CN106811719B - Wear Protection coating, preparation method and application - Google Patents

Wear Protection coating, preparation method and application Download PDF

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Publication number
CN106811719B
CN106811719B CN201510873075.5A CN201510873075A CN106811719B CN 106811719 B CN106811719 B CN 106811719B CN 201510873075 A CN201510873075 A CN 201510873075A CN 106811719 B CN106811719 B CN 106811719B
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coating
preparation
stainless steel
hard
vcn
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CN106811719A (en
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王永欣
叶育伟
慕永涛
姚懿容
王立平
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Ningbo Institute of Material Technology and Engineering of CAS
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Ningbo Institute of Material Technology and Engineering of CAS
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates

Abstract

The invention discloses a kind of wear Protection coating, preparation method and applications.The wear Protection coating includes: the VCN coating for being covered in the hard V transition zone of substrate surface and being covered on the hard V transition zone.The substrate preferably is selected from stainless steel mechanical movement basic part.The preparation method includes: to deposit hard V transition zone in substrate surface using arc ion plating (aip)；Using arc ion plating (aip), continue to deposit VCN coating on hard V transition zone.VCN coating shows as a kind of typical amorphous embedding nano crystal structure, shows lower coefficient of friction and wear rate in atmosphere and briny environment mainly by VC and VN phase composition in the present invention；Hard V transition zone can improve the binding performance of the totally different storeroom of both substrates and VCN the coating ingredient such as stainless steel mechanical movement basic part, the part stress in VCN coating is discharged simultaneously, to effectively raise the comprehensive performance and service life of VCN coating Yu stainless steel mechanical movement basic part.

Description

Wear Protection coating, preparation method and application
Technical field
Present invention relates particularly to a kind of wear Protection coating, preparation method and applications, belong to Surface Engineering guard technology Field.
Background technique
Exploitation ocean has higher requirements to substrate hardness, intensity and the anti-fatigue ability of all kinds of machine components, and the zero of equipment Component can the work of safety and stability in a long time be heavily dependent on and be directly subjected to fretting wear and erosion medium resistance Surface, the change that plastic deformation, crack propagation, erosion, cavitation erosion, oxidation, material such as strip at the surface state will lead to part clothes The significant decrease for using as a servant service life and safety, even the components of global failure, failure procedure is also mostly to be made from receiving is external Surface starts gradually to material core extension.(such as probing exploitation, boat under the usage working condition of many mechanical equipments Empty space flight, gas power system etc.) it can not generally find one kind and can meet the tough double requirements of structural support and surface simultaneously Material, therefore research and development surfacecti proteon and reinforcement technique extend key components and parts for improving the performance quality of equipment Service life, reducing energy consumption etc. has great significance.The every 90s in the statistical result showed whole world just has nearly 1 ton of steel Material rust corrosion, meanwhile, marine material is being sharply increased because losing caused by fretting wear, only from the function of offer surfacecti proteon From the aspect of, it is surface-treated the basis being just widely used.Also just because of the technical connotation of surface treatment agrees with 21 century with excellent The Manufactured Theory Makes Enli that matter is efficiently, safe and reliable, energy-saving material-saving is target, can provide strong technology branch for Rebuilding engineering Support, contributes for low-carbon circular economy.Surface treatment combines machinery, electronics, automatic control on the basis of physics and chemistry Research and practical value is continuously improved in the new technique of a variety of branches of learning and subjects such as system.Typical case of the thin film technique as surface treatment It represents, is widely used in material protection field.
Stainless steel mechanical movement basic part (such as gear, bearing, mechanical joint, sealing ring) directly connects as with seawater One of system cores components such as the pump valve pipeline of touching, hydraulic and power transmission, usage service life and safety are largely Tribology behavior stability depending on each component of system.Stainless steel mechanical movement basic part surface coating technique can not change Its more excellent characteristic is assigned on the basis of change part base solid moulding processability, is to improve components usage service life and safety The effective technology means of property.Compared to atmospheric environment, seawater is a kind of medium compared with strong corrosive, the Cl of high concentration-So that more Corrosion can occur in the seawater for number metal and the method that can not be blocked by anode mitigates corrosion reaction degree, in addition, spot corrosion, Crevice corrosion and turbulent flow corrosion and cavitation damage are also widely present.Component surface to be on active service under this harsh conditions provides The coating of protection need to have both excellent friction and wear behavior and corrosion resistance.How stainless steel mechanical movement basis is improved The physical life of part, by the efficiency and quality for improving entire ocean development engineering, save the cost plays the role of critical.
The stainless steel mechanical movement basic part service life of country's independent research is well below same kind of products at abroad at present. Main cause has two: first is that being applied to this kind of high-performance coating core technology on component of machine surface substantially by Germany, day This grade western developed country is grasped.Second is that about the opposite shortage of research of the VCN coating under exceedingly odious environment.Therefore, Obtaining the wear Protection coating haveing excellent performance on stainless steel mechanical movement basic part surface is that difficult point in the urgent need to address is asked Topic.
For the deficiency of domestic machinery component surface novel wear resistant coating described above research, and in stainless steel machine Tool movable basis part surface obtains the VCN wear Protection coating haveing excellent performance, technical problem exactly solved by the invention.
Summary of the invention
It is existing to overcome the main purpose of the present invention is to provide a kind of wear Protection coating, preparation method and application Deficiency in technology.
For realization aforementioned invention purpose, the technical solution adopted by the present invention includes:
An embodiment provides a kind of wear Protection coating, the wear Protection coating includes: substrate, covers The VCN coating for being placed on the hard V transition zone of substrate surface and being covered on the hard V transition zone.
Wherein, the substrate is especially preferably stainless steel mechanical movement basic part.
Preferably, there is the coating amorphous to wrap up nanocrystalline nano composite structure, described nanocrystalline for VC and VN phase Structure, the amorphous are amorphous carbon.
An embodiment provides a kind of methods for preparing wear Protection coating comprising:
Using arc ion plating (aip), hard V transition zone is deposited in substrate surface；
Using arc ion plating (aip), continue to deposit VCN coating on the hard V transition zone.
Wherein, the substrate is especially preferably stainless steel mechanical movement basic part.
In one more preferred embodiment, the preparation method includes: using arc ion plating system in stainless steel Matter mechanical movement basic part surface is previously deposited the hard V transition zone；Target used is metal V target, reaction chamber substrate vacuum Degree is (3~6) × 10-3Pa, work atmosphere Ar, flow are 350~450sccm, and working vacuum degree is 0.2~0.5Pa；Deposition Bias is adjustable between -30~-50V, and V target arc current is 45~65A, and depositing temperature remains 300~400 DEG C, sedimentation time It is 10~15 minutes.
In one more specifically embodiment, during depositing the hard V transition zone, the arc ion plating Be provided with two groups of V targets in system, every group include upper, middle and lower positioned vertical three V targets.
Wherein, the purity of Ar is preferably not lower than 99.99%.
In one more preferred embodiment, the preparation method includes: using arc ion plating system with institute The stainless steel mechanical movement basic part surface for stating hard V transition zone continues to deposit the VCN coating, wherein target used is gold Belong to V target, under uninterrupted vacuum coating state, reaction chamber substrate vacuum is lower than 4 × 10-3Pa, cutting Ar are flowed into, are led into chamber Enter C2H2And high-purity N2As reaction gas, wherein C2H2Flow is 10~80sccm, N2Flow is 600~800sccm, remains true For reciprocal of duty cycle between 2.0~4.0Pa, V target current is adjustable between 45~65A, and depositing temperature remains 300~400 DEG C.
In one more specifically embodiment, in depositing the VCN coating procedure, in the arc ion plating system Be provided with two groups of V targets, every group include upper, middle and lower positioned vertical three V targets.
Further, C2H2Purity be not less than 99.99%.
Further, N2Purity be not less than 99.99%.
An embodiment provides a kind of device, described device includes: stainless steel mechanical movement basic part； And it is formed in the wear Protection coating on the basic part surface.
Compared with prior art, the present invention at least has the advantages that
(1) VCN coating is shown a kind of typical mainly by VC and VN phase composition in wear Protection coating of the invention Amorphous embedding nano crystal structure；Compared to basis material, VCN coating shows lower friction system in atmosphere and briny environment Several and wear rate.Under atmospheric environment, the coefficient of friction and wear rate of VCN coating are 0.26 and 3.416*10-15m3/N·m；? Under briny environment, the coefficient of friction and wear rate of VCN coating are 0.21 and 7.532*10-16m3/N·m。
(2) wear Protection coating of the invention includes hard V transition zone, can improve stainless steel mechanical movement basic part With the binding performance of both the VCN coatings totally different storeroom of ingredient, while the part stress in VCN coating is discharged, thus effectively The comprehensive performance and service life for improving VCN coating and stainless steel mechanical movement basic part can satisfy ocean development strategy Urgent need to novel wear resistant protective coating has good application value.
Detailed description of the invention
Fig. 1 is the preparation technology flow chart of wear Protection coating in an embodiment of the present invention；
Fig. 2 is the preparation technology flow chart of wear Protection coating in another embodiment of the present invention；
Fig. 3 is the XRD diagram of VCN coating in the embodiment of the present invention 1；
Fig. 4 a- Fig. 4 b is the TEM figure of VCN coating in the embodiment of the present invention 1；
Fig. 5 is the hardness profile of VCN coating in the embodiment of the present invention 1；
Fig. 6 a, Fig. 6 b are the coefficient of friction and wear rate figure (atmosphere of matrix and VCN coating in the embodiment of the present invention 1 respectively Environment)；
Fig. 7 a, Fig. 7 b are the coefficient of friction and wear rate figure (seawater of matrix and VCN coating in the embodiment of the present invention 1 respectively Environment).
Specific embodiment
In view of deficiency in the prior art, inventor is studied for a long period of time and is largely practiced, and is able to propose of the invention Technical solution, mainly by using the multi sphere ion plating technology in physical gas phase deposition technology, in stainless steel mechanical movement Basic part (such as gear, bearing, mechanical joint, sealing ring) surface uniform deposition wear Protection coating.It as follows will be to the technology Scheme, its implementation process and principle etc. are further explained.
One aspect of the present invention provides a kind of wear Protection coating, and the coating is formed in stainless steel mechanical movement The substrate surfaces such as basic part, the coating include positioned at the hard V transition zone of the substrate surface and positioned at the hard V VCN coating on transition zone.Wherein V is vanadium, and C is carbon, and N is nitrogen.
Among some embodiments, the hard V transition zone with a thickness of 200~600nm.
Among some embodiments, the VCN coating with a thickness of 2 μm~8 μm.
Among some embodiments, there is the coating amorphous to wrap up nanocrystalline nano composite structure, the nanometer Crystalline substance is VC and VN phase structure, and the amorphous is amorphous carbon.
Further, the nanocrystalline crystallite dimension is 5~30nm.
Further, the hardness of the coating is 30~40GPa.
Stainless steel mechanical movement basic part in the present invention includes but is not limited to gear, bearing, mechanical joint, sealing ring Deng.
Another aspect of the present invention provides a kind of method for preparing the wear Protection coating, joins shown in Fig. 1, described Preparation method includes:
S1, deposition hard V transition zone:
Using arc ion plating (aip), hard V transition zone is deposited in substrate surfaces such as stainless steel mechanical movement basic parts；
S2, deposition VCN coating:
Using arc ion plating (aip), continue to deposit VCN painting in the substrate surface with the hard V transition zone Layer.
Among some embodiments, the step S1 includes: to be transported using arc ion plating system in stainless steel machinery Dynamic basic part surface is previously deposited the hard V transition zone；Target metal V target used, reaction chamber substrate vacuum degree (3~6) × 10-3Pa, work atmosphere Ar, flow are 350~450sccm, and working vacuum degree is 0.2~0.5Pa；Substrate bias be -30 to - Adjustable between 50V, V target arc current is 45~65A, and depositing temperature remains 300~400 DEG C, and sedimentation time is 10~15 minutes.
Among some embodiments, the step S2 includes: using arc ion plating system, with the hard V The surface of the stainless steel mechanical movement basic part of transition zone continues to deposit the VCN coating, and target used is metal V target, Under uninterrupted vacuum coating state, reaction chamber substrate vacuum is lower than 4 × 10-3Pa, cutting Ar are flowed into, and C is passed through into chamber2H2With High-purity N2As reaction gas, wherein C2H2Flow is 10~80sccm, N2Flow is 600~800sccm, and vacuum degree is maintained to exist Between 2.0~4.0Pa, V target current is adjustable between 45~65A, and depositing temperature remains 300~400 DEG C.
Among some embodiments, two groups of V targets are provided in the step S1 in arc ion plating system, every group includes Three V targets of upper, middle and lower positioned vertical.
Among some embodiments, the purity of Ar is 99.99% or more in the step S1.
Among some embodiments, two groups of V targets are provided in the step S2 in arc ion plating system, every group includes Three V targets of upper, middle and lower positioned vertical.
Among some embodiments, C in the step S22H2Purity in 99.99% or more, N2Purity exist 99.99% or more.
Among some embodiments, the preparation method is before step S1 further include:
S01, treatment before plating:
Before step S1, stainless steel mechanical movement basic part is cleaned, oil removing.
Further, among some embodiments, the preparation method is before step S1, after S01 further include:
S02, the cleaning of bias reverse sputtering:
Before step S1, stainless steel mechanical movement basic part is packed into cavity, transports stainless steel machinery after vacuumizing Dynamic basic part is preheated to 300 DEG C~400 DEG C, using Ar plasma to the stainless steel mechanical movement basic part for applying back bias voltage Surface bombardment activation.
Among some embodiments, the preparation method is after step S2 further include:
S03, aftertreatment technology:
Upon step s 2, after deposition to be coated, it is cooled to 200~250 DEG C under vacuum conditions hereinafter, then existing N2It is cooled to 80~100 DEG C under protective atmosphere hereinafter, be finally deflated to atmospheric pressure, begins to speak to come out of the stove.
As joined shown in Fig. 2, in another embodiment of the present invention, the preparation method successively includes:
S01, treatment before plating；
S02, the cleaning of bias reverse sputtering；
S1, deposition hard V transition zone；
S2, deposition VCN coating；
S03, aftertreatment technology.
The present invention is using physical gas phase deposition technologies such as multi-arc ion coatings, first in stainless steel mechanical movement basic part table Face deposits hard V transition zone in advance, and purpose is widely different to improve both stainless steel mechanical movement basic part and VCN coating ingredient The binding performance of different storeroom, while the part stress in VCN coating is discharged, then continue to deposit VCN on hard V transition zone Coating, to effectively raise the comprehensive performance and service life of VCN coating Yu stainless steel mechanical movement basic part.
It is more specifically illustrated below in conjunction with several examples and drawings technical solution of the present inventions.Postscript, Used various products structural parameters, various reaction partners and process conditions are more typical among following examples Example, but verified by inventor's a large number of experiments, in other Different structural parameters of those listed above, other types of anti- It is applicable for should participating in object and other process conditions also, and also equal attainable cost invents claimed technical effect.
Embodiment 1
Matrix is the stainless steel gear in component of machine, the preparation method specific steps of wear Protection coating are as follows:
(1) treatment before plating
Stainless steel gear matrix is put into petroleum ether, with ultrasonic wave stirring and washing 30 minutes, removes stainless steel surface It is put into acetone and is cleaned by ultrasonic 20 minutes after greasy dirt, be then cleaned by ultrasonic in dehydrated alcohol 15 minutes, finally take out and use nitrogen Drying；
(2) bias reverse sputtering cleans
Treated stainless steel gear is packed into cavity, reaction chamber temperature is heated to 350 DEG C, and back end vacuum is pre- It is evacuated to 4.00 × 10-3Pa.It is passed through high-purity Ar (purity >=99.99%), flow 100sccm, it is straight to open V target (purity >=99.5%) Galvanic electricity source, sets target current as 60A, successively the stainless steel gear table of constant bombardment at -900V, -1100V and -1200V bias Face 3 minutes；
(3) hard V transition zone is deposited
Using arc ion plating system, treated stainless steel gear surface is previously deposited V transition zone；Target used Material is two groups of 6 metal V targets (purity >=99.5%), reaction chamber substrate vacuum degree 4 × 10-3Pa, work atmosphere Ar (purity >= 99.99%), flow 350sccm, working vacuum degree 0.4Pa；Substrate bias is -20V, and V target arc current is 60A, deposition temperature Degree is 350 DEG C, and deposition obtains the V transition zone of about 300nm thickness after 15 minutes；
(4) VCN coating is deposited
Arc ion plating system is equally used, is applied in the stainless steel gear surface redeposition VCN of above-mentioned deposition V transition zone Layer, target used is still two groups of 6 metal V targets (purity >=99.5%), under uninterrupted vacuum coating state, reaction chamber substrate Vacuum remains 4 × 10-3Pa, cutting Ar are flowed into, and C is passed through into chamber2H2And high-purity N2(purity >=99.95%) is as reaction Gas, flow are respectively 35sccm and 800sccm, maintain vacuum degree in 4.00Pa, increase target current to 65A, depositing temperature is protected It holds at 350 DEG C, is co-deposited 2h；
(5) aftertreatment technology
After deposition to be coated, 200 DEG C are cooled under vacuum environment hereinafter, being then charged with protective gas N2, protecting 100 DEG C are cooled to hereinafter, be deflated to atmospheric pressure under shield atmosphere, begins to speak to come out of the stove, and are finally obtained in stainless steel gear surface wear-resisting Protect VCN coating.
Join Fig. 3, Fig. 4 a, shown in Fig. 4 b, the wear Protection coating of stainless steel gear surface has amorphous in the present embodiment Nanocrystalline nano composite structure is wrapped up, nanocrystalline is VC and VN phase structure, and amorphous is amorphous carbon, wherein XRD diagram in Fig. 3 Ordinate Intensity be diffraction maximum.
G200 nanometers of MTS-Nano indentation test platforms measure the hard of stainless base steel gear surface coating with continuous stiffness measurement Degree and elasticity modulus select 6 different zones on sample, are pressed into constant depth with Berkovich diamond penetrator (1000nm) is unloaded afterwards, obtains indentation-unloading curve, the hardness and elasticity modulus of coating is calculated, is then averaged, obtains To VCN coating as shown in Figure 5 hardness profile (abscissa Displacement Into Surface indicate compression distance, Ordinate Hardness indicates hardness), test result shows: VCN coating hardness is 34GPa, it is seen that than prior art coating Hardness improves more, the world lead level out in analogous coatings.
Basis material and the stainless steel gear surface VCN of the present invention are applied using UMT-3 multifunction friction wear testing machine Fretting wear service life of the layer under atmosphere and briny environment is evaluated, and frictional experiment cuts sample and friction with pair using plated film gear Mutually reciprocatingly slide mode, sliding frequency 5Hz, load 10N, environment temperature (19 ± 3) DEG C, relative humidity (75 ± 5) %, Φ=3mm YG-6 sintered carbide ball (94%WC+6%Co, H ≈ 14GPa, E ≈ 650GPa), with pair, is obtained such as figure as friction The coefficient of friction and wear rate of matrix (not including the stainless steel gear of coating) and VCN coating in 6a, Fig. 6 b and Fig. 7 a, Fig. 7 b Figure (wherein, COF indicates that coefficient of friction, specific wear ratio indicate that wear rate, dry indicate atmospheric environment, Seawater indicates briny environment).Test result shows: compared to basis material, the stainless steel gear surface VCN of the present invention is applied Layer shows lower coefficient of friction and wear rate under atmospheric environment and briny environment.Under atmospheric environment, VCN coating Coefficient of friction and wear rate are 0.26 and 3.416*10-15m3/N·m；Under briny environment, the coefficient of friction and mill of VCN coating Loss rate is 0.21 and 7.532*10-16m3/ Nm can effectively improve the performance of coating and gear matrix global facility and use the longevity Life.
Embodiment 2
Matrix is the stainless base steel sealing ring in the key components and parts of ocean, the preparation method specific steps of wear Protection coating Are as follows:
(1) treatment before plating is implemented to stainless base steel sealing ring using the method for 1 step 1 of embodiment；
(2) implement bias reverse sputtering to stainless base steel sealing ring using the method for 1 step 2 of embodiment to clean；
(3) hard V transition zone is deposited to stainless base steel sealing ring using the method for 1 step 3 of embodiment；
(4) arc ion plating system is used, is applied in above-mentioned deposition V transition zone stainless base steel sealing ring surface redeposition VCN Layer, target used is 6 metal V targets (purity >=99.5%), and under uninterrupted vacuum coating state, reaction chamber substrate vacuum is protected Hold is 4.5 × 10-3Pa, cutting Ar are flowed into, and C is passed through into chamber2H2And high-purity N2As reaction gas, flow is respectively 20sccm and 800sccm maintains vacuum degree between 3.5Pa, and V target current is 70A, and depositing temperature remains 400 DEG C, when deposition Between be 1h.
G200 nanometers of MTS-Nano indentation test platforms measure stainless base steel sealing ring surface covering with continuous stiffness measurement Hardness and elasticity modulus, test result show: coating hardness 32GPa, and elasticity modulus 598GPa shows more excellent machine Tool performance.
Using UMT-3 multifunction friction wear testing machine to stainless base steel sealing ring surface in basis material and the present embodiment Fretting wear service life of the VCN coating under briny environment is evaluated, and frictional experiment is using plated film sealing ring and friction with secondary past Multiple sliding type, sliding frequency are respectively 10Hz, load 10N, environment temperature (22 ± 3) DEG C, relative humidity (60 ± 5) %, Φ=3mm Si3N4As friction with pair.Test result shows: compared to matrix (not including the stainless base steel sealing ring of coating) Material, VCN coating do not fail under atmosphere and briny environment, show lower coefficient of friction and wear rate.
As can be seen from the above technical solutions, the invention has the following advantages:
VCN coating shows a kind of typical amorphous mainly by VC and VN phase composition in the coating that the present invention is deposited Embedding nano crystal structure；Compared to basis material, VCN coating atmosphere and briny environment show lower coefficient of friction and Wear rate.Under atmospheric environment, the coefficient of friction and wear rate of VCN coating are 0.26 and 3.416*10-15m3/N·m；In seawater Under environment, the coefficient of friction and wear rate of VCN coating are 0.21 and 7.532*10-16m3/N·m。
Include hard V transition zone in the coating that is deposited of the present invention, can improve stainless steel mechanical movement basic part with The binding performance of the totally different storeroom of both VCN coatings ingredient, while the part stress in VCN coating is discharged, to effectively mention The high comprehensive performance and service life of VCN coating and stainless steel mechanical movement basic part, it is strategic to can satisfy ocean development Urgent need to novel wear resistant protective coating has good application value.
It should be appreciated that the above description is only an embodiment of the present invention, it is not intended to limit the scope of the invention, it is all Using equivalent structure or equivalent flow shift made by description of the invention and accompanying drawing content, it is applied directly or indirectly in other Relevant technical field, is included within the scope of the present invention.

Claims (14)

1. a kind of preparation method of wear Protection coating, characterized by comprising:
Stainless steel mechanical movement basic part is packed into cavity, is preheated to stainless steel mechanical movement basic part after vacuumizing 300 DEG C ~ 400 DEG C, the stainless steel mechanical movement basic part surface bombardment for applying back bias voltage is activated using Ar plasma；
Using arc ion plating (aip), hard V transition zone is deposited on stainless steel mechanical movement basic part surface, wherein target used Material is metal V target, and reaction chamber substrate vacuum degree is (3~6) × 10-3Pa, work atmosphere Ar, flow are 350~450sccm, Working vacuum degree is 0.2~0.5Pa；Substrate bias is adjustable between -30~-50V, and V target arc current is 45~65A, deposition temperature Degree remains 300~400 DEG C, and sedimentation time is 10~15 minutes；And
Using arc ion plating (aip), continue to deposit VCN coating on the hard V transition zone, wherein target used is metal V Target, under uninterrupted vacuum coating state, reaction chamber substrate vacuum is lower than 4 × 10-3Pa, cutting Ar are flowed into, are passed through into chamber C2H2And high-purity N2As reaction gas, wherein C2H2Flow is 10~80sccm, N2Flow is 600~800sccm, maintains vacuum Degree is between 2.0~4.0Pa, and V target current is adjustable between 45~65A, and depositing temperature remains 300~400 DEG C；
Obtained wear Protection coating includes substrate, the hard V transition zone for being covered in substrate surface and is covered in the hard V VCN coating on transition zone；Wherein, there is the wear Protection coating amorphous to wrap up nanocrystalline nano composite structure, described Nanocrystalline is VC and VN phase structure, and the amorphous is amorphous carbon；The substrate includes stainless steel mechanical movement basic part.
2. preparation method according to claim 1, characterized by comprising: in the process for depositing the hard V transition zone In, be provided with two groups of V targets in the arc ion plating system, every group include upper, middle and lower positioned vertical three V targets.
3. preparation method according to claim 1, it is characterised in that: the purity of Ar is not less than 99.99%.
4. preparation method according to claim 1, it is characterised in that: during depositing the VCN coating, the electricity Be provided with two groups of V targets in arc ion plating system, every group include upper, middle and lower positioned vertical three V targets.
5. preparation method according to claim 1, it is characterised in that: C2H2Purity be not less than 99.99%.
6. preparation method according to claim 1, it is characterised in that: N2Purity be not less than 99.99%.
7. preparation method described according to claim 1 ~ any one of 6, it is characterised in that the preparation method further include:
Stainless steel mechanical movement basic part is cleaned, oil removing, deposits the operation of the hard V transition zone later.
8. preparation method described according to claim 1 ~ any one of 6, it is characterised in that the preparation method further include: to institute After stating VCN coating deposition, it is cooled to 200~250 DEG C under vacuum conditions hereinafter, then in N2It is cooled under protective atmosphere 80~100 DEG C or less.
9. preparation method according to claim 1, it is characterised in that: the hard V transition zone with a thickness of 200 ~ 600nm。
10. preparation method according to claim 1, it is characterised in that: the VCN coating with a thickness of 2 μm ~ 8 μm.
11. preparation method according to claim 1, it is characterised in that: the nanocrystalline crystallite dimension is 5 ~ 30nm.
12. preparation method according to claim 1, it is characterised in that: the hardness of the wear Protection coating be 30~ 40GPa。
13. preparation method according to claim 1, it is characterised in that: the stainless steel mechanical movement basic part includes Gear, bearing, mechanical joint, any one in sealing ring.
14. a kind of device, which is characterized in that described device includes: stainless steel mechanical movement basic part；And it is formed in institute State basic part surface, the preparation of any one of such as claim 1-13 the method wear Protection coating.
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CN104451561A (en) * 2014-11-21 2015-03-25 中国科学院宁波材料技术与工程研究所 Method for preparing CrN coating on surface of substrate
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