CN112815859A - Vacuum coating OD on-line thickness gauge - Google Patents
Vacuum coating OD on-line thickness gauge Download PDFInfo
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- CN112815859A CN112815859A CN202110038479.8A CN202110038479A CN112815859A CN 112815859 A CN112815859 A CN 112815859A CN 202110038479 A CN202110038479 A CN 202110038479A CN 112815859 A CN112815859 A CN 112815859A
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 20
- 239000000463 material Substances 0.000 claims abstract description 25
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 7
- 238000005070 sampling Methods 0.000 claims description 6
- 238000004458 analytical method Methods 0.000 claims description 3
- 238000004364 calculation method Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 210000005056 cell body Anatomy 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000007306 turnover Effects 0.000 claims description 2
- 238000003466 welding Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 15
- 230000003287 optical effect Effects 0.000 abstract description 9
- 239000000523 sample Substances 0.000 abstract description 6
- 238000004441 surface measurement Methods 0.000 abstract description 3
- 230000008020 evaporation Effects 0.000 description 9
- 238000001704 evaporation Methods 0.000 description 9
- 238000002834 transmittance Methods 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000424 optical density measurement Methods 0.000 description 2
- 238000004590 computer program Methods 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- Length Measuring Devices By Optical Means (AREA)
Abstract
An OD (optical density) online thickness gauge for vacuum coating comprises: the device comprises a main machine body, an aluminum alloy frame, a measuring assembly and a PC (personal computer) end, wherein the outer side of the main machine body is provided with the aluminum alloy frame, the middle part of the aluminum alloy frame is provided with a trough for placing a material to be measured, the side position of the trough in the main machine body is provided with the measuring assembly for measuring the thickness of the material to be measured, and a single chip in the measuring assembly can be connected with a CCD (charge coupled device) module and is communicated with the; two groups of fixed brackets; the thickness gauge has the technical key points that in order to overcome the existing measurement problem, the thickness gauge uses a measuring lens to replace the original OD measuring probe, so that the limitation of the volume is effectively solved, the measurement requirement of covering the whole film width is met, and the measurement is called as surface measurement in the line; the cover plate with the support frame component is used for covering and protecting the trough when not used, and the support frame component is used for supporting the material to be measured when the cover plate is unfolded for use, so that the material to be measured can move in the trough conveniently, and the situation that the measurement result has errors due to the fact that the traditional material to be measured shakes in the trough is avoided.
Description
Technical Field
The invention belongs to the field of thickness gauges, and particularly relates to a vacuum coating OD online thickness gauge.
Background
With the rapid development of new energy science and technology in recent years, great pressure is generated on the requirements and quality requirements of new energy capacitors in the capacitor industry; especially for high sheet resistance capacitors, the sheet resistance is required to reach 100 square ohms or even higher. When the square resistance is larger than 20 square ohms, the original contact type square resistance on-line measurement on the existing film plating machine exceeds the measurement range and is not applicable any more;
therefore, OD measurement methods commonly used in the industry replace sheet resistance measurement, but the existing OD measurement methods are point measurement methods, one or more probes are generally arranged on one capacitance coating machine, but only more than 10 positions can be measured due to the limitation of the individual volume of the probes,
for example, the occupied width of each measuring head of the LS152 type vacuum coating on-line thickness gauge of the science and technology in shenzhen forest is 54mm, the uniformity of the whole sheet resistance or the light transmittance of the whole film surface cannot be detected, and the probe must be correspondingly adjusted when products with different specifications are plated, so that the use is inconvenient and the reliability is low, and therefore, an instrument capable of measuring and displaying the light transmittance of the whole film surface on line is urgently needed in the industry.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides an OD (optical density) online thickness gauge for a vacuum coating.
In order to achieve the purpose, the invention adopts the following technical scheme:
an OD (optical density) online thickness gauge for vacuum coating comprises:
the device comprises a main machine body, an aluminum alloy frame, a measuring assembly and a singlechip, wherein the outer side of the main machine body is provided with the aluminum alloy frame, the middle part of the aluminum alloy frame is provided with a trough for placing a material to be measured, the position of the side edge of the trough in the main machine body is provided with the measuring assembly for measuring the thickness of the material to be measured, and the singlechip in the measuring assembly can be connected with a CCD (charge coupled device) module and is communicated with an P C end through;
two groups of fixed brackets welded on two sides of the aluminum alloy frame and fixedly connected with the inner wall of the vacuum chamber; and
two sets of apron, its convertible both sides of assembling the main engine body to cover the opening of silo, install the strut assembly who is used for supporting by the side material in the recess of apron inner wall, and strut assembly contains hack lever, No. two hack levers and No. three hacks levers, connect through setting up the running roller between hack lever and No. two hacks levers, between hack lever and the apron, between No. two hack levers and No. three hacks levers and between No. three hack levers and the apron all be connected through setting up torsion spring.
Preferably, the measuring assembly comprises a plurality of measuring lenses, a controller and a light source, the plurality of measuring lenses and the controller are distributed at equal intervals and distributed on one side of the trough, and the light source is arranged on the other side of the trough in the main machine body.
Preferably, the single chip microcomputer is connected with a CCD module through an AD0-A1-A0 data line, the core of the CCD module is a linear CCD with 128 pixels, and the CCD module is used for collecting images.
Preferably, the main body can be installed in the vacuum chamber, a vacuum electrode flange is arranged on the wall of the vacuum chamber in a penetrating mode, and a lead matched with the main body is connected with an external power supply and a PC (personal computer) end through the vacuum electrode flange.
Preferably, the turnover angle of the cover plate is 90 degrees, in this state, the section of the bracket assembly is triangular, and the outer surface of the roller can be attached to the surface of the material to be laterally arranged.
Preferably, the rotatable hook is installed to the inboard of apron, the welding of erection formula has a plurality of hooked poles that can articulate with the hook in the cell body that third hack lever avris predetermine.
An OD (optical density) online thickness gauge for vacuum coating comprises the following steps:
s1, focusing by using a plurality of measuring lenses, designing the transverse size of the shot object imaged by the lenses to be 70mm, the angle to be 70 degrees, and the focusing distance to be 5 mm;
the above focal length calculation formula is: f-vxD/V or f-hxD/H f,
the focal length v of the lens is such that,
the longitudinal dimension V of the imaging of the subject is taken,
the longitudinal dimension h of the subject being photographed,
the lateral dimension H of the subject image is taken,
the lateral dimension D of the subject is photographed,
the distance between the lens and the shooting object;
s2, collecting images shot by the measuring lens by using a linear array type CCD module as a multi-channel photoelectric conversion device;
s3, sending the image acquisition result to a single chip microcomputer on a system board for sampling, and sending the image acquisition result to a PC (personal computer) terminal for further analysis and processing through detection system software developed based on VB (visual basic), wherein the system software is used for brightness detection; the system board is provided into the controller 8.
And S4, displaying the detection result on a screen in real time, and realizing the requirement of measuring the whole film width.
Compared with the prior art, the invention provides a vacuum coating OD on-line thickness gauge, which has the following beneficial effects:
firstly, in order to overcome the existing measurement problem, the thickness gauge uses the measuring lens to replace the original OD measuring probe, so that the limitation of the volume is effectively solved, the measurement requirement of covering the whole film width is met, and the measurement is called as surface measurement in the line;
the cover plate with the support frame component is used, the trough can be covered and protected when the cover plate is not used, the support frame component can be used for supporting the material to be measured when the cover plate is unfolded for use, the material to be measured can conveniently move in the trough, and the situation that the traditional material to be measured shakes in the trough to cause errors in the measurement result is avoided;
thirdly, the invention uses the corresponding measuring lens to focus, and because the distance of the evaporation boat of the common capacitance film plating machine is not less than 70mm, the installation size of the measuring lens is designed for reasonably arranging the space and measuring the evaporation range of one evaporation boat by one lens (being beneficial to feedback control); if the precision is further improved, only the transverse sizes of focusing and imaging need to be adjusted, and the use is convenient.
Drawings
FIG. 1 is a schematic diagram of the main body structure of the present invention;
FIG. 2 is a sectional view showing the internal structure of the main body according to the present invention;
FIG. 3 is a schematic view of the cover of the present invention in an unfolded state;
FIG. 4 is an enlarged view of the partial structure A of FIG. 3 of the present invention;
FIG. 5 is a schematic view of the main body of the present invention in a use state;
FIG. 6 is a schematic diagram of the present invention;
FIG. 7 is a graph of optical density versus light transmittance and a graph of sheet resistance versus optical density in accordance with the present invention.
Reference numerals: 1. a main body; 101. an aluminum alloy frame; 2. a cover plate; 3. fixing a bracket; 4. a light source; 5. a trough; 6. a material to be coated; 7. a measuring lens; 8. a controller; 9. a power source; 10. hooking; 11. a vacuum chamber; 12. a strut assembly; 121. a first frame rod; 122. a second frame rod; 123. a third frame rod; 13. a roller; 14. a hook rod; 15. a single chip microcomputer; 16. and a CCD module.
Detailed Description
The following further describes a specific embodiment of the vacuum coating OD on-line thickness gauge of the present invention with reference to FIG. 1. The OD in-line thickness gauge for vacuum plating according to the present invention is not limited to the description of the following examples.
This embodiment provides a specific structure of a vacuum coating OD on-line thickness gauge, as shown in fig. 1 to 6, a vacuum coating OD on-line thickness gauge, including:
the device comprises a main machine body 1, an aluminum alloy frame 101 is arranged on the outer side of the main machine body 1, a trough 5 used for placing a material 6 to be measured is arranged in the middle of the aluminum alloy frame 101, a measuring assembly used for measuring the thickness of the material 6 to be measured is arranged at the side position of the trough 5 in the main machine body 1, and a single chip microcomputer 15 in the measuring assembly can be connected with a CCD module 16 and is communicated with a PC end through a serial port;
two groups of fixed brackets 3 welded on two sides of the aluminum alloy frame 101 and fixedly connected with the inner wall of the vacuum chamber 11; and
two sets of apron 2, its convertible both sides of assembling to the main engine body 1, and cover the opening of silo 5, install in the recess of apron 2 inner wall and be used for supporting by side material 6 strut assembly 12, and strut assembly 12 contains hack lever 121 No. two, hack lever 122 and No. three hack lever 123, connect through setting up running roller 13 between hack lever 121 and No. two hack levers 122, between hack lever 121 and apron 2, between No. two hack levers 122 and No. three hack levers 123 and between No. three hack lever 123 and the apron 2 all through setting up torsion spring and being connected.
By adopting the technical scheme:
in order to overcome the existing measurement problem, the thickness gauge effectively solves the limitation of volume by using a measuring lens to replace the original OD measuring probe, meets the measurement requirement of covering the whole film width, and is called as surface measurement in the line.
As shown in fig. 2, the measuring assembly includes a plurality of measuring lenses 7, a controller 8 and a light source 4, the plurality of measuring lenses 7 and the controller 8 are distributed at equal intervals and are distributed at one side of the trough 5, and the light source 4 is installed in the main body 1 and is located at the other side of the trough 5.
As shown in fig. 2, the single chip microcomputer 15 is connected to the CCD module 16 through an AD0-a1-a0 data line, the core of the CCD module 16 is a linear CCD with 128 pixels, and the CCD module 16 is used for collecting images;
the model of the CCD module 16 is TLS1401, the core of the module is a linear CCD with 128 pixels, and since the TSL1401 collects 128 pixels at maximum per line, the lower computer program of the single chip microcomputer 15 must continuously transmit 128 bytes of data (at this time, default 1 byte represents one pixel data, that is, the AD sampling precision is 8 bits, and the maximum value is 255).
The corresponding measuring lens 7 is used for focusing, and the evaporation boat distance of a common capacitance coating machine is not less than 7Omm, so that the evaporation range of one evaporation boat is measured (beneficial to feedback control) for reasonably arranging space and one lens. Therefore, the transverse size of the imaging of the shot object is 70mm, the angle is 70 degrees, and the focusing distance is about 5 mm. From these, about 0.5mm sampling point can be calculated, which is enough to satisfy the monitoring requirement of coating film. If the precision is further improved, only the transverse sizes of focusing and imaging are required to be adjusted.
As shown in fig. 5, the main body 1 can be installed in the vacuum chamber 11, and a vacuum electrode flange is penetratingly disposed on a wall of the vacuum chamber 11, and a wire matched with the main body 1 passes through the vacuum electrode flange and is connected with an external power supply 9 and a PC terminal.
As shown in fig. 3, the cover plate 2 can be turned at an angle of 90 °, and in this state, the cross section of the bracket assembly 12 is triangular, and the outer surface of the roller 13 can be attached to the surface of the material 6 to be coated.
As shown in fig. 3 and 4, a rotatable hook 10 is mounted on the inner side of the cover plate 2, and a plurality of hook rods 14 capable of being hooked with the hook 10 are mounted in a rack body preset on the side of the third frame rod 123.
By adopting the technical scheme:
the cover plate 2 with the support frame component is used, the trough 5 can be covered and protected when the cover plate is not used, the support frame component 12 can be used for supporting the material 6 to be measured when the cover plate is unfolded for use, the material 6 to be measured can move in the trough 5 conveniently, and the situation that the traditional material 6 to be measured shakes in the trough 5 to cause errors in the measurement result is avoided.
An OD (optical density) online thickness gauge for vacuum coating comprises the following steps:
s1, focusing by using a plurality of measuring lenses 7, designing the transverse size of the shot object image of the lenses to be 70mm, the angle to be 70 degrees and the focusing distance to be 5 mm;
the above focal length calculation formula is: f-vxD/V or f-hxD/H f,
the focal length v of the lens is such that,
the longitudinal dimension V of the imaging of the subject is taken,
the longitudinal dimension h of the subject being photographed,
the lateral dimension H of the subject image is taken,
the lateral dimension D of the subject is photographed,
the distance between the lens and the shooting object;
s2, collecting the image shot by the measuring lens 7 by using the linear array type CCD module 16 as a multi-channel photoelectric conversion device;
s3, sending the image acquisition result to a singlechip 15 on a system board for sampling, and sending the image acquisition result to a PC terminal for further analysis and processing through detection system software developed based on VB, wherein the system software is used for brightness detection; the system board is provided into the controller 8.
S4, displaying the detection result on a screen in real time to meet the requirement of measuring the whole film width;
in particular, the method comprises the following steps of,
an MC9S12XS128MAA type single chip microcomputer is adopted in an XS128 system board, ADO-A1-AO is connected with the CCD module 16 for data acquisition, and the data acquisition is communicated with a PC end through a USBtoTTL serial port.
The principle and implementation scheme of data acquisition are that different numbers of lens combinations are matched with coating machines corresponding to different material widths, and generally, 10 groups of CAP650 machines are matched, the coverage width measured by 70x10 is 700, 13 groups of CAP900 machines are matched, and the coverage width measured by 70x13 is 910.
The VB program is used for data analysis, and generally has a light transmittance of 0 to 100% and an optical density LOG (1/transmittance). And in practical application, reference may be made to fig. 7 as follows;
the instrument as initially mentioned above mainly solves the problem of on-line measurement of plated high sheet resistance capacitive films (new energy applications), so that as can be seen in fig. 7, an OD value between 0.5 and 3 is sufficient, corresponding to a light transmittance of 0 to 30%;
in actual operation, the exposure time and the sampling period are reasonably adjusted by designing the OD value of 0-4, so that the optical density of 0-4 covers the photosensitive brightness of 0-255, and the accuracy (FF is 255) of 4/255-0.0150D is obtained.
The brightness detection system software developed on the PC side based on VB is not subject to the present invention and technical solutions, and will not be described in detail.
By adopting the technical scheme:
the invention uses the corresponding measuring lens 7 to focus, because the evaporation boat distance of the common capacitance film plating machine is not less than 70mm, in order to reasonably arrange the space and measure the evaporation range of one evaporation boat by one lens (beneficial to feedback control), the installation size of the measuring lens 7 is designed; if the precision is further improved, only the transverse sizes of focusing and imaging need to be adjusted, and the use is convenient.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (7)
1. The utility model provides an online calibrator of vacuum coating OD which characterized in that includes:
the device comprises a main machine body (1), wherein an aluminum alloy frame (101) is arranged on the outer side of the main machine body (1), a trough (5) for placing a material (6) to be measured is formed in the middle of the aluminum alloy frame (101), a measuring assembly for measuring the thickness of the material (6) to be measured is arranged at the side position of the trough (5) in the main machine body (1), and a single chip microcomputer (15) in the measuring assembly can be connected with a CCD (charge coupled device) module (16) and is communicated with a PC (personal computer) end through a serial port;
two groups of fixed brackets (3) welded on two sides of the aluminum alloy frame (101) and fixedly connected with the inner wall of the vacuum chamber (11); and
two sets of apron (2), its convertible both sides of assembling to the main engine body (1) to the opening to silo (5) covers, install strut assembly (12) that are used for supporting by side material (6) in the recess of apron (2) inner wall, and strut assembly (12) contain hack lever (121), No. two hack levers (122) and No. three hack levers (123), connect through setting up running roller (13) between hack lever (121) and No. two hack levers (122), between hack lever (121) and apron (2), between No. two hack levers (122) and No. three hack levers (123) and lap and all be connected through setting up torsion spring between hack lever (123) and the apron (2).
2. The vacuum coating OD on-line thickness gauge of claim 1, characterized in that: the measuring assembly comprises a plurality of measuring lenses (7), a controller (8) and a light source (4), the measuring lenses (7) and the controller (8) are distributed at equal intervals and distributed on one side of the trough (5), and the light source (4) is arranged on the other side of the trough (5) in the main machine body (1).
3. The vacuum coating OD on-line thickness gauge of claim 1, characterized in that: the single chip microcomputer (15) is connected with the CCD module (16) through an AD0-A1-A0 data line, the core of the CCD module (16) is a linear CCD with 128 pixels, and the CCD module (16) is used for collecting images.
4. The vacuum coating OD on-line thickness gauge of claim 1, characterized in that: the main machine body (1) can be installed in the vacuum chamber (11), a vacuum electrode flange is arranged on the wall of the vacuum chamber (11) in a penetrating mode, and a conducting wire matched with the main machine body (1) is connected with an external power supply (9) and a PC end through the vacuum electrode flange.
5. The vacuum coating OD on-line thickness gauge of claim 1, characterized in that: the turnover angle of the cover plate (2) is 90 degrees, the section of the bracket component (12) is triangular in the state, and the outer surface of the roller (13) can be attached to the surface of the quilt side material (6).
6. The vacuum coating OD on-line thickness gauge of claim 1, characterized in that: rotatable couple (10) are installed to the inboard of apron (2), erect the formula welding in the cell body that No. three hack levers (123) avris was predetermine and have a plurality of hooked poles (14) that can articulate with couple (10).
7. The vacuum coating OD on-line thickness gauge of claim 1, characterized in that: the thickness gauge comprises the following use steps:
s1, focusing by using a plurality of measuring lenses (7), designing the transverse size of the shot object imaged by the lenses to be 70mm, the angle to be 70 degrees and the focusing distance to be 5 mm;
the above focal length calculation formula is: f-vxD/V or f-hxD/Hf,
the focal length v of the lens is such that,
the longitudinal dimension V of the imaging of the subject is taken,
the longitudinal dimension h of the subject being photographed,
the lateral dimension H of the subject image is taken,
the lateral dimension D of the subject is photographed,
the distance between the lens and the shooting object;
s2, collecting images shot by the measuring lens (7) by using a linear array type CCD module (16) as a multi-channel photoelectric conversion device;
s3, sending the image acquisition result to a singlechip (15) positioned on a system board (the system board is arranged in the controller 8) for sampling, and sending the image acquisition result to a PC terminal for further analysis and processing through detection system software developed based on VB, wherein the system software is used for brightness detection;
and S4, displaying the detection result on a screen in real time, and realizing the requirement of measuring the whole film width.
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| CN202110038479.8A CN112815859A (en) | 2021-01-12 | 2021-01-12 | Vacuum coating OD on-line thickness gauge |
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| CN203587061U (en) * | 2013-11-27 | 2014-05-07 | 深圳市林上科技有限公司 | Vacuum coating online thickness gauge |
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| CN109580642A (en) * | 2018-12-13 | 2019-04-05 | 中天光伏材料有限公司 | A kind of membrane material coated face defect analysis control system and its method |
| CN209367205U (en) * | 2018-12-21 | 2019-09-10 | 偃师市三合绝热科技有限公司 | A kind of turnover mechanism waste material recovery device producing nano-thermal-insulating plate |
| CN210973270U (en) * | 2019-10-29 | 2020-07-10 | 洛阳生波尔真空装备有限公司 | Be applied to compression roller mechanism on coating film coiling mechanism |
| CN211697501U (en) * | 2020-03-05 | 2020-10-16 | 郭瑾 | Textile fiber transmittance detector |
-
2021
- 2021-01-12 CN CN202110038479.8A patent/CN112815859A/en active Pending
Patent Citations (7)
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|---|---|---|---|---|
| CN203587061U (en) * | 2013-11-27 | 2014-05-07 | 深圳市林上科技有限公司 | Vacuum coating online thickness gauge |
| CN204085441U (en) * | 2014-08-04 | 2015-01-07 | 广西三威林产工业有限公司 | Medium density fibre board (MDF) on-line thickness testing |
| CN106871773A (en) * | 2017-02-14 | 2017-06-20 | 肇庆市嘉仪仪器有限公司 | A kind of online noncontact thickness-measuring equipment and its measuring method |
| CN109580642A (en) * | 2018-12-13 | 2019-04-05 | 中天光伏材料有限公司 | A kind of membrane material coated face defect analysis control system and its method |
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