CN106908155B - A kind of wavelength measurement instrument - Google Patents

A kind of wavelength measurement instrument Download PDF

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Publication number
CN106908155B
CN106908155B CN201710124709.6A CN201710124709A CN106908155B CN 106908155 B CN106908155 B CN 106908155B CN 201710124709 A CN201710124709 A CN 201710124709A CN 106908155 B CN106908155 B CN 106908155B
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China
Prior art keywords
light source
lens
measured
ring
newton
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CN201710124709.6A
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CN106908155A (en
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黄耀清
郝成红
葛坚坚
郝得然
李颖
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Shanghai Institute of Technology
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Shanghai Institute of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0246Measuring optical wavelength
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/0273Ring interferometer

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The present invention provides a kind of wavelength measurement instrument, comprising: replaceable light source assembly, Newton's ring instrument, imaging sensor, processor;Newton's ring instrument includes a plano-convex lens and planar lens, and the convex surface of plano-convex lens is contacted with planar lens;Replaceable light source assembly includes the standard sources with identical light-emitting angle and light source to be measured, and standard sources and light source to be measured go out light optical axis all with the center overlapping of axles of Newton's ring instrument, the plano-convex lens side for going out light vertical incidence Newton's ring instrument of standard sources and light source to be measured;Imaging sensor is for the interference ring information in standard sources and light source incidence to be measured on the planar lens of detection Newton's ring instrument and is sent to processor;Processor is used to determine the radius of the interference ring of standard sources and light source to be measured according to the resolution ratio of interference ring information and the imaging sensor, and the wavelength of light source to be measured is calculated further according to wavelength equation.

Description

A kind of wavelength measurement instrument
Technical field
The present invention relates to computer measurements and photoelectron technical field, and in particular, to a kind of wavelength measurement instrument.
Background technique
The contents such as two-slit interference, Michelson interference, diffraction grating, double prism are all classical in Physical Experiment The method for measuring wavelength, spacing, the clarity of light and shade striped cause striped " pouring in " or " gushing out " item number to determine in experimentation All because the restriction of mechanical precision inevitably has large error.These wavelength measurement experimental provision adjustment processes are complicated, survey Complex steps are measured, thus obtained measurement result is unsatisfactory.
Summary of the invention
For the defects in the prior art, the object of the present invention is to provide a kind of wavelength measurement instrument.
A kind of wavelength measurement instrument provided according to the present invention, comprising: replaceable light source assembly, Newton's ring instrument, image sensing Device, processor;
The Newton's ring instrument includes a plano-convex lens and planar lens, the convex surface of the plano-convex lens and the planar lens Contact;
The replaceable light source assembly includes the standard sources with identical light-emitting angle and light source to be measured, and the standard Center overlapping of axles of the light optical axis all with the Newton's ring instrument out of light source and light source to be measured, the standard sources and light source to be measured The plano-convex lens side of Newton's ring instrument described in light vertical incidence out;
Described image sensor is for detecting the Newton's ring instrument in the standard sources and light source incidence to be measured Planar lens on interference ring information and be sent to the processor;
The processor is used to determine the standard light according to the resolution ratio of the interference ring information and the imaging sensor Source and
The radius r of the interference ring of light source to be measuredMark、rIt surveys, further according to wavelength equation rn 2=(n-1) R λ, (r "n)2=(n- 1) k,Calculate the wavelength related coefficient k of the light source to be measuredIt surveysWith the wavelength related coefficient of standard sources kMark, wherein rn" it is that imaging sensor measures Newton's ring radius, n is interference level,B is sensor Amplification factor and s and s ' are Newton's ring object distance, image distance respectively, and R is the radius of curvature of plano-convex lens;
According to the wavelength related coefficient k of the light source to be measuredIt surveysWith the wavelength related coefficient k of standard sourcesMarkAnd standard sources Wavelength XMarkCalculate the wavelength of the light source to be measured
As a kind of prioritization scheme, the interference ring information includes pixel radius r "Mark、rIt surveys", the processor is further used According to the pixel radius r "Mark、r″It surveysThe radius of the interference ring is determined with the resolution ratio δ of the imaging sensor: Wherein rMark、rIt surveys, it is n-th grade of interference circle radius.
As a kind of prioritization scheme, the replaceable light source assembly includes light source mounting base and the first lens;The standard Light source or light source to be measured are removably installed in the light source mounting base, so that the light that the standard sources or light source to be measured issue The emergent light parallel with the Newton's ring instrument central axis is obtained after first lens refraction.
As a kind of prioritization scheme, the replaceable light source assembly includes the first lens, reflecting mirror, the standard may be reversed Light source, the light source to be measured;
The turnable mirror arrangement is to be turned to predeterminated position to issue the standard sources or the light source to be measured Light reflect into first lens so that by first lens refraction after obtain it is parallel with the Newton's ring instrument central axis Emergent light.
As a kind of prioritization scheme, the primary optical axis of the standard sources and the light source to be measured relative to first lens It is symmetrical arranged.
As a kind of prioritization scheme, the replaceable light source assembly includes the first lens, prism, the standard sources, institute State light source to be measured;
The prism is configured that
The light that the standard sources issues is reflected into first lens, so that described in by reflecting or being totally reflected The emergent light parallel with the Newton's ring instrument central axis is obtained after the refraction of first lens, or
The light that the light source to be measured issues is reflected into first lens, so that described in by reflecting or being totally reflected The emergent light parallel with the Newton's ring instrument central axis is obtained after the refraction of first lens.
As a kind of prioritization scheme, described image sensor includes charge coupling device imaging sensor or complementary oxidation Metal semiconductor.
It further include the second lens as a kind of prioritization scheme;Second lens are set to the Newton's ring instrument and the figure As between sensor, the parallel emergent light of the parallel lens side of the Newton's ring passes through incident institute after second lens convergence It states in the probe of imaging sensor.
Compared with prior art, the present invention have it is following the utility model has the advantages that
Wavelength measurement instrument features simple structure provided by the invention, wavelength measurement method is simple, and Newton's ring instrument is used to measure Accuracy is high, calculates the foundation of wavelength formula, calibration process is omitted.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment Attached drawing be briefly described, it is therefore apparent that drawings in the following description are only some embodiments of the invention, for ability For field technique personnel, without creative efforts, it is also possible to obtain other drawings based on these drawings.It is attached In figure:
Fig. 1 is a kind of optional example structure schematic diagram of wavelength measurement instrument;
Fig. 2 is a kind of optional structural schematic diagram of replaceable light source assembly;
Fig. 3 is the structural schematic diagram of optional another replaceable light source assembly.
Specific embodiment
Below in conjunction with attached drawing, the present invention is described in detail in a manner of specific embodiment.Following embodiment will be helpful to Those skilled in the art further understands the present invention, but the invention is not limited in any way.It should be pointed out that can be with Modification structurally and functionally is carried out using other embodiments, or to embodiment enumerated herein, without departing from this hair Bright scope and spirit.
In a kind of embodiment of wavelength measurement instrument provided by the invention, as shown in Figure 1, comprising: replaceable light source assembly, Newton's ring instrument, imaging sensor, processor;
The Newton's ring instrument includes a plano-convex lens and planar lens, the convex surface of the plano-convex lens and the planar lens Contact;
The replaceable light source assembly includes the standard sources with identical light-emitting angle and light source to be measured, and the standard Center overlapping of axles of the light optical axis all with the Newton's ring instrument out of light source and light source to be measured, the standard sources and light source to be measured The plano-convex lens side of Newton's ring instrument described in light vertical incidence out;
Described image sensor is for detecting the Newton's ring instrument in the standard sources and light source incidence to be measured Planar lens on interference ring information and be sent to the processor;
The processor is used to determine the standard light according to the resolution ratio of the interference ring information and the imaging sensor The radius r of the interference ring of source and light source to be measuredMark、rIt surveys, further according to wavelength equation rn 2=(n-1) R λ, (r "n)2=(n-1) k,Calculate the wavelength related coefficient k of the light source to be measuredIt surveysWith the wavelength related coefficient k of standard sourcesMark, Middle rn" it is that imaging sensor measures Newton's ring radius, n is interference level,B is sensor amplification Multiple and s and s ' are Newton's ring object distance, image distance respectively, and R is the radius of curvature of plano-convex lens;
According to the wavelength related coefficient k of the light source to be measuredIt surveysWith the wavelength related coefficient k of standard sourcesMarkAnd standard sources Wavelength XMarkCalculate the wavelength of the light source to be measured
The variable of the above-mentioned not subscripting of the present invention indicates to can be used for that standard sources calculates and that light source to be measured calculates is general Formula variable.
The interference ring information includes pixel radius r "Mark、r″It surveys, the processor is further used for according to the pixel half Diameter r "Mark、r″It surveysThe radius of the interference ring is determined with the resolution ratio δ of the imaging sensor:Wherein rMark、 rIt surveys, it is n-th grade of interference circle radius.
As the first embodiment, the replaceable light source assembly includes light source mounting base and the first lens;The standard Light source or light source to be measured are removably installed in the light source mounting base, so that the light that the standard sources or light source to be measured issue The emergent light parallel with the Newton's ring instrument central axis is obtained after first lens refraction.Light source described in the present embodiment Mounting base and the relative position of first lens are kept fixed, and first install the interference ring of the standard sources detection acquisition standard Radius information, then remove the standard sources again, install the light source detection to be measured obtains corresponding interference ring half Diameter information, so that the formula for carrying out wavelength to be measured calculates.The present embodiment structure is simply easy to build, but due to standard sources and Light source to be measured requires to carry out disassembly replacement in measurement process, it is thus possible to because the difference of mounting structure introduces certain error.
As second of embodiment, as shown in Fig. 2, the replaceable light source assembly includes the first lens, reflection may be reversed Mirror, the standard sources, the light source to be measured;
The turnable mirror arrangement is to be turned to predeterminated position to issue the standard sources or the light source to be measured Light reflect into first lens so that by first lens refraction after obtain it is parallel with the Newton's ring instrument central axis Emergent light.
As shown in Fig. 2, the standard sources and the light source to be measured are set relative to the key light axial symmetry of first lens It sets.
In second embodiment, reach incident to the selectivity of the first lens by the rotation of the turnable reflecting mirror, It may be selected first to reflect the light that the standard sources issues, then overturn to reflect the light that the light source to be measured issues.In order to save electricity Can and avoid the interference of stray light, when the light for issuing the standard sources is reflected into the first lens, can close it is described to Survey light source.Equally, when the light for issuing the light source to be measured is reflected into the first lens, the standard sources can be closed.This Without being harmonized to the position of standard sources and light source to be measured in embodiment, it is thus only necessary to ensure the turnable reflecting mirror Two upturned positions it is accurate it is ensured that final wavelength measurement result it is accurate.
As third embodiment, as shown in figure 3, the replaceable light source assembly includes the first lens, prism, the mark Quasi-optical source, the light source to be measured;
The prism is configured that
The light that the standard sources issues is reflected into first lens, so that described in by reflecting or being totally reflected The emergent light parallel with the Newton's ring instrument central axis is obtained after the refraction of first lens, or
The light that the light source to be measured issues is reflected into first lens, so that described in by reflecting or being totally reflected The emergent light parallel with the Newton's ring instrument central axis is obtained after the refraction of first lens.
It, can be as since prism can be by reflecting and being totally reflected change optical path direction in third embodiment It is shown in Fig. 3, anaclasis it will be entered in first lens all the way by way of refraction, by another way by way of total reflection Light reflects in first lens.In this embodiment, the interference that the standard sources incidence obtains standard sources is first opened Ring information turns off the standard light, opens the light source to be measured, obtains the interference ring information of the light source to be measured.Due to whole A process only needs to switch standard sources and light source to be measured, without being moved to device any in optical path, therefore only important affair First optical path is harmonized, it is ensured that the incident angle and position consistency of standard sources and light source to be measured, so that it may obtain the most accurate Wavelength measurement result.
As a kind of embodiment of imaging sensor, described image sensor includes charge coupling device imaging sensor (CCD) or Complimentary Metal-Oxide semiconductor (CMOS).The advantage of CCD is good imaging quality, but since manufacturing process is multiple Miscellaneous, only a small number of manufacturers will appreciate that, so causing manufacturing cost high, especially large size CCD, price are very high It is high.The advantages of CMOS image sensor first is that power consumption ratio CCD is low, CCD is to provide excellent image quality, pays generation Valence is higher power consumption, and to keep charge transmission smooth, noise is reduced, and need to improve laser propagation effect by High Pressure Difference.But The charge of each picture element is converted into voltage by CMOS image sensor, is just amplified before reading, utilizes the power supply of 3.3V Driving, power consumption ratio CCD are low.Another advantage of CMOS image sensor, be with the conformability of peripheral circuit height, can will ADC is combined with signal processor, reduces volume substantially.
As one embodiment, wavelength measurement instrument further includes the second lens;Second lens are set to the Newton's ring instrument Between described image sensor, the parallel emergent light of the parallel lens side of the Newton's ring is converged by second lens Afterwards in the probe of incident described image sensor.Second lens main function is carried out to the light that goes out of the parallel lens side of Newton's ring Convergence, to guarantee that the imaging sensor in subsequent optical path can obtain perfect Newton's ring image.
The foregoing is merely presently preferred embodiments of the present invention, and those skilled in the art know, is not departing from essence of the invention In the case where mind and range, various changes or equivalent replacement can be carried out to these features and embodiment.In addition, of the invention Under introduction, it can modify to these features and embodiment to adapt to particular situation and material without departing from of the invention Spirit and scope.Therefore, the present invention is not limited to the particular embodiment disclosed, and the right of fallen with the application is wanted The embodiment in range is asked to belong to protection scope of the present invention.

Claims (8)

1. a kind of wavelength measurement instrument characterized by comprising replaceable light source assembly, Newton's ring instrument, imaging sensor, processing Device;
The Newton's ring instrument includes a plano-convex lens and planar lens, and the convex surface of the plano-convex lens connects with the planar lens Touching;
The replaceable light source assembly includes the standard sources with identical light-emitting angle and light source to be measured, and the standard sources With center overlapping of axles of the light optical axis all with the Newton's ring instrument out of light source to be measured, the light out of the standard sources and light source to be measured The plano-convex lens side of Newton's ring instrument described in vertical incidence;
Described image sensor is used to detect the flat of the Newton's ring instrument in the standard sources and light source incidence to be measured Interference ring information on the lens of face is simultaneously sent to the processor;
The processor be used for according to the resolution ratio of the interference ring information and the imaging sensor determine the standard sources with The radius r of the interference ring of light source to be measuredMark、rIt surveys, further according to wavelength equation(rn″)2=(n-1) k,Calculate the wavelength related coefficient k of the light source to be measuredIt surveysWith the wavelength related coefficient k of standard sourcesMark, Middle r "nIt is that imaging sensor measures Newton's ring radius, n is interference level,B is sensor amplification Multiple and s and s ' are Newton's ring object distance, image distance respectively, and R is the radius of curvature of plano-convex lens;
According to the wavelength related coefficient k of the light source to be measuredIt surveysWith the wavelength related coefficient k of standard sourcesMarkWith the wave of standard sources Long λMarkCalculate the wavelength of the light source to be measured
2. a kind of wavelength measurement instrument according to claim 1, which is characterized in that the interference ring information includes pixel radius r″Mark、r″It surveys, the processor is further used for according to the pixel radius r "Mark、r″It surveysIt is true with the resolution ratio δ of the imaging sensor The radius of the fixed interference ring:Wherein rMark、rIt surveys, it is n-th grade of interference circle radius.
3. a kind of wavelength measurement instrument according to claim 1, which is characterized in that the replaceable light source assembly includes light source Mounting base and the first lens;The standard sources or light source to be measured are removably installed in the light source mounting base, so that described The light that standard sources or light source to be measured issue obtains parallel with the Newton's ring instrument central axis after first lens refraction Emergent light.
4. a kind of wavelength measurement instrument according to claim 1, which is characterized in that the replaceable light source assembly includes first Reflecting mirror, the standard sources, the light source to be measured may be reversed in lens;
The turnable mirror arrangement is the light for being turned to predeterminated position and issuing the standard sources or the light source to be measured It reflects into first lens, goes out so that acquisition is parallel with the Newton's ring instrument central axis after first lens refraction Penetrate light.
5. a kind of wavelength measurement instrument according to claim 4, which is characterized in that the standard sources and the light source to be measured Primary optical axis relative to first lens is symmetrical arranged.
6. a kind of wavelength measurement instrument according to claim 1, which is characterized in that the replaceable light source assembly includes first Lens, prism, the standard sources, the light source to be measured;
The prism is configured that
The light that the standard sources issues is reflected into first lens by reflecting or being totally reflected, so that by described first The emergent light parallel with the Newton's ring instrument central axis is obtained after lens refraction, or
The light that the light source to be measured issues is reflected into first lens by reflecting or being totally reflected, so that by described first The emergent light parallel with the Newton's ring instrument central axis is obtained after lens refraction.
7. a kind of wavelength measurement instrument according to claim 1, which is characterized in that described image sensor includes that charge lotus root is closed Device image sensor or Complimentary Metal-Oxide semiconductor.
8. a kind of wavelength measurement instrument according to claim 1, which is characterized in that further include the second lens;Described second thoroughly Mirror is set between the Newton's ring instrument and described image sensor, and the parallel emergent light of the parallel lens side of the Newton's ring is logical It crosses after second lens converge in the probe of incident described image sensor.
CN201710124709.6A 2017-03-03 2017-03-03 A kind of wavelength measurement instrument Expired - Fee Related CN106908155B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201974994U (en) * 2011-01-04 2011-09-14 浙江师范大学 Experimental device capable of observing transmission and reflection Newton rings synchronously
CN104792498A (en) * 2015-03-27 2015-07-22 常州光电技术研究所 Dynamic testing method for light source
CN105785318A (en) * 2016-03-07 2016-07-20 南京光锥信息科技有限公司 Indoor positioning system based on flight time distributed optical pulse detection and method thereof
CN205560609U (en) * 2016-02-19 2016-09-07 林瑞珠 Statue of buddha lining light device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201974994U (en) * 2011-01-04 2011-09-14 浙江师范大学 Experimental device capable of observing transmission and reflection Newton rings synchronously
CN104792498A (en) * 2015-03-27 2015-07-22 常州光电技术研究所 Dynamic testing method for light source
CN205560609U (en) * 2016-02-19 2016-09-07 林瑞珠 Statue of buddha lining light device
CN105785318A (en) * 2016-03-07 2016-07-20 南京光锥信息科技有限公司 Indoor positioning system based on flight time distributed optical pulse detection and method thereof

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