CN106840226B - 基于微光纤结构的柔性可穿戴健康传感器及其制备和测量方法 - Google Patents
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Abstract
本发明公开了一种基于微光纤结构的柔性可穿戴健康传感器及其制备和测量方法。在软性基底表面镀上一层金属薄膜，通过局部加热拉伸或者腐蚀的方法拉制出具有腰部区域的微光纤，结合精密电控位移台制作环形结光学谐振腔，并放置到金属薄膜表面，然后对上述结构进行封装固化即可得到可穿戴光纤健康监测传感器件。具体测量时，将该传感器直接贴放在手腕脉搏处，光源输出端通过单模光纤依次经起偏器、偏振控制器接该传感器的一端，另一端的透射光经单模光纤到达光电探测器，再接入示波器。本发明制备成本低廉，方法简单，对多种金属材料及柔性材料具有通用性，尤其是其基于光纤系统的特性，使得超远距离高保真信息传递、远程健康检测成为可能。
Description
技术领域
本发明涉及光电子技术领域、柔性材料领域、健康监测领域，具体涉及光纤柔性传感器的研究与制备。更具体而言，涉及一种基于微光纤结构的柔性可穿戴健康传感器及其制作方法和测量应用。
背景技术
波导与金属表面等离激元结合是光电子学领域的一个重要分支，描述了当金属与光波导结合后的现象，即波导中的横磁场模式与金膜表面等离激元相互作用产生杂化等离激元，从而使得波导中的横磁场减弱。近年来，不断地有各类波导与表面等离激元结合的尝试，包括微光纤与布拉格光栅金属衬底的结合，波导与金属块状结构结合，波导与V形槽金属结构的结合等。
光纤传感技术是一门以光作为信息载体，以光纤作为信息传输介质的一种新技术。相对于传统传感器而言，光纤传感器具有不受电磁场干扰、灵敏度高、体积小、重量轻等优点，特别地，微纳光纤结合光学谐振腔效应也可以进一步用来提高传感灵敏度。因而低损耗光纤自20世纪70年代问世以来，它逐步成为新一代传感器的研究重点。近几年来，随着理论进步工艺技术的完善，各种类型的光纤传感器不断被研制出来，光纤传感器成为一个热门研究领域。
随着信息技术的发展，人类生活方式和时代的改变，可穿戴的技术已经更多地出现在人们的日常生活中。随着可穿戴设备的发展，可穿戴健康设备逐渐衍生出来成为可穿戴设备的又一重要分支。光电技术与可穿戴概念的结合使得可穿戴设备能直接与信息处理技术接轨，使得超远距离高保真信息传递、远程健康检测成为可能。
发明内容
本发明的目的是：利用金属与微光纤结合封装在PDMS等软性基底材料中制作一种柔性可穿戴健康传感器，使其具有高灵敏度、高便携性、低成本、制备简单、全光纤体系等优势。
本发明的传感器采用的技术方案是：
基于微光纤结构的柔性可穿戴健康传感器，包括软性基底、金属薄膜、微光纤和封装层，所述微光纤形成环形结光学谐振腔，并位于金属薄膜的表面，所述金属薄膜镀在软性基底的表面，所述封装层对上述结构进行封装。
优选地，所述软性基底和封装层均采用聚二甲基硅氧烷材料。
优选地，所述微光纤的腰部区域的直径为2-10微米，长度为0.5-3厘米；所述环形结光学谐振腔的环的直径为100-5000微米；所述金属薄膜的厚度为40-200纳米，所述软性基底的厚度为100-600微米，所述封装层的厚度为100-1000微米。
本发明基于微光纤结构的柔性可穿戴健康传感器的制备方法，包括如下步骤：
(1)利用局部加热拉伸或者腐蚀的方法拉制出具有腰部区域的微光纤，
(2)结合精密电控位移台，制作微光纤环形结光学谐振腔，
(3)在软性基底表面通过磁控溅射的方法镀上一层金属薄膜，
(4)通过精密三维调节台将微光纤环形结光学谐振腔放置到金属薄膜上，
(5)对步骤(4)制备得到的结构进行封装固化后即可得到柔性可穿戴健康传感器。
本发明基于微光纤结构的柔性可穿戴健康传感器的测量方法，包括光源、起偏器、偏振控制器、平移台、单模光纤、光电探测器、示波器和所述柔性可穿戴健康传感器，所述柔性可穿戴健康传感器的两根尾纤分别接入偏振控制器和光电探测器，光源输出的光通过单模光纤依次经过起偏器、偏振控制器接入所述柔性可穿戴健康传感器，所述柔性可穿戴健康传感器贴于被测者的腕部，被测者的身体振动信号引起所述柔性可穿戴健康传感器光学信号的变化，再经由光电探测器将光学信号转化为电学信号，由示波器显示出来。
本发明中的基于微光纤结构的柔性可穿戴健康传感器，其传感的原理为：将微光纤环形结光学谐振腔贴放在金属衬底上后，微光纤中的横磁膜式与金属表面等离基元相互作用形成杂化等离基元模式，在外界微扰作用下光纤中模式发生变化，使得与金属表面等离基元发生作用的横磁膜式也发生变化，从而改变微光纤结构的透射率。将该微光纤结合金属薄膜的结构封装在柔性材料(如PDMS)后，柔性材料本身的弹光效应也进一步加强了该结构对于外界震动，压力，扭转，拉伸等灵敏度，由外界这些条件的改变从而使得器件对于每种动作有着对应的透射率变化趋势，将这样光功率的变化通过光电探测器再接入示波器即可反映出人体的脉搏，呼吸等重要的生理特征。
本发明同时具有以下优势：(1)该传感器的制备工艺简单，制作成本低廉。(2)该微光纤结构的柔性可穿戴健康传感器测量方法采用全光纤光路设计，系统内无分离光学元件，结构简单，对外界电磁干扰具有优良的抵抗性。(3)传感器具有高度便携性，可做成手环形状。(4)该传感器具有高灵敏度。(5)本发明对多种金属材料及柔性材料具有通用性，尤其是其基于光纤系统的特性，使得超远距离高保真信息传递、远程健康检测成为可能，这是一种新型的基于光学微光纤的健康监测传感器。
附图说明
图1是本发明基于微光纤结构的柔性可穿戴健康传感器的制备过程示意图。
图2是本发明微光纤结型谐振腔的显微图。
图3是将本实施例基于微光纤结构的柔性可穿戴健康传感器贴附在手腕处的测试示意图。
图4是被测者在屏住呼吸状态下的脉搏数据图。
图5是图4中单个脉搏信号的放大图，其中a表示舒张压的最大强度，b表示收缩压的最大强度，ΔT表示转换时间。
图6是被测者在有呼吸参与的状态下的脉搏呼吸数据图。
具体实施方式
下面结合附图和具体实施例对本发明做进一步详细的说明。
图1是本发明基于微光纤结构的柔性可穿戴健康传感器的制备过程示意图。具体制备过程如下：
在聚二甲基硅氧烷(PDMS)表面通过磁控溅射的方法镀上一层金膜，通过火焰拉伸法拉制微光纤，用精密电控位移台结合动手操作制作微型光纤结谐振腔，实物图为图2所示。将微型光纤结谐振腔放置到金膜表面，再用PDMS对上述结构封装固化后即可得到该器件。优选地，微光纤的腰部区域的直径为2-10微米，长度为0.5-3厘米；金膜的厚度为40-200纳米，PDMS衬底厚度100-600微米，覆盖封装层PDMS为100-1000微米。
图3是本发明的测量光路，包括连续光光源1(波长覆盖范围1550纳米附近)、起偏器2、偏振控制器3、柔性可穿戴健康传感器4、光电探测器5和示波器6。柔性可穿戴健康传感器4的两尾纤分别接入偏振控制器3和光电探测器5，光源1输出的光通过普通单模光纤经过起偏器2、偏振控制器3接入柔性可穿戴健康传感器4，被测者将柔性可穿戴健康传感器4贴于腕部，被测者的脉搏呼吸等振动信号引起柔性可穿戴健康传感器4光学信号的变化，经由光电探测器5将光学信号转化为电学信号，最后由示波器6显示出来。
图4是本实施例基于微光纤结构的柔性可穿戴健康传感器对屏住呼吸状态下脉搏的示波器图像，图中可以看出，该传感器对脉搏震动的响应度很好，记录的脉搏清晰，重复性良好，可用于健康监测等领域。
图5是图4中单个脉搏信号的放大图，其中a表示舒张压的最大强度，b表示收缩压的最大强度，ΔT表示转换时间。定义两个指标SI＝h/ΔT,RI＝a/b×100％，其中h为测试者身高。由图5中数据可知，SI＝7，RI＝60％,符合一个健康的170cm的24岁男性的数据。
图6是本实施例基于微光纤结构的柔性可穿戴健康传感器对引入呼吸作用下的脉搏呼吸的示波器图像，图中小的振荡峰即为脉搏震动引起，大的包络为呼吸引起。可以看到，结果图清晰明了，重复性良好，可用于疾病诊断，健康监测等。
Claims (3)
1.基于微光纤结构的柔性可穿戴健康传感器的测量方法，其柔性可穿戴健康传感器包括软性基底、金属薄膜、微光纤和封装层，其特征在于，所述微光纤形成环形结光学谐振腔，并位于金属薄膜的表面，所述金属薄膜镀在软性基底的表面，所述封装层对上述结构进行封装；其特征在于，测量装置包括光源、起偏器、偏振控制器、平移台、单模光纤、光电探测器、示波器和所述柔性可穿戴健康传感器，所述柔性可穿戴健康传感器的两根尾纤分别接入偏振控制器和光电探测器，光源输出的光通过单模光纤依次经过起偏器、偏振控制器接入所述柔性可穿戴健康传感器，所述柔性可穿戴健康传感器贴于被测者的腕部，被测者的身体振动信号引起所述柔性可穿戴健康传感器光学信号的变化，再经由光电探测器将光学信号转化为电学信号，由示波器显示出来。
2.根据权利要求1所述的基于微光纤结构的柔性可穿戴健康传感器的测量方法，其特征在于，所述软性基底和封装层均采用聚二甲基硅氧烷材料。
3.根据权利要求1或2所述的基于微光纤结构的柔性可穿戴健康传感器的测量方法，其特征在于，所述微光纤的腰部区域的直径为2-10微米，长度为0.5-3厘米；所述环形结光学谐振腔的环的直径为100-5000微米；所述金属薄膜的厚度为40-200纳米，所述软性基底的厚度为100-600微米，所述封装层的厚度为100-1000微米。
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