CN106881660A - 一种用于大尺寸晶片单面抛光的旋转调节式上轴机构 - Google Patents
一种用于大尺寸晶片单面抛光的旋转调节式上轴机构 Download PDFInfo
- Publication number
- CN106881660A CN106881660A CN201710165035.4A CN201710165035A CN106881660A CN 106881660 A CN106881660 A CN 106881660A CN 201710165035 A CN201710165035 A CN 201710165035A CN 106881660 A CN106881660 A CN 106881660A
- Authority
- CN
- China
- Prior art keywords
- upper disk
- disk surface
- rotary shaft
- cylinder
- block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/047—Grinding heads for working on plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710165035.4A CN106881660B (zh) | 2017-03-20 | 2017-03-20 | 一种用于大尺寸晶片单面抛光的旋转调节式上轴机构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710165035.4A CN106881660B (zh) | 2017-03-20 | 2017-03-20 | 一种用于大尺寸晶片单面抛光的旋转调节式上轴机构 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106881660A true CN106881660A (zh) | 2017-06-23 |
CN106881660B CN106881660B (zh) | 2023-07-18 |
Family
ID=59181734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710165035.4A Active CN106881660B (zh) | 2017-03-20 | 2017-03-20 | 一种用于大尺寸晶片单面抛光的旋转调节式上轴机构 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106881660B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107877338A (zh) * | 2017-11-01 | 2018-04-06 | 湖南宇晶机器股份有限公司 | 单面抛光机用抛光头装置 |
CN110076489A (zh) * | 2019-05-29 | 2019-08-02 | 惠州市诚业家具有限公司 | 多工位旋转焊接设备及其焊接方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102091994A (zh) * | 2010-12-11 | 2011-06-15 | 昆明台兴精密机械有限责任公司 | 晶片单面抛光机主轴磨盘冷却装置 |
CN102626902A (zh) * | 2012-04-28 | 2012-08-08 | 浙江昀丰新能源科技有限公司 | 单面研磨抛光机用冷却装置 |
CN104084885A (zh) * | 2014-07-15 | 2014-10-08 | 宇环数控机床股份有限公司 | 一种研磨抛光盘的循环冷却结构 |
CN204700747U (zh) * | 2015-04-27 | 2015-10-14 | 蓝思科技(湘潭)有限公司 | 一种带内冷却系统的抛光抛头装置 |
CN205415324U (zh) * | 2016-03-21 | 2016-08-03 | 浙江森永光电设备有限公司 | 抛光研磨机的上盘水冷机构 |
CN205438196U (zh) * | 2016-03-03 | 2016-08-10 | 东莞金研精密研磨机械制造有限公司 | 一种晶片cmp的抛头结构 |
CN206795523U (zh) * | 2017-03-20 | 2017-12-26 | 江苏吉星新材料有限公司 | 一种用于大尺寸晶片单面抛光的旋转调节式上轴机构 |
-
2017
- 2017-03-20 CN CN201710165035.4A patent/CN106881660B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102091994A (zh) * | 2010-12-11 | 2011-06-15 | 昆明台兴精密机械有限责任公司 | 晶片单面抛光机主轴磨盘冷却装置 |
CN102626902A (zh) * | 2012-04-28 | 2012-08-08 | 浙江昀丰新能源科技有限公司 | 单面研磨抛光机用冷却装置 |
CN104084885A (zh) * | 2014-07-15 | 2014-10-08 | 宇环数控机床股份有限公司 | 一种研磨抛光盘的循环冷却结构 |
CN204700747U (zh) * | 2015-04-27 | 2015-10-14 | 蓝思科技(湘潭)有限公司 | 一种带内冷却系统的抛光抛头装置 |
CN205438196U (zh) * | 2016-03-03 | 2016-08-10 | 东莞金研精密研磨机械制造有限公司 | 一种晶片cmp的抛头结构 |
CN205415324U (zh) * | 2016-03-21 | 2016-08-03 | 浙江森永光电设备有限公司 | 抛光研磨机的上盘水冷机构 |
CN206795523U (zh) * | 2017-03-20 | 2017-12-26 | 江苏吉星新材料有限公司 | 一种用于大尺寸晶片单面抛光的旋转调节式上轴机构 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107877338A (zh) * | 2017-11-01 | 2018-04-06 | 湖南宇晶机器股份有限公司 | 单面抛光机用抛光头装置 |
CN110076489A (zh) * | 2019-05-29 | 2019-08-02 | 惠州市诚业家具有限公司 | 多工位旋转焊接设备及其焊接方法 |
CN110076489B (zh) * | 2019-05-29 | 2024-04-26 | 惠州市诚业家具有限公司 | 多工位旋转焊接设备及其焊接方法 |
Also Published As
Publication number | Publication date |
---|---|
CN106881660B (zh) | 2023-07-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110509143B (zh) | 一种光学零件平面研磨装置 | |
CN106881660A (zh) | 一种用于大尺寸晶片单面抛光的旋转调节式上轴机构 | |
CN206255846U (zh) | 一种石墨烯浆料生产线系统 | |
CN206795523U (zh) | 一种用于大尺寸晶片单面抛光的旋转调节式上轴机构 | |
CN101491797A (zh) | 涂胶装置 | |
CN106757021A (zh) | 分体承压太阳能立式夹套搪瓷内胆专用涂搪机 | |
CN107660721A (zh) | 一种用于皮蛋包裹保鲜料的包蛋装置 | |
CN107678499A (zh) | 一种高稳定性便于散热的计算机显示屏 | |
CN202219189U (zh) | 一种立式砂磨机 | |
CN207818761U (zh) | 一种旋转式注液机构 | |
CN207014176U (zh) | 一种电磁流量计氯丁橡胶衬里表面抛光装置 | |
CN206676298U (zh) | 一种用于玻璃生产的混合装置 | |
CN205575607U (zh) | 一种检测药瓶菌群器械装置 | |
CN207580947U (zh) | 一种采用空压机余热循环预热投料系统 | |
CN207262934U (zh) | 一种超高真空热处理炉 | |
CN108015675A (zh) | 一种阀座研磨液的加液系统 | |
CN106693791A (zh) | 一种用于玻璃生产的混合装置 | |
CN208012419U (zh) | 一种农药悬浮剂生产中研磨物料用的冷却装置 | |
CN206868061U (zh) | 一种施工用益胶泥搅拌装置 | |
CN207797601U (zh) | 一种制备药剂原料受热均匀的烘干设备 | |
CN205948976U (zh) | 一种粉磨辊压力可调的油压曲柄机构 | |
CN108951187A (zh) | 一种具有废弃处理的合成革生产用加热装置 | |
CN105919810A (zh) | 一种新型滴丸取样检测装置 | |
CN206008964U (zh) | 一种选粉装置的反吹风密封结构 | |
CN111168075A (zh) | 一种真空金属或合金材料颗粒制造装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20230105 Address after: 100102 20628, Floor 2, Building A1, No. 1, Huangchang West Road, Dougezhuang, Chaoyang District, Beijing Applicant after: Youran Walker (Beijing) Technology Co.,Ltd. Address before: 212200 new materials Industrial Park, Youfang Town, Yangzhong City, Zhenjiang City, Jiangsu Province Applicant before: JIANGSU JESHINE NEW MATERIAL Co.,Ltd. |
|
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20230615 Address after: 050035 No. 369, Zhujiang Avenue, high tech Zone, Shijiazhuang, Hebei Applicant after: TUNGHSU GROUP Co.,Ltd. Address before: 100102 20628, Floor 2, Building A1, No. 1, Huangchang West Road, Dougezhuang, Chaoyang District, Beijing Applicant before: Youran Walker (Beijing) Technology Co.,Ltd. |
|
GR01 | Patent grant | ||
GR01 | Patent grant |