CN106847980A - A kind of silicon solar hull cell based on the double-deck micro-nano multiple tooth resonance grating of two dimension - Google Patents
A kind of silicon solar hull cell based on the double-deck micro-nano multiple tooth resonance grating of two dimension Download PDFInfo
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- H—ELECTRICITY
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- H01L31/0543—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means comprising light concentrating means of the refractive type, e.g. lenses
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- G—PHYSICS
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Abstract
The invention discloses a kind of silicon solar hull cell based on the double-deck micro-nano multiple tooth resonance grating of two dimension, structure of the invention is：It is provided with along the micro-nano multiple tooth resonance grating of two dimension of both direction mechanical periodicity in silicon solar hull cell silicon active layer upper and lower surface, there are two grating teeth of silicon materials in each cycle, and two materials are the linear grating groove of air.Put and grating thickness by regulating and controlling the physical dimension of the silicon active layer upper and lower surface micro-nano multiple tooth resonance grating of two dimension, grating tooth position, theory analysis shows, the silicon solar hull cell is to the absorption efficiency of incident light up to more than 81.8%, this can cause that the interaction ability between silicon active layer and sunshine is obviously improved, so as to improve silicon solar hull cell electricity conversion.
Description
Technical field
The invention belongs to optical field, specially a kind of silicon solar based on the double-deck micro-nano multiple tooth resonance grating of two dimension is thin
Film battery.
Background technology
Solar film battery is relatively easy because of its manufacture craft, and energy consumption is low, small volume and the extremely concern of researcher.So
And, puzzlement one important problem of solar film battery is exactly its opto-electronic conversion performance problem at present.There are some researches show passing through
Solar film battery surface texture is improved, its capture absorbability to sunshine can be improved, participate in more photons
Photoelectric conversion process, so as to improve the opto-electronic conversion performance of solar film battery.Among these, because optical grating construction is simple, easy
In it is integrated, manufacture craft is easy the advantages of, thus it is often placed in solar film battery surface, to reduce solar energy film electricity
Pool surface light reflectivity, and improve transmission light path of the incident light inside solar film battery by optical grating diffraction effect,
Strengthen the absorptivity to solar photon.
Theoretical, the conventional uniform grating from optical grating diffraction（The grating number of teeth is 1 in a cycle）To the polarization of incident light
State, incident angle and wavelength are all more sensitive, and this causes that application of the conventional uniform grating in solar film battery is received
Limitation, and compared with conventional uniform, multiple tooth grating（There are 2 or more not wide grating teeth in a cycle）In design freely
Degree, optical field distribution in control grating region, the transmission of tunnelling ray in manipulation grating realizes that wide range, wide-angle response etc. have huge
Big advantage, so that the structure can realize that broadband, wide-angle, full-polarization capture absorb, is obtained in that opto-electronic conversion is imitated
Rate is obviously improved.
The content of the invention
According to the above, using the multiple tooth grating monopolizing characteristic of micro-nano, the present invention devises a kind of based on double-deck micro-nano two
The silicon solar hull cell of multiple tooth resonance grating is tieed up, has benefited from the multiple tooth resonance grating of double-deck micro-nano two dimension, this silicon solar
Hull cell can realize broadband, wide-angle, the capture and absorption of full polarization to sunshine, enable to opto-electronic conversion performance
Get a promotion.
The technical solution adopted by the present invention is as follows：A kind of silicon solar based on the double-deck micro-nano multiple tooth resonance grating of two dimension is thin
Film battery, it is characterised in that：The micro-nano along X, Y direction mechanical periodicity is provided with hull cell silicon active layer upper and lower surface
The multiple tooth resonance grating of two dimension（May be such that silicon active layer is greatly improved to the absorption efficiency of incident light, enhance silicon solar film
Cell photoelectric conversion performance.）, and have two grating teeth of silicon materials in each cycle, and two materials are the grating of air
Groove, grating layer thickness is along Z-direction.
1. the multiple tooth resonance grating of silicon active layer upper surface micro-nano two dimension：
It is 1200 nanometers of (T along X-direction screen periodsx1=1200nm), there are two grating teeth of silicon materials in each cycle
(wx11And wx12), and two materials are the linear grating groove (kx of air11And kx12), and wx11=130 nanometers, wx12=54 nanometers,
kx11=306 nanometers, kx12=710 nanometers；
It is 1200 nanometers of (T along Y direction screen periodsy1=1200nm), there are two grating teeth of silicon materials in each cycle
(wy11And wy12), and two materials are the linear grating groove (ky of air11And ky12), and wy11=51 nanometers, wy12=838 nanometers,
ky11=261 nanometers, ky12=50 nanometers；
It it is 340 nanometers along Z-direction grating thickness；
2. the multiple tooth resonance grating of silicon active layer lower surface micro-nano two dimension：
It is 400 nanometers of (T along X-direction screen periodsx2=400nm), there are two grating tooth (wx of silicon materials in each cycle21
And wx22), and two materials are the linear grating groove (kx of air21And kx22), and wx21=141 nanometers, wx22=141 nanometers,
kx21=59 nanometers, kx22=59 nanometers；
It is 1200 nanometers of (T along Y direction screen periodsy2=1200nm), there are two grating teeth of silicon materials in each cycle
(wy21And wy22), and two materials are the linear grating groove (ky of air21And ky22), and wy21=50 nanometers, wy22=50 nanometers,
ky21=50 nanometers, ky22=1050 nanometers；
Highly it is 340 nanometers along Z-direction grating.
Put by regulating and controlling the physical dimension of the silicon active layer upper and lower surface micro-nano multiple tooth resonance grating of two dimension, grating tooth position and
Grating thickness, may be such that the multiple tooth resonance grating of silicon active layer upper surface micro-nano two dimension can be in 300 ~ 1200 nanometers of broad spectral ranges thoroughly
The rate of penetrating is maintained at more than 95%, and incident angle reflectivity in the range of -40 degree to+40 degree can maintain less than 5%；Silicon active layer
Average reflectance of the multiple tooth resonance grating of lower surface micro-nano two dimension in each incident angle（Incident angle is anti-in -85 ° ~ 85 °
Penetrate the average value of rate）More than 81.9%, can so cause that transmitted light is reflected back toward silicon active layer and is absorbed.Theory analysis shows,
Silicon active layer, up to more than 81.8%, can so greatly improve silicon solar hull cell photoelectricity and turn to the absorption efficiency of incident light
Change performance.
From optical grating diffraction theory analysis, this solar film battery silicon active layer upper surface micro-nano multiple tooth resonance of two dimension
Grating, average reflectance is maintained at less than 12.26% in 300 ~ 1200 nanometers of broad spectral ranges, and grating height is received 340 ± 60
In rice excursion, its reflectivity changes is no more than 0.7%.In addition, this resonance grating is in the range of incident angle ± 40 degree, its
Reflectivity can keep less than 5%；And the multiple tooth resonance grating of silicon active layer lower surface micro-nano two dimension, it is flat in each incident angle
Equal reflectivity is about 81.9%.
Under the collective effect of this double-layer grating, silicon active layer can to the average absorption efficiency of all angles incidence sunshine
Up to more than 81.8%, this can cause that silicon active layer is greatly prolonged with the sunshine interaction time, so as to effective raising
Opto-electronic conversion performance.
The principle that the present invention is used is as follows：
1. the broadband of the multiple tooth resonance grating of silicon active layer upper and lower surface micro-nano two dimension, diffraction efficiency high and wide-angle are composed in this structure
Characteristic wide comes from the interaction of this double-layer grating tunnelling ray resonance effect and tunnelling ray.Theory analysis shows, when grating occurs
During tunnelling ray resonance, can cause that optical grating diffraction spectrum energy is redistributed, show as being emphasized in optical grating diffraction is composed 0 grade of matter grating
Reflection (or transmission) rate almost nearly 100% phenomenon, and the interaction of tunnelling ray can extend diffraction efficiency bandwidth high；In addition, this
The broadband of double-layer grating, diffraction efficiency high and wide-angle spectrum width characteristic also with the high index-contrast of this double-layer grating constituent material（By force
It is quenched）And multiple tooth shape modulation is relevant.The grating layer of high index-contrast can extend resonance range, so as to be conducive to broadband, height
The formation of diffraction efficiency and wide-angle spectrum width characteristic, and, the multiple tooth shape modulation of this double-layer grating can effectively prevent incident light
Quick the declining of tunnelling ray is died, and this can greatly increase the capture absorbability to incident light, so as to strengthen the performance of this device.
2. in this structure, the multiple tooth resonance grating of upper surface micro-nano two dimension enables to incide silicon active layer surface too
Sunlight major part is transmitted into silicon active layer.And the multiple tooth resonance grating of lower surface micro-nano two dimension enables to enter into silicon active layer
Sunshine be reflected back toward active layer, effectively prevent the leakage of sunshine.Thus, under the collective effect of this double-layer grating, too
Light path of the sunlight in silicon active layer is greatly increased, so that sunshine is obtained significantly with the interaction time of silicon active layer
Extension, and this causes photon residence time to increase, wherein photon residence time is defined as：In the case where light field is not applied,
Photon number is decayed to the time of 1/e by maximum.Photon residence time, then mean the work of sunshine and hull cell
Increased with the time, then silicon solar hull cell strengthens the capture ability of sunshine, so as to strengthen silicon solar thin-film electro
The photoelectric conversion performance in pond.
The present invention has following advantages and good effect：
1. silicon material system is based on, is easy to be processed device preparation using existing micro-nano technology platform, beneficial to extensive
It is integrated；
2. the structure can realize the sunshine capture of broadband, high-diffraction efficiency, wide-angle spectrum width and full polarization and absorb；
3. under the collective effect of this double-layer grating, light path of the sunshine in silicon active layer is greatly increased, so that the sun
Light is greatly prolonged with the interaction time of silicon active layer, which enhances capture of the silicon solar hull cell to sunshine
Absorbability, so as to strengthen the photoelectric conversion performance of silicon solar hull cell.
Brief description of the drawings
Fig. 1 is the silicon solar hull cell sandwich layer tomograph based on the multiple tooth resonance grating of double-deck micro-nano two dimension.
Fig. 2 is the top view of the silicon active layer upper surface micro-nano multiple tooth resonance grating of two dimension.
Fig. 3 is the upward view of the silicon active layer lower surface micro-nano multiple tooth resonance grating of two dimension.
Fig. 4 is the upper surface micro-nano multiple tooth resonant grating reflection rate of two dimension with incidence（Vertically）The change curve of wavelength.
Fig. 5 is change curve of the upper surface multiple tooth resonance grating average reflectance of micro-nano two dimension with incident wavelength.
Fig. 6 is change curve of the multiple tooth resonance grating average reflectance of lower surface micro-nano two dimension with incident wavelength.
Fig. 7 solar film battery silicon active layers average reflectance, absorptivity, transmissivity with wavelength change curve.
Specific embodiment
Described in detail below in conjunction with the accompanying drawings：
1st, it is overall
As shown in figure 1, solar film battery silicon active layer upper and lower surface be provided with along X, Y direction mechanical periodicity it is micro-
Receive two-dimentional multiple tooth resonance grating, and there are two grating teeth of silicon materials in each cycle, and two materials are the grating of air
Groove, grating layer thickness is along Z-direction.
2nd, the multiple tooth resonance grating of silicon active layer upper surface micro-nano two dimension：
It is 1200 nanometers of (T along X-direction screen periodsx1=1200nm), there are two grating teeth of silicon materials in each cycle, its
Width is respectively, wx11=130 nanometers, wx12=54 nanometers；And two materials are the linear grating groove of air, its width is respectively,
kx11=306 nanometers, kx12=710 nanometers；
It is 1200 nanometers of (T along Y direction screen periodsy1=1200nm), there are two grating teeth of silicon materials in each cycle, its
Width is respectively, wy11=51 nanometers, wy12=838 nanometers；And two materials are the linear grating groove of air, its width is respectively,
ky11=261 nanometers, ky12=50 nanometers.
It it is 340 nanometers along Z-direction grating thickness.
Its function is：Produce tunnelling ray resonance effect and maintain influencing each other for tunnelling ray, in addition, this micro-nano optical grating constitution
The high index-contrast of material can extend resonance range, and the multiple tooth shape modulation of grating can effectively prevent incident light tunnelling ray
Quick declining die, this can greatly increase the capture absorbability to incident light, so as to strengthen the performance of this device.
3rd, the multiple tooth resonance grating of silicon active layer lower surface micro-nano two dimension：
It is 400 nanometers of (T along X-direction screen periodsx2=400nm), there are two grating teeth of silicon materials in each cycle, it is wide
Degree is respectively, wx21=141 nanometers, wx22=141 nanometers；And two materials are the linear grating groove of air, its width is respectively,
kx21=59 nanometers, kx22=59 nanometers；
It is 1200 nanometers of (T along Y direction screen periodsy2=1200nm), there are two grating teeth of silicon materials in each cycle, its
Width is respectively, wy21=50 nanometers, wy22=50 nanometers；And two materials are the linear grating groove of air, its width is respectively,
ky21=50 nanometers, ky22=1050 nanometers.
Highly it is 340 nanometers along Z-direction grating.
Its function is：Based on tunnelling ray resonance effect, using the high index-contrast and many odontoids of optical grating constitution material
Modulation, produces the reflection of broadband, diffraction efficiency high, wide-angle spectrum width and full polarization state light so that enter into silicon active layer too
Sunlight is reflected back toward active layer, effectively prevents the leakage of sunshine.
4th, silicon active layer
Silicon active layer is a kind of square block based on silicon materials.
Its function is：Used as the active layer of silicon solar hull cell, it can be by the capture of upper and lower two-layer micro-nano grating too
Sunlight is absorbed, and incident light is converted into electric energy.
5th, embodiment
1）Specific size
Show that device size is according to rigorous couple-wave analysis method and Finite Difference Time Domain analysis, design：
The silicon active layer upper surface micro-nano multiple tooth resonance grating of two dimension：
Along X-direction screen periods Tx1=1200 nanometers, wx11=130 nanometers, wx12=54 nanometers, kx11=306 nanometers, kx12=710
Nanometer；
Along Y direction screen periods Ty1=1200 nanometers, wy11=51 nanometers, wy12=838 nanometers, ky11=261 nanometers, ky12=50
Nanometer.
It it is 340 nanometers along Z-direction grating thickness.
The multiple tooth resonance grating of silicon active layer lower surface micro-nano two dimension：
Along X-direction screen periods Tx2=400 nanometers, wx21=141 nanometers, wx22=141 nanometers, kx21=59 nanometers, kx22=59
Nanometer；
Along Y direction screen periods Ty2=1200 nanometers, wy21=50 nanometers, wy22=50 nanometers, ky21=50 nanometers, ky22=1050
Nanometer；
Z-direction is highly 340 nanometers.
2）Experiment condition
300 ~ 1200 nanometers of input wavelength.
3）Experimental result
Emulation is analyzed according to data above, the structure can realize that broadband, wide-angle, full-polarization capture absorb.
Claims (3)
1. a kind of silicon solar hull cell based on the double-deck micro-nano multiple tooth resonance grating of two dimension, it is characterised in that：It is active in silicon
Layer upper and lower surface is provided with the micro-nano multiple tooth resonance grating of two dimension along X, Y direction mechanical periodicity, and has two in each cycle
The grating tooth of individual silicon materials, and two materials are the linear grating groove of air, and grating layer thickness is along Z-direction.
2. a kind of silicon solar hull cell based on the double-deck micro-nano multiple tooth resonance grating of two dimension according to claim 1,
It is characterized in that：
1. the multiple tooth resonance grating of silicon active layer upper surface micro-nano two dimension：
It is 1200 nanometers of (T along X-direction screen periodsx1=1200nm), there are two grating tooth (wx of silicon materials in each cycle11
And wx12), and two materials are the linear grating groove (kx of air11And kx12), and wx11=130 nanometers, wx12=54 nanometers, kx11=
306 nanometers, kx12=710 nanometers；
It is 1200 nanometers of (T along Y direction screen periodsy1=1200nm), there are two grating tooth (wy of silicon materials in each cycle11
And wy12), and two materials are the linear grating groove (ky of air11And ky12), and wy11=51 nanometers, wy12=838 nanometers, ky11=
261 nanometers, ky12=50 nanometers；
It it is 340 nanometers along Z-direction grating thickness；
2. the multiple tooth resonance grating of silicon active layer lower surface micro-nano two dimension：
It is 400 nanometers of (T along X-direction screen periodsx2=400nm), there are two grating tooth (wx of silicon materials in each cycle21With
wx22), and two materials are the linear grating groove (kx of air21And kx22), and wx21=141 nanometers, wx22=141 nanometers, kx21=
59 nanometers, kx22=59 nanometers；
It is 1200 nanometers of (T along Y direction screen periodsy2=1200nm), there are two grating tooth (wy of silicon materials in each cycle21
And wy22), and two materials are the linear grating groove (ky of air21And ky22), and wy21=50 nanometers, wy22=50 nanometers, ky21=
50 nanometers, ky22=1050 nanometers；
Highly it is 340 nanometers along Z-direction grating.
3. according to claim 1, a kind of silicon solar thin-film electro based on the double-deck micro-nano multiple tooth resonance grating of two dimension described in 2
Pond, it is characterised in that：
The silicon active layer upper surface micro-nano multiple tooth resonance grating of two dimension can be maintained in 300 ~ 1200 nanometers of broad spectral range internal transmission factors
More than 95%, and incident angle reflectivity in the range of -40 degree to+40 degree can maintain less than 5%；Silicon active layer lower surface micro-nano
Average reflectance of the multiple tooth resonance grating of two dimension in each incident angle is more than 81.9%, can so cause that transmitted light is reflected
Return silicon active layer and absorbed；Theory analysis shows, silicon active layer to the absorption efficiency of incident light up to more than 81.8%, so
Silicon solar hull cell photoelectric conversion performance can be greatly improved.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113054044A (en) * | 2021-03-08 | 2021-06-29 | 合肥工业大学 | Monocrystalline silicon thin-film solar cell with double-layer period unmatched rotating rectangular grating structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100126577A1 (en) * | 2008-11-26 | 2010-05-27 | National Central University | Guided mode resonance solar cell |
| CN102074591A (en) * | 2010-12-02 | 2011-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | Composite micro-nano photon structure for enhancing absorption efficiency of solar cell and manufacturing method thereof |
| CN103811590A (en) * | 2014-02-17 | 2014-05-21 | 中国科学院半导体研究所 | Manufacturing method of mixed light trapping structures on front and back faces of semiconductor film solar cell |
| CN105866868A (en) * | 2016-04-09 | 2016-08-17 | 南昌航空大学 | Broadband micro nano two-dimensional multitooth grating trap filter |
-
2017
- 2017-02-28 CN CN201710110490.4A patent/CN106847980B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100126577A1 (en) * | 2008-11-26 | 2010-05-27 | National Central University | Guided mode resonance solar cell |
| CN102074591A (en) * | 2010-12-02 | 2011-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | Composite micro-nano photon structure for enhancing absorption efficiency of solar cell and manufacturing method thereof |
| CN103811590A (en) * | 2014-02-17 | 2014-05-21 | 中国科学院半导体研究所 | Manufacturing method of mixed light trapping structures on front and back faces of semiconductor film solar cell |
| CN105866868A (en) * | 2016-04-09 | 2016-08-17 | 南昌航空大学 | Broadband micro nano two-dimensional multitooth grating trap filter |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113054044A (en) * | 2021-03-08 | 2021-06-29 | 合肥工业大学 | Monocrystalline silicon thin-film solar cell with double-layer period unmatched rotating rectangular grating structure |
| CN113054044B (en) * | 2021-03-08 | 2022-08-05 | 合肥工业大学 | Monocrystalline silicon thin-film solar cell with double-layer period unmatched rotating rectangular grating structure |
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