CN102828185A - Optical element processing method based on thermal accelerated corrosion - Google Patents
Optical element processing method based on thermal accelerated corrosion Download PDFInfo
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- CN102828185A CN102828185A CN2012102923500A CN201210292350A CN102828185A CN 102828185 A CN102828185 A CN 102828185A CN 2012102923500 A CN2012102923500 A CN 2012102923500A CN 201210292350 A CN201210292350 A CN 201210292350A CN 102828185 A CN102828185 A CN 102828185A
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Abstract
The invention provides a lapping and polishing method based on thermal accelerated corrosion, which mainly solves the problems of high cost and low processing efficiency for current processing of optical elements, especially aspherical optical elements. The optical element processing method based on thermal accelerated corrosion comprises the following steps: 1. determining a processing target shape; 2. determining the amount to be removed for points on a surface of a workpiece to be processed according to the determined target shape and the shape of the workpiece to be processed; 3. setting the temperature and the dwell time of corrosion liquid on the points on the workpiece to be processed according to the amount to be removed for the points on the surface of the workpiece to be processed determined in step 2; 4. performing corrosion to obtain the processing shape determined in step 1. The method of the invention is high in efficiency and low in cost.
Description
Technical field
The present invention relates to a kind of grinding, polishing mechanism, this device is applicable to the highly-efficient processing of aspherical optical element.
Background technology
Aspherical optical element has corrects multiple aberration, improves image quality, simplifies optical system and enlarges plurality of advantages such as visual field, in the numerous photovoltaic in dual-use field, is used widely.But the processing of aspherical optical element still exists, and apparatus expensive, precision are low, inefficiency etc. topic, seriously restricted the development of related industries and scientific research project.
The small abrasive nose polishing technology is a kind of quantitative polishing technology that proposes to aspheric processing difficulties.Because the determinacy and the popularity of its processing should technology become each main processing means of big optics job shop at present.
The advantage of small abrasive nose is based on the removal function of Gaussian, realizes quantitatively control easily, and little fringing effect is arranged.But its main drawback be easy to generate the medium-high frequency error, working (machining) efficiency is low and relevant device is expensive.Based on the polishing technology of big bistrique, be the effective means that significantly improves aspherical mirror machining efficient.Main big bistrique technology comprises strain disc technology and stress mirror technology at present, and wherein stress mirror technology adopts the whole mirror polish method of sphere, has more excellent working (machining) efficiency, but because its principle of elasticity changes the processing that technology can only be used for ultra-thin mirror.
Summary of the invention
The present invention provides a kind of grinding and buffing method based on hot accelerated corrosion, and mainly having solved existing optical element, especially aspherical optical element, to add the man-hour cost higher, the problem that working (machining) efficiency is lower.
Concrete technical solution of the present invention is:
Should may further comprise the steps based on the method for manufacturing optical element of hot accelerated corrosion:
1] target shape of definite processing;
2] confirm the amount that workpiece to be machined surface each point need be removed based on target shape of confirming and workpiece to be machined shape;
3] according to the amount of confirming in the step 2 that workpiece to be machined surface each point needs are removed, temperature and the corrosive fluid of setting each point corrosive fluid on the workpiece to be machined need residence time;
4] corrosive fluid through being complementary with workpiece to be machined needs residence time carry out corrosion processing to workpiece to be machined according to the temperature and the corrosive fluid of each point corrosive fluid on the workpiece to be machined of setting in the step 3, corrodes the machining shape of confirming to the step 1.Possibly need repeatedly iteration in the process, finally converge in certain accuracy rating.
In above-mentioned steps 4 processes, also need the auxiliary machinery polishing is carried out on the workpiece to be machined surface,, specifically can adopt traditional polishing disk polishing or gasbag-type mechanical polishing with level and smooth corrosion surface.
Corrosion processing specifically is to set up the temperature field according to the temperature of each point corrosive fluid to process in the above-mentioned steps 4; Guarantee to generate the equilibrium temperature field that needs; Workpiece to be machined is immersed in the corrosive fluid of temperature field accomplishes; The temperature field adopts nichrome wire to generate, and can also adopt microwave type or projection formula radiation to generate; Or adopt the constant temperature corrosive fluid, accomplish corrosion processing through the adjustment etching time to workpiece to be machined surface difference.
In the above-mentioned steps 4, corrosion processing is in closed environment, to carry out, and has avoided the influence of corrosive fluid to the processor.
The invention has the advantages that:
1, efficient is higher.The introducing of the introducing of corrosive fluid and temperature controlled variable has significantly improved material and has removed ability, can realize aspheric milling.
2, with low cost.Equipment prices such as CCOS at present commonly used, magnetorheological, ionic fluid are expensive.And this invention only is conventional temperature control, is converted into cheap relatively temperature control to complicated accurate TRAJECTORY CONTROL.Required equipment and commerce can obtain, and do not need customization.
Description of drawings
Fig. 1 is embodiment 1 principle schematic;
Fig. 2 is embodiment 2 principle schematic;
Fig. 3 is embodiment 3 principle schematic.
Embodiment
Below provide three kinds of embodiment working method of the present invention is described.
Embodiment 1:
As shown in Figure 1: based on the jet grinding and buffing method of hot accelerated corrosion
Wherein: 1 is 6 shaft industrial robots, and 2 is nozzle, and 3 is work piece, and 4 is confined chamber, and 5 is device for storing liquid, and 6 is strainer, and 7 is industrial robot controller, and 8 is Industrial PC, and 9 is temperature regulator, and 10 is heating unit, and 11 is pump.
With reference to Fig. 1, based on the jet grinding and buffing method employing of hot accelerated corrosion work piece to be inverted and to be connected on the stationary installation, stationary installation one side is provided with work piece, and opposite side is fixedly connected with live spindle; Corrosive fluid can be realized the closed loop cycle utilization; In device for storing liquid, pour the corrosive fluid adaptive into work piece; Through behind strainer, heating unit and the pump, on workpiece to be machined, corrosive fluid is mingled with the workpiece material that is corroded and drops in the device for storing liquid again then through nozzle act.The motion control of nozzle realizes through industrial robot.Because core of the present invention is utilized corrosive fluid exactly, therefore should note the influence of corrosive fluid to other parts, comprise that industrial robot, device for storing liquid, pipeline etc. all will carry out anti-corrosive treatment.The care should be used to corrosive fluid is to processor's influence in addition, so in the course of processing, should use confined chamber to completely cut off.
Add man-hour carrying out optics,, calculate the temperature and the residence time of each point on the movement locus according to the profile of processed element; Generate the robot steering order then, the speculum profile that circulates is detected the jet polishing with the abrasive material corrosive fluid, reach λ/10 until surface precision RMS, carry out the transition to the abrasive water-jet of routine again, moving in circles reaches processing request until surface precision; Simultaneously, be ejected into the homo(io)thermism of optical element, require the corrosive fluid constant flow rate, and nozzle be to the constant distance of workpiece surface in order to realize jet; Optical element is fixed in the process engineering; Motion (requiring five-axle linkage) through the control nozzle is processed by the track of advance planning optical element; Through the temperature of control corrosive fluid, and the residence time of any point, accomplish the quantitative material of element surface and remove; After processed optical work corrosion polishing reaches certain precision, carry out the transition to conventional abrasive water-jet polishing, realize final face type and smooth surface.
This embodiment has overcome the defective of conventional abrasives water jet, is incorporated into the chemical corrosion principle in the jet optics processing, and increases the temperature controlled variable chemical corrosion is quickened, and realizes that the small abrasive nose endless belt is repaiied throwing efficiently; In order to realize slick surface to be machined, in the concrete process implementing process, can the corrosion jet be carried out the transition to abrasive water-jet gradually.
Embodiment 2:
As shown in Figure 2: based on control corrosive gasbag-type grinding and buffing method
Wherein: 1 gasbag-type rubbing head, 2 corrosion liquid baths, 3 temperature control micro-chips, 4 computingmachines, 5 workpieces to be machined, 6 air pumps.
With reference to Fig. 2, adopt the gasbag-type rubbing head based on control corrosive gasbag-type grinding and buffing method,, the corrosion liquid bath, temperature control micro-chip, computingmachine, workpiece to be machined and the air pump that are installed on the single shaft machine are formed.To the different size and shape of workpiece to be machined, select corresponding air bag, be installed on the rubbing head, start air pump to required pressure, air bag is contacted well with workpiece.In the corrosion liquid bath, pour the corrosive fluid that is complementary with the workpiece to be machined material into.At the internal surface of the air bag annular nichrome wire that distributes, outside surface is arranged special shape polishing skin; In the gasbag-type rubbing head, introduce nichrome wire and realize required temperature field, realize that once the integral material of small-bore non-spherical reflector is removed; Simultaneously, mechanical polishing is gasbag-type, and instrument and workpiece face type can finely be fitted, and adopts bar shaped polishing skin, can obtain the even removal of workpiece surface material.
Calculate on the basis in the temperature field, nichrome wire is heated and maintenance, guarantee to generate stable endless belt temperature field, this partial function is mainly accomplished through the temperature control micro-chip.Industrial computer provides the operation interface towards the processor, can be conveniently to calculating and the real-time follow-up and the control in temperature field.
Workpiece places the corrosion liquid bath, installs and fixes, and workpiece rotates with the single shaft machine with the corrosion liquid bath.The gasbag-type rubbing head is installed on the single shaft machine rocker.In the corrosion liquid bath, pour the corrosive fluid that is complementary with workpiece to be machined into.Should note pouring the corrosive fluid capacity into,, should guarantee to corrode liquid bath intermediary corrosion fluid power and cover workpiece to be machined because in the single shaft machine main shaft rotation process, corrosive fluid can be assembled to periphery under centrifugal action.Start air pump to certain pressure, make air bag contact well starter motor 1-2 with workpiece.According to the face type error of workpiece, calculate temperature field required in the set time and distribute, through the temperature control micro-chip nichrome wire is carried out temperature and apply.So after temperature equilibrium for some time, emit corrosive fluid (but filtration cycle use), clean and take off workpiece, can carry out the face type and detect.
According to the temperature analysis result, at air bag internal surface 4 the annular electro heated filaments (according to error condition, can be more many) that distribute, stick special shape polishing skin at the outside surface of air bag, the mechanical assistance of realization corrosion surface is level and smooth.
This embodiment applies the temperature field through nichrome wire on the air bag polishing head, can realize the efficient corrosion processing of small-bore optical element.Adopt the mechanical assistance of gasbag-type to make polishing disk and workpiece to be machined better fit, can be used for processing the aspheric surface of symmetric form.
Embodiment 3:
As shown in Figure 3: based on the grinding and buffing method of radiation temperature field accelerated corrosion
Wherein: 1 temperature field generates equipment, 2 units, 3 computingmachines, 4 transparent grinding tools, 5 workpieces to be machined, 6 corrosive fluid reservoirs, 7 closed environments.
With reference to Fig. 3, load carrier all is immersed in the corrosive fluid reservoir processed element, also is provided with transparent grinding tool on the load carrier, and polished die is a transparent material, and is suitable with the workpiece to be machined size; The temperature field generates equipment and is connected with member; Load carrier and corrosive fluid reservoir all are fixedly set on the turning axle.Implement definite temperature distribution radiation through temperature field generation equipment; Through the equilibrium temperature field that 7 realizations of control closed environment need, workpiece will be realized the material removal of different endless belt in corrosive fluid; Transparent grinding tool and workpiece spindle relatively rotate and slightly swing and realize surface smoothing, thereby obtain high-quality type surface.
Workpiece to be machined places the corrosive fluid reservoir, installs and fixes, and workpiece to be machined and corrosive fluid reservoir rotate with single shaft machine main shaft, and transparent grinding tool tool places on the workpiece to be machined, owing to require grinding tool can see through radius, requiring grinding tool is transparent material.In the corrosive fluid reservoir, pour the corrosive fluid that is complementary with workpiece to be machined into.
Should note pouring the corrosive fluid capacity into,, should guarantee that groove intermediary corrosion fluid power covers workpiece to be machined under centrifugal action because in the single shaft machine main shaft rotation process, corrosive fluid can be assembled to periphery.According to the face type error of workpiece, calculate temperature field required in the set time and distribute, apply through temperature field generation equipment, guarantee to generate the equilibrium temperature field that needs.So after for some time, pour out corrosive fluid (but filtration cycle use), clean and take off workpiece, can carry out the face type and detect.
This embodiment realizes needed temperature field through radiation (microwave or projection), therefore can carry out the corrosion polishing of optical elements of large caliber.Use traditional polishing disk extruding to realize the level and smooth of corrosion surface.
Claims (5)
1. the method for manufacturing optical element based on hot accelerated corrosion is characterized in that, may further comprise the steps:
1] target shape of definite processing;
2] confirm the amount that workpiece to be machined surface each point need be removed based on target shape of confirming and workpiece to be machined shape;
3] according to the amount of confirming in the step 2 that workpiece to be machined surface each point needs are removed, temperature and the corrosive fluid of setting each point corrosive fluid on the workpiece to be machined need residence time;
4] corrosive fluid through being complementary with workpiece to be machined needs residence time carry out corrosion processing to workpiece to be machined according to the temperature and the corrosive fluid of each point corrosive fluid on the workpiece to be machined of setting in the step 3, corrodes the machining shape of confirming to the step 1.
2. the method for manufacturing optical element based on hot accelerated corrosion according to claim 1 is characterized in that: during said step 4 is carried out, simultaneously the mechanical assistance polishing is carried out on the workpiece to be machined surface, realized the smooth of corrosion surface; Said polishing is to adopt traditional polishing disk polishing or gasbag-type mechanical polishing.
3. the method for manufacturing optical element based on hot accelerated corrosion according to claim 2; It is characterized in that: corrosion processing specifically is to set up the temperature field according to the temperature of each point corrosive fluid to process in the said step 4; Guarantee to generate the equilibrium temperature field that needs; Workpiece to be machined is immersed in the corrosive fluid of temperature field accomplishes, nichrome wire, microwave type or projection formula are adopted in the temperature field.
4. the method for manufacturing optical element based on hot accelerated corrosion according to claim 2; It is characterized in that: corrosion processing specifically is to adopt the constant temperature corrosive fluid in the said step 4, through the adjustment corrosive fluid etching time of workpiece to be machined surface difference is accomplished corrosion processing.
5. according to the method for manufacturing optical element of the arbitrary described hot accelerated corrosion of claim 1 to 4, it is characterized in that: in the said step 4, corrosion processing is in closed environment, to carry out.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106826463A (en) * | 2016-07-25 | 2017-06-13 | 中国科学院长春光学精密机械与物理研究所 | A kind of complex-curved processing method |
Citations (2)
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| CN101088705A (en) * | 2007-02-14 | 2007-12-19 | 长春设备工艺研究所 | Efficient numerically controlled polishing process and apparatus for great aperture aspherical optical elements |
| CN101540363A (en) * | 2009-04-28 | 2009-09-23 | 上海大晨半导体技术有限公司 | Method for coarsening surface of quaternary system AlGaInP LED chip |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101088705A (en) * | 2007-02-14 | 2007-12-19 | 长春设备工艺研究所 | Efficient numerically controlled polishing process and apparatus for great aperture aspherical optical elements |
| CN101540363A (en) * | 2009-04-28 | 2009-09-23 | 上海大晨半导体技术有限公司 | Method for coarsening surface of quaternary system AlGaInP LED chip |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106826463A (en) * | 2016-07-25 | 2017-06-13 | 中国科学院长春光学精密机械与物理研究所 | A kind of complex-curved processing method |
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Application publication date: 20121219 |