CN106929811B - 一种基于微纳结构的金属防护体系 - Google Patents
一种基于微纳结构的金属防护体系 Download PDFInfo
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- CN106929811B CN106929811B CN201710211066.9A CN201710211066A CN106929811B CN 106929811 B CN106929811 B CN 106929811B CN 201710211066 A CN201710211066 A CN 201710211066A CN 106929811 B CN106929811 B CN 106929811B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
- C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D9/00—Electrolytic coating other than with metals
- C25D9/04—Electrolytic coating other than with metals with inorganic materials
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Electrochemistry (AREA)
- Ceramic Engineering (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
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Abstract
Description
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0 | 120 |
50 | 144 |
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Claims (4)
Priority Applications (1)
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CN201710211066.9A CN106929811B (zh) | 2017-03-31 | 2017-03-31 | 一种基于微纳结构的金属防护体系 |
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CN201710211066.9A CN106929811B (zh) | 2017-03-31 | 2017-03-31 | 一种基于微纳结构的金属防护体系 |
Publications (2)
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CN106929811A CN106929811A (zh) | 2017-07-07 |
CN106929811B true CN106929811B (zh) | 2018-12-14 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109136846A (zh) * | 2018-07-10 | 2019-01-04 | 深圳通感微电子有限公司 | 一种独立金属薄膜制备方法及金属薄膜 |
CN109260840A (zh) * | 2018-11-19 | 2019-01-25 | 泉州市英伦环保科技有限公司 | 一种可型变袋笼骨架 |
CN109402570A (zh) * | 2018-12-12 | 2019-03-01 | 深圳朗昇贸易有限公司 | 基于纳米阵列的金属防护体系 |
CN109630764A (zh) * | 2018-12-12 | 2019-04-16 | 深圳桓轩科技有限公司 | 一种防腐蚀型给水管 |
CN112885504B (zh) * | 2021-02-09 | 2022-07-12 | 兰州空间技术物理研究所 | 一种具有微纳结构的月尘防护导电薄膜及其制备方法 |
CN115432937B (zh) * | 2022-08-19 | 2024-03-12 | 中建材玻璃新材料研究院集团有限公司 | 一种具有微纳组合阵列的磷酸铝薄膜及其制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61265822A (ja) * | 1985-05-21 | 1986-11-25 | Japan Radio Co Ltd | 金属薄膜の形成方法 |
CN102492945A (zh) * | 2011-12-09 | 2012-06-13 | 北京航空航天大学 | 一种仿生微纳复合结构防覆冰表面及其制备方法 |
JP2012219329A (ja) * | 2011-04-08 | 2012-11-12 | Nisshin Steel Co Ltd | 害虫忌避性に優れる表面処理鋼板およびその製造方法 |
CN103702928A (zh) * | 2011-07-21 | 2014-04-02 | 浦项工科大学校产学协力团 | 加工极疏水性表面的方法及具有极疏水性表面的蒸发器 |
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2017
- 2017-03-31 CN CN201710211066.9A patent/CN106929811B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61265822A (ja) * | 1985-05-21 | 1986-11-25 | Japan Radio Co Ltd | 金属薄膜の形成方法 |
JP2012219329A (ja) * | 2011-04-08 | 2012-11-12 | Nisshin Steel Co Ltd | 害虫忌避性に優れる表面処理鋼板およびその製造方法 |
CN103702928A (zh) * | 2011-07-21 | 2014-04-02 | 浦项工科大学校产学协力团 | 加工极疏水性表面的方法及具有极疏水性表面的蒸发器 |
CN102492945A (zh) * | 2011-12-09 | 2012-06-13 | 北京航空航天大学 | 一种仿生微纳复合结构防覆冰表面及其制备方法 |
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Effective date of registration: 20181030 Address after: 221400 north of wee tou village, Cao Qiao Town, Xinyi City, Xuzhou, Jiangsu Applicant after: XUZHOU YOUSHANG PRECISION MACHINERY MANUFACTURING Co.,Ltd. Address before: 518000 B1002, 2022 Kangle tower, Nanshan Road, Nanshan District, Shenzhen, Guangdong Applicant before: SHENZHEN ZHIDA MACHINERY TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20221028 Address after: 221400 south of 323 provincial road, Caoqiao Town, Xinyi City, Xuzhou City, Jiangsu Province Patentee after: Xuzhou Zhongsheng Yuanda New Material Co.,Ltd. Address before: 221400 north of wee tou village, Cao Qiao Town, Xinyi City, Xuzhou, Jiangsu Patentee before: XUZHOU YOUSHANG PRECISION MACHINERY MANUFACTURING Co.,Ltd. |
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