CN106817833B - Double-rotor high-frequency induction plasma generator - Google Patents
Double-rotor high-frequency induction plasma generator Download PDFInfo
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- CN106817833B CN106817833B CN201710104231.0A CN201710104231A CN106817833B CN 106817833 B CN106817833 B CN 106817833B CN 201710104231 A CN201710104231 A CN 201710104231A CN 106817833 B CN106817833 B CN 106817833B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/28—Cooling arrangements
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
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Abstract
The double-rotor high-frequency induction plasma generator comprises an inner ring cyclone, an inner ring and outer ring rotor connecting piece, an outer ring cyclone, a fixed cover, an outer quartz tube fastening ring and an inner quartz tube which are coaxially arranged; the inner ring cyclone and the outer ring cyclone are hollow, the outer ring surface is of a rotary groove structure, and the rotary direction of the outer ring cyclone groove is consistent with that of the inner ring cyclone; the inner ring cyclone rotor and the outer ring cyclone rotor are fixedly connected through an inner ring and outer ring rotor connecting piece; the inner quartz tube is sleeved on the outer ring surface of the rotary groove of the inner ring cyclone and limited with the outer ring cyclone through steps; the outer quartz tube is sleeved on the outer ring surface of the rotating groove of the outer ring cyclone and is fastened through the outer quartz tube fastening ring; the outer ring cyclone is fixed on the upper part of the fixed cover, the lower part of the fixed cover is fixedly connected with the upper part of the radiation shielding bin, and the outer quartz tube and the inner quartz tube are partially arranged in the radiation shielding bin; the lower part of the radiation shielding bin is connected with the generator and the nozzle connecting piece; the water-cooled inductance coil is wound on the periphery of the quartz tube inside and outside the radiation shielding bin, and the tail end of the coil is connected with a high-frequency power supply.
Description
Technical Field
The invention relates to the technical field of high-temperature plasmas, in particular to a double-rotor megawatt-level high-frequency induction plasma generator.
Background
High frequency induction thermal plasma is also called as rf induction coupled plasma due to its high frequency. The principle of high-frequency plasma generation is as follows: the high-frequency current provided by the high-frequency power supply is coupled with plasma in the discharge tube through a variable magnetic field generated by a coil of the reactor, so that gas is ionized, and an induced alternating electric field generated by an alternating magnetic field in the coil induces current in conductive gas and generates joule heat.
The high-frequency plasma has the following characteristics: (1) the high-frequency plasma is mainly generated by strong electromagnetic coupling without an electrode, so that the problem of evaporation pollution of the electrode does not exist, and the generated plasma atmosphere is pure; (2) due to the action of joule heat effect, the plasma flow can reach extremely high temperature of 3000-10000K; (3) the high-frequency plasma has larger volume, low flame flow speed and uniform and flat temperature distribution. Therefore, the high-frequency plasma is particularly suitable for processing refractory particles (such as spheroidization, solid-gas reaction, ultrafine powder preparation and the like) and ground heating experimental research on a thermal protection material of a deep space probe with higher requirement on thermal environment atmosphere.
The typical high-frequency plasma generator mainly comprises a quartz tube, a high-frequency coil and a gas channel, wherein the quartz tube is used as the wall of an induction discharge chamber, the water-cooled high-frequency inductive coil is wound outside the quartz tube, and working gas is introduced into the generator from the upper part. However, the conventional plasma generator has a relatively simple structure, and due to the reasons that the gas inlet position, the gas inlet mode, the matching of the working gas quantity and the power supply parameters, the cooling of the quartz tube is poor, and the plasma generator is difficult to maintain under the high-power condition, the maximum power of the plasma generator is about 500kW, and the development and the application of a high-frequency plasma, namely a pure high-temperature heating technology, are limited to a certain extent.
Disclosure of Invention
The invention provides a double-rotor megawatt-level high-frequency induction plasma generator which adopts a high-frequency plasma generator adopting a double-rotor rotary air inlet mode.
The invention further solves the technical problem of providing a high-frequency plasma generator in megawatt level.
The technical solution of the invention is as follows: the double-rotor high-frequency induction plasma generator comprises an inner ring cyclone, an inner ring and outer ring rotor connecting piece, an outer ring cyclone, a fixed cover, an outer quartz tube fastening ring, an inner quartz tube, a water-cooling inductance coil, a generator and nozzle connecting piece and a radiation shielding bin;
the inner ring cyclone, the inner ring and outer ring cyclone connecting piece, the outer ring cyclone, the fixed cover, the outer quartz tube fastening ring and the inner quartz tube are coaxially arranged; the inner ring cyclone and the outer ring cyclone are hollow, the outer ring surface is of a rotary groove structure, and the rotary direction of the outer ring cyclone groove is consistent with that of the inner ring cyclone;
the inner ring cyclone rotor and the outer ring cyclone rotor are fixedly connected through an inner ring and outer ring rotor connecting piece; the inner quartz tube is sleeved on the outer ring surface of the rotary groove of the inner ring cyclone and limited with the outer ring cyclone through steps; the outer quartz tube is sleeved on the outer ring surface of the rotating groove of the outer ring cyclone and is fastened through the outer quartz tube fastening ring; the outer ring cyclone is fixed on the upper part of the fixed cover, the lower part of the fixed cover is fixedly connected with the upper part of the radiation shielding bin, and the outer quartz tube and the inner quartz tube are partially arranged in the radiation shielding bin; the lower part of the radiation shielding bin is connected with the generator and the nozzle connecting piece; the water-cooled inductance coil is wound on the periphery of the quartz tube inside and outside the radiation shielding bin, and the tail end of the coil is connected with a high-frequency power supply.
The plasma generator also comprises a pressure monitoring hole which is arranged on the upper part of the inner ring cyclone and is used for monitoring the pressure in the plasma generator.
The connecting piece of the inner ring and the outer ring rotor also comprises a thin-wall structure for protecting the inner quartz tube, the thin-wall structure is directly sleeved on the outer ring surface of the rotating groove of the inner ring rotor, and a gap is reserved between the thin-wall structure and the inner wall of the inner quartz tube.
The fixed cover also comprises a thin-wall structure for protecting the outer quartz tube, the thin-wall structure is directly sleeved on the outer ring surface of the rotary groove of the outer ring cyclone, and a gap is reserved between the thin-wall structure and the inner wall of the outer quartz tube.
The wall thickness of the thin-wall structure is 1-2 mm.
The number of the inner ring cyclone rotary grooves is 30-60, and the rotation angle α is set to be 15-45 degrees.
The number of the outer ring cyclone rotary grooves is 30-60, and the rotation angle β is set to be 15-60 degrees.
The ratio of the gas quantity passing through the inner ring of the cyclone to the gas quantity passing through the outer ring of the cyclone is set as follows: 1/10-5/10.
When the voltage provided by the high-frequency power supply is more than 10kV, the total amount of gas passing through the inner ring cyclone and the outer ring cyclone is kept more than 20g/s, and the rotating angle of the rotating groove of the outer ring cyclone is adjusted within the range of 45-60 degrees, so that the plasma generator can reach megawatt level and stably operate.
Compared with the prior art, the invention has the advantages that:
1. the inner ring rotor and the outer ring rotor adopt a rotary groove structure to enable gas to rotate, the structure is easy to process and small in resistance, and the rotary strength of the gas passing through the rotary groove can be guaranteed.
2. The inner ring and the outer ring are adopted, the working gas enters the plasma generator in a layered rotating mode, on one hand, the working gas required by the generator for generating high-frequency plasma is met, on the other hand, the working gas entering the outer ring is used as cooling gas to fully cool the outer quartz tube, and the safety and the reliability of the outer quartz tube when the generator runs at high power are guaranteed.
3. The strength of the quartz tube is lower than that of the outer quartz tube and the inner quartz tube, if the quartz tube is easily broken by directly matching with the turner, the fixed cover and the connecting piece of the inner ring and the outer ring turner are respectively provided with a layer of thin-wall structure, the thin wall is matched with the outer ring surface of the rotary groove of the turner and keeps a gap with the inner wall of the quartz tube, the metal turner is prevented from being directly matched with the fragile quartz tube, and the quartz tube is protected.
4. By designing the number and the angle of the rotating grooves of the inner ring cyclone and the outer ring cyclone, the proportion of the inner ring gas to the outer ring gas, the matching of the working gas quantity and the power supply parameter and other parameters, the safe and stable work of the high-frequency plasma generator under different working gases and different power conditions can be realized.
5. On the basis of the structure of the invention, the maximum power of the high-frequency plasma generator can reach 1MW and run safely and stably by adjusting parameters such as the working gas quantity, the output voltage of the high-frequency power supply, the angle of the rotating groove of the outer ring rotor and the like, thereby improving the research and application level of the high-frequency plasma technology.
Drawings
FIG. 1 is a schematic view of the apparatus of the present invention;
FIG. 2 is a side view of the apparatus of the present invention;
FIG. 3 is a schematic view A-A of FIG. 1;
FIG. 4 is a schematic view of B-B of FIG. 2;
FIG. 5 is a schematic view of an inner ring cyclone;
FIG. 6 is an outer ring cyclone schematic;
reference numbers in the figures: 1-inner ring cyclone; 2-inner ring and outer ring rotor connecting piece; 3-outer ring cyclone; 4-fixing the cover; 5-outer quartz tube fastening ring; 6-outer quartz tube; 7-inner quartz tube; 8-water-cooling inductance coils; 9-generator and nozzle connection; 10-a radiation shielded bin; 11-pressure monitoring hole;
Detailed Description
The working principle of the invention is as follows: the water-cooled inductance coil is wound on the periphery of the outer quartz tube, the tail end of the coil is connected with a high-frequency power supply, when alternating high-frequency current passes through the inductance coil, a changing magnetic field is generated in the outer quartz tube, the Faraday law shows that the changing magnetic field in the quartz tube induces an electric field, gas entering the generator is ionized under the action of the changing magnetic field to generate Joule heat, and the current and the gas flow are properly controlled to form stable and continuous high-temperature plasma gas flow. Working gas enters the plasma generator in an inner layer and an outer layer in a rotating mode, inner ring working gas enters the generator in a rotating mode along the inner wall of the inner quartz tube through the inner ring cyclone, and high-temperature plasma is generated through ionization in the electromagnetic induction area; the outer ring working gas enters the generator through the outer ring cyclone along the inner wall of the outer quartz tube in a rotating mode, on one hand, the working gas is ionized through the electromagnetic induction area to generate high-temperature plasma, on the other hand, cold airflow tightly attached to the wall surface of the outer quartz tube cools the outer quartz tube, and the outer quartz tube is prevented from being burnt by the high-temperature plasma airflow when the generator runs at high power.
The invention is described in further detail below with reference to the accompanying drawings.
As shown in figures 1-3, the double-rotor megawatt high-frequency induction plasma generator comprises an inner ring cyclone 1, an inner ring and outer ring cyclone connecting piece 2, an outer ring cyclone 3, a fixed cover 4, an outer quartz tube 6, an outer quartz tube fastening ring 5, an inner quartz tube 7, a water-cooling induction coil 8, a generator and nozzle connecting piece 9, a radiation shielding bin 10 and a pressure monitoring hole 11, wherein the inner ring cyclone 1, the inner ring and outer ring cyclone connecting piece 2, the outer ring cyclone 3, the fixed cover 4, the outer quartz tube 6, the outer quartz tube fastening ring 5 and the inner quartz tube 7 are coaxially arranged, part of working gas enters the generator through the inner ring cyclone 1 and rotates along the inner wall of the inner quartz tube 7 to generate high-temperature plasma through ionization of the working gas through an electromagnetic induction zone, the rotation angle of the inner ring cyclone 1 is α, the other part of working gas enters the generator through the outer ring cyclone 3 and rotates along the inner wall of the outer quartz tube 6 to generate high-temperature plasma through the electromagnetic induction zone, the outer ring cyclone current generates high-temperature plasma closely to prevent the outer ring cyclone current from generating when the outer ring cyclone current and the quartz tube rotates along the outer ring cyclone tube, the outer ring generates high-temperature plasma, the high-temperature induction coil, the high-frequency induction coil generates high-frequency induction coil, the high-frequency induction coil generates high-frequency induction plasma, the high-frequency induction plasma generates the high-frequency induction plasma.
As shown in fig. 4, cooling water channels are respectively arranged on the inner ring cyclone, the inner ring cyclone and outer ring cyclone connecting piece, the outer ring cyclone and the fixed cover, and are communicated with each other, and the inlet and the outlet of the cooling water are respectively integrated on the inner ring cyclone, and the above components are cooled by circulating cooling water.
As shown in FIG. 5, the number of the rotating grooves of the inner ring rotor 1 is 30 to 60, and the rotating angle α is set to be 15 to 45 °.
As shown in FIG. 6, the number of the grooves of the outer ring rotor 3 is 30 to 60, and the rotation angle β is set to be 15 to 60 °.
The ratio of the amount of gas passing through the inner ring rotor 1 to the amount of gas passing through the outer ring rotor 3 is set as: 1/10-5/10.
In the above-mentioned double-rotor megawatt-level high-frequency induction plasma generator, the maximum power of the generator is 1 MW.
The present invention is not disclosed in the technical field of the common general knowledge of the technicians in this field.
Claims (4)
1. The double-rotor high-frequency induction plasma generator is characterized by comprising an inner ring cyclone rotor (1), an inner ring and outer ring rotor connecting piece (2), an outer ring cyclone rotor (3), a fixing cover (4), an outer quartz tube (6), an outer quartz tube fastening ring (5), an inner quartz tube (7), a water-cooling induction coil (8), a generator and nozzle connecting piece (9) and a radiation shielding bin (10), wherein the inner ring cyclone rotor (1), the inner ring and outer ring rotor connecting piece (2), the outer ring cyclone rotor (3), the fixing cover (4), the outer quartz tube (6), the outer quartz tube fastening ring (5) and the inner quartz tube (7) are coaxially arranged, the inner ring cyclone rotor (1) and the outer ring rotor connecting piece (2) are hollow, the outer ring surface is of a rotating slot structure, the rotating direction of the outer ring cyclone rotor (3) is consistent with the rotating direction of the inner ring cyclone rotor, the inner ring cyclone rotor (3) and the outer ring cyclone rotor connecting piece (3) are arranged in the rotating direction, the inner ring cyclone rotor connecting piece (3) and the outer ring cyclone rotor connecting piece (3) is arranged between the inner ring cyclone rotor connecting piece (3) and the outer ring rotating slot, the outer ring shielding bin, the inner ring rotating slot (3) is arranged between the inner ring and the outer ring rotating slot, the inner ring rotating gas shielding bin (3) and the outer ring shielding bin, the outer ring rotating slot (3) is arranged in a rotating slot, the inner ring rotating slot, the outer ring rotating slot, the inner ring rotating slot is arranged between the inner ring rotating slot, the outer ring cyclone tube (3) rotating slot, the inner ring rotating slot, the rotating slot is arranged between the rotating slot, the rotating slot is arranged between the inner ring rotating slot, the rotating slot is arranged between the inner ring rotating slot, the rotating slot is arranged between the rotating slot, the rotating slot is arranged between the rotating slot, the rotating slot is arranged between the rotating slot, the rotating.
2. The plasma generator of claim 1, wherein: the plasma generator further comprises a pressure monitoring hole (11) which is arranged on the upper portion of the inner ring cyclone (1) and used for monitoring the pressure in the plasma generator.
3. The plasma generator of claim 1, wherein: the fixed cover (4) also comprises a thin-wall structure for protecting the outer quartz tube (6), the thin-wall structure is directly sleeved on the outer ring surface of the rotary groove of the outer ring cyclone (3), and a gap is reserved between the thin-wall structure and the inner wall of the outer quartz tube (6).
4. The plasma generator of claim 3, wherein: the wall thickness of the thin-wall structure is 1-2 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710104231.0A CN106817833B (en) | 2017-02-24 | 2017-02-24 | Double-rotor high-frequency induction plasma generator |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710104231.0A CN106817833B (en) | 2017-02-24 | 2017-02-24 | Double-rotor high-frequency induction plasma generator |
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| Publication Number | Publication Date |
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| CN106817833A CN106817833A (en) | 2017-06-09 |
| CN106817833B true CN106817833B (en) | 2020-04-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710104231.0A Active CN106817833B (en) | 2017-02-24 | 2017-02-24 | Double-rotor high-frequency induction plasma generator |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110402008B (en) * | 2019-08-26 | 2024-02-06 | 贵州正业龙腾新材料开发有限公司 | Cooling gas distribution device suitable for high-frequency plasma torch |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05242995A (en) * | 1991-08-30 | 1993-09-21 | Jeol Ltd | Plasma ignition method for induction plasma generator |
| US5285046A (en) * | 1990-07-03 | 1994-02-08 | Plasma-Technik Ag | Apparatus for depositing particulate or powder-like material on the surface of a substrate |
| JP2001118697A (en) * | 1999-10-18 | 2001-04-27 | Tadahiro Sakuta | Induction plasma generating apparatus |
| JP2003311146A (en) * | 2002-04-23 | 2003-11-05 | Jeol Ltd | High-frequency induction thermal plasma device |
| CN101296550A (en) * | 2007-04-25 | 2008-10-29 | 烟台龙源电力技术股份有限公司 | Guiding air ring for plasma generator |
| CN104470185A (en) * | 2014-12-11 | 2015-03-25 | 中国航天空气动力技术研究院 | 100-KW high-frequency induction generator |
-
2017
- 2017-02-24 CN CN201710104231.0A patent/CN106817833B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5285046A (en) * | 1990-07-03 | 1994-02-08 | Plasma-Technik Ag | Apparatus for depositing particulate or powder-like material on the surface of a substrate |
| JPH05242995A (en) * | 1991-08-30 | 1993-09-21 | Jeol Ltd | Plasma ignition method for induction plasma generator |
| JP2001118697A (en) * | 1999-10-18 | 2001-04-27 | Tadahiro Sakuta | Induction plasma generating apparatus |
| JP2003311146A (en) * | 2002-04-23 | 2003-11-05 | Jeol Ltd | High-frequency induction thermal plasma device |
| CN101296550A (en) * | 2007-04-25 | 2008-10-29 | 烟台龙源电力技术股份有限公司 | Guiding air ring for plasma generator |
| CN104470185A (en) * | 2014-12-11 | 2015-03-25 | 中国航天空气动力技术研究院 | 100-KW high-frequency induction generator |
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| CN106817833A (en) | 2017-06-09 |
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