CN106871773A - A kind of online noncontact thickness-measuring equipment and its measuring method - Google Patents
A kind of online noncontact thickness-measuring equipment and its measuring method Download PDFInfo
- Publication number
- CN106871773A CN106871773A CN201710078987.2A CN201710078987A CN106871773A CN 106871773 A CN106871773 A CN 106871773A CN 201710078987 A CN201710078987 A CN 201710078987A CN 106871773 A CN106871773 A CN 106871773A
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- Prior art keywords
- ccd
- measurement assembly
- active roll
- disk roller
- magnetic field
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The present invention relates to detection technique field, refer in particular to a kind of online noncontact thickness-measuring equipment, including central control board and the equipment rack for being arranged at central control board one side, guide component, measurement assembly and the crossbeam jacking block for supporting measurement assembly are provided with the equipment rack, the measurement assembly is slided and is located at crossbeam jacking block, and the measurement assembly includes magnetic field sensor, optical transmitting set and ccd sensor；The guide component includes being arranged at the active roll and driven disk roller below measurement assembly；The magnetic field sensor is located at the surface of active roll；The optical transmitting set and ccd sensor are respectively positioned at the both sides of active roll and towards magnetic field sensor just on the position of active roll.The metering system that the present invention is combined by magnetic field sensor and telescope callipers, can effectively reduce influence of the extraneous factor to measuring, while high-acruracy survey can be carried out to greater area of nonmagnetic film class.
Description
Technical field
The present invention relates to the nonmagnetic film class measuring for materials such as lithium battery pole slice, Copper Foil, aluminium foil field, refer in particular to
A kind of online noncontact thickness-measuring equipment and its measuring method.
Background technology
With human society production and living and scientific practice activity deepen continuously, lithium battery pole slice, Copper Foil, aluminium foil etc. are non-
The application of thin magnetic film class material is more and more wider, it has also become the industry such as electric power, electronics, information, military project, core, Aeronautics and Astronautics is not
One of critical material that can lack.It is non magnetic in its many performance requirement for the nonmagnetic film class material produced
The thickness of film-like materials, the uniformity are most more crucial parameters, directly affect production cost and application effect, can also be influenceed
Other many problems, therefore, monitoring, the thickness of control film, the uniformity have turned into important during nonmagnetic film class material is produced
, indispensable link.
But in process of production, it is necessary to be detected to nonmagnetic film class material；Some are directly by hand-held survey
The thickness of scale or slide calliper rule after a shutdown to nonmagnetic film class material detects that troublesome poeration, efficiency is low, and due to for
Contact is measured, and easily material surface is caused to damage；Also some use laser triangulation, and its thickness measuring module is swashed by two
Mode of the Optical displacement sensor up and down to penetrating is constituted, two upper and lower sensors measure respectively measured body upper surface position and
The position of lower surface, by being calculated the thickness of measured body, because tested thin slice is not absolute plane, if when laser from
When on-plane surface reflects, measurement error is will result in, and laser minimum light spot is 2 μm, so measurement error is at least more than 2 μm.
The content of the invention
The present invention is reliable and stable for a kind of simple structure of problem of the prior art offer, compact and running, and measures
Precision can reach ± 0.5 μm of online noncontact thickness-measuring equipment and its measuring method.
In order to solve the above-mentioned technical problem, the present invention is adopted the following technical scheme that：
A kind of online noncontact thickness-measuring equipment that the present invention is provided, including central control board and it is arranged at central control board one side
Equipment rack, is provided with guide component, measurement assembly and the crossbeam jacking block for supporting measurement assembly on the equipment rack,
The measurement assembly is slided and is located at crossbeam jacking block, and the measurement assembly includes magnetic field sensor, optical transmitting set and ccd sensor；
The guide component includes being arranged at the active roll and driven disk roller below measurement assembly；The magnetic field sensor is located at actively
The surface of disk roller；The optical transmitting set and ccd sensor are respectively positioned at the both sides of active roll.
Therein, the active roll is magnetic backgear.
Therein, the crossbeam jacking block is provided with for driving measurement assembly to be driven along the displacement that crossbeam jacking block is moved back and forth
Motivation structure.
Used as preferred, the measurement assembly also includes Mobile base and measuring instrument mounting bracket；The magnetic field sensor is set
At the middle part of the measuring instrument mounting bracket；The Mobile base is provided with the first sliding block and is led with the first sliding block is used cooperatively first
Rail, first slide rail is fixedly connected on crossbeam jacking block；The both sides of the Mobile base are provided with the second guide rail and the second guide rail
The second sliding block for using cooperatively and the lift drive mechanism for driving the lifting of measuring instrument mounting bracket, the measuring instrument mounting bracket are fixed and connected
It is connected to the second sliding block.
As preferred, the displacement drive mechanism include being respectively equipped with the driving wheel and driven pulley at crossbeam jacking block two ends,
The motor for being set around the driving belt of driving wheel and driven pulley and being connected with driving wheel, the driving belt connects with Mobile base
Connect.
Used as preferred, the crossbeam jacking block material is marble.
Therein, the equipment rack is provided with the first support base, and the two ends of the active roll are connected to the first support base
And positioned at the lower section of measurement assembly, the equipment rack is provided with the first drive mechanism for driving active roll；It is described driven
Disk roller is slided and is located at first support base, and first support base is provided with for driving driven disk roller closer or far from actively
Second drive mechanism of disk roller.
Used as preferred, second drive mechanism is used cooperatively including disk roller Mobile base, the 3rd sliding block and the 3rd sliding block
The second guide rail and drive roller wheel Mobile base displacement drive cylinder, the 3rd guide rail is connected to the first support base, described
Three sliding blocks are connected with disk roller Mobile base.
Therein, the guide component also includes the first guide disk roller, the second guide disk roller and located at equipment rack the
Two support bases and the 3rd support base, the two ends of the first guide disk roller are connected to second support base, second guide
The two ends of disk roller are connected to the 3rd support base.
The present invention also provides a kind of for a kind of measuring method of the online noncontact thickness measuring of online noncontact thickness-measuring equipment,
Comprise the following steps：
Step 1：Before product thickness is measured, measurement assembly is driven ccd sensor and optical transmitting set is detected the master of zero load
Dynamic disk roller, then drives measurement assembly to move back and forth n in the axial direction of active roll（n≥1）It is secondary, often move one-shot measurement group
Part chosen axis m fixed upwards（m≥1）Individual point is as measurement point, thus the n group data records measured by ccd sensor
CCD_C1, CCD_C2, CCD_C3 ... CCD_Cn, the n groups data record that what magnetic field sensor was measured measure are AD_C1, AD_
C2, AD_C3 ... .AD_Cn, wherein including the m measured value of point in every group of data of CCD_C and AD_C, finally calculate back and forth
The mobile n corresponding m respective average value of point is recorded as CCD_CA1 and AD_CA1.
Step 2：By measurement assembly in its segment distance of range intrinsic displacement one, measurement assembly is then driven in the axle of active roll
Move back and forth n to direction（n≥1）It is secondary, often move one-shot measurement component chosen axis m fixed upwards（m≥1）Individual point is used as measurement
Point, thus the n groups data record measured by ccd sensor is CCD_C1, CCD_C2, CCD_C3 ... CCD_Cn, magnetic field sensing
The n groups data record that what device was measured measure is AD_C1, AD_C2, AD_C3 ... AD_Cn, wherein every group of CCD_Cn and AD_Cn
Include the m measured value of point in data, finally calculate the m respective average value of point corresponding to moving back and forth n times and be recorded as
CCD_CA2 and AD_CA2.
Step 3：The correction factor AD_a of AD is calculated, its formula is AD_a=（CCD_CA2- CCD_CA1）/（AD_CA2-
AD_CA1）, AD_a takes exhausted angle value, and wherein AD_a includes the m correction factor of point.
Step 4：By nonmagnetic film close to active roll move, measurement assembly active roll axial direction back and forth
Mobile, the actual value that thus magnetic field sensor and ccd sensor are measured is CCD_T and AD_T, and the non-magnetic is calculated by formula
Property film thickness H, the formula be H=（CCD_T-CCD_CA1- [(AD_T-AD_CA1)] xAD_a, wherein H include m point
Calculated value.
Beneficial effects of the present invention：
The present invention passes through to use the measuring probe tip of magnetic field sensor to the real-time range of active roll top surface, then by side position
The ccd sensor put measures the peak of tested nonmagnetic film highly, and the reality of tested thin slice then can be drawn by calculating
Shi Houdu, and can accomplish that in high precision, the characteristics of continual and steady, tested thin slice is impaired simultaneously avoiding with noncontact,
Also accuracy of detection and speed are improved, overall structure is simple in addition, be easily achieved, beneficial to wide popularization and application.
Brief description of the drawings
Fig. 1 is front view of the invention.
Fig. 2 is the structural decomposition diagram of measurement assembly of the present invention.
Fig. 3 is another structural decomposition diagram of measurement assembly of the present invention.
Fig. 4 is the configuration schematic diagram of guide component of the present invention.
Fig. 5 is measuring method schematic diagram of the present invention.
Fig. 6 is another schematic diagram of measuring method of the present invention.
Description of reference numerals
1- central control boards；2- equipment racks；3- guide components；31- active rolls；The drive mechanisms of 311- first；32- driven vollers
Wheel；The support bases of 33- first；321- disk roller Mobile bases；The guide rails of 322- the 3rd；The sliding blocks of 333- the 3rd；324- displacement drive cylinders；
33- the first guide disk rollers；The support bases of 331- second；34- the second guide disk rollers；The support bases of 341- the 3rd；342- chutes；4- is measured
Component；41- magnetic field sensors；421- optical transmitting sets；422-CCD sensors；43- Mobile bases；44- measuring instrument mounting brackets；441-
Belt gripping block；45- lifts drive cylinder；The carriages of 46- second；The guide rails of 461- second；The sliding blocks of 462- second；5- crossbeams
Jacking block；61- driving wheels；62- driven pulleys；63- driving belts；64- motors；The carriages of 7- first；The guide rails of 71- first；
The sliding blocks of 72- first；8- nonmagnetic films.
Specific embodiment
For the ease of the understanding of those skilled in the art, the present invention is made further with reference to embodiment and accompanying drawing
It is bright, the content that implementation method is referred to not limitation of the invention.The present invention is described in detail below in conjunction with accompanying drawing.
As shown in figure 1, a kind of online noncontact thickness-measuring equipment that the present invention is provided, including central control board 1 and be arranged at
The equipment rack 2 of the one side of central control board 1, is provided with guide component 3, measurement assembly 4 and for propping up on the equipment rack 2
The crossbeam jacking block 5 of measurement assembly 4 is supportted, the measurement assembly 4 is slided and is located at crossbeam jacking block 5, and the measurement assembly 4 is passed including magnetic field
Sensor 41, optical transmitting set 421 and ccd sensor 422；The guide component 3 includes being arranged at the drive roll of the lower section of measurement assembly 4
Wheel 31 and driven disk roller 32；The magnetic field sensor 41 is located at the surface of active roll 31；The optical transmitting set 421 and CCD
Sensor 422 is respectively positioned at the both sides of active roll 31 and towards magnetic field sensor 41 just on the position of active roll 31.
Wherein, the active roll 31 is magnetic backgear.The measurement assembly 4 also includes Mobile base 43 and measuring instrument mounting bracket 44；Institute
Magnetic field sensor 41 is stated located at the middle part of the measuring instrument mounting bracket 44, the optical transmitting set 421 and ccd sensor 422
Located at the both sides of measuring instrument mounting bracket 44.
Specifically, existing measuring method is the disk roller for using 421 pairs of zero loads of optical transmitting set irradiating, ccd sensor 422 connects
The numerical value that light signal measures the peak of disk roller is received, then allows disk roller to post flaky medium, with ccd sensor 422
The numerical value of flaky medium peak is measured, two numerical value subtract each other the thickness for just obtaining the flaky medium.However, due to existing
The circularity of the disk roller that machining accuracy and current material are processed has certain tolerance, and there is also bounce when rotating
Phenomenon, i.e., when rotating, peak actually has larger fluctuation, so as to be measured directly if only using ccd sensor 422
Nonmagnetic film class medium on measurement disk roller, can cause to measure and the error that external hardware is brought occur, influence measurement it is true
Real data, therefore, the present invention adds magnetic field sensor 41 and measures in the lump on the basis of ccd sensor 422, and will be traditional
Disk roller is changed to active roll 31, is used to coordinate the use of magnetic field sensor 41, so as to improve the accuracy of its measurement.It is of the invention
Magnetic field sensor 41 preferably uses Hall sensor, is converted by the magnetic flux change to active roll 31 using Hall sensor
It is the principle of digital number, measures the probe tip of Hall sensor to the real-time range of the top surface of active roll 31, then by side
The ccd sensor 422 of side position measures the peak of tested thin slice highly, then by specific computational methods can draw by
The real-time thickness of thin slice is surveyed, and can be accomplished with noncontact, high accuracy, the characteristics of continual and steady.
As shown in Figure 1 and Figure 2, in the present embodiment, the crossbeam jacking block 5 is provided with for driving measurement assembly 4 along crossbeam
The displacement drive mechanism that jacking block 5 is moved back and forth.The displacement drive mechanism includes being respectively equipped with the driving wheel at the two ends of crossbeam jacking block 5
61 and driven pulley 62, the motor 64 that is set around the driving belt 63 of driving wheel and driven pulley and is connected with driving wheel 61, institute
Driving belt 63 is stated to be connected with Mobile base 43.Specifically, the Mobile base 43 is provided with the belt gripping block for locking belt
441, the motor 64 can use stepper motor or servomotor.The measurement assembly 4 also includes Mobile base 43 and surveys
Amount instrument mounting bracket 44；The magnetic field sensor 41 is arranged on the middle part of the measuring instrument mounting bracket 44, the He of the optical transmitting set 421
Ccd sensor 422 is located at the both sides of measuring instrument mounting bracket 44.The Mobile base 43 be provided with the first sliding block 72 and with the first sliding block 72
The first guide rail 71 for using cooperatively, first slide rail 72 is fixedly connected on crossbeam jacking block 5.Operationally, displacement drive motor
64 are rotated by driving driving wheel 61, move driving belt 63, so as to drive measurement assembly 4 reciprocal along crossbeam jacking block 5
It is mobile, measurement assembly 4 is measured the numerical value that nonmagnetic film class 8 axially goes up each point in active roll 31.Skin
V belt translation has good elasticity, shock and vibration, stable movement noiselessness, and simple structure can be relaxed at work and is manufactured
Easily, easy to installation and maintenance, cost is relatively low.
In the present embodiment, the both sides of the Mobile base 43 are provided with the second guide rail 461 and the cooperation of the second guide rail 461 to be made
Second sliding block 462 and the lifting drive cylinder 45 of the lifting of driving measuring instrument mounting bracket 41, the measuring instrument mounting bracket 41 are consolidated
Surely it is connected to the second sliding block 462.Before product is measured, measurement assembly 4 needs the radial direction in active roll 31 to the present invention
Data are measured, therefore the present invention drives Mobile base to move by lifting drive cylinder 45, to drive measurement assembly 4 to measure model at it
Moved up and down in enclosing.Its simple structure, easy to control, displacement accuracy is high.
In the present embodiment, the material of crossbeam jacking block 5 is marble.Marble material has precise structure, homogeneous,
Good stability, intensity is big, and hardness is high, can keep high accuracy under heavy load and general temperature, and with non-corrosive, it is acidproof
Alkali, wearability, do not magnetize, not modification the advantages of so that equipment reduces the measurement error brought of extraneous factor, improve measurement
Accuracy.
As shown in figure 4, in the present embodiment, the equipment rack 2 is provided with the first support base 33, the two of the active roll 3
End is connected to the first support base 33 and is located at the lower section of measurement assembly 4, and the equipment rack 2 is provided with for driving active roll 31
The first drive mechanism 311；The driven disk roller 32 is slided and is located at first support base 33, and first support base 33 is set
Have for driving driven disk roller 32 closer or far from the second drive mechanism of active roll 31.Second drive mechanism include with
The 3rd guide rail 322 that the disk roller Mobile base 321 of the connection of driven disk roller 32, the 3rd sliding block 333 and the 3rd sliding block 333 are used cooperatively
With the displacement drive cylinder 324 of the displacement of drive roller wheel Mobile base 321, the 3rd guide rail 322 is connected to the first support base 33, institute
The 3rd sliding block 333 is stated to be connected with disk roller Mobile base 321.First drive mechanism includes driven with what active roll 31 was connected
Wheel, driving wheel, the belt for being set around driven pulley and driving wheel and the motor being connected with driven pulley.The motor can be adopted
With stepper motor or servomotor.Operationally, displacement drive cylinder 324 drives driven disk roller 32 to move, with active roll
31 engagements.Enable nonmagnetic film class 8 to be adjacent to be moved on the surface of active roll 31, it is to avoid nonmagnetic film class 8 was being measured
Space is produced between active roll 31 in journey, the accuracy for influenceing it to measure improves the precision of present invention measurement.
As shown in figure 4, the guide component 3 also includes the first guide disk roller 33, the second guide disk roller 34 and located at equipment
Second support base 331 of frame 2 and the 3rd support base 341, the two ends of the first guide disk roller 33 are connected to described second
Support seat 331, the two ends of the second guide disk roller 34 are connected to the 3rd support base 341.Specifically, the 3rd support base
Chute 342 is provided with 341, the second guide disk roller 34 can adjust installation site in the range of chute 342.First guide rack
The guide disk roller 34 of wheel 33 and second plays guide effect, is easy to the charging and discharging of nonmagnetic film class 8.
As shown in Figure 5, Figure 6, a kind of the online non-of a kind of online noncontact thickness-measuring equipment for described in claim 1 connects
The measuring method of thickness measuring is touched, is comprised the following steps：
Step 1：Before product thickness is measured, driving measurement assembly 4 to decline detects ccd sensor 422 and optical transmitting set 421
To unloaded active roll 31, measurement assembly 4 is then driven to move back and forth n in the axial direction of active roll 31（n≥1）It is secondary,
Once, measurement assembly 4 chooses the m set in the axial direction of active roll 31 for often movement（m≥1）Individual point as measurement point, thus CCD
N groups data record measured by sensor 422 is CCD_C1, CCD_C2, CCD_C3 ... CCD_Cn, measured by magnetic field sensor 41
N groups data record be AD_C1, AD_C2, AD_C3 ... AD_Cn, wherein all including m in every group of data of CCD_C and AD_C
The measured value of point, finally calculates the m respective average value of point corresponding to moving back and forth n times and is recorded as CCD_CA1 and AD_CA1.
Specifically, numerical value and average value measured by the ccd sensor 422 of the step 1 are as shown in table 1 below：
Form 1
X1, X12, X13 ... X1m in form is that ccd sensor 422 sets in the axial direction movement first time pair of active roll 31
Numerical value measured by m fixed measurement point, by that analogy, Xn, X2n, X2n ... Xnm are ccd sensor 422 in active roll 31
Axial direction move n-th to set m measurement point measured by numerical value（As shown in Figure 5）；、、、…Table
In lattice to be calculated average value after measured n times of each measurement point.
Specifically, numerical value measured by the magnetic field sensor 41 of the step 1 and average value are as shown in following table 2：
Form 2
Numerical value in form 2 is magnetic field sensor 41 in the axial direction n m measurement point to setting of movement of active roll 31
Measured numerical value and average value, its principle as previously described, are repeated no more herein with calculation.
Step 2：By measurement assembly 4 in its segment distance of range intrinsic displacement one, measurement assembly 4 is then driven in active roll 31
Axial direction move back and forth n（n≥1）It is secondary, often move the chosen axis of one-shot measurement component 4 m fixed upwards（m≥1）Individual point is made
It is measurement point, thus the n groups data record measured by ccd sensor 422 is CCD_C1, CCD_C2, CCD_C3 ... CCD_Cn, magnetic
The n groups data record that field sensor 41 is measured is AD_C1, AD_C2, AD_C3 ... AD_Cn, wherein every group of CCD_Cn and AD_Cn
Include the m measured value of point in data, finally calculate the m respective average value of point corresponding to moving back and forth n times and be recorded as
CCD_CA2 and AD_CA2.
Specifically, the step is on the basis of the data of step 1 and a correction data of survey, think that next step is calculated
Used, its operation principle and calculation are repeated no more herein as described in step 1.
Step 3：The correction factor AD_a of AD is calculated, its formula is AD_a=（CCD_CA2—CCD_CA1）/（AD_CA2—
AD_CA1）, AD_a takes exhausted angle value, and wherein AD_a includes the m correction factor of point.
Specifically, the step formula can calculate numerical value change amount measured by magnetic field sensor 41 to ccd sensor
The proportionate relationship of the influence of the data variation amount measured by 422.
Step 4：Nonmagnetic film is moved close to active roll 31, axial direction of the measurement assembly 4 in active roll 31
Move back and forth, the actual value that thus magnetic field sensor 41 and ccd sensor 422 are measured is CCD_T and AD_T, is calculated by formula
Go out the thickness H of the nonmagnetic film, the formula is H=（CCD_T-CCD_CA1）- [(AD_T-AD_CA1) XAD_a], wherein H bags
Include the m calculated value of point.Specifically, last central control board can judge what is surveyed according to each the H value put for being calculated
Whether the thickness and the uniformity of nonmagnetic film class material reach the requirement needed for producing.
The above, is only present pre-ferred embodiments, and any formal limitation is not made to the present invention, although
The present invention is disclosed as above with preferred embodiment, but is not limited to the present invention, any those skilled in the art,
Do not depart from the range of technical solution of the present invention, when making a little change using the technology contents of the disclosure above or be modified to equivalent change
The Equivalent embodiments of change, as long as it, without departing from technical solution of the present invention content, refers to above example according to the technology of the present invention to be
Any simple modification, equivalent variations and the modification made, belong in the range of technical solution of the present invention.
Claims (10)
1. a kind of online noncontact thickness-measuring equipment, including central control board and the equipment rack for being arranged at central control board one side,
It is characterized in that：Guide component, measurement assembly and the crossbeam top for supporting measurement assembly are provided with the equipment rack
Block, the measurement assembly is slided and is located at crossbeam jacking block, and the measurement assembly includes magnetic field sensor, optical transmitting set and CCD sensing
Device；The guide component includes being arranged at the active roll and driven disk roller below measurement assembly；The magnetic field sensor is located at
The surface of active roll；The optical transmitting set and ccd sensor are respectively positioned at the both sides of active roll.
2. a kind of online noncontact thickness-measuring equipment according to claim 1, it is characterised in that：The active roll is magnetic
Backgear.
3. a kind of online noncontact thickness-measuring equipment according to claim 1, it is characterised in that：The crossbeam jacking block is provided with
For the displacement drive mechanism for driving measurement assembly to be moved back and forth along crossbeam jacking block.
4. a kind of online noncontact thickness-measuring equipment according to claim 1, it is characterised in that：The measurement assembly also includes
Mobile base and measuring instrument mounting bracket；The magnetic field sensor is located at the middle part of the measuring instrument mounting bracket, the light transmitting
Device and ccd sensor are located at the both sides of measuring instrument mounting bracket；The Mobile base is provided with the first sliding block and coordinates with the first sliding block to be made
First guide rail, first slide rail is fixedly connected on crossbeam jacking block；The both sides of the Mobile base be provided with the second guide rail,
The second sliding block used cooperatively with the second guide rail and the lifting drive cylinder for driving the lifting of measuring instrument mounting bracket, the measuring instrument peace
Shelve and be fixedly connected on the second sliding block.
5. a kind of online noncontact thickness-measuring equipment according to claim 3, it is characterised in that：The displacement drive mechanism bag
Include be respectively equipped with crossbeam jacking block two ends driving wheel and driven pulley, be set around driving wheel and driven pulley driving belt and with actively
The motor of connection is taken turns, the driving belt is connected with Mobile base.
6. a kind of online noncontact thickness-measuring equipment according to claim 3, it is characterised in that：The crossbeam jacking block material is
Marble.
7. a kind of online noncontact thickness-measuring equipment according to claim 1, it is characterised in that：The equipment rack is provided with
One support base, the two ends of the active roll are connected to the first support base and are located at the lower section of measurement assembly, the equipment rack
It is provided with the first drive mechanism for driving active roll；The driven voller slipping is located at first support base, described the
One support base is provided with for driving driven disk roller closer or far from the second drive mechanism of active roll.
8. a kind of online noncontact thickness-measuring equipment according to claim 7, it is characterised in that：The second drive mechanism bag
Include the disk roller Mobile base that is connected with driven disk roller, the second guide rail that the 3rd sliding block and the 3rd sliding block are used cooperatively and drive roller wheel
The displacement drive cylinder of Mobile base displacement, the 3rd guide rail is connected to the first support base, and the 3rd sliding block is moved with disk roller
Seat connection.
9. a kind of online noncontact thickness-measuring equipment according to claim 1, it is characterised in that：The guide component also includes
First guide disk roller, the second guide disk roller and the second support base and the 3rd support base located at equipment rack, first guide
The two ends of disk roller are connected to second support base, and the two ends of the second guide disk roller are connected to the 3rd support base.
10. the measurement side of the online noncontact thickness measuring of a kind of a kind of online noncontact thickness-measuring equipment for described in claim 1
Method, it is characterised in that：Comprise the following steps：
Step 1：Before product thickness is measured, measurement assembly is driven ccd sensor and optical transmitting set is detected the master of zero load
Dynamic disk roller, then drives measurement assembly to move back and forth n in the axial direction of active roll（n≥1）It is secondary, often move one-shot measurement group
Part chosen axis m fixed upwards（m≥1）Individual point is as measurement point, thus the n group data records measured by ccd sensor
CCD_C1, CCD_C2, CCD_C3 ... CCD_Cn, the n groups data record that what magnetic field sensor was measured measure are AD_C1, AD_
C2, AD_C3 ... .AD_Cn, wherein including the m measured value of point in every group of data of CCD_C and AD_C, finally calculate back and forth
The mobile n corresponding m respective average value of point is recorded as CCD_CA1 and AD_CA1.
Step 2：By measurement assembly in its segment distance of range intrinsic displacement one, measurement assembly is then driven in the axial direction side of active roll
To moving back and forth n（n≥1）It is secondary, often move one-shot measurement component chosen axis m fixed upwards（m≥1）Individual point as measurement point,
Thus the n groups data record measured by ccd sensor is CCD_C1, CCD_C2, CCD_C3 ... CCD_Cn, and magnetic field sensor is measured
The n groups data record for measuring be AD_C1, AD_C2, AD_C3 ... AD_Cn, wherein in every group of data of CCD_Cn and AD_Cn wrap
Include the m measured value of point, finally calculate move back and forth n corresponding m respective average value of point be recorded as CCD_CA2 with
AD_CA2。
Step 3：The correction factor AD_a of AD is calculated, its formula is AD_a=（CCD_CA2-CCD_CA1）/（AD_CA2-AD_
CA1）, AD_a takes exhausted angle value, and wherein AD_a includes the m correction factor of point.
Step 4：Nonmagnetic film is moved close to active roll, measurement assembly is moved back in the axial direction of active roll
Dynamic, the actual value that thus magnetic field sensor and ccd sensor are measured is CCD_T and AD_T, calculates this by formula non magnetic
The thickness H of film, the formula is H=（CCD_T-CCD_CA1- [(AD_T-AD_CA1)] xAD_a, wherein H include the m meter of point
Calculation value.
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Cited By (9)
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| CN107238351A (en) * | 2017-07-07 | 2017-10-10 | 宁波九纵智能科技有限公司 | A kind of measurement apparatus corrected applied to rotor on-line thickness measurement |
| CN110455238A (en) * | 2019-08-12 | 2019-11-15 | 佛山市景旭机电设备有限公司 | The device and method of rubber and plastic coiled material online automatic detection thickness |
| CN111486782A (en) * | 2019-01-26 | 2020-08-04 | 保定长空科技有限公司 | Glass steel coating film thickness non-contact monitoring facilities |
| WO2020192057A1 (en) * | 2019-03-27 | 2020-10-01 | 大连理工大学 | Large wall plate ultrasonic on-machine non-contact scanning thickness measuring device and method |
| CN112146583A (en) * | 2020-09-14 | 2020-12-29 | 济南金诺公路工程监理有限公司 | Structural concrete reinforcing bar protective layer thickness detector |
| CN112815859A (en) * | 2021-01-12 | 2021-05-18 | 上海苗威科技有限公司 | Vacuum coating OD on-line thickness gauge |
| CN114034254A (en) * | 2021-11-22 | 2022-02-11 | 深圳市曼恩斯特科技股份有限公司 | Method for measuring thickness of thin material |
| CN114111911A (en) * | 2021-12-06 | 2022-03-01 | 湖南特种玻璃研究院有限公司 | Traction roller speed and abrasion on-line measuring structure |
| CN116447962A (en) * | 2023-03-09 | 2023-07-18 | 中国人民解放军海军第九七一医院 | Scar thickness measuring equipment based on piezoelectric effect |
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| CN107238351A (en) * | 2017-07-07 | 2017-10-10 | 宁波九纵智能科技有限公司 | A kind of measurement apparatus corrected applied to rotor on-line thickness measurement |
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| CN110455238A (en) * | 2019-08-12 | 2019-11-15 | 佛山市景旭机电设备有限公司 | The device and method of rubber and plastic coiled material online automatic detection thickness |
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| CN112146583B (en) * | 2020-09-14 | 2022-02-15 | 济南金诺公路工程监理有限公司 | Structural concrete reinforcing bar protective layer thickness detector |
| CN112815859A (en) * | 2021-01-12 | 2021-05-18 | 上海苗威科技有限公司 | Vacuum coating OD on-line thickness gauge |
| CN114034254A (en) * | 2021-11-22 | 2022-02-11 | 深圳市曼恩斯特科技股份有限公司 | Method for measuring thickness of thin material |
| CN114111911A (en) * | 2021-12-06 | 2022-03-01 | 湖南特种玻璃研究院有限公司 | Traction roller speed and abrasion on-line measuring structure |
| CN114111911B (en) * | 2021-12-06 | 2022-06-24 | 湖南特种玻璃研究院有限公司 | Traction roller speed and abrasion on-line measuring structure |
| CN116447962A (en) * | 2023-03-09 | 2023-07-18 | 中国人民解放军海军第九七一医院 | Scar thickness measuring equipment based on piezoelectric effect |
| CN116447962B (en) * | 2023-03-09 | 2023-09-15 | 中国人民解放军海军第九七一医院 | Scar thickness measuring equipment based on piezoelectric effect |
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