CN106847980B - A kind of silicon solar hull cell based on the multiple tooth resonance grating of the double-deck micro-nano two dimension - Google Patents
A kind of silicon solar hull cell based on the multiple tooth resonance grating of the double-deck micro-nano two dimension Download PDFInfo
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- 239000000463 material Substances 0.000 claims abstract description 19
- 239000002210 silicon-based material Substances 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 4
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
- H01L31/0543—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means comprising light concentrating means of the refractive type, e.g. lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
Abstract
The invention discloses a kind of silicon solar hull cells based on the multiple tooth resonance grating of the double-deck micro-nano two dimension, structure of the invention is: being provided with the multiple tooth resonance grating of micro-nano two dimension of mechanical periodicity in both directions in silicon solar hull cell silicon active layer upper and lower surface, there are two the linear grating grooves that the grating tooth of silicon materials and two materials are air in each period.By the structure size of the multiple tooth resonance grating of regulation silicon active layer upper and lower surface micro-nano two dimension, grating tooth position is set and grating thickness, theoretical analysis shows that, the silicon solar hull cell is to the absorption efficiency of incident light up to 81.8% or more, this can make the interaction ability between silicon active layer and sunlight be obviously improved, so as to improve silicon solar hull cell incident photon-to-electron conversion efficiency.
Description
Technical field
The invention belongs to optical field, specially a kind of silicon solar based on the multiple tooth resonance grating of the double-deck micro-nano two dimension is thin
Film battery.
Background technique
Solar film battery is because of the concern that its manufacture craft is relatively easy, and low energy consumption, small in size and by researcher.So
And perplexing one important problem of solar film battery at present is exactly its photoelectric conversion performance problem.Some researches show that pass through
Solar film battery surface texture is improved, its capture absorbability to sunlight can be improved, participates in more photons
Photoelectric conversion process, so as to improve the photoelectric conversion performance of solar film battery.Among these, because optical grating construction is simple, easy
In integrated, manufacture craft is easy the advantages that, thus it is often placed in solar film battery surface, electric to reduce solar energy film
Pool surface light reflectivity, and improve transmission light path of the incident light inside solar film battery by optical grating diffraction effect,
Enhance the absorptivity to solar photon.
By optical grating diffraction theory it is found that conventional uniform grating (the grating number of teeth is 1 in a cycle) is to the polarization of incident light
State, incident angle and wavelength are all more sensitive, this receives application of the conventional uniform grating in solar film battery
Limitation, and compared with conventional uniform, multiple tooth grating (having 2 or more not wide grating teeth in a cycle) is free in design
Degree controls optical field distribution in grating region, manipulates the transmission of tunnelling ray in grating, and it is huge to realize that wide range, wide-angle response etc. have
Big advantage can obtain photoelectric conversion effect so that broadband, wide-angle, full-polarization capture absorption may be implemented in the structure
Rate is obviously improved.
Summary of the invention
According to above content, using the multiple tooth grating monopolizing characteristic of micro-nano, the present invention devises a kind of based on the double-deck micro-nano two
The silicon solar hull cell for tieing up multiple tooth resonance grating has benefited from the multiple tooth resonance grating of bilayer micro-nano two dimension, this silicon solar
The broadband to sunlight, wide-angle, the capture and absorption polarized entirely may be implemented in hull cell, enables to photoelectric conversion performance
It gets a promotion.
The technical solution adopted by the invention is as follows: a kind of silicon solar based on the multiple tooth resonance grating of the double-deck micro-nano two dimension is thin
Film battery, it is characterised in that: be provided with the micro-nano along X, Y direction mechanical periodicity in hull cell silicon active layer upper and lower surface
The multiple tooth resonance grating of two dimension (may make silicon active layer to greatly improve the absorption efficiency of incident light, enhance silicon solar film
Cell photoelectric conversion performance.), and there are two the gratings that the grating tooth of silicon materials and two materials are air in each period
Groove, grating layer thickness is along Z-direction.
1. the multiple tooth resonance grating of silicon active layer upper surface micro-nano two dimension:
Screen periods are 1200 nanometers of (T along the x axisx1=1200nm), each period is interior, and there are two the grating teeth of silicon materials
(wx11And wx12), and two materials are the linear grating groove (kx of air11And kx12), and wx11=130 nanometers, wx12=54 nanometers,
kx11=306 nanometers, kx12=710 nanometers；
Screen periods are 1200 nanometers of (T along the y axisy1=1200nm), each period is interior, and there are two the grating teeth of silicon materials
(wy11And wy12), and two materials are the linear grating groove (ky of air11And ky12), and wy11=51 nanometers, wy12=838 nanometers,
ky11=261 nanometers, ky12=50 nanometers；
It is 340 nanometers along Z-direction grating thickness；
2. the multiple tooth resonance grating of silicon active layer lower surface micro-nano two dimension:
Screen periods are 400 nanometers of (T along the x axisx2=400nm), each period is interior, and there are two the grating teeth of silicon materials
(wx21And wx22), and two materials are the linear grating groove (kx of air21And kx22), and wx21=141 nanometers, wx22=141 receive
Rice, kx21=59 nanometers, kx22=59 nanometers；
Screen periods are 1200 nanometers of (T along the y axisy2=1200nm), each period is interior, and there are two the grating teeth of silicon materials
(wy21And wy22), and two materials are the linear grating groove (ky of air21And ky22), and wy21=50 nanometers, wy22=50 nanometers,
ky21=50 nanometers, ky22=1050 nanometers；
It is 340 nanometers along Z-direction grating height.
Set by structure size, the grating tooth position of the multiple tooth resonance grating of regulation silicon active layer upper and lower surface micro-nano two dimension and
Grating thickness may make the multiple tooth resonance grating of silicon active layer upper surface micro-nano two dimension can be in 300 ~ 1200 nanometers of broad spectral ranges thoroughly
The rate of penetrating is maintained at 95% or more, and incident angle can maintain 5% or less to+40 degree range internal reflection rates in -40 degree；Silicon active layer
The multiple tooth resonance grating of lower surface micro-nano two dimension in each incident angle average reflectance (incident angle be in -85 ° ~ 85 ° it is anti-
Penetrate the average value of rate) it is greater than 81.9%, transmitted light can be made to be reflected back toward silicon active layer and be absorbed in this way.Theoretical analysis shows that
Silicon active layer, up to 81.8% or more, can greatly improve silicon solar hull cell photoelectricity in this way and turn to the absorption efficiency of incident light
Change performance.
By optical grating diffraction theory analysis it is found that this multiple tooth resonance of solar film battery silicon active layer upper surface micro-nano two dimension
Grating, average reflectance is maintained at 12.26% hereinafter, and grating height is received 340 ± 60 in 300 ~ 1200 nanometers of broad spectral ranges
In rice variation range, reflectivity changes are no more than 0.7%.In addition, this resonance grating is within the scope of incident angle ± 40 degree,
Reflectivity is able to maintain 5% or less；And the multiple tooth resonance grating of silicon active layer lower surface micro-nano two dimension, it is flat in each incident angle
Equal reflectivity is about 81.9%.
Under the collective effect of this double-layer grating, silicon active layer can to the average absorption efficiency of all angles incidence sunlight
Up to 81.8% or more, this can make silicon active layer be greatly prolonged with the sunlight interaction time, so as to effectively improve
Photoelectric conversion performance.
The principle that the present invention uses is as follows:
1. broadband, high diffraction efficiency and the big angle of the multiple tooth resonance grating of silicon active layer upper and lower surface micro-nano two dimension in this structure
Spectrum width characteristic is spent derived from the interaction of this double-layer grating tunnelling ray resonance effect and tunnelling ray.Theoretical analysis shows that working as grating
When tunnelling ray resonance occurs, optical grating diffraction spectrum energy can be made to redistribute, show as emphasizing matter grating in optical grating diffraction spectrum
0 grade of reflection (or transmission) rate almost nearly 100% the phenomenon that, and the interaction of tunnelling ray can extend high diffraction efficiency bandwidth；Separately
Outside, the high refractive index of the broadband of this double-layer grating, high diffraction efficiency and wide-angle spectrum width characteristic also with this double-layer grating constituent material
Poor (emphasizing matter) and multiple tooth shape modulation are related.The grating layer of high index-contrast can extend resonance range, to be conducive to width
The formation of band, high diffraction efficiency and wide-angle spectrum width characteristic, moreover, the multiple tooth shape modulation of this double-layer grating can effectively prevent into
It penetrates quickly declining for light tunnelling ray to die, this can greatly increase the capture absorbability to incident light, so as to enhance the property of this device
Energy.
2. in this structure, the multiple tooth resonance grating of upper surface micro-nano two dimension enables to be incident on silicon active layer surface too
Sunlight is largely transmitted into silicon active layer.And the multiple tooth resonance grating of lower surface micro-nano two dimension enables to enter silicon active layer
Sunlight be reflected back toward active layer, effectively prevent the leakage of sunlight.Thus, under the collective effect of this double-layer grating, too
Light path of the sunlight in silicon active layer greatly increases, so that the interaction time of sunlight and silicon active layer obtains significantly
Extend, and this makes the increase of photon residence time, wherein photon residence time is defined as: in the case where not applying light field,
Photon number is decayed to the time of 1/e by maximum value.Photon residence time then means the work of sunlight and hull cell
Increased with the time, then silicon solar hull cell enhances the capture ability of sunlight, so as to enhance silicon solar thin-film electro
The photoelectric conversion performance in pond.
The present invention has following advantages and good effect:
1. being based on silicon material system, convenient for carrying out processing preparation to device using existing micro-nano technology platform, it is conducive to big
Scale is integrated；
2. the structure may be implemented broadband, high-diffraction efficiency, wide-angle spectrum width and the sunlight capture polarized entirely and absorb；
3. light path of the sunlight in silicon active layer greatly increases under the collective effect of this double-layer grating, so that
The interaction time of sunlight and silicon active layer is greatly prolonged, and which enhance silicon solar hull cells to sunlight
Absorbability is captured, so as to enhance the photoelectric conversion performance of silicon solar hull cell.
Detailed description of the invention
Fig. 1 is the silicon solar hull cell sandwich layer tomograph based on the multiple tooth resonance grating of the double-deck micro-nano two dimension.
Fig. 2 is the top view of the multiple tooth resonance grating of silicon active layer upper surface micro-nano two dimension.
Fig. 3 is the bottom view of the multiple tooth resonance grating of silicon active layer lower surface micro-nano two dimension.
Fig. 4 is change curve of the upper surface multiple tooth resonant grating reflection rate of micro-nano two dimension with incident (vertical) wavelength.
Fig. 5 is change curve of the upper surface multiple tooth resonance grating average reflectance of micro-nano two dimension with incident wavelength.
Fig. 6 is change curve of the lower surface multiple tooth resonance grating average reflectance of micro-nano two dimension with incident wavelength.
Fig. 7 solar film battery silicon active layer average reflectance, absorptivity, transmissivity with wavelength change curve.
Specific embodiment
It is described in detail with reference to the accompanying drawing:
1, overall
As shown in Figure 1, being provided in solar film battery silicon active layer upper and lower surface along X, Y direction mechanical periodicity
The multiple tooth resonance grating of micro-nano two dimension, and be air there are two the grating tooth of silicon materials and two materials in each period
Linear grating groove, grating layer thickness is along Z-direction.
2, the multiple tooth resonance grating of silicon active layer upper surface micro-nano two dimension:
Screen periods are 1200 nanometers of (T along the x axisx1=1200nm), each period is interior, and there are two the gratings of silicon materials
Tooth, width are respectively wx11=130 nanometers, wx12=54 nanometers；And two materials are the linear grating groove of air, width point
It is not kx11=306 nanometers, kx12=710 nanometers；
Screen periods are 1200 nanometers of (T along the y axisy1=1200nm), each period is interior, and there are two the gratings of silicon materials
Tooth, width are respectively wy11=51 nanometers, wy12=838 nanometers；And two materials are the linear grating groove of air, width point
It is not ky11=261 nanometers, ky12=50 nanometers.
It is 340 nanometers along Z-direction grating thickness.
Its function is: generating tunnelling ray resonance effect and maintains influencing each other for tunnelling ray, in addition, this micro-nano optical grating constitution
The high index-contrast of material can extend resonance range, and the multiple tooth shape modulation of grating can effectively prevent incident light tunnelling ray
Quickly decline and die, this can greatly increase the capture absorbability to incident light, so as to enhance the performance of this device.
3, the multiple tooth resonance grating of silicon active layer lower surface micro-nano two dimension:
Screen periods are 400 nanometers of (T along the x axisx2=400nm), there are two the grating tooth of silicon materials in each period,
Its width is respectively wx21=141 nanometers, wx22=141 nanometers；And two materials are the linear grating groove of air, width difference
For kx21=59 nanometers, kx22=59 nanometers；
Screen periods are 1200 nanometers of (T along the y axisy2=1200nm), each period is interior, and there are two the gratings of silicon materials
Tooth, width are respectively wy21=50 nanometers, wy22=50 nanometers；And two materials are the linear grating groove of air, width point
It is not ky21=50 nanometers, ky22=1050 nanometers.
It is 340 nanometers along Z-direction grating height.
Its function is: being based on tunnelling ray resonance effect, high index-contrast and multiple tooth shape using optical grating constitution material
Modulation generates the reflection in broadband, high diffraction efficiency, wide-angle spectrum width and full polarization state light, so that entering silicon active layer too
Sunlight is reflected back toward active layer, effectively prevent the leakage of sunlight.
4, silicon active layer
Silicon active layer is a kind of square block based on silicon materials.
Its function is: as the active layer of silicon solar hull cell, it can capture upper layer and lower layer micro-nano grating too
Sunlight is absorbed, and converts electric energy for incident light.
5, embodiment
1) specific size
Device size is obtained according to rigorous couple-wave analysis method and Finite Difference Time Domain analysis, design are as follows:
The multiple tooth resonance grating of silicon active layer upper surface micro-nano two dimension:
Screen periods Tx along the x axis1=1200 nanometers, wx11=130 nanometers, wx12=54 nanometers, kx11=306 nanometers, kx12
=710 nanometers；
Screen periods Ty along the y axis1=1200 nanometers, wy11=51 nanometers, wy12=838 nanometers, ky11=261 nanometers, ky12
=50 nanometers.
It is 340 nanometers along Z-direction grating thickness.
The multiple tooth resonance grating of silicon active layer lower surface micro-nano two dimension:
Screen periods T along the x axisx2=400 nanometers, wx21=141 nanometers, wx22=141 nanometers, kx21=59 nanometers, kx22
=59 nanometers；
Screen periods Ty along the y axis2=1200 nanometers, wy21=50 nanometers, wy22=50 nanometers, ky21=50 nanometers, ky22=
1050 nanometers；
Z-direction height is 340 nanometers.
2) experiment condition
300 ~ 1200 nanometers of input wavelength.
3) experimental result
Analysis emulation is carried out according to above data, which may be implemented broadband, wide-angle, full-polarization capture absorption.
Claims (3)
1. a kind of silicon solar hull cell based on the multiple tooth resonance grating of the double-deck micro-nano two dimension, it is characterised in that: active in silicon
Layer upper and lower surface is provided with the multiple tooth resonance grating of micro-nano two dimension along X, Y direction mechanical periodicity, and has two in each period
The grating tooth of a silicon materials and two materials are the linear grating groove of air, and grating layer thickness is along Z-direction；
The multiple tooth resonance grating of silicon active layer lower surface micro-nano two dimension:
Screen periods are 400 nanometers along the x axis, and there are two the grating teeth of silicon materials and two materials in each period is
The linear grating groove of air；The width of the grating tooth is respectively wx21And wx22, wherein wx21It is 141 nanometers, wx22It is received for 141
Rice；The width of the linear grating groove is respectively kx21And kx22, wherein kx21It is 59 nanometers, kx22It is 59 nanometers；
Screen periods are 1200 nanometers along the y axis, and there are two the grating teeth of silicon materials and two materials in each period is
The linear grating groove of air；The width of the grating tooth is respectively wy21And wy22, wherein wy21It is 50 nanometers, wy22It is 50 nanometers；
The width of the linear grating groove is respectively ky21And ky22, wherein ky21It is 50 nanometers, ky22It is 1050 nanometers；
It is 340 nanometers along Z-direction grating height.
2. a kind of silicon solar hull cell based on the multiple tooth resonance grating of the double-deck micro-nano two dimension according to claim 1,
It is characterized by:
The multiple tooth resonance grating of silicon active layer upper surface micro-nano two dimension:
Screen periods are 1200 nanometers along the x axis, and there are two the grating teeth of silicon materials and two materials in each period is
The linear grating groove of air；The width of the grating tooth is respectively wx11And wx12, wherein wx11=130 nanometers, wx12=54 nanometers；
The width of the linear grating groove is respectively kx11And kx12, wherein kx11=306 nanometers, kx12=710 nanometers；
Screen periods are 1200 nanometers along the y axis, and there are two the grating teeth of silicon materials and two materials in each period is
The linear grating groove of air；The width of the grating tooth is respectively wy11And wy12, wherein wy11=51 nanometers, wy12=838 nanometers；
The width of the linear grating groove is respectively ky11And ky12, wherein ky11=261 nanometers, ky12=50 nanometers；
It is 340 nanometers along Z-direction grating thickness.
3. a kind of silicon solar thin-film electro based on the multiple tooth resonance grating of the double-deck micro-nano two dimension according to claim 1 or 2
Pond, it is characterised in that:
The silicon active layer upper surface multiple tooth resonance grating of micro-nano two dimension can be maintained in 300~1200 nanometers of broad spectral range internal transmission factors
95% or more, and incident angle can maintain 5% or less to+40 degree range internal reflection rates in -40 degree；Silicon active layer lower surface is micro-
Average reflectance of the multiple tooth resonance grating of two dimension in each incident angle of receiving is greater than 81.9%, transmitted light can be made anti-in this way
It is emitted back towards silicon active layer and is absorbed.
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| CN102074591A (en) * | 2010-12-02 | 2011-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | Composite micro-nano photon structure for enhancing absorption efficiency of solar cell and manufacturing method thereof |
| CN103811590A (en) * | 2014-02-17 | 2014-05-21 | 中国科学院半导体研究所 | Manufacturing method of mixed light trapping structures on front and back faces of semiconductor film solar cell |
| CN105866868A (en) * | 2016-04-09 | 2016-08-17 | 南昌航空大学 | Broadband micro nano two-dimensional multitooth grating trap filter |
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| CN102074591A (en) * | 2010-12-02 | 2011-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | Composite micro-nano photon structure for enhancing absorption efficiency of solar cell and manufacturing method thereof |
| CN103811590A (en) * | 2014-02-17 | 2014-05-21 | 中国科学院半导体研究所 | Manufacturing method of mixed light trapping structures on front and back faces of semiconductor film solar cell |
| CN105866868A (en) * | 2016-04-09 | 2016-08-17 | 南昌航空大学 | Broadband micro nano two-dimensional multitooth grating trap filter |
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