CN106826463B - A kind of complex-curved processing method - Google Patents
A kind of complex-curved processing method Download PDFInfo
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- CN106826463B CN106826463B CN201610590649.2A CN201610590649A CN106826463B CN 106826463 B CN106826463 B CN 106826463B CN 201610590649 A CN201610590649 A CN 201610590649A CN 106826463 B CN106826463 B CN 106826463B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/0031—Machines having several working posts; Feeding and manipulating devices
- B24B13/0037—Machines having several working posts; Feeding and manipulating devices the lenses being worked by different tools, e.g. for rough-grinding, fine-grinding, polishing
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- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The present invention disclose a kind of complex-curved processing method, and one, treat processed complex curved surface and carry out material removal using strain disc, until face shape error peak-to-valley value is better than 30 μm；2nd, error analysis is carried out to complex-curved face shape, it is processed for low order error of the entire surface shape better than 30 μm using strain disc, it is processed for medium-high frequency error of the entire surface shape better than 30 μm using small abrasive nose, until the RMS value of face shape error is better than 100nm；3rd, error analysis is carried out to complex-curved face shape error, low order error of the RMS value better than 100nm is processed using strain disc, local medium-high frequency error or annulus error under the precision is processed using small abrasive nose, the medium-high frequency error of the entire surface shape under the precision is processed using magnetorheological；Until the RMS of complex-curved face shape error is better than 30nm；4th, can be obtained by high material removal efficiency, obtain high face shape convergence efficiency by complex surface machining to meet demand, the present invention using ion beam fabrication technology.
Description
Technical field
The invention belongs to the technical field of optical system processing, and in particular to a kind of complex-curved processing method.
Background technology
With the continuous development of Modern Optics Technology, the spectrophotometric data of optical system requires to improve constantly.High accuracy
Large-diameter non-spherical reflecting mirror is the core component of contemporary optics system, is widely used in high-resolution contemporary optics system.
With the increase of reflection aperture of mirror, higher requirement is proposed to the efficiency of optical manufacturing.
Currently, the processing method of aspherical optical element has a lot, such as CCOS small abrasive nose sub-apertures processing method, strain disc
Processing method, magnetorheological processing method, ion beam machining etc..Practice adds these methods in large-diameter non-spherical reflecting mirror
During work.But these methods have its limitation, such as the polishing of CCOS small abrasive noses sub-aperture and strain disc polishing both approaches
Bistrique size can be increased and improve material removal efficiency, still, with the increase of bistrique size, it is to small yardstick face shape error
Control ability declines, i.e., shape convergence efficiency in face declines.Magnetorheological processing method and the higher processing of being to determine property of ion beam machining
Method, and bistrique will not wear in process, can obtain more stable removal function, therefore its face shape convergence efficiency
It is higher, but the bistrique size of both approaches is smaller, therefore material removal efficiency is relatively low, in large-diameter non-spherical reflecting mirror
The requirement of processing efficiency can not be met.
The content of the invention
In view of this, the invention provides a kind of complex-curved processing method, high material removal efficiency can be obtained, is obtained
High face shape convergence efficiency is obtained, so as to realize the complex-curved high-efficiency high-precision processing of heavy caliber.
Realize that technical scheme is as follows：
A kind of complex-curved processing method, comprises the following steps：
Step 1: the grinding stage
For to be processed complex-curved using strain disc progress material removal, until face shape error peak-to-valley value is better than 30 μm；
Step 2: rough polishing photophase
Error analysis is carried out to complex-curved face shape, entered for low order error of the entire surface shape better than 30 μm using strain disc
Row processing, it is processed for medium-high frequency error of the entire surface shape better than 30 μm using small abrasive nose, until the RMS value of face shape error
Better than 100nm；
Step 3: the finishing polish stage
Error analysis is carried out to complex-curved face shape error, low order error of the RMS value better than 100nm is added using strain disc
Work, local the medium-high frequency error or annulus error under the precision are processed using small abrasive nose, to the entire surface under the precision
The medium-high frequency error of shape is processed using magnetorheological；Until the RMS of complex-curved face shape error is better than 30nm；
Step 4: the ion beam processing stage
Using ion beam fabrication technology to complex surface machining to meet demand.
Beneficial effect：
The present invention has complementary advantages for different processing methods by analyzing existing ripe process technology, root
Combined machining strategy is established according to the complex-curved face shape feature of different processing stages such as PV values, RMS value and medium-high frequency distribution, is carried out
More targeted processing, effectively increase material removal efficiency and face shape convergence effect during heavy caliber complex surface machining
Rate.
Brief description of the drawings
Fig. 1 is main machining method material removal efficiency and face shape convergence efficiency qualitative analysis schematic diagram.
Fig. 2 is Combined machining technology grinding stage and rough polishing phase flow figure.
Fig. 3 is Combined machining technology finishing polish stage and ion beam processing phase flow figure.
Embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
The processing method that Combined machining technology mainly uses in the present invention includes：CCOS small abrasive nose sub-apertures processing method,
Strain disc processing method, magnetorheological processing method (MRF), ion beam machining (IBF).Its material removal efficiency and the convergence of face shape are imitated
It is as shown in Figure 1 that rate carries out the qualitative analysis.
It can be seen that by Fig. 1, material removal efficiency and the face shape convergence efficiency of different processing methods are inversely proportional, i.e., using single
One processing method is unable to reach highest processing efficiency.To solve the problem, the invention provides a kind of complex-curved processing side
Method, comprise the following steps：
Step 1: the grinding stage
As shown in Fig. 2 carry out material removal for complex-curved use strain disc to be processed and detect face shape error, until
Face shape error peak-to-valley value is better than 30 μm, into rough polishing photophase.
Heavy caliber it is complex-curved after milling firstly the need of being ground, this stage face shape error feature is face shape essence
Spend relatively low, material removal amount is big.The stage uses PV values evaluation face shape, and carrying out rapid mass using strain disc processing method goes
Remove.
Step 2: rough polishing photophase
As shown in Fig. 2 to complex-curved face shape carry out error analysis, this stage face shape error generally comprise two kinds into
Point, the first is low order composition, mainly includes the large scale error of the covering entire surface shape such as defocus, astigmatism, spherical aberration.For whole
Low order error of the face shape better than 30 μm is processed using strain disc.Second is high frequency components, mainly include annulus error,
Marginal error, small yardstick local error, added for medium-high frequency error of the entire surface shape better than 30 μm using CCOS small abrasive noses
Work, face shape error is detected, until the RMS value of face shape error enters the finishing polish stage better than 100nm.
Step 3: the finishing polish stage
As shown in figure 3, carrying out error analysis to complex-curved face shape error, low order error of the RMS value better than 100nm is adopted
Processed with strain disc, for medium-high frequency face shape error, it is necessary to further analyze：To the local medium-high frequency error under the precision
Or annulus error is processed using CCOS small abrasive noses, the medium-high frequency error for being uniformly distributed in entire surface shape under the precision is made
It is processed with magnetorheological；Face shape error is detected, until the RMS of complex-curved face shape error enters ion better than 30nm
The beam process segment.
Step 4: the ion beam processing stage
Using ion beam fabrication technology to complex surface machining to meet demand.
Above-mentioned processing method intermediate ion Shu Fangfa certainty is best, but material removal amount is minimum, therefore only face to face
Shape precision is better than being processed using ion beam during 30nm, is finally reached required face shape, completes processing.
For above-mentioned flow is described in detail, above-mentioned flow is introduced using actual processing example：Actual processing workpiece is
Diameter 1450mmSiC non-spherical reflectors.Initial face shape error PV values are 72 μm, and according to Combined machining strategy, the stage uses
Strain disc is processed.After converging to PV less than 30 μm with face shape, the mode combined using strain disc with small abrasive nose is carried out down
One step is processed.As face shape further restrains, to RMS be less than 100nm after, into polishing the stage, this stage face shape error compared with
For complexity, including low order face shape error, medium-high frequency error, local medium-high frequency error etc..Middle height for being distributed in entire surface shape
Frequency face shape error is mainly removed using MRF.It is magnetorheological to be machined to mainly use ion beam after surface figure accuracy is 30nm to RMS
Processing mode is processed, and after ion beam processing, surface figure accuracy meet demand, completes whole work flow.
In summary, presently preferred embodiments of the present invention is these are only, is not intended to limit the scope of the present invention.
Within the spirit and principles of the invention, any modification, equivalent substitution and improvements made etc., it should be included in the present invention's
Within protection domain.
Claims (1)
1. a kind of complex-curved processing method, it is characterised in that comprise the following steps：
Step 1: the grinding stage
For to be processed complex-curved using strain disc progress material removal, until face shape error peak-to-valley value is better than 30 μm；
Step 2: rough polishing photophase
Error analysis is carried out to complex-curved face shape, added for low order error of the entire surface shape better than 30 μm using strain disc
Work, it is processed for medium-high frequency error of the entire surface shape better than 30 μm using small abrasive nose, until the RMS value of face shape error is better than
100nm；
Step 3: the finishing polish stage
Error analysis is carried out to complex-curved face shape error, low order error of the RMS value better than 100nm is processed using strain disc,
Local medium-high frequency error or annulus error under the precision is processed using small abrasive nose, to the entire surface shape under the precision
Medium-high frequency error is processed using magnetorheological；Until the RMS of complex-curved face shape error is better than 30nm；
Step 4: the ion beam processing stage
Using ion beam fabrication technology to complex surface machining to meet demand.
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| CN201610590649.2A CN106826463B (en) | 2016-07-25 | 2016-07-25 | A kind of complex-curved processing method |
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| CN201610590649.2A CN106826463B (en) | 2016-07-25 | 2016-07-25 | A kind of complex-curved processing method |
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| CN106826463B true CN106826463B (en) | 2018-04-10 |
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| CN114102340B (en) * | 2021-12-03 | 2023-03-14 | 湖北久之洋红外系统股份有限公司 | Polishing preparation method for quadric surface reflector |
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| MXPA03006434A (en) * | 2003-07-18 | 2005-01-21 | Univ Mexico Nacional Autonoma | Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces. |
| CN100456075C (en) * | 2007-04-24 | 2009-01-28 | 浙江大学 | Multi-sheet type panoramic looking-around imaging lens |
| CN102416590B (en) * | 2011-10-28 | 2014-03-12 | 中国科学院光电技术研究所 | Flexible limiting and supporting device for large-caliber light reflector |
| CN102828185A (en) * | 2012-08-16 | 2012-12-19 | 中国科学院西安光学精密机械研究所 | Optical element processing method based on thermal accelerated corrosion |
| CN103921176B (en) * | 2014-03-27 | 2017-06-09 | 中国科学院长春光学精密机械与物理研究所 | Suitable for the magnetorheological finishing device of super large caliber optical manufacturing |
| CN104942678B (en) * | 2015-06-24 | 2017-08-01 | 中国科学院光电技术研究所 | Device for processing large-caliber optical element by swing frame type active grinding disc |
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