CN106814545B - Air pressure measuring apparatus and method, focusing leveling device and photoetching machine equipment - Google Patents
Air pressure measuring apparatus and method, focusing leveling device and photoetching machine equipment Download PDFInfo
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- CN106814545B CN106814545B CN201510856576.2A CN201510856576A CN106814545B CN 106814545 B CN106814545 B CN 106814545B CN 201510856576 A CN201510856576 A CN 201510856576A CN 106814545 B CN106814545 B CN 106814545B
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- pipeline
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70641—Focus
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
- G03F9/7026—Focusing
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7049—Technique, e.g. interferometric
- G03F9/7053—Non-optical, e.g. mechanical, capacitive, using an electron beam, acoustic or thermal waves
- G03F9/7057—Gas flow, e.g. for focusing, leveling or gap setting
Abstract
The present invention provides a kind of air pressure measuring apparatus, barometric surveying method, focusing leveling device and photoetching machine equipments.Air pressure measuring apparatus includes the reference pipeline for being connected to feeder and multiple measurement pipelines；It positioned at the reference pipeline gas nozzle with reference to pipeline one end, is set to above a reference planes with reference to pipeline gas nozzle, for spraying gas to reference planes；Branch positioned at each measurement pipeline one end measures pipeline gas nozzle, and multiple branches measure pipeline gas nozzle and are arranged side by side above same measurement plane, for spraying gas to measurement plane；It is connected to reference to pipeline and multiple barometers measured between pipeline；It is connected to multiple suction lines of getter device and branch's suction line gas nozzle positioned at each suction line one end, multiple branch's suction line gas nozzles are arranged side by side above measurement plane, and, one branch measures is arranged at least two branch's suction line gas nozzles around pipeline gas nozzle, for siphoning away the gas measured around pipeline, the precision of position measurement is improved.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, more particularly to a kind of air pressure measuring apparatus, is adjusted barometric surveying method
Burnt levelling device and photoetching machine equipment.
Background technology
In litho machine, silicon chip focusing, leveling is used to measure height and corner of the silicon chip surface relative to projection objective, with
The vertical position of real-time control silicon chip ensures that silicon chip is in the focal depth range of projection objective always in exposure process, therefore,
The precision that focusing and leveling measures directly affects the exposure quality of litho machine.
Traditional focusing and leveling mostly uses the principle of photodetection, measures the deviation position of silicon chip plane and system coordinates,
Its detailed process be lighting source is imaged onto by projection slit in silicon chip plane, and through silicon chip plane reflection enter detection it is narrow
Seam, then, by conversion of photoelectric sensor obtain silicon chip plane system coordinates Z-direction deviation post.However, since silicon chip applies
The factors such as inhomogeneities, environment temperature, pressure, the humidity of layer can cause air refraction to change, and therefore, influence light
The positional accuracy measurement of electrical resistivity survey technology.
To solve the above problems, United States Patent (USP) US2005268698A1, US2006123888A1, US5540082A,
US2009000354A1 and Japan Patent JP2006189429A, W02013063104A1 are proposed using barometric surveying object
Location method.
Fig. 1~2 are a kind of typical air pressure measuring apparatus, wherein Fig. 1 is the structural representation of the air pressure measuring apparatus
Figure, Fig. 2 are the partial enlarged view of air pressure measuring apparatus shown in Fig. 1.
Refering to fig. 1 and Fig. 2, the air pressure measuring apparatus include feeder 101, center culvert 102, gas flow controller
103, porous buffer 104, with reference to pipeline 105, with reference to pipeline current limiter 106, with reference to pipeline measurement point 107, with reference to pipeline gas
Mouth 108 measures pipeline 109, measures pipeline current limiter 110, measurement pipe road measurement point 111, measures pipeline gas nozzle 112 and barometer
113.Wherein, described to be connect with feeder 101 by center culvert 102 with reference to pipeline 105 and measurement pipeline 109, the gas
Stream controller 103 and porous buffer 104 may be contained in center culvert 102, described to be set to ginseng with reference to pipeline current limiter 106
It examines on pipeline 105, it is described to be set to reference to pipeline 105 adjacent to one end of a reference planes 114 with reference to pipeline gas nozzle 108, it is described
It measures pipeline current limiter 110 to be set on measurement pipeline 109, it is neighbouring that the measurement pipeline gas nozzle 112 is set to measurement pipeline 109
One measures one end of plane 115, and one end connection of the barometer 113 refers to pipeline measurement point 107, and the other end connects measurement pipe
Road measurement point 111.It is described to be provided with air gap h1, and the reference gas with reference between pipeline gas nozzle 108 and reference planes 114
Gap h1 is given value, is provided between the measurement pipeline gas nozzle 112 and measurement plane 115 and measures air gap h2, and the measurement
Air gap h2 is value to be measured.
In barometric surveying, the air pressure measuring apparatus with reference to pipeline 105 and measures pipeline by the perception of barometer 113
Air-flow between 109 is poor, to obtain with reference to pipeline 105 and measure the pressure difference between pipeline 109.The pressure difference is actually
What is represented is the difference measured between air gap h2 and air gap h1, and then the pressure difference after calculation processing by that can obtain
Measure the value of air gap h2.When the air pressure measuring apparatus is applied to litho machine, the position of silicon chip plane is improved to a certain extent
Measurement accuracy.
But with the development of science and technology, also higher and higher to the required precision of silicon chip plan-position measurement, it is above-mentioned to carry
The air pressure measuring apparatus of confession can generate silicon chip plane certain add due to measuring the gas near pipeline gas nozzle gas outlet
Power, and then the precision of position measurement is influenced, and in the case of multiple measurement pipeline dense distributions, two neighboring measurement pipe
Between the gas nozzle of road gas can also mutual crosstalk, and then the pressure of measurement point is had an impact, reduces the precision of position measurement.
Invention content
The purpose of the present invention is to provide a kind of air pressure measuring apparatus, barometric surveying method, focusing leveling device and light
Carve machine equipment, in the case of solving multiple measurement pipeline dense distributions, gas crosstalk shadow between two neighboring measurement pipeline gas nozzle
The measurement error problem rung and brought improves the precision that position measures.
In order to solve the above technical problems, the present invention provides a kind of air pressure measuring apparatus, including：
It is connected to the reference pipeline of feeder and multiple measurement pipelines；
It is described to be set in a reference planes with reference to pipeline gas nozzle positioned at the reference pipeline gas nozzle with reference to pipeline one end
Side, for spraying gas to the reference planes；
Pipeline gas nozzle is measured positioned at each branch for measuring pipeline one end, multiple branches measure pipeline gas nozzle simultaneously
Row is set to above same measurement plane, for spraying gas to the measurement plane；
It is connected to the barometer with reference to pipeline between multiple measurement pipelines；
It is connected to multiple suction lines of getter device and branch's suction line positioned at each described suction line one end
Gas nozzle, multiple branch's suction line gas nozzles are arranged side by side above the measurement plane, also, a branch measures
At least two branch's suction line gas nozzles are set around pipeline gas nozzle, for siphoning away the gas around the measurement pipeline.
Optionally, in the air pressure measuring apparatus, each measurement pipe road is respectively provided with that there are one measure pipeline
Current limiter and a measurement adjustable tracheae of pipeline.
Optionally, it in the air pressure measuring apparatus, is provided with reference to pipeline current limiter and ginseng on the reference pipeline
Examine the adjustable tracheae of pipeline.
Optionally, in the air pressure measuring apparatus, it is respectively provided with that there are one flowmeter, one in each suction line
A suction line current limiter, an air valve and the adjustable tracheae of at least one suction line.
Optionally, in the air pressure measuring apparatus, the adjustable tracheae of suction line includes horizontal direction suction line
Adjustable tracheae and vertically to the adjustable tracheae of suction line；The horizontal direction air-breathing there are one being respectively provided in each suction line
Pipeline is adjustable tracheae and one it is described vertically to the adjustable tracheae of suction line.
Optionally, in the air pressure measuring apparatus, the air entry of the getter device is connected with a suction line gas
Pressure meter, the suction line barometer are connect with each suction line respectively.
Optionally, in the air pressure measuring apparatus, the feeder is connected with feeder by center culvert
Current limiter and porous buffer, the porous buffer are separately connected described with reference to pipeline and each measurement pipeline.
Optionally, in the air pressure measuring apparatus, each both sides for measuring pipeline are arranged symmetrically, and there are two institutes
State suction line.
Optionally, it in the air pressure measuring apparatus, is annularly provided at least around each measurement pipeline
Two suction lines.
In addition, the present invention also provides a kind of barometric surveying method, filled using the barometric surveying described in any one as above
When setting progress barometric surveying, passes through and measure at least two branch's air intake ducts of setting around pipeline gas nozzle in each branch
Road gas nozzle siphons away the gas around branch's measurement pipeline gas nozzle.
In addition, the present invention also provides a kind of focusing leveling device, including silicon chip and air pressure measuring apparatus as described above.
Moreover invention further provides a kind of photoetching machine equipment including focusing leveling device as described above, and it is described
Photoetching machine equipment further includes projection objective, supporting rack, signal processor, host computer, motor and work stage；The barometric surveying dress
It sets and is fixed on support frame as described above, support frame as described above is set to the top of the work stage, and the silicon chip is set to described
In work stage, the draught head that the air pressure measuring apparatus measures by reaching the host computer after the signal processor processes,
According to treated, data obtain the location information of the silicon chip to the host computer, then control the motor and drive the work stage
Movement, so that the silicon chip is in the focal plane of the projection objective.
In conclusion air pressure measuring apparatus provided by the invention, barometric surveying method, focusing leveling device and litho machine
Equipment has the advantages that：
The first, in barometric surveying, air pressure measuring apparatus of the invention in a branch by measuring around pipeline gas nozzle
At least two branch's suction line gas nozzles are set, the gas around branch's measurement pipeline gas nozzle can be siphoned away in time, to
Gas crosstalk is to the interference effect of measurement point pressure, Jin Erti between adjacent Liang Ge branches measurement pipeline gas nozzle is reduced or eliminated
The positional accuracy measurement of plane is measured when high Multi-path air pressure measures；
The second, air pressure measuring apparatus of the invention at the air entry of getter device also by being arranged a suction line gas
Pressure meter, can balance the inspiratory capacity of each suction line, generate fluctuation to avoid air-flow in each suction line, it is ensured that each to inhale
The stability of air-flow further increases positional accuracy measurement to improve the stability of local measurement environment in air pipe.
Description of the drawings
Fig. 1 is the structural schematic diagram of typical air pressure measuring apparatus；
Fig. 2 is the partial enlarged view of air pressure measuring apparatus shown in Fig. 1；
Fig. 3 is the structural schematic diagram of the air pressure measuring apparatus of the embodiment of the present invention one；
Fig. 4 is that the branch of the embodiment of the present invention one measures the two-dimensional simulation model schematic of pipeline gas nozzle；
Fig. 5 is the static pressure cloud atlas for the fluid emulation analysis result that branch shown in Fig. 4 measures pipeline gas nozzle；
Fig. 6 is the overall architecture schematic diagram of the photoetching machine equipment of the embodiment of the present invention two；
Fig. 7 is the circuit block diagram of the signal processor of the embodiment of the present invention two.
Specific implementation mode
In air pressure measuring apparatus provided by the invention, barometric surveying method, focusing leveling device and photoetching machine equipment, institute
Stating air pressure measuring apparatus includes：It is connected to the reference pipeline of feeder and multiple measurement pipelines；Pipeline one is referred to positioned at described
The reference pipeline gas nozzle at end, it is described to be set to above a reference planes with reference to pipeline gas nozzle, for being sprayed to the reference planes
Gas；Pipeline gas nozzle is measured positioned at each branch for measuring pipeline one end, multiple branches measure pipeline gas nozzle side by side
It is set to above same measurement plane, for spraying gas to the measurement plane；It is connected to described with reference to pipeline and multiple institutes
State the barometer measured between pipeline；It is connected to multiple suction lines of getter device and positioned at each described suction line one end
Branch's suction line gas nozzle, multiple branch's suction line gas nozzles are arranged side by side above the measurement plane, also, one
A branch, which measures, is arranged at least two branch's suction line gas nozzles around pipeline gas nozzle, for siphoning away the measurement pipe
Gas around road.
When carrying out barometric surveying, air pressure measuring apparatus of the invention is set by being measured in a branch around pipeline gas nozzle
At least two branch's suction line gas nozzles are set, the gas around branch's measurement pipeline gas nozzle can be siphoned away in time, to subtract
It is small or eliminate the interference effect that adjacent Liang Ge branches measure gas crosstalk between pipeline gas nozzle to measurement point pressure, and then improve
The precision that position measures when Multi-path air pressure measures.
Below in conjunction with 3~7 pairs of attached drawing air pressure measuring apparatus proposed by the present invention, barometric surveying method, focusing leveling device
And photoetching machine equipment is described in further detail.It should be noted that attached drawing is all made of very simplified form and uses non-
Accurately ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
【Embodiment one】
Fig. 3 is the structural schematic diagram of the air pressure measuring apparatus of the embodiment of the present invention one.As shown in figure 3, the present embodiment provides
Air pressure measuring apparatus include nine measurement pipelines, for simultaneously to one measure plane carry out position measurement.But the present embodiment
Nine provided measure pipeline and are merely illustrative, can not be in this, as limitation of the present invention.In addition, actual application
In, two or more can be selected to measure pipeline, specifically, the present invention and being not construed as limiting.
With continued reference to Fig. 3, the air pressure measuring apparatus of the present embodiment includes feeder 201, center culvert 202, gas supply dress
Set current limiter 203, porous buffer 204, binding site 205, with reference to pipeline 302, with reference to pipeline gas nozzle 303, with reference to pipeline current limliting
Device 304 measures 402~410, nine points of pipelines with reference to the adjustable tracheae 305 of pipeline, reference point 306, overall measurement pipeline 401, nine
Branch measures 411~419, nine measurement points 420~428 of pipeline gas nozzle, measures pipeline current limiter group 429, measures pipeline horizontal direction
430, nine barometric surveying pipelines 501~509 of adjustable tracheae group, barometer group 510, getter device 601, total air-breathing pipeline 602,
Ten suction lines, 603~612, ten branch's suction line gas nozzles 613~622, suction line current limiter group 623, air valve group
624, suction line is vertically to adjustable tracheae group 625, suction line horizontal direction is adjustable tracheae group 626, suction line barometer 627
With flowmeter group 628.
The feeder 201 can improve the gas of certain pressure to the air pressure measuring apparatus, pass through central tube
Road 202 is sequentially connected feeder current limiter 203 and porous buffer 204.The feeder current limiter 203 can be used for controlling
The gas that feeder 201 exports is the gas of constant flow rate, and can also export laminar flow and incompressible gas, to subtract
Few aerodynamic noise.The porous buffer 204 can reduce to be influenced by the gas turbulence that feeder 201 exports.In addition, from supplying
The gas that device current limiter 203 is discharged reaches binding site 205 after porous buffer 204 by center culvert 202.Into one
Step, the center culvert 202 terminates at binding site 205 and is divided into reference to pipeline 302 and overall measurement pipeline 401.
The proximal end connection with reference to pipeline 302 refers to pipeline gas nozzle 303.It is described to be set to one with reference to pipeline gas nozzle 303
The top of a reference planes 301, and can be used for spraying gas to reference planes 301.Optionally, the reference planes 301 are one
Metal plate, but it is not limited to the metal plate, as long as reference planes 301 are a high-precision plane body, to provide
Measure reference.It is described to be set to reference on pipeline 302 with reference to pipeline current limiter 304, refer to gas in pipeline 302 for controlling
Flow velocity improves to stablize air pressure and measures stability.Optionally, it is also set up with reference to the adjustable tracheae of pipeline on the reference pipeline 302
305, the distance for controlling adjustment with reference to the proximal end distance reference plane 301 of pipeline 302, such as adjust described with reference to pipeline
The horizontal direction of 302 proximal end distance reference plane 301 and vertically to distance.
Likewise, each measuring the distal end connection overall measurement pipeline 401 of pipeline, each proximal end for measuring pipeline connects one
Branch measures pipeline gas nozzle, such as the proximal end for measuring pipeline 402 connects a branch and measures pipeline gas nozzle 411, the survey
The proximal end on buret road 403 connects a branch and measures pipeline gas nozzle 412, and so on, the proximal end connection for measuring pipeline 410
One branch measures pipeline gas nozzle 419.Nine branches measure pipeline gas nozzle 411~419 and are arranged side by side in the same measurement
The top of plane 431, and can be used for the injection gas of plane 431 is measured, to be carried out to the position for measuring multiple points in plane 431
It measures.In litho machine application, the measurement plane 431 is usually a silicon chip.
The measurement pipeline current limiter group 429 includes nine and measures pipeline current limiter (not indicated in figure), each measurement pipe
Road measures pipeline current limiter there are one being respectively provided with.The measurement pipeline current limiter can be used for controlling in corresponding measurement pipeline
The flow velocity of gas improves to stablize air pressure and measures stability.
The adjustable tracheae group 430 of measurement pipeline horizontal direction includes nine and measures the adjustable tracheae of pipeline horizontal direction (in figure not
Mark).Optionally, each measurement pipe road is respectively provided with that there are one measure the adjustable tracheae of pipeline horizontal direction.The measurement pipeline water
It puts down to adjustable tracheae and can be used for adjusting the corresponding horizontal direction distance for measuring pipeline, to adjust the water between each measurement pipeline
Flat distance.More optional, each measurement pipe road can also be arranged a measurement pipeline and (not scheme to adjustable tracheae vertically
Show).The pipeline that measures vertically can be used for adjusting the corresponding proximal end range measurement plane 431 for measuring pipeline to adjustable tracheae
It is vertical to distance.
With continued reference to Fig. 3, the air pressure measuring apparatus of the present embodiment further includes nine barometric surveying pipelines 501~509, each
One end connection of barometric surveying pipeline refers to the reference point 306 of same position on pipeline 302, each barometric surveying pipeline
The other end connects the measurement point of a measurement pipe road, specifically, the other end of the barometric surveying pipeline 501 connects measurement pipe
The other end connection of measurement point 420 on road 410, the barometric surveying pipeline 502 measures the measurement point 421 on pipeline 409, institute
State barometric surveying pipeline 503 the other end connection measure pipeline 408 on measurement point 422, the barometric surveying pipeline 504 it is another
One end connection measures the measurement point 423 on pipeline 407, and the other end connection of the barometric surveying pipeline 505 measures on pipeline 406
Measurement point 424, the barometric surveying pipeline 506 the other end connection measure pipeline 405 on measurement point 425, the air pressure
The measurement point 426 on the other end connection measurement pipeline 404 of pipeline 507 is measured, the other end of the barometric surveying pipeline 508 connects
The measurement point 427 measured on pipeline 403 is connect, the other end connection of the barometric surveying pipeline 509 measures the measurement on pipeline 402
Point 428.
The barometer group 510 includes nine barometers (not indicating), be respectively provided on each barometric surveying pipeline there are one
Barometer.Preferably, each barometer is set to the centre position of corresponding barometric surveying pipeline.Each barometer can be used for
Perception is by the air-flow with reference to caused by pressure difference between pipeline 302 and corresponding measurement pipeline.The pressure difference is actually because surveying
It measures plane 431 and branch measures the measurement gap between pipeline gas nozzle and reference planes 301 and with reference between pipeline gas nozzle 303
Caused by air gap difference.
The air pressure measuring apparatus that above-described embodiment provides is in application, described be positioned at a fixation with reference to pipeline gas nozzle 303
Reference planes 301 top, and the air gap h3 with reference between pipeline gas nozzle 303 and reference planes 301 is one
A datum.The order of magnitude of the air gap h3 is usually micron order.Meanwhile each branch measures pipeline gas nozzle and is positioned at survey
The top of plane 431 is measured, and the measurement air gap that each branch measures pipeline gas nozzle and measures between plane 431 is one unknown
Number, that is, actually measure value is needed, the order of magnitude for measuring air gap also mutually should be micron order.Specifically, such as Fig. 3
Shown, the branch measures pipeline gas nozzle 411 and measures the measurement air gap 432 between plane 431, and the branch measures pipeline gas
Measurement air gap 433 between mouth 412 and measurement plane 431, the branch measure between pipeline gas nozzle 413 and measurement plane 431
Measurement air gap 434, successively sequence indicate, here, no longer in detail narration.It is understood that all measurement air gaps may
It is identical or differ, specifically, they change with the change in location measured on 431 surface of plane.The known reference gas
Gap h3 is set to a constant target constant, this target constant is an optimal air gap value.In this way, when referring to pipeline
When the pressure fed back at 302 and the unequal pressure fed back at a measurement pipeline, corresponding barometer can perceive two
The pressure difference of person.Caused by the pressure difference is the changes in flow rate by gas, in the case of air gap h3 is known, institute
It is actually a function about measurement air gap to state flow, and the function is typically unique.Thus, above-mentioned pressure difference is also
One function about measurement air gap, and be unique, obtain measurement plane 431 and branch's measurement so as to pass through pressure difference
Practical measurement air gap between pipeline gas nozzle, and then obtain measuring the vertical position of plane 431.
In the present embodiment, the distal end connection total air-breathing pipeline 602 of each suction line, the proximal end connection of each suction line
One branch's suction line gas nozzle, such as the proximal end of the suction line 603 connect branch's suction line gas nozzle 613, institute
The proximal end for stating suction line 604 connects branch's suction line gas nozzle 614, and the proximal end of the suction line 605 connects one
Branch's suction line gas nozzle 615, is analogized by label sequence successively, specifically, the present embodiment no longer describes in detail, can accordingly refering to
Fig. 3.
Described ten branch's suction line gas nozzles 613~622 are arranged side by side in the same top for measuring plane 431, and
In order to which influence of the gas to measurement point pressure between two neighboring branch's measurement pipeline gas nozzle is reduced or eliminated, the application is each
Branch, which measures, is provided at least two branch's suction line gas nozzles around pipeline gas nozzle, pipeline gas is measured for siphoning away respective branches
Gas around mouth, and then improve the precision that position measures.
As shown in figure 3, the present embodiment branch measure be provided with around pipeline gas nozzle 411 branch's suction line gas nozzle 613,
614, it is measured in branch and is provided with branch's suction line gas nozzle 614,615 around pipeline gas nozzle 412, pipeline gas nozzle is measured in branch
It is provided with branch's suction line gas nozzle 615,616 around 413, is measured in branch and is provided with branch's air-breathing around pipeline gas nozzle 414
Pipeline gas nozzle 616,617 measures in branch and is provided with branch's suction line gas nozzle 617,618 around pipeline gas nozzle 415, in branch
It measures and is provided with branch's suction line gas nozzle 618,619 around pipeline gas nozzle 416, measure in branch and set around pipeline gas nozzle 417
It is equipped with branch's suction line gas nozzle 619,620, is measured in branch and is provided with branch's suction line gas nozzle around pipeline gas nozzle 418
620,621, it is measured in branch and is provided with branch's suction line gas nozzle 621,622 around pipeline gas nozzle 419.
Preferably, the both sides for each measuring pipeline are symmetrical arranged there are two suction line, specifically, the measurement pipeline
402 both sides are symmetrically arranged with suction line 603,604, and the both sides for measuring pipeline 403 are symmetrically arranged with suction line
604,605, the both sides for measuring pipeline 404 are symmetrically arranged with suction line 605,606, the both sides for measuring pipeline 405
It is symmetrically arranged with suction line 606,607, the both sides for measuring pipeline 406 are symmetrically arranged with suction line 607,608, described
The both sides for measuring pipeline 407 are symmetrically arranged with suction line 608,609, and the both sides for measuring pipeline 408 are symmetrically arranged with suction
Air pipe 609,610, the both sides for measuring pipeline 409 are symmetrically arranged with suction line 610,611, the measurement pipeline 410
Both sides be symmetrically arranged with suction line 611,612.Using symmetrically arranged mode, it is conducive to balanced each branch's suction line gas
The inspiratory capacity of mouth, it is ensured that the uniformity of measuring environment.
In other embodiment, at least two suction lines can be also annularly arranged around pipeline in each measure, specifically,
The present invention not and is construed as limiting, as long as each suction line and each branch's suction line gas nozzle can uniformly measure branch
The perturbed force of air-flow is reduced or eliminated near pipeline gas nozzle, and does not generate additional perturbed force.
The getter device 601 of the present embodiment connects each suction line by total air-breathing pipeline 602, is used for each air-breathing
Pipeline provides air-breathing power source.Optionally, the getter device 601 can be moved by cylinder piston and provide air-breathing power source,
Specifically, the present invention and being not construed as limiting.
The suction line current limiter group 623 includes ten suction line current limiters, is both provided in each suction line
One suction line current limiter.The suction line current limiter can be used for controlling the flow velocity of gas in corresponding suction line, with true
It is steady to protect flow velocity, maintains the stability of measuring environment.The air valve group 624 includes ten air valves (not indicated in figure), each to inhale
Air valve there are one being respectively provided on air pipe.The air valve is used to control the break-make of corresponding suction line.The suction line is vertical
(do not indicated in figure) to adjustable tracheae vertically including ten to adjustable tracheae group 625, be respectively provided in each suction line there are one
Vertically to adjustable tracheae.The adjustable tracheae group 626 of suction line horizontal direction (is not marked including ten adjustable tracheaes of horizontal direction in figure
Show), it is respectively provided with that there are one the adjustable tracheaes of horizontal direction in each suction line.Each vertically it can be used for adjustment and its to adjustable tracheae
The vertical distance of corresponding suction line, each adjustable tracheae of suction line horizontal direction can be used for adjusting corresponding suction line
Horizontal direction distance.
Optionally, the suction line barometer 627 is set at the air entry of getter device 601, the suction line
Barometer 627 is connect with each suction line respectively.The flowmeter group 628 includes ten flowmeters (not indicated in figure), and
And a flowmeter is provided in each suction line, it is each to be set according to the pressure values of suction line barometer 627
The inspiratory capacity of suction line, to improve the stability of local measurement environment, the precision that further raised position measures.
In the present embodiment, in order to not influence original positional accuracy measurement, the lower face of each branch's suction line gas nozzle is excellent
Choosing is concordant with the respective branches measurement upper surface of pipeline gas nozzle, still, in actual application, each branch's suction line gas
The lower face of mouth measures the height of the lower face of pipeline gas nozzle apart from respective branches, can be adjusted accordingly according to actual conditions,
As long as each branch suction line gas nozzle does not influence original positional accuracy measurement in air-breathing.
Optionally, above-mentioned air pressure measuring apparatus further includes a controller (not shown), and the controller connects getter device
601 and suction line barometer 627, and set each suction line according to the pressure values for being set to suction line barometer 627
Inspiratory capacity, specifically, first closing getter device 601 and reading the pressure values of suction line barometer 627；Then start to supply
And read the pressure values of suction line barometer 627 at this time；Then it opens getter device 601 and reads suction line barometer
Pressure values after 627 pressure values and unlatching getter device 601 at this time, it is comprehensive that each suction is calculated according to above-mentioned pressure values
The inspiratory capacity of air pipe.Herein, the inspiratory capacity of each suction line can pass through the flowmeter and pressure in each suction line
Between relationship obtain, however, due to flowmeter difference, the relationship between the gas flow and pressure of flowmeter also can be different,
Therefore, the relationship between the gas flow and pressure of flowmeter is determined by specifically used flowmeter.
Using the suction line barometer 627 being set at 601 air entry of getter device, it is convenient for each air-breathing of overall balance
The inspiratory capacity size of pipeline 603-612, and then the inspiratory capacity of reasonable set getter device 601 improve the steady of local measurement environment
It is qualitative.
More optional, the controller is also connected with nine and measures that the adjustable tracheae of pipelines, ten suction line horizontal directions are adjustable
Tracheae and ten suction lines are vertically to adjustable tracheae, and when barometric surveying, the controller can be according to measuring 431 position of plane
The desired value of measurement and the error condition of experiment value, adjust the adjustable tracheae of each measurement pipeline, each suction line horizontal direction can
Regulating the qi flowing in the channels pipe and each suction line are vertically to adjustable tracheae, to make each measurement pipeline and each suction line be in rational
Horizontal position and/or vertical position, and make 431 position of measurement plane measure desired value and experiment value error in range.
In addition, in the case of multiple measurement pipeline dense distributions, pipeline gas nozzle is measured in order to analyze two neighboring branch
Between influence of the gas crosstalk to measurement point pressure, applicant is being not turned on getter device 601, is surveyed to above-mentioned air pressure
Amount device has carried out the analysis of finite element modelling fluid emulation.Specifically, please referring to Fig. 4 and Fig. 5, Fig. 4 is that branch measures pipeline gas
The two-dimensional simulation model schematic of mouth, Fig. 5 are the static pressure for the simulation analysis result that branch shown in Fig. 4 measures pipeline gas nozzle
Cloud atlas, longitudinal series of values is the corresponding static pressure force value of cloud atlas in Fig. 5.
When fluid emulation is analyzed, applicant uses ANSYS softwares and has carried out limited flow filament to branch's measurement pipeline gas nozzle
Body analogue simulation is analyzed, wherein the model parameter setting that the branch measures pipeline gas nozzle is as follows：
Endotracheal air velocity V:5m/s；Branch measures pipeline gas nozzle internal diameter d:0.5mm；Branch measure pipeline gas nozzle with
Measure the measurement air gap h between plane 401:100um；Branch measures pipeline gas nozzle length L:1mm；Adjacent measurement pipeline spacing：
2mm。
Boundary condition is set as：Tracheal strips pressure P1；Environmental stress P0；Branch measures pipeline gas nozzle, and nearby pressure P2 (can
To be assumed to be the local environment pressure of measurement).
Normally, the measurement air gap h between branch's measurement pipeline gas nozzle and measurement plane is fixed, above-mentioned
Relationship between the pressure pressure difference Δ P measured and tracheal strips pressure P1 is fixed, and specific relationship is as follows：
Δ P=f (P1) (1)
Δ P '=P1-P2=f (h) (2)
In formula (1), pressure difference Δ P is a function about tracheal strips pressure P1, when tracheal strips pressure P1 is to fix
When value, the pressure difference Δ P is also fixed.The pressure difference Δ P is pressure difference ideally, steady to ensure to measure
Fixed, the branch measures pipeline gas nozzle, and nearby pressure P2 cannot have fluctuation.
In formula (2), the pressure difference Δ P ' is one and measures pipeline gas nozzle about branch and measure the survey between plane
The function for measuring air gap h, for the pressure difference in the case of practical measure, if branch measures pipeline gas nozzle, nearby pressure P2 has change
Change, tracheal strips pressure P1 and branch will be led to measure pipeline gas nozzle and measure the relationship measured between air gap h between plane to produce
Changing, meanwhile, the pressure difference Δ P ' and branch measure pipeline gas nozzle and measure the pass measured between air gap h between plane
System is also corresponding to generate variation.
As shown in figure 5, the branch measures pipeline gas nozzle, nearby pressure P2 is implicitly present in variation, therefore, two neighboring point
It is strictly existing that branch, which measures the gas crosstalk between pipeline gas nozzle,.Thus, it is multiple that dense distribution around pipeline is measured when one
When measuring pipeline, the gas disturbing influence that the branch measures near pipeline gas nozzle be can not ignore.
In addition, the present invention provides a kind of barometric surveying method carrying out barometric surveying using above-mentioned air pressure measuring apparatus,
Specifically, at least two suction line gas are arranged around pipeline gas nozzle by being measured in each branch in the barometric surveying method
Mouth can siphon away the gas around respective branches measurement pipeline gas nozzle.Since the barometric surveying method uses above-mentioned implementation
The air pressure measuring apparatus of example, so, the barometric surveying method is please referred to above-mentioned by the advantageous effect that air pressure measuring apparatus is brought
Embodiment.
In addition, the present invention provides a kind of focusing leveling devices comprising the air pressure described in silicon chip and embodiment as above is surveyed
Measure device.Since the focusing leveling device uses the air pressure measuring apparatus of above-described embodiment, so, similarly, the tune
Burnt levelling device by rotor banding Lai advantageous effect please refer to above-described embodiment.
【Embodiment two】
A kind of photoetching machine equipment is present embodiments provided, specifically as shown in fig. 6, the photoetching machine equipment includes embodiment one
The focusing leveling device, the focusing leveling device include the air pressure measuring apparatus described in a silicon chip 701 and embodiment one
702, the air pressure measuring apparatus 702 can be used for carrying out vertical position measurement to silicon chip 701, with the perpendicular of real-time control silicon chip 701
To position, it is ensured that the quality of photoetching process.
In the present embodiment, the photoetching machine equipment further include projection objective 703, supporting rack 704, signal processor 705, on
Position machine 706, motor 707 and work stage 708.In application, the air pressure measuring apparatus 702 is fixed on supporting rack 704, together
When, support frame as described above 704 is set to the top of work stage 708, and the silicon chip 701 is fixedly installed in work stage 708, with this
Meanwhile the draught head that measures of the air pressure measuring apparatus 702 handled by signal processor 705 after reach host computer 706, it is described
According to treated, data obtain the location information of silicon chip 701 to host computer 706, then control motor 707 and work stage 708 is driven to transport
It is dynamic, so that silicon chip 701 is in the focal plane of projection objective 703.
Similarly, the advantageous effect that the photoetching machine equipment is brought by focusing leveling device, corresponding reference implementation example one.
Refering to Fig. 3 and Fig. 6, the course of work of the photoetching machine equipment is as follows：The air pressure measuring apparatus 702 passes through air pressure
Meter group 510 obtains the pressure difference of silicon chip 701, and the pressure difference is transmitted to signal processor 705 in turn and is processed and converted to position
Signal is exported to host computer 706, and the host computer 706 drives work stage 708 to transport according to position signal control motor 707
Dynamic, so that silicon chip 702 is in the focal plane of projection objective 703, and the projection objective 703 further carries out silicon chip 702
Photoetching process processing.
In addition, in order to preferably implement the application, the realization of the air pressure measuring apparatus of the photoetching machine equipment of the present embodiment
Journey includes：
Step S1：Power supply is opened, adjustment refers to the adjustable tracheae 305 of pipeline, measures the adjustable tracheae group 430 of pipeline, air intake duct
Tracheae group 626 that road horizontal direction is adjustable and suction line make vertically to adjustable tracheae group 625 with reference to pipeline 302, each measurement pipeline
402~410 and each suction line 603~612 in suitable position；The suitable position is in not impact position measurement accuracy
Under the premise of obtained by theoretical calculation and practical debugging；
Step S2：Feeder 201 is opened, adjustment feeder current limiter 203 makes gas enter ginseng with certain flow velocity
Examine pipeline 302 and each measurement pipeline 402~410；
Step S3：Open 601 gentle valve group 624 of getter device, adjustment suction line current limiter group 623, not influence
The gas near each branch's measurement pipeline gas nozzle 411~419 is siphoned away in the case of measurement accuracy；
Step S4：Each barometrical pressure difference in barometer group 510 is read, and after stable gas pressure after a period of time,
The pressure difference is converted into position signal using 705 calculation processing of signal processor and exports to host computer 706, can be surveyed
Measure the position height of multiple measurement points in plane 431.
Then, Fig. 7 is the circuit block diagram of the signal processor of the embodiment of the present invention two.As shown in fig. 7, the signal processing
Device 705 is filtered circuit 7051, analog to digital conversion circuit 7052 and arithmetic processor 7053 including sequentially connected, as a result, institute
Stating each barometrical pressure difference Δ P in barometer group 510, the filtering of filtered processing circuit 7051, analog-to-digital conversion are electric successively
The A/D on road 7052 is converted with output after the calculation process of arithmetic processor 7053 as position signal, and can be further transmitted supreme
Position machine 706, in this way, the vertical position of plane 401 can be obtained measuring.
In conclusion in barometric surveying, air pressure measuring apparatus of the invention in a branch by measuring pipeline gas nozzle
At least two branch's suction line gas nozzles are arranged in surrounding, can siphon away the gas around branch's measurement pipeline gas nozzle in time,
To which the interference effect that adjacent Liang Ge branches measure gas crosstalk between pipeline gas nozzle to measurement point pressure be reduced or eliminated, into
And improve the positional accuracy measurement that plane is measured when Multi-path air pressure measures.
In addition, the air pressure measuring apparatus of the present invention at getter device air entry also by being arranged a suction line air pressure
Meter, can balance the inspiratory capacity of each suction line, generate fluctuation to avoid air-flow in each suction line, it is ensured that each air-breathing
The stability of air-flow further increases positional accuracy measurement to improve the stability of local measurement environment in pipeline.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair
Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims
Range.
Claims (12)
1. a kind of air pressure measuring apparatus, which is characterized in that including：
It is connected to the reference pipeline of feeder and multiple measurement pipelines；
It is described to be set to above a reference planes with reference to pipeline gas nozzle positioned at the reference pipeline gas nozzle with reference to pipeline one end,
For spraying gas to the reference planes；
Pipeline gas nozzle is measured positioned at each branch for measuring pipeline one end, multiple branches measure pipeline gas nozzle and set side by side
It is placed in above same measurement plane, for spraying gas to the measurement plane；
It is connected to the barometer with reference to pipeline between multiple measurement pipelines；
It is connected to multiple suction lines of getter device and branch's suction line gas nozzle positioned at each described suction line one end,
Multiple branch's suction line gas nozzles are arranged side by side above the measurement plane, also, a branch measures pipeline
At least two branch's suction line gas nozzles are set around gas nozzle, for siphoning away the gas around the measurement pipeline.
2. air pressure measuring apparatus as described in claim 1, which is characterized in that there are one each measurement pipe road is respectively provided with
Measure pipeline current limiter and a measurement adjustable tracheae of pipeline.
3. air pressure measuring apparatus as described in claim 1, which is characterized in that be provided on the reference pipeline and limited with reference to pipeline
It flows device and refers to the adjustable tracheae of pipeline.
4. air pressure measuring apparatus as described in claim 1, which is characterized in that there are one being respectively provided in each suction line
Flowmeter, a suction line current limiter, an air valve and the adjustable tracheae of at least one suction line.
5. air pressure measuring apparatus as claimed in claim 4, which is characterized in that the adjustable tracheae of suction line includes horizontal direction
Suction line is adjustable tracheae and vertically to the adjustable tracheae of suction line；The water there are one being respectively provided in each suction line
It puts down described vertically to the adjustable tracheae of suction line to the adjustable tracheae of suction line and one.
6. air pressure measuring apparatus as described in claim 1, which is characterized in that the air entry of the getter device is connected with a suction
Air pipe barometer, the suction line barometer are connect with each suction line respectively.
7. air pressure measuring apparatus as described in claim 1, which is characterized in that the feeder is connected successively by center culvert
It is connected to feeder current limiter and porous buffer, the porous buffer is separately connected described with reference to pipeline and each survey
Buret road.
8. air pressure measuring apparatus as described in claim 1, which is characterized in that each both sides for measuring pipeline are symmetrical arranged
There are two the suction lines.
9. air pressure measuring apparatus as described in claim 1, which is characterized in that annularly set around each measurement pipeline
It is equipped at least two suction lines.
10. a kind of barometric surveying method, which is characterized in that use barometric surveying as in one of claimed in any of claims 1 to 9
When device carries out barometric surveying, at least two branch's air-breathings are set by being measured in each branch around pipeline gas nozzle
Pipeline gas nozzle siphons away the gas around branch's measurement pipeline gas nozzle.
11. a kind of focusing leveling device, which is characterized in that including silicon chip and gas as in one of claimed in any of claims 1 to 9
Pressure measuring device.
12. a kind of photoetching machine equipment including focusing leveling device as claimed in claim 11, which is characterized in that further include throwing
Shadow object lens, supporting rack, signal processor, host computer, motor and work stage；The air pressure measuring apparatus is fixed at the branch
On support, support frame as described above is set to the top of the work stage, and the silicon chip is set in the work stage, and the air pressure is surveyed
The draught head that amount device measures is by reaching the host computer after the signal processor processes, after the host computer is according to processing
Data obtain the location information of the silicon chip, then control the motor and drive the work stage movement, so that at the silicon chip
In in the focal plane of the projection objective.
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| CN201510856576.2A CN106814545B (en) | 2015-11-30 | 2015-11-30 | Air pressure measuring apparatus and method, focusing leveling device and photoetching machine equipment |
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| US10871325B2 (en) | 2018-11-15 | 2020-12-22 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Vaccum drying apparatus |
| CN109445251B (en) * | 2018-11-15 | 2020-06-30 | 武汉华星光电半导体显示技术有限公司 | Decompression drying equipment |
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| CN2777524Y (en) * | 2004-12-14 | 2006-05-03 | 中国石化集团天津石油化工公司 | Measurer for pressure drop in adsorption chamber |
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| EP0421645A2 (en) * | 1989-10-04 | 1991-04-10 | Holtronic Technologies Limited | Apparatus for and method of optical inspection in a total internal reflection holographic imaging system |
| CN2777524Y (en) * | 2004-12-14 | 2006-05-03 | 中国石化集团天津石油化工公司 | Measurer for pressure drop in adsorption chamber |
| CN103904013A (en) * | 2012-12-28 | 2014-07-02 | 上海微电子装备有限公司 | Vacuum absorption device and absorption calibrating method |
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