architecture, please refer to fig. 6, which schematically shows a flowchart of the data interaction method based on VPX architecture according to an embodiment of the present invention, as shown in fig. 6, the data interaction method based on VPX architecture includes the following steps:
step S100: and the data control module receives a command of the upper computer and performs initialization operation on the whole system.
Step S200: the data acquisition module converts received analog sampling data measured by the measurement subsystem into digital sampling data and sends the digital sampling data to the I/O interface module through the SRIO bus.
Step S300: and the data control module acquires digital sampling data on the SRIO bus and sends the digital sampling data to the model calculation module.
Step S400: and the model calculation module performs multi-core parallel calculation on the received digital sampling data sent by the data control module, sends the processed data to the I/O interface module through an SRIO bus, and outputs the processed data by the I/O interface module.
The data interaction method provided by the invention takes the VPX framework as a support, so that the data interaction method has the characteristics of high real-time performance and high reliability, overcomes the defects of the traditional VME framework, and solves the problems that the data interaction time is long, a double-workpiece-table plane grating ruler cannot be output with high frequency and high-precision position information at the same time in the currently used VME framework. The invention completes the data interaction in the system by adopting the high-speed serial bus SRIO, greatly improves the data transmission speed, reduces the data transmission delay among the system modules and effectively improves the data processing capacity of the system. In addition, the multi-core board card is adopted for model calculation, so that the calculation capacity of the system on the complex model is improved, the system model can be reasonably disassembled and calculated in parallel, the model calculation time is shortened, and the timeliness of the system is improved.
Preferably, the data control module includes a data control unit, a command control unit and a command management unit.
The data control module receives a command of the upper computer and performs initialization operation on the whole system, and the steps comprise: the command management unit receives a command of the upper computer, and analyzes, processes and packages the received command; and the command control unit distributes the packed commands to the I/O interface module, the data acquisition module and the model calculation module so as to initialize the whole system. Preferably, the command control unit distributes the packed initialization command to the I/O interface module, the data acquisition module, and the model calculation module through a GbE gigabit ethernet. Therefore, the invention can greatly improve the data interaction capacity of the system by adopting the GbE bus, can complete the initialization and command issuing of the board cards with different slot numbers in parallel and realizes the communication among the board cards with different types in the case.
The step of acquiring the digital sampling data on the SRIO bus and sending the digital sampling data to the model calculation module by the data control module is specifically as follows: and the data control unit acquires the digital sampling data on the SRIO bus and sends the digital sampling data to the model calculation module.
Preferably, the step of receiving the command of the upper computer by the data control module and performing initialization operation on the whole system further includes: and the command control unit receives feedback information of whether the command fed back by the I/O interface module, the data acquisition module and the model calculation module arrives and whether the command is successfully executed, and if the received feedback information is command execution failure, the command control unit sends the packed command to the module with command execution failure again. Therefore, the command interaction needs double checks, and the timeliness and the accuracy of the command interaction are improved.
Preferably, the data control module is still including the synchronous control unit who is used for sending synchronous control signal, the data acquisition module is including warm-pressing detection integrated circuit board and light signal detection integrated circuit board, analog sampling data includes analog light signal and analog warm-pressing data, digital sampling data includes digital light signal and digital warm-pressing data, the measurement subsystem includes plane grating module and sensor module, the plane grating module is used for turning into analog light signal with the position variation of work piece platform, sensor module is used for acquireing the outside analog warm-pressing data of system.
The step of receiving the analog sampling data measured by the measurement subsystem by the data acquisition module specifically comprises the following steps: and the data acquisition module receives the analog optical signal and the analog temperature and pressure data measured by the measurement subsystem simultaneously according to the synchronous control signal sent by the synchronous control unit.
The step of the data control module controlling the digital sampling data on the SRIO bus and sending the digital sampling data to the model calculation module is specifically as follows: and the data control unit simultaneously acquires the digital optical signal and the digital temperature and pressure data on the SRIO bus according to the synchronous control signal sent by the synchronous control unit and sends the digital optical signal and the digital temperature and pressure data to the model calculation module.
Therefore, the synchronous control unit can realize the synchronous control among all the board cards in the VPX chassis. Specifically, the synchronous control unit can send multichannel synchronous control signal to can realize that the input signal that light signal detected integrated circuit board and warm-pressing detected integrated circuit board is the signal of same moment, in order to realize acquireing the data that light signal detected integrated circuit board and warm-pressing detected integrated circuit board simultaneously, and then realize the warm-pressing compensation function of same moment. In addition, by using the synchronous control signal sent by the synchronous control unit, the model input signal (digital optical signal) and the model compensation signal (digital temperature and pressure data) of different cores of the model calculation module can be ensured to be in the same period, so that the model calculation precision is improved and the efficient data compensation function is realized.
Preferably, the model calculation module includes at least one multi-core DSP board, and each DSP board includes at least one multi-core DSP chip. Therefore, by arranging at least one multi-core DSP board card in the model calculation module, the calculation of different types of model data can be completed simultaneously. In addition, because the multi-core DSP board card in the model calculation module adopts a multi-core chip, the problems of over-full case slots, insufficient power supply voltage and heat dissipation and difficult case expansion caused by the fact that a plurality of single-core model calculation board cards are needed in the case of the traditional photoetching machine workpiece platform position measurement system to realize measurement calculation are solved.
Preferably, the model calculation module comprises at least two multi-core DSP board cards, so that different DSP board cards can finish calculation of different types of model data, and the calculation speed and the calculation capacity of the model calculation module are greatly improved. For example, in this embodiment, the model calculation module includes two multi-core DSP boards, where one DSP board may calculate the position information of one of the two workpiece tables, and the other DSP board may calculate the position information of the other workpiece table.
Preferably, the data interaction between the cores of the multi-core DSP chip is completed through a shared memory. After the model calculation module is initialized, the arrival of original data of position change carried by a plane grating is waited, after the data arrive, the data are quickly transferred to a shared memory, then the parallel calculation of the multi-core model is carried out, and after the data and time compensation are completed, the position data are sent to an I/O interface module through a back plate SRIO bus. Therefore, by adopting a shared memory mechanism of the multi-core DSP board card, the problem of time consumption of mass data transmission of the chassis backboard is solved, and the problem that the original single-core model calculation board card cannot complete measurement calculation within a specific high frequency, such as a 10 mu s servo period, is solved.
Preferably, each DSP board includes at least two multi-core DSP chips, each multi-core DSP chip integrates eight cores, inter-core data interaction of the eight cores is completed through a shared memory, each DSP chip divides the shared memory area into eight shared areas, and each shared area allows only one core to write data in. Therefore, at least two DSP chips are arranged in each DSP board card, so that the calculation speed and the calculation capacity of the model calculation module can be further improved.
Preferably, each of the cores includes a first port and a second port, the first port is used for sending data, and the second port is used for receiving data. Therefore, each multi-core DSP chip segments the shared memory as required to refine a shared area between the source core and the target core, the address and the length of the shared area are specified and only can be operated in a single direction, the first port of the source core can point to the second ports of the target cores, and the second port of the target core can receive data sent by the source cores. By independently refining the address, the cross contamination of address data is avoided. In addition, each core comprises a first port for sending data and a second port for receiving data, so that the inter-core communication can follow a full-duplex communication mode, and the data interaction efficiency is greatly improved.
Preferably, the shared memory area includes a model constant sharing area and a diagnostic data sharing area, the model constant sharing area is used for storing fixed and variable model constants, and the diagnostic data sharing area is used for dynamically storing key intermediate data and result data in model calculation. Therefore, the shared memory area has a function of storing extra-large data, and the fixed model constants can be divided into regions to be stored through the model constant shared area, so that data reading during multi-core parallel computation is facilitated; the diagnostic data sharing area can be specially used for dynamically storing key intermediate data and result data of model calculation, has a data memory function, and can facilitate a user to diagnose and analyze the data at any time.
In summary, compared with the prior art, the data interaction system and method based on the VPX architecture provided by the invention have the following advantages:
(1) the VPX framework is used as a system support, the system has the characteristics of high real-time performance and high reliability, the defects of the traditional VME framework are overcome, and the problems that the data interaction time is long, a double-workpiece-table plane grating ruler cannot be output with high frequency and high-precision position information at the same time, and the like in the conventional VME framework are solved;
(2) according to the invention, data interaction in the system is completed by adopting the high-speed serial bus SRIO, so that the data transmission speed is greatly improved, the data transmission delay among system modules is reduced, and the data processing capacity of the system is effectively improved;
(3) the model calculation module of the invention completes model calculation by adopting a multi-core DSP architecture, and data communication among the multiple cores is completed by utilizing a shared memory, thereby greatly improving data interaction and processing capacity, greatly improving model calculation efficiency and effectively improving model calculation precision;
(4) according to the method, the multi-core board card is adopted for model calculation, so that the calculation capacity of the system on the complex model is improved, and the system model can be reasonably disassembled and calculated in parallel, so that the model calculation time is shortened, and the timeliness of the system is improved;
(5) the invention expands a larger shared memory area by adopting the multi-core DSP, has a larger data memory function, can not only store fixed and unchangeable parameters in a partitioned area, but also store intermediate results and final results of model calculation for a user to call at any time, and has a powerful data diagnosis function;
(6) the invention adopts a multi-board card networking structure, has stronger expandability and applicability, can be applied to a plane grating measuring system, and can also be applied to focusing and leveling, workpiece table alignment, transmission and other systems;
(7) the invention can complete the initialization and command issuing of the board cards with different slot numbers in parallel, thereby realizing the communication among the board cards with different types;
(8) the invention can effectively compensate the data delay, the environmental temperature and pressure change and the error caused by the grating surface type in the system, and improves the whole machine control capability of the system;
(9) the invention can control the master control synchronous signal, improves the cooperative working capacity of each module of the system, effectively reduces the data transmission delay, reduces the asynchronism of data processing obtained from the outside, strengthens the high efficiency of data compensation during model calculation, and improves the data interaction and processing capacity of the whole system;
(10) the invention optimizes the space occupied by the chassis board card, improves the utilization rate of the chassis slot, improves the integration level of the chassis, enhances the heat dissipation performance of the chassis, and leads the whole system to be more flexible and have stronger expansibility.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims. It will be apparent to those skilled in the art that various changes and modifications may be made in the invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (14)
1. A data interaction system based on VPX architecture is characterized by comprising a data control module, an I/O interface module, a data acquisition module and a model calculation module;
the data control module is used for receiving a command of the upper computer, carrying out initialization operation on the whole system and controlling data interaction in the whole system;
the I/O interface module is used for realizing data interaction inside and outside the whole system and data intercommunication among all board cards inside the system;
the data acquisition module is used for converting the received analog sampling data measured by the measurement subsystem into digital sampling data and sending the digital sampling data to the I/O interface module through an SRIO bus;
the model calculation module is used for performing multi-core parallel calculation on the received digital sampling data sent by the data control module, sending the processed data to the I/O interface module through an SRIO bus, and outputting the processed data by the I/O interface module.
2. The VPX architecture-based data interaction system of claim 1, wherein the data control module comprises a data control unit, a command control unit, and a command management unit;
the data control unit is used for acquiring digital sampling data on an SRIO bus and sending the digital sampling data to the model calculation module;
the command management unit is used for receiving commands of the upper computer and analyzing, processing and packaging the received commands;
the command control unit is used for distributing the packed commands to the I/O interface module, the data acquisition module and the model calculation module.
3. The VPX architecture-based data interaction system of claim 2, wherein the data control module further comprises a synchronization control unit for generating a system synchronization reference clock, outputting an external synchronization clock, and receiving synchronization status information of the external subsystem.
4. The VPX architecture-based data interaction system of claim 2, wherein the packed command comprises a physical slot number of a command manipulation module, keyword information of the command manipulation module, and a calling function manipulation address.
5. The VPX architecture-based data interaction system of claim 2, wherein the command control unit is further configured to receive feedback information of whether a command is reached and whether the command is successfully executed, wherein the feedback information is fed back by the I/O interface module, the data acquisition module and the model computation module.
6. The VPX architecture-based data interaction system of claim 1, wherein the measurement subsystem comprises a planar grating module and a sensor module, the planar grating module is used for converting position variation of a workpiece stage into an analog optical signal, and the sensor module is used for acquiring analog temperature and pressure data outside the system;
the data acquisition module comprises a temperature and pressure detection board card and an optical signal detection board card, wherein the optical signal detection board card is used for converting analog optical signals into digital optical signals, and the temperature and pressure detection board card is used for converting analog temperature and pressure data into digital temperature and pressure data.
7. The VPX architecture-based data interaction system of claim 1, wherein the model computation module comprises at least one multi-core DSP board, each DSP board comprises at least one multi-core DSP chip, and inter-core data interaction of the multi-core DSP chips is achieved through a shared memory.
8. The VPX architecture-based data interaction system of claim 7, wherein each DSP board comprises at least two multi-core DSP chips, each DSP chip is integrated with eight cores, inter-core data interaction of the eight cores is completed through a shared memory, each DSP chip divides the shared memory into eight shared regions, and each shared region allows only one core to write data.
9. The VPX architecture-based data interaction system of claim 8, wherein each of the cores comprises a first port for sending data and a second port for receiving data.
10. The VPX architecture-based data interaction system of claim 8, wherein the shared memory region comprises a model constant sharing region for fixed and variable model constant storage and a diagnostic data sharing region for dynamic storage of key intermediate data and result data in model computation.
11. A data interaction method based on a VPX architecture is characterized by comprising the following steps:
the data control module receives a command of an upper computer and performs initialization operation on the whole system;
the data acquisition module converts received analog sampling data measured by the measurement subsystem into digital sampling data and sends the digital sampling data to the I/O interface module through the SRIO bus;
the data control module acquires digital sampling data on the SRIO bus and sends the digital sampling data to the model calculation module; and
and the model calculation module performs multi-core parallel calculation on the received digital sampling data sent by the data control module, sends the processed data to the I/O interface module through an SRIO bus, and outputs the processed data by the I/O interface module.
12. The VPX architecture-based data interaction method of claim 11, wherein the data control module comprises a data control unit, a command control unit and a command management unit;
the data control module receives a command of the upper computer and performs initialization operation on the whole system, and the steps comprise:
the command management unit receives a command of the upper computer, and analyzes, processes and packages the received command; and
the command control unit distributes the packed commands to the I/O interface module, the data acquisition module and the model calculation module so as to initialize the whole system;
the step of acquiring the digital sampling data on the SRIO bus and sending the digital sampling data to the model calculation module by the data control module is specifically as follows:
and the data control unit acquires the digital sampling data on the SRIO bus and sends the digital sampling data to the model calculation module.
13. The VPX architecture-based data interaction method of claim 12, wherein the step of receiving a command from an upper computer by the data control module and performing initialization operation on the whole system further comprises:
and the command control unit receives feedback information of whether the command fed back by the I/O interface module, the data acquisition module and the model calculation module arrives and whether the command is successfully executed, and if the received feedback information is command execution failure, the command control unit sends the packed command to the module with command execution failure again.
14. The VPX architecture-based data interaction method of claim 12, wherein the data control module further comprises a synchronization control unit for issuing a synchronization control signal;
the data acquisition module comprises a temperature and pressure detection board card and an optical signal detection board card, the analog sampling data comprises analog optical signals and analog temperature and pressure data, and the digital sampling data comprises digital optical signals and digital temperature and pressure data;
the step of receiving the analog sampling data measured by the measurement subsystem by the data acquisition module specifically comprises the following steps:
the data acquisition module receives the analog optical signal and the analog temperature and pressure data measured by the measurement subsystem simultaneously according to the synchronous control signal sent by the synchronous control unit;
the step of the data control module controlling the digital sampling data on the SRIO bus and sending the digital sampling data to the model calculation module is specifically as follows:
and the data control unit simultaneously acquires the digital optical signal and the digital temperature and pressure data on the SRIO bus according to the synchronous control signal sent by the synchronous control unit and sends the digital optical signal and the digital temperature and pressure data to the model calculation module.
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