CN106814545A - Air pressure measuring apparatus and method, focusing leveling device and photoetching machine equipment - Google Patents
Air pressure measuring apparatus and method, focusing leveling device and photoetching machine equipment Download PDFInfo
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- CN106814545A CN106814545A CN201510856576.2A CN201510856576A CN106814545A CN 106814545 A CN106814545 A CN 106814545A CN 201510856576 A CN201510856576 A CN 201510856576A CN 106814545 A CN106814545 A CN 106814545A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70641—Focus
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
- G03F9/7026—Focusing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7049—Technique, e.g. interferometric
- G03F9/7053—Non-optical, e.g. mechanical, capacitive, using an electron beam, acoustic or thermal waves
- G03F9/7057—Gas flow, e.g. for focusing, leveling or gap setting
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
Abstract
The invention provides a kind of air pressure measuring apparatus, barometric surveying method, focusing leveling device and photoetching machine equipment.Air pressure measuring apparatus include being connected to the reference pipeline of feeder and multiple measurement pipelines；Positioned at the reference pipeline valve with reference to pipeline one end, reference planes top is arranged at reference to pipeline valve, for reference planes gas injection；Branch positioned at each measurement pipeline one end measures pipeline valve, and multiple branch's measurement pipeline valves are arranged side by side in same measurement plane top, for measurement plane gas injection；It is connected to reference to the barometer between pipeline and multiple measurement pipelines；It is connected to multiple suction lines and the branch's suction line valve positioned at each suction line one end of getter device, multiple branch's suction line valves are arranged side by side in measurement plane top, and, at least two branch's suction line valves are set around one branch's measurement pipeline valve, for siphoning away the gas around measurement pipeline, the precision of position measurement is improve.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, more particularly to a kind of air pressure measuring apparatus, barometric surveying
Method, focusing leveling device and photoetching machine equipment.
Background technology
In litho machine, silicon chip focusing, leveling is used to measure silicon chip surface relative to the height of projection objective and turns
Angle, with the vertical position of real-time control silicon chip, it is ensured that silicon chip is in projection objective all the time in exposure process
In focal depth range, therefore, the precision of focusing and leveling measurement directly affects the exposure quality of litho machine.
Using the principle of photodetection more than traditional focusing and leveling, the deviation of measurement silicon chip plane and system coordinates
Position, its detailed process is that lighting source is imaged onto in silicon chip plane by projection slit, and flat through silicon chip
Face is reflected into detecting slit, then, silicon chip plane is obtained in system coordinates Z by conversion of photoelectric sensor
To deviation post.However, inhomogeneities, environment temperature, pressure, humidity due to silicon chip coating etc. because
Element can cause air refraction to change, therefore, have influence on the positional accuracy measurement of detecting technique.
To solve the above problems, United States Patent (USP) US2005268698A1, US2006123888A1,
US5540082A, US2009000354A1 and Japan Patent JP2006189429A, W02013063104A1
Propose using barometric surveying object space method.
Fig. 1~2 are a kind of typical air pressure measuring apparatus, wherein, Fig. 1 is the knot of the air pressure measuring apparatus
Structure schematic diagram, Fig. 2 is the partial enlarged drawing of air pressure measuring apparatus shown in Fig. 1.
Refering to Fig. 1 and Fig. 2, the air pressure measuring apparatus include feeder 101, center culvert 102, gas
Stream controller 103, porous buffer 104, with reference to pipeline 105, with reference to pipeline current limiter 106, with reference to pipe
Road measurement point 107, with reference to pipeline valve 108, measurement pipeline 109, measurement pipeline current limiter 110, measurement
Pipeline measurement point 111, measurement pipeline valve 112 and barometer 113.Wherein, the He of reference pipeline 105
Measurement pipeline 109 is connected by center culvert 102 with feeder 101, the He of the gas flow controller 103
Porous buffer 104 may be contained within center culvert 102, and the reference pipeline current limiter 106 is arranged at ginseng
Examine on pipeline 105, the reference pipeline valve 108 is arranged at reference to pipeline 105 adjacent to a reference planes 114
One end, the measurement pipeline current limiter 110 be arranged at measurement pipeline 109 on, it is described measurement pipeline valve
112 are arranged at measurement pipeline 109 adjacent to one end of a measurement plane 115, and one end of the barometer 113 connects
Connect with reference to pipeline measurement point 107, other end connection measurement pipe road measurement point 111.The reference pipeline valve 108
Air gap h1 is provided between reference planes 114, and the air gap h1 is given value, the survey
Measurement air gap h2 is provided between buret road valve 112 and measurement plane 115, and the measurement air gap h2 is
Value to be measured.
In barometric surveying, the air pressure measuring apparatus are perceived with reference to pipeline 105 and surveyed by barometer 113
Air-flow between buret road 109 is poor, so as to obtain with reference to the pressure between pipeline 105 and measurement pipeline 109
Difference.What the pressure difference was actually represented is to measure the difference between air gap h2 and air gap h1, and then
The pressure difference just can obtain measuring the value of air gap h2 after calculating is processed.The air pressure measuring apparatus application
When litho machine, the positional accuracy measurement of silicon chip plane is improve to a certain extent.
But, with the development of science and technology, to the required precision also more and more higher of silicon chip plan-position measurement,
The air pressure measuring apparatus of above-mentioned offer, because the gas near measurement pipeline valve gas outlet can be to silicon chip plane
Certain additional force is produced, and then has influence on the precision of position measurement, and intensive point of pipeline is measured in multiple
In the case of cloth, between two neighboring measurement pipeline valve gas can also mutually crosstalk, and then to measurement point
Pressure produces influence, reduces the precision of position measurement.
The content of the invention
It is an object of the invention to provide a kind of air pressure measuring apparatus, barometric surveying method, focusing leveling device
And photoetching machine equipment, with the case of solving multiple measurement pipeline dense distributions, two neighboring measurement pipeline gas
Gas cross talk effects between mouth and the measurement error problem brought, improve the precision of position measurement.
In order to solve the above technical problems, the invention provides a kind of air pressure measuring apparatus, including：
It is connected to the reference pipeline and multiple measurement pipelines of feeder；
Positioned at the reference pipeline valve of described reference pipeline one end, the reference pipeline valve is arranged at a reference
Plane top, for the reference planes gas injection；
Pipeline valve, multiple branch's measurement pipelines are measured positioned at the branch that pipeline one end is measured each described
Valve is arranged side by side in same measurement plane top, for the measurement plane gas injection；
It is connected to the barometer between the reference pipeline and multiple measurement pipelines；
It is connected to multiple suction lines and the branch's air-breathing positioned at suction line one end each described of getter device
Pipeline valve, multiple branch's suction line valves are arranged side by side in measurement plane top, also,
Branch's suction line valve described at least two is set around one branch's measurement pipeline valve, for inhaling
Walk the gas around the measurement pipeline.
Optionally, in described air pressure measuring apparatus, a survey is provided with each described measurement pipeline
Buret road current limiter and a measurement adjustable tracheae of pipeline.
Optionally, in described air pressure measuring apparatus, it is provided with the reference pipeline with reference to pipeline current limliting
Device and the reference adjustable tracheae of pipeline.
Optionally, in described air pressure measuring apparatus, a stream is provided with each described suction line
Gauge, suction line current limiter, an air valve and the adjustable tracheae of at least one suction line.
Optionally, in described air pressure measuring apparatus, the adjustable tracheae of suction line includes level to suction
Air pipe is adjustable tracheae and vertical to the adjustable tracheae of suction line；One is provided with each described suction line
The individual level is described vertical to the adjustable tracheae of suction line to the adjustable tracheae of suction line and one.
Optionally, in described air pressure measuring apparatus, the air entry of the getter device is connected with an air-breathing
Pipeline barometer, the suction line barometer is connected with suction line each described respectively.
Optionally, in described air pressure measuring apparatus, the feeder is connected with confession by center culvert
Device of air current limiter and porous buffer, the porous buffer connect the reference pipeline and each institute respectively
State measurement pipeline.
Optionally, in described air pressure measuring apparatus, the both sides of each measurement pipeline are symmetrically arranged with
Two suction lines.
Optionally, in described air pressure measuring apparatus, annularly set around each described measurement pipeline
There is suction line described at least two.
Additionally, present invention also offers a kind of barometric surveying method, using the air pressure described in as above any one
When measurement apparatus carry out barometric surveying, set at least two around pipeline valve by being measured in each described branch
Individual branch's suction line valve, siphons away the gas around branch's measurement pipeline valve.
In addition, being surveyed present invention also offers a kind of focusing leveling device, including silicon chip and air pressure as described above
Amount device.
Moreover, invention further provides a kind of photoetching machine equipment including focusing leveling device as described above,
And the photoetching machine equipment also includes projection objective, support frame, signal processor, host computer, motor and work
Part platform；The air pressure measuring apparatus are fixedly installed on support frame as described above, and support frame as described above is arranged at the work
The top of part platform, the silicon chip is arranged in the work stage, the draught head that the air pressure measuring apparatus are measured
By reaching the host computer after the signal processor processes, the host computer is obtained according to the data after treatment
To the positional information of the silicon chip, then the motor is controlled to drive the work stage to move, so that the silicon chip
In focal plane in the projection objective.
In sum, the present invention provide air pressure measuring apparatus, barometric surveying method, focusing leveling device with
And photoetching machine equipment, have the advantages that：
Firstth, in barometric surveying, air pressure measuring apparatus of the invention measure pipeline gas by a branch
At least two branch's suction line valves are set around mouth, branch's measurement pipeline valve can be in time siphoned away
Around gas, so as between adjacent Liang Ge branches measurement pipeline valve is reduced or eliminated gas crosstalk to surveying
The interference effect of amount point pressure, and then improve the positional accuracy measurement of measurement plane when Multi-path air pressure is measured；
Secondth, air pressure measuring apparatus of the invention at the air entry of getter device also by setting an air-breathing
Pipeline barometer, can balance the inspiratory capacity of each suction line, be produced with air-flow in avoiding each suction line
Raw fluctuation, it is ensured that the stability of air-flow in each suction line, so that the stability of local measurement environment is improved,
Further improve positional accuracy measurement.
Brief description of the drawings
Fig. 1 is the structural representation of typical air pressure measuring apparatus；
Fig. 2 is the partial enlarged drawing of air pressure measuring apparatus shown in Fig. 1；
Fig. 3 is the structural representation of the air pressure measuring apparatus of the embodiment of the present invention one；
Fig. 4 is the two-dimensional simulation model schematic of branch's measurement pipeline valve of the embodiment of the present invention one；
Fig. 5 is the static pressure cloud atlas of the fluid emulation analysis result of the branch's measurement pipeline valve shown in Fig. 4；
Fig. 6 is the overall architecture schematic diagram of the photoetching machine equipment of the embodiment of the present invention two；
Fig. 7 is the circuit block diagram of the signal processor of the embodiment of the present invention two.
Specific embodiment
Air pressure measuring apparatus, barometric surveying method, focusing leveling device and the litho machine that the present invention is provided set
In standby, the air pressure measuring apparatus include：It is connected to the reference pipeline and multiple measurement pipelines of feeder；
Positioned at the reference pipeline valve of described reference pipeline one end, the reference pipeline valve is arranged at a reference planes
Top, for the reference planes gas injection；Positioned at branch's measurement that pipeline one end is measured each described
Pipeline valve, multiple branches measurement pipeline valves are arranged side by side in same measurement plane top, for
The measurement plane gas injection；It is connected to the air pressure between the reference pipeline and multiple measurement pipelines
Meter；It is connected to multiple suction lines and the branch's air-breathing positioned at suction line one end each described of getter device
Pipeline valve, multiple branch's suction line valves are arranged side by side in measurement plane top, also,
Branch's suction line valve described at least two is set around one branch's measurement pipeline valve, for inhaling
Walk the gas around the measurement pipeline.
When barometric surveying is carried out, air pressure measuring apparatus of the invention measure pipeline valve by a branch
Surrounding sets at least two branch's suction line valves, can in time siphon away branch's measurement pipeline valve week
The gas for enclosing, so as between adjacent Liang Ge branches measurement pipeline valve is reduced or eliminated gas crosstalk to measurement
The interference effect of point pressure, and then improve the precision of position measurement when Multi-path air pressure is measured.
Adjusted below in conjunction with 3~7 pairs of air pressure measuring apparatus proposed by the present invention of accompanying drawing, barometric surveying method, focusing
Leveling device and photoetching machine equipment are described in further detail.It should be noted that, accompanying drawing is using very simplified
Form and use non-accurately ratio, be only used to conveniently, lucidly aid in illustrating the embodiment of the present invention
Purpose.
【Embodiment one】
Fig. 3 is the structural representation of the air pressure measuring apparatus of the embodiment of the present invention one.As shown in figure 3, this reality
Applying the air pressure measuring apparatus of example offer includes nine measurement pipelines, for carrying out position to a measurement plane simultaneously
Measurement.But, nine measurement pipelines that the present embodiment is provided are merely illustrative, can not be in this, as right
Limitation of the invention.Additionally, in actual application, two or more measurement pipelines, tool can be selected
Body, the present invention is simultaneously not construed as limiting.
With continued reference to Fig. 3, the air pressure measuring apparatus of the present embodiment include feeder 201, center culvert 202,
Feeder current limiter 203, porous buffer 204, binding site 205, with reference to pipeline 302, with reference to pipeline
Valve 303, with reference to pipeline current limiter 304, with reference to the adjustable tracheae 305 of pipeline, reference point 306, overall measurement
Measurement pipeline 411~419, nine measurements of valve of the measurement pipeline 402~410, nine of pipeline 401, nine branch
Point 420~428, measurement pipeline current limiter group 429, measurement pipeline level are to 430, nine gas of adjustable tracheae group
Pressure measurement pipeline 501~509, barometer group 510, getter device 601,602, ten suctions of total air-breathing pipeline
603~612, ten branch's suction line valves 613~622, suction line current limiter group 623, gas of air pipe
Valve group 624, suction line vertically to adjustable tracheae group 625, suction line level to adjustable tracheae group 626,
Suction line barometer 627 and flowmeter group 628.
The feeder 201 can improve the gas of certain pressure to the air pressure measuring apparatus, and it passes through
Center culvert 202 is sequentially connected feeder current limiter 203 and porous buffer 204.The feeder limit
Stream device 203 can be used to control the gas that the gas that feeder 201 is exported is constant flow rate, and also can be with
Output laminar flow and incompressible gas, to reduce aerodynamic noise.The porous buffer 204 can reduce by
The gas turbulence influence of the output of feeder 201.Additionally, the gas discharged from feeder current limiter 203
By binding site 205 can be reached by center culvert 202 after porous buffer 204.Further, in described
Heart pipeline 202 terminates at binding site 205 and is divided into reference to pipeline 302 and overall measurement pipeline 401.
The near-end connection of the reference pipeline 302 is with reference to pipeline valve 303.The reference pipeline valve 303 sets
A top for reference planes 301 is placed in, and be can be used for the gas injection of reference planes 301.Optionally,
The reference planes 301 are a metal plate, but are not limited to the metal plate, as long as reference planes 301
It is a high-precision plane body, to provide measurement reference.The reference pipeline current limiter 304 is arranged at
With reference on pipeline 302, for controlling the flow velocity with reference to gas in pipeline 302, to stablize air pressure, improve and survey
Amount stability.Optionally, also set up on the reference pipeline 302 with reference to the adjustable tracheae 305 of pipeline, for controlling
System adjustment for example adjusts the reference pipeline with reference to the distance of the near-end distance reference plane 301 of pipeline 302
The level of 302 near-end distance reference plane 301 to vertically to distance.
Likewise, the distal end of each measurement pipeline connects overall measurement pipeline 401, near-end of each measurement pipeline connects
Branch's measurement pipeline valve is connect, such as the near-end of described measurement pipeline 402 connects branch's measurement pipe
Road valve 411, the near-end of the measurement pipeline 403 connects a branch and measures pipeline valve 412, successively class
Push away, the near-end of the measurement pipeline 410 connects a branch and measures pipeline valve 419.Nine branches survey
Buret road valve 411~419 is arranged side by side in the top of same measurement plane 431, and can be used for measurement
The gas injection of plane 431, is measured with the position to multiple points in measurement plane 431.Should in litho machine
In, the measurement plane 431 is usually a silicon chip.
The measurement pipeline current limiter group 429 includes nine measurements pipeline current limiter (not indicated in figure), each
A measurement pipeline current limiter is provided with measurement pipeline.It is described measurement pipeline current limiter can be used for control with
The flow velocity of gas, to stablize air pressure, improves measurement stability in its correspondence measurement pipeline.
The measurement pipeline level includes nine measurement pipeline levels to adjustable tracheae (figure to adjustable tracheae group 430
In do not indicate).Optionally, a measurement pipeline level is provided with each measurement pipeline to adjustable tracheae.
The measurement pipeline level can be used to adjusting the level of corresponding measurement pipeline to distance to adjustable tracheae, with
Adjust the horizontal range between each measurement pipeline.It is more optional, can also be set on described each measurement pipeline
Put a measurement pipeline vertical to adjustable tracheae (not shown).The measurement pipeline is vertical available to adjustable tracheae
In the vertical to distance of the near-end range measurement plane 431 for adjusting corresponding measurement pipeline.
With continued reference to Fig. 3, the air pressure measuring apparatus of the present embodiment also include nine barometric surveying pipelines 501~509,
One end connection of each barometric surveying pipeline with reference to same position on pipeline 302 reference point 306, it is described each
The other end of barometric surveying pipeline connects the measurement point on a measurement pipeline, specifically, the barometric surveying
Measurement point 420 on the other end connection measurement pipeline 410 of pipeline 501, the barometric surveying pipeline 502
Measurement point 421 on other end connection measurement pipeline 409, the other end connection of the barometric surveying pipeline 503
Measurement point 422 on measurement pipeline 408, the other end connection measurement pipeline of the barometric surveying pipeline 504
Measurement point 423 on 407, the survey on the other end connection measurement pipeline 406 of the barometric surveying pipeline 505
Amount point 424, the measurement point 425 on the other end connection measurement pipeline 405 of the barometric surveying pipeline 506,
Measurement point 426 on the other end connection measurement pipeline 404 of the barometric surveying pipeline 507, the air pressure is surveyed
Measurement point 427 on the other end connection measurement pipeline 403 on buret road 508, the barometric surveying pipeline 509
The other end connection measurement pipeline 402 on measurement point 428.
The barometer group 510 includes nine barometers (sign), is respectively provided with each barometric surveying pipeline
There is a barometer.Preferably, each barometer is arranged at the centre position of corresponding barometric surveying pipeline.
Each barometer can be used to perceive the air-flow by causing with reference to pressure difference between pipeline 302 and correspondence measurement pipeline.
The pressure difference be actually because measurement plane 431 and branch measurement pipeline valve between measurement gap and
Reference planes 301 are different from reference to the air gap between pipeline valve 303 and cause.
During the air pressure measuring apparatus application that above-described embodiment is provided, the reference pipeline valve 303 is positioned at one
The top of the reference planes 301 of individual fixation, and the reference pipeline valve 303 and reference planes 301 it
Between air gap h3 be a datum.The order of magnitude of the air gap h3 is usually micron order.Together
When, each branch measurement pipeline valve is positioned at the top of measurement plane 431, and each branch's measurement pipe
Measurement air gap between road valve and measurement plane 431 is a unknown number, that is, needs actual measurement
One value, the order of magnitude of the measurement air gap also mutually should be micron order.Specifically, as shown in figure 3, described
Branch measures the measurement air gap 432 between pipeline valve 411 and measurement plane 431, and the branch measures pipeline
Measurement air gap 433 between valve 412 and measurement plane 431, branch's measurement pipeline valve 413 and survey
Measurement air gap 434 between amount plane 431, order is indicated successively, here, no longer narration in detail.Can manage
Solution, all of measurement air gap may be identical or differs, specifically, they are with the table of measurement plane 431
Change in location on face and change.The known air gap h3 is set to a constant target constant,
This target constant is an optimal air gap value.In this way, when with reference to the pressure and one fed back at pipeline 302
When the pressure fed back at individual measurement pipeline is unequal, corresponding barometer can perceive both pressure differences.
Caused by the pressure difference is the changes in flow rate by gas, when air gap h3 is in the case of known, institute
It is actually a function on measuring air gap to state flow, and the function is typically unique.Thus, on
It is also a function on measuring air gap to state pressure difference, and is unique, such that it is able to be obtained by pressure difference
The actual measurement air gap between measurement plane 431 and branch's measurement pipeline valve is taken, and then obtains measurement plane
431 vertical position.
In the present embodiment, the distal end of each suction line connection total air-breathing pipeline 602, each suction line it is near
One branch's suction line valve of end connection, such as near-end of described suction line 603 connects a branch and inhales
Air pipe valve 613, the near-end of the suction line 604 connects a branch suction line valve 614, institute
The near-end for stating suction line 605 connects a branch suction line valve 615, analogizes by label order successively,
Specifically, the present embodiment is no longer described in detail, Fig. 3 can be accordingly referred to.
Described ten branch suction line valves 613~622 are arranged side by side in the top of same measurement plane 431,
And in order to shadow of the gas to measurement point pressure between two neighboring branch measurement pipeline valve is reduced or eliminated
Ring, the application is provided with least two branch's suction line valves around each branch measurement pipeline valve,
For siphoning away the gas around respective branches measurement pipeline valve, and then improve the precision of position measurement.
As shown in figure 3, the present embodiment is measured in branch be provided with branch's suction line around pipeline valve 411
Valve 613,614, be provided with around branch measurement pipeline valve 412 branch suction line valve 614,
615, branch suction line valve 615,616 is provided with around branch measurement pipeline valve 413, in branch
Branch suction line valve 616,617 is provided with around measurement pipeline valve 414, pipeline gas is measured in branch
Branch suction line valve 617,618 is provided with around mouth 415, around branch measurement pipeline valve 416
Branch suction line valve 618,619 is provided with, branch is provided with around branch measurement pipeline valve 417
Suction line valve 619,620, measures in branch and be provided with branch's suction line gas around pipeline valve 418
Mouth 620,621, is provided with branch suction line valve 622,622 around branch measurement pipeline valve 419.
Preferably, the both sides of each measurement pipeline are symmetrically arranged with two suction lines, specifically, the survey
The both sides on buret road 402 are symmetrically arranged with suction line 603,604, the both sides pair of the measurement pipeline 403
Title is provided with suction line 604,605, the both sides of the measurement pipeline 404 be symmetrically arranged with suction line 605,
606, the both sides of the measurement pipeline 405 are symmetrically arranged with suction line 606,607, the measurement pipeline
406 both sides are symmetrically arranged with suction line 607,608, and the both sides of the measurement pipeline 407 are symmetrical arranged
The both sides for having suction line 608,609, the measurement pipeline 408 are symmetrically arranged with suction line 609,610,
The both sides of the measurement pipeline 409 are symmetrically arranged with suction line 610,611, the measurement pipeline 410
Both sides are symmetrically arranged with suction line 611,612.Using symmetrically arranged mode, beneficial to balanced each branch
The inspiratory capacity of suction line valve, it is ensured that the uniformity of measuring environment.
In other embodiment, at least two suction lines can be also annularly set around each measurement pipeline,
Specifically, the present invention not and is construed as limiting, as long as described each suction line and each branch's suction line valve
Uniformly the perturbed force of air-flow near branch's measurement pipeline valve can be reduced or eliminated, and do not produced extra
Perturbed force.
The getter device 601 of the present embodiment by total air-breathing pipeline 602 connect each suction line, for
Each suction line provides air-breathing power source.Optionally, the getter device 601 can be by cylinder piston
Motion provide air-breathing power source, specifically, the present invention and be not construed as limiting.
The suction line current limiter group 623 includes ten suction line current limiters, in each suction line
It is provided with a suction line current limiter.The suction line current limiter can be used to control in correspondingly suction line
The flow velocity of gas, to ensure that flow velocity is steady, maintains the stability of measuring environment.The air valve group 624 includes
Ten air valves (not indicated in figure), are provided with an air valve in each suction line.The air valve is used to control
The break-make of system correspondence suction line.The suction line it is vertical to adjustable tracheae group 625 include ten it is vertical to
Adjustable tracheae (not indicated in figure), is provided with one vertically to adjustable tracheae in each suction line.It is described
Suction line level (is not indicated) to adjustable tracheae including ten levels to adjustable tracheae group 626 in figure, each
A level is provided with suction line to adjustable tracheae.Each it is vertical to adjustable tracheae can be used to adjusting with
The vertical distance of its correspondence suction line, each suction line level can be used to adjust right with it to adjustable tracheae
The level of suction line is answered to distance.
Optionally, the suction line barometer 627 is arranged at the air entry of getter device 601, described
Suction line barometer 627 is connected with each suction line respectively.The flowmeter group 628 includes ten streams
Gauge (is not indicated) in figure, and a flowmeter is provided with each suction line, with according to air-breathing
The pressure values of pipeline barometer 627 set the inspiratory capacity of each suction line, so as to improve local measurement environment
Stability, the precision of further raised position measurement.
In the present embodiment, in order to not influence original positional accuracy measurement, under each branch's suction line valve
Upper surface of the end face preferably with respective branches measurement pipeline valve is concordant, but, in actual application,
The lower surface of each branch's suction line valve measures the height of the lower surface of pipeline valve apart from respective branches,
Can be adjusted accordingly according to actual conditions, as long as each branch's suction line valve does not influence original in air-breathing
There is positional accuracy measurement.
Optionally, above-mentioned air pressure measuring apparatus also include a controller (not shown), and the controller connection is inhaled
Device of air 601 and suction line barometer 627, and according to being arranged at the pressure values of suction line barometer 627
The inspiratory capacity of each suction line is set, specifically, first closing getter device 601 and reading suction line gas
The pressure values of pressure meter 627；Then start to supply and read the pressure values now of suction line barometer 627；
Then open getter device 601 and read the pressure values and unlatching air-breathing now of suction line barometer 627
Pressure values after device 601, the comprehensive inspiratory capacity that each suction line is calculated according to above-mentioned pressure values.
Herein, the inspiratory capacity of each suction line can be by between the flowmeter in each suction line and pressure
Relation is obtained, however, because flowmeter is different, the relation between the gas flow and pressure of flowmeter also can
Difference, therefore, the relation between the gas flow and pressure of flowmeter is determined by specifically used flowmeter.
Using the suction line barometer 627 being arranged at the air entry of getter device 601, it is easy to overall balance each
The inspiratory capacity size of individual suction line 603-612, so reasonable set getter device 601 inspiratory capacity, improve
The stability of local measurement environment.
More optional, the controller is also connected with nine the adjustable tracheaes of measurement pipeline, ten suction line levels
Vertical to adjustable tracheae to adjustable tracheae and ten suction lines, during barometric surveying, the controller can be with root
According to the desired value and the error condition of experiment value of the position measurement of measurement plane 431, adjusting each measurement pipeline can
Regulating the qi flowing in the channels pipe, each suction line level are vertical to adjustable tracheae to adjustable tracheae and each suction line, so that
Each measurement pipeline and each suction line is in rational horizontal level and/or vertical position, and make measurement
The desired value of the position measurement of plane 431 and the error of experiment value are in the range of.
In addition, in the case of multiple measurement pipeline dense distribution, in order to analyze two neighboring branch's measurement pipe
Influence of the gas crosstalk to measurement point pressure between the valve of road, applicant is being not turned on the feelings of getter device 601
Under condition, above-mentioned air pressure measuring apparatus are carried out with the analysis of finite element modelling fluid emulation.Specifically, referring to
Fig. 4 and Fig. 5, Fig. 4 are the two-dimensional simulation model schematic that branch measures pipeline valve, and Fig. 5 is shown in Fig. 4
Branch measurement pipeline valve simulation analysis result static pressure cloud atlas, in Fig. 5 longitudinal direction a series of numbers
It is the corresponding static pressure force value of cloud atlas to be worth.
When fluid emulation is analyzed, applicant employs ANSYS softwares to be had to branch's measurement pipeline valve
The first fluid analogue simulation analysis of limit, wherein, the model parameter setting of branch's measurement pipeline valve is as follows：
Endotracheal air velocity V:5m/s；Branch measures pipeline valve internal diameter d:0.5mm；Branch's measurement pipe
Measurement air gap h between road valve and measurement plane 401:100um；Branch measures pipeline valve length
L:1mm；Adjacent measurement pipeline spacing：2mm.
Boundary condition is set as：Tracheal strips pressure P1；Environmental stress P0；Pressed near branch's measurement pipeline valve
Strong P2 (assume that to be the local environment pressure of measurement).
Normally, it is fixed situation to measure the measurement air gap h between pipeline valve and measurement plane in branch
Under, the relation between pressure difference Δ P that above-mentioned pressure is measured and tracheal strips pressure P1 be it is fixed, it is specific to close
System is as follows：
Δ P=f (P1) (1)
Δ P '=P1-P2=f (h) (2)
In formula (1), pressure difference Δ P is a function on tracheal strips pressure P1, when tracheal strips pressure
When P1 is fixed value, the pressure difference Δ P is also fixed.The pressure difference Δ P is pressure ideally
Strong poor, to ensure the stabilization of measurement, nearby pressure P2 can not have fluctuation to branch's measurement pipeline valve.
In formula (2), the pressure difference Δ P ' be one on branch measurement pipeline valve and measurement plane it
Between measurement air gap h function, it is the pressure difference in the case of actual measurement, if branch measures pipeline valve
Neighbouring pressure P2 is changed, and will be caused between tracheal strips pressure P1 and branch's measurement pipeline valve and measurement plane
Measurement air gap h between relation produce change, meanwhile, the pressure difference Δ P ' measures pipeline valve with branch
Also corresponding generation changes the relation between measurement air gap h between measurement plane.
As shown in figure 5, pressure P2 is implicitly present in change near branch's measurement pipeline valve, therefore, phase
Gas crosstalk between Lin Liangge branches measurement pipeline valve is strictly presence.Thus, when a measurement pipe
Around road during dense distribution multiple measurement pipeline, the gas disturbing influence near branch's measurement pipeline valve
Can not ignore.
Additionally, the invention provides a kind of barometric surveying that barometric surveying is carried out using above-mentioned air pressure measuring apparatus
Method, specifically, the barometric surveying method is set at least by being measured in each branch around pipeline valve
Two suction line valves, can siphon away the gas around respective branches measurement pipeline valve.Due to the gas
Pressure measuring method employs the air pressure measuring apparatus of above-described embodiment, so, the barometric surveying method is by gas
The beneficial effect that pressure measuring device brings refer to above-described embodiment.
In addition, the invention provides a kind of focusing leveling device, it includes silicon chip and is performed as described above described in example
Air pressure measuring apparatus.The air pressure measuring apparatus of above-described embodiment, institute are employed due to the focusing leveling device
So that similarly, the focusing leveling device refer to above-described embodiment by the beneficial effect that rotor banding comes.
【Embodiment two】
A kind of photoetching machine equipment is present embodiments provided, it is specific as shown in fig. 6, the photoetching machine equipment includes
Focusing leveling device described in embodiment one, the focusing leveling device includes a silicon chip 701 and embodiment one
Described air pressure measuring apparatus 702, the air pressure measuring apparatus 702 can be used to carry out vertical position to silicon chip 701
Measurement is put, with the vertical position of real-time control silicon chip 701, it is ensured that the quality of photoetching process.
In the present embodiment, the photoetching machine equipment also includes projection objective 703, support frame 704, signal transacting
Device 705, host computer 706, motor 707 and work stage 708.Using when, the air pressure measuring apparatus 702
It is fixedly installed on support frame 704, meanwhile, support frame as described above 704 is arranged at the top of work stage 708,
And the silicon chip 701 is fixedly installed in work stage 708, at the same time, the air pressure measuring apparatus 702
The draught head for measuring after the treatment of signal processor 705 by reaching host computer 706, the basis of the host computer 706
Data after treatment obtain the positional information of silicon chip 701, then controlled motor 707 drives work stage 708 to move,
So that silicon chip 701 is in the focal plane of projection objective 703.
Similarly, the beneficial effect that the photoetching machine equipment is brought by focusing leveling device, correspondence reference implementation
Example one.
Refering to Fig. 3 and Fig. 6, the course of work of the photoetching machine equipment is as follows：The air pressure measuring apparatus 702
The pressure difference of silicon chip 701 is obtained by barometer group 510, the pressure difference and then is transmitted to signal processor
705 are processed and converted to position signalling exports to host computer 706, and the host computer 706 is believed according to the position
Number controlled motor 707 drives work stage 708 to move, so that Jiao that silicon chip 702 is in projection objective 703 puts down
In face, and the projection objective 703 further carries out photoetching process treatment to silicon chip 702.
Additionally, in order to preferably implement the application, the air pressure measuring apparatus of the photoetching machine equipment of the present embodiment
Implementation process includes：
Step S1：Power-on, adjustment with reference to pipeline adjustable tracheae 305, the adjustable tracheae group 430 of measurement pipeline,
Suction line level is vertical to adjustable tracheae group 625 to adjustable tracheae group 626 and suction line, makes to refer to pipeline
302nd, each measurement pipeline 402~410 and each suction line 603~612 are in correct position；It is described suitable
Position is obtained under the premise of not impact position certainty of measurement by theoretical calculation and actual debugging；
Step S2：Feeder 201 is opened, adjustment feeder current limiter 203 makes gas with certain stream
Speed enters with reference to pipeline 302 and each measurement pipeline 402~410；
Step S3：The gentle valve group 624 of getter device 601 is opened, suction line current limiter group 623 is adjusted, with
The gas near each branch measurement pipeline valve 411~419 is siphoned away in the case of certainty of measurement is not influenceed；
Step S4：Each barometrical pressure difference in barometer group 510 is read, and through air pressure after a while
After stabilization, it is supreme that the pressure difference is converted into position signalling output by the calculating of signal processor 705 treatment again
Position machine 706, just can obtain the position height of multiple measurement points in measurement plane 431.
Then, Fig. 7 is the circuit block diagram of the signal processor of the embodiment of the present invention two.As shown in fig. 7, institute
Stating signal processor 705 includes the filtering process circuit 7051, analog to digital conversion circuit 7052 and the fortune that are sequentially connected
Processor 7053 is calculated, thus, each barometrical pressure difference Δ P sequentially passes through filter in the barometer group 510
The filtering of ripple process circuit 7051, the A/D conversions of analog to digital conversion circuit 7052 and arithmetic processor 7053
Position signalling is output as after calculation process, and can further be sent to host computer 706, in this way, just can be surveyed
Measure the vertical position of plane 401.
In sum, in barometric surveying, air pressure measuring apparatus of the invention are by branch's measurement pipe
At least two branch's suction line valves are set around the valve of road, branch's measurement pipeline can be in time siphoned away
Gas around valve, so as to gas crosstalk between adjacent Liang Ge branches measurement pipeline valve is reduced or eliminated
To the interference effect of measurement point pressure, and then improve the positional accuracy measurement of measurement plane when Multi-path air pressure is measured.
Additionally, air pressure measuring apparatus of the invention at getter device air entry also by setting an air intake duct
Road barometer, can balance the inspiratory capacity of each suction line, be produced with air-flow in avoiding each suction line
Fluctuation, it is ensured that the stability of air-flow in each suction line, so that the stability of local measurement environment is improved,
Further improve positional accuracy measurement.
Foregoing description is only the description to present pre-ferred embodiments, not to any limit of the scope of the invention
Calmly, the those of ordinary skill in field of the present invention does according to the disclosure above content any change, modification, belong to
In the protection domain of claims.
Claims (12)
1. a kind of air pressure measuring apparatus, it is characterised in that including：
It is connected to the reference pipeline and multiple measurement pipelines of feeder；
Positioned at the reference pipeline valve of described reference pipeline one end, the reference pipeline valve is arranged at a reference
Plane top, for the reference planes gas injection；
Pipeline valve, multiple branch's measurement pipelines are measured positioned at the branch that pipeline one end is measured each described
Valve is arranged side by side in same measurement plane top, for the measurement plane gas injection；
It is connected to the barometer between the reference pipeline and multiple measurement pipelines；
It is connected to multiple suction lines and the branch's air-breathing positioned at suction line one end each described of getter device
Pipeline valve, multiple branch's suction line valves are arranged side by side in measurement plane top, also,
Branch's suction line valve described at least two is set around one branch's measurement pipeline valve, for inhaling
Walk the gas around the measurement pipeline.
2. air pressure measuring apparatus as claimed in claim 1, it is characterised in that on each described measurement pipeline
It is provided with a measurement pipeline current limiter and a measurement adjustable tracheae of pipeline.
3. air pressure measuring apparatus as claimed in claim 1, it is characterised in that set on the reference pipeline
Have with reference to pipeline current limiter and refer to the adjustable tracheae of pipeline.
4. air pressure measuring apparatus as claimed in claim 1, it is characterised in that in each described suction line
It is provided with a flowmeter, suction line current limiter, an air valve and at least one suction line can
Regulating the qi flowing in the channels pipe.
5. air pressure measuring apparatus as claimed in claim 4, it is characterised in that the suction line can regulating the qi flowing in the channels
Pipe includes level to the adjustable tracheae of suction line and vertically to the adjustable tracheae of suction line；Each described air intake duct
Be provided with road a level to the adjustable tracheae of suction line and one it is described it is vertical can to suction line
Regulating the qi flowing in the channels pipe.
6. air pressure measuring apparatus as claimed in claim 1, it is characterised in that the air-breathing of the getter device
Mouth is connected with a suction line barometer, and the suction line barometer connects with suction line each described respectively
Connect.
7. air pressure measuring apparatus as claimed in claim 1, it is characterised in that during the feeder passes through
Heart pipeline is connected with feeder current limiter and porous buffer in turn, and the porous buffer connects institute respectively
State with reference to pipeline and each described measurement pipeline.
8. air pressure measuring apparatus as claimed in claim 1, it is characterised in that each measurement pipeline
Both sides are symmetrically arranged with two suction lines.
9. air pressure measuring apparatus as claimed in claim 1, it is characterised in that each measurement pipeline
Surrounding is annularly provided with suction line described at least two.
10. a kind of barometric surveying method, it is characterised in that using such as any one in claim 1 to 9
When described air pressure measuring apparatus carry out barometric surveying, measured around pipeline valve by each described branch
Branch's suction line valve described in setting at least two, siphons away the gas around branch's measurement pipeline valve.
11. a kind of focusing leveling devices, it is characterised in that including silicon chip and as appointed in claim 1 to 9
Air pressure measuring apparatus described in meaning one.
A kind of 12. photoetching machine equipments including focusing leveling device as claimed in claim 11, its feature exists
In also including projection objective, support frame, signal processor, host computer, motor and work stage；The gas
Pressure measuring device is fixedly installed on support frame as described above, and support frame as described above is arranged at the top of the work stage,
The silicon chip is arranged in the work stage, and the draught head that the air pressure measuring apparatus are measured passes through the signal
The host computer is reached after processor treatment, the host computer obtains the silicon chip according to the data after treatment
Positional information, then control the motor to drive the work stage to move, so that the silicon chip is in the projection
In the focal plane of object lens.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109445251A (en) * | 2018-11-15 | 2019-03-08 | 武汉华星光电半导体显示技术有限公司 | A kind of decompression drying equipment |
| US10871325B2 (en) | 2018-11-15 | 2020-12-22 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Vaccum drying apparatus |
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| CN106814545B (en) | 2018-08-24 |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Applicant after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Applicant after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Applicant before: Shanghai Micro Electronics Equipment Co., Ltd. Applicant before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. |
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