CN206497370U - Combined type high accuracy mass flow control system - Google Patents
Combined type high accuracy mass flow control system Download PDFInfo
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- CN206497370U CN206497370U CN201720014814.XU CN201720014814U CN206497370U CN 206497370 U CN206497370 U CN 206497370U CN 201720014814 U CN201720014814 U CN 201720014814U CN 206497370 U CN206497370 U CN 206497370U
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Abstract
The high-precision mass flow control system of combined type of the present utility model, air inlet pipeline is connected with source of the gas, set at air inlet pipeline import after metrical instrument precise pressure regulating valve, pressure sensor, temperature sensor, the high-precision mass flow controller of a large amount of range of flow by the connection in parallel of three tunnels, the high-precision mass flow controller of a small amount of range of flow, needle-valve；A large amount of high-precision mass flow controllers of range of flow, the high-precision mass flow controller of a small amount of range of flow, needle-valve porch are respectively arranged with independent ball valve, using the different high-precision mass flow controller of two groups of range abilities and one group of high sensitivity needle-valve combination, range ability is big, accuracy is high, and flow can be adjusted under tiny flow quantity.
Description
Technical field
The utility model is related to a kind of high-precision mass flow control system of combined type for gas flow metering device.
Background technology
The control general measurement apparatus by single performance of the prior art to gas flow is realized, can only be directed to spy
Determine technical parameter to be monitored, gas flow control has larger limitation, and range ability is small, it is impossible to take into account different amounts
Journey, precision is not high, and accurate control is particularly difficult in the case of tiny flow quantity, and Flow-rate adjustment is difficult；And directly subtracted using gas
Press valve regulating flow, there is also Flow-rate adjustment is inaccurate, time-consuming longer, measurable process narrow range the problems such as, and influence small
The accuracy of the measurement of gas flow.
The content of the invention
Technical problem to be solved in the utility model, which is to provide one kind, can accurately measure gas flow, range ability
Greatly, the high-precision mass flow control system of the high combined type of measurement accuracy.
The high-precision mass flow control system of combined type of the present utility model, air inlet pipeline, air inlet pipe are connected with source of the gas
Road is connected on subsequent detection device after a Sets of Measurement instrument；The one Sets of Measurement instrument is three tunnels flowmeter in parallel
Measure device；Three tunnel flow measurement device in parallel be the high-precision mass flow controller of a large amount of range of flow being connected in parallel,
A small amount of high-precision mass flow controllers of range of flow, needle-valve；The high-precision mass flow controller of a large amount of range of flow, small-range
Flow high accuracy mass flow controller, needle-valve porch are respectively arranged with independent ball valve, and the air inlet tube portion of air source inlet is set
It is equipped with precise pressure regulating valve, pressure sensor, temperature sensor；
Accurate filter is additionally provided with the source of the gas front end inlet；
The high-precision mass flow controller measurement range of a large amount of range of flow is 0~500 sccm, and a small amount of range of flow are high
Accurate mass flow controllers measurement range is 0~50sccm, the high-precision mass flow controller of a large amount of range of flow, small-range stream
The degree of accuracy of the high-precision mass flow controller of amount is all ± 1%FS.
The high-precision mass flow control system of combined type of the present utility model, using the different high accuracy of two groups of range abilities
Mass flow controller and one group of high sensitivity needle-valve parallel combination, extend the measurable flow amount model that tiny flow quantity measures device
Enclose；Use quality flow controller as flow regulator, can quick response set flow point, than use pressure regulation valve regulation
Flow substantially reduces the time, reduces time cost；It is applied in combination using high-accuracy pressure regulator valve and needle-valve, realizes range model
The Flow-rate adjustment for enclosing two ends is more rapidly easy；Measurable process scope is extended, detection flows point quick regulation is realized, improves
The accuracy of minute gas flow measurement.
Brief description of the drawings
Fig. 1 is the high-precision mass flow control system principle schematic of combined type of the utility model embodiment.
Embodiment
As illustrated, a kind of high-precision mass flow control system of combined type, air inlet pipeline, air inlet pipe are connected with source of the gas
Road is connected on subsequent detection device after a Sets of Measurement instrument；The one Sets of Measurement instrument is three tunnels flowmeter in parallel
Measure device；Three tunnel flow measurement device in parallel be the high-precision mass flow controller of a large amount of range of flow being connected in parallel,
A small amount of high-precision mass flow controllers of range of flow, needle-valve；Each high-precision mass flow controller of a large amount of range of flow, small-range
Flow high accuracy mass flow controller, needle-valve porch are provided with independent ball valve, and the air inlet tube portion of air source inlet is provided with
Precise pressure regulating valve, pressure sensor, temperature sensor；Accurate filter is additionally provided with source of the gas front end inlet；A large amount of range of flow
High-precision mass flow controller measurement range is 0~500 sccm, the high-precision mass flow controller measurement of a small amount of range of flow
Scope is 0~50sccm, the high-precision mass flow controller of a large amount of range of flow, the high-precision mass flow controller of a small amount of range of flow
The degree of accuracy all be ± 1%FS；The air inlet tube portion of air source inlet is provided with precise pressure regulating valve, pressure sensor, TEMP
Device, needs to adjust air pressure, and detect suction press, temperature parameter by pressure sensor, temperature sensor according to detection；Gas
Accurate filter is additionally provided with the front end inlet of source to cross dust, the impurity in air filtering；The detection in parallel of air inlet pipe Jing San Road
It is connected to after device detection in subsequently tested instrument and export pipeline.
The utility model is connected in parallel the different high-precision mass flow controller system of two groups of range abilities and one group high
Sensitivity needle-valve regulating system, the high-precision mass flow control systems of one group of a large amount of range of flow include high-accuracy pressure regulator valve, ball valve,
The high-precision mass flow controllers of a large amount of range of flow, the high-precision mass flow controller range abilities of a large amount of range of flow are（0~
500）Sccm, the degree of accuracy is ± 1%FS；The high-precision mass flow control system of a small amount of range of flow of another set includes high-accuracy adjust
Pressure valve, ball valve, the high-precision mass flow controller of a small amount of range of flow, the high-precision mass flow controller range model of a small amount of range of flow
Enclose for（0~50）Slpm, the degree of accuracy is ± 1%FS；One group of high sensitivity needle-valve regulating system includes high-accuracy pressure regulator valve, ball valve,
Needle-valve；By adjusting pressure regulator valve, the setting of low discharge and big flow can be achieved.
Corresponding mass flow control system is selected according to gas flowmeter range scope, the corresponding ball of selected system is opened
Valve, simultaneously closes off remaining two groups of ball valve.Set using high-precision mass flow controller or metering pin valve and high-accuracy pressure regulator valve
Detection flows point；By a set of flow control system using three groups of mass flow control systems, tiny flow quantity metering dress is extended
The measurable flow amount scope put；Use quality flow controller as flow regulator, can quick response set flow point, than
The time is substantially reduced using pressure regulation valve regulating flow, time cost is reduced；Being combined using high-accuracy pressure regulator valve with needle-valve is made
With the Flow-rate adjustment for realizing range ability two ends is more rapidly easy.
The high-precision mass flow control system of combined type of the present utility model, using the different high accuracy of two groups of range abilities
Mass flow controller and one group of high sensitivity needle-valve parallel combination, extend the measurable flow amount model that tiny flow quantity measures device
Enclose；Use quality flow controller as flow regulator, can quick response set flow point, than use pressure regulation valve regulation
Flow substantially reduces the time, reduces time cost；It is applied in combination using high-accuracy pressure regulator valve and needle-valve, realizes range model
The Flow-rate adjustment for enclosing two ends is more rapidly easy；Measurable process scope is extended, detection flows point quick regulation is realized, improves
The accuracy of minute gas flow measurement.
Claims (3)
1. a kind of high-precision mass flow control system of combined type, air inlet pipeline is connected with source of the gas, air inlet pipeline passes through one group
After metrical instrument, it is connected on subsequent detection device；The one Sets of Measurement instrument is three tunnels flow measurement device in parallel；It is described
Three tunnels flow measurement device in parallel is the high-precision mass flow controller of a large amount of range of flow being connected in parallel, a small amount of range of flow height
Accurate mass flow controllers, needle-valve；The high-precision mass flow controller of a large amount of range of flow, the high-precision matter of a small amount of range of flow
Amount flow controller, needle-valve porch are respectively arranged with independent ball valve, and the air inlet tube portion of air source inlet is provided with accurate voltage regulating
Valve, pressure sensor, temperature sensor.
2. the high-precision mass flow control system of combined type according to claim 1, it is characterised in that：The source of the gas front end
Porch is additionally provided with accurate filter.
3. the high-precision mass flow control system of combined type according to claim 1, it is characterised in that：The wide range stream
The high-precision mass flow controller measurement range of amount is 0~500 sccm, and the high-precision mass flow controller of a small amount of range of flow is surveyed
Amount scope is 0~50sccm, the high-precision mass flow control of the high-precision mass flow controller of a large amount of range of flow, a small amount of range of flow
The degree of accuracy of device is all ± 1%FS.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720014814.XU CN206497370U (en) | 2017-01-06 | 2017-01-06 | Combined type high accuracy mass flow control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720014814.XU CN206497370U (en) | 2017-01-06 | 2017-01-06 | Combined type high accuracy mass flow control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206497370U true CN206497370U (en) | 2017-09-15 |
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| CN201720014814.XU Active CN206497370U (en) | 2017-01-06 | 2017-01-06 | Combined type high accuracy mass flow control system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107844133A (en) * | 2017-12-20 | 2018-03-27 | 北京创昱科技有限公司 | A kind of mass flow controller |
| CN112000160A (en) * | 2020-09-07 | 2020-11-27 | 中国航空工业集团公司沈阳空气动力研究所 | Wide-range high-precision gas pressure and flow rapid adjusting device and adjusting method thereof |
| CN113063097A (en) * | 2021-03-12 | 2021-07-02 | 深圳市鑫路远电子设备有限公司 | Intelligent control method and device for sensitivity of automatic ball valve induction system |
-
2017
- 2017-01-06 CN CN201720014814.XU patent/CN206497370U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107844133A (en) * | 2017-12-20 | 2018-03-27 | 北京创昱科技有限公司 | A kind of mass flow controller |
| CN112000160A (en) * | 2020-09-07 | 2020-11-27 | 中国航空工业集团公司沈阳空气动力研究所 | Wide-range high-precision gas pressure and flow rapid adjusting device and adjusting method thereof |
| CN113063097A (en) * | 2021-03-12 | 2021-07-02 | 深圳市鑫路远电子设备有限公司 | Intelligent control method and device for sensitivity of automatic ball valve induction system |
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