CN104694893A - Carbon-based antifriction wear resistant coat and production method thereof - Google Patents
Carbon-based antifriction wear resistant coat and production method thereof Download PDFInfo
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- CN104694893A CN104694893A CN201310645609.XA CN201310645609A CN104694893A CN 104694893 A CN104694893 A CN 104694893A CN 201310645609 A CN201310645609 A CN 201310645609A CN 104694893 A CN104694893 A CN 104694893A
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Abstract
The invention provides a carbon-based antifriction wear resistant coat and a production method thereof. The carbon-based antifriction wear resistant coat is a multilayer film structure formed through alternative deposition of a bonding layer and a working layer; the bonding layer is a film of simple substance or nitride or carbide of one of Ti, Cr and W elements, or a film of the Si element; and the working layer is a graphite-like amorphous carbon film, and the atom percentage content of the graphite structure in the graphite-like carbon film is not lower than 70%. The alternative deposition of the bonding layer and the working layer realizes heavy gauge production of the graphite-like amorphous carbon coat, so the water environment friction performance of the graphite-like amorphous carbon coat is stable for a long time; and the above alternative deposition multi-interface design improves the corrosion/erosion resistance of the graphite-like amorphous carbon coat in various water-based fluid environments.
Description
Technical field
The present invention relates to field of surface engineering technique, particularly relate to a kind of carbon back anti-friction wear-resistant coating and preparation method thereof.
Background technology
For friction pair component such as hard sealed valve, water lubricated bearing and water surrounding gear class driving members, the low lubricating property of water medium makes it often be in semi-dry friction state when frequent On/Off (or start/stop) and momentary overload, frictional coefficient between frictional contact surface will sharply raise, and incident abrasive damage also will sharply increase.When there is acid, alkali, salt in water-based fluid, its chemistry or galvanic corrosion characteristic will aggravate the friction and wear of this type of friction pair working face again further.Therefore, frictional wear is the key issue of the friction pair component job stabilitys such as restriction hard sealed valve, water lubricated bearing and water surrounding gear class driving member and service life, is also the bottleneck of the whole hydraulicefficiency machinery system high efficiency running of restriction simultaneously.Coating protection technology can give the working face of component more excellent military service performance while not changing matrix physical and chemical performance and machine-shaping property, is to solve the most convenient and swift and fruitful technological approaches of this type of water surrounding friction pair component frictional wear problem.
Class graphite amorphous carbon has excellent environment self-adaption tribological property, lubricating the metal to-metal contact of disappearance, the semi-dry friction of lack of lubrication and all can show stable low friction and low wearing character under lubricating sufficient boundary lubrication or hydrodynamic lubrication condition, particularly its low friction, low wearing and tearing and to the insensitive characteristic of water molecules, make it be applicable to variously have aqueous vapor atmosphere or environment.
But the thickness of preparing of traditional class graphite amorphous carbon coating is less than 5 μm more, cause the anti-friction wear-resistant characteristic of its excellence to be difficult to long lifetime performance, and supporting capacity is limited.Simultaneously, the interface structure of tradition class graphite amorphous carbon coating is single, its individual layer (substrate Direct precipitation class graphite amorphous carbon layer) or double-deck (transition layer+class graphite amorphous carbon layer) structure are difficult to interrupt continuous growth defect, for the erosion/corrosion of water molecules or corrosive molecules provides potential passage, so be also just difficult to show enough resistant to corrosion/corrosive propertys in water surrounding, cause work-ing life shorter.
Summary of the invention
The invention provides a kind of carbon back anti-friction wear-resistant coating and preparation method thereof, this carbon back anti-friction wear-resistant coating can keep lower friction and wear in water-based fluid, and the water surrounding friction pair component depositing this carbon back anti-friction wear-resistant coating can be made to realize long lifetime steady running.
For reaching technical purpose, the technical solution used in the present invention is as follows:
A kind of carbon back anti-friction wear-resistant coating is the multi-layer film structure by tack coat and working lining alternating deposit;
Described tack coat is the film of a kind of simple substance in Ti, Cr, W element or nitride or carbide, or is the film of Si element;
Described working lining is class graphite amorphous carbon film, and in described class graphite amorphous carbon film, the atomic percentage conc of graphite-structure is greater than 70%.
Wherein in an embodiment, the thickness of described carbon back anti-friction wear-resistant coating is 10 μm ~ 50 μm, and hardness is 10GPa ~ 20GPa, and cut bonding force is greater than 50N, and the frictional coefficient in water surrounding is less than 0.1, and the wear rate in water surrounding is less than 10
-16m
3n
-1m
-1the order of magnitude.
Wherein in an embodiment, described in every one deck, the thickness of tack coat is 100nm ~ 400nm, and described in every one deck, the thickness of working lining is 1000nm ~ 2000nm, and the Thickness Ratio of described tack coat and adjacent described working lining is 1:5 ~ 1:10.
Wherein in an embodiment, the cycle index of described tack coat and described working lining alternating deposit is 10 ~ 30 times.
A preparation method for described carbon back anti-friction wear-resistant coating, comprises the following steps:
Matrix is carried out pre-treatment; The matrix surface complete to pre-treatment carries out plasma clean; In the carbon back anti-friction wear-resistant coating described in the matrix surface deposition after plasma cleaning.
Wherein in an embodiment, the pre-treatment of described matrix comprises the following steps:
1. matrix described in conventional detergent process is selected;
2. sandblasting is carried out to the matrix surface that 1. step obtains;
3. industrial cleaning agent is adopted to carry out ultrasonic cleaning to the matrix that 2. step obtains;
4. the matrix that 3. step obtains is placed on baking oven through rinsed with deionized water, heating, drying surface is water stain.
Wherein in an embodiment, described plasma clean comprises the following steps:
Matrix complete for pre-treatment is placed on the specimen holder in magnetic control sputtering system vacuum chamber, vacuumizes; Treat that vacuum chamber internal gas pressure is evacuated to 5 × 10
-3during below Pa, pass into Ar gas and adjustable pressure to 1Pa ~ 10Pa; Open grid bias power supply, adjustment bias voltage is 500V ~ 1000V, and bias voltage dutycycle is 40% ~ 60%; Ar gas is activated into plasma body under electric field action, and the matrix surface complete to described pre-treatment etches, and etching time is 5min ~ 50min.
Wherein in an embodiment, described carbon back anti-friction wear-resistant coating adopts magnetron sputtering technique deposition;
Wherein, the film of the simple substance of Ti, Cr, W adopts the sputtering sedimentation acquisition under an ar atmosphere of intermediate frequency or magnetically controlled DC sputtering technology; The film of nonmetal Si adopts the sputtering sedimentation acquisition under an ar atmosphere of radio frequency or magnetically controlled DC sputtering technology; The film of the nitride of Ti, Cr, W adopts intermediate frequency or direct current reaction magnetron sputtering technology at N
2under atmosphere, sputtering sedimentation obtains; The film of the carbide of Ti, Cr, W adopts intermediate frequency or direct current reaction magnetron sputtering technology at C
2h
2under atmosphere, sputtering sedimentation obtains; Class graphite amorphous carbon film adopts the sputtering sedimentation acquisition under an ar atmosphere of magnetically controlled DC sputtering technology.
Wherein in an embodiment, in the deposition process of described carbon back anti-friction wear-resistant coating, concrete technology parameter is as follows:
In the vacuum chamber of magnetron sputtering equipment, gaseous tension is 0.5Pa ~ 1.5Pa; The electric current of medium frequency magnetron sputtering power supply is 1.5A ~ 2.5A, and the electric current of D. C magnetic control sputter power source is 1.0A ~ 2.0A, and the power of rf magnetron sputtering power supply is 300W ~ 500W; Power source bias is the pulsed bias of 400V ~ 600V, and bias voltage dutycycle is 40% ~ 60%.
Carbon back anti-friction wear-resistant coating of the present invention, by the alternating deposit of tack coat and working lining, achieves the heavy thickness preparation of class graphite amorphous carbon coating, makes the water surrounding tribological property of class graphite amorphous carbon coating excellence be able to the long lifetime and stablely to play; And the multiple solutions of alternating deposit design, further increase class graphite amorphous carbon coating in various water-based fluid environment corrosion-resistant/erosional competency.Utilize preparation method of the present invention, successfully can prepare above-mentioned carbon back anti-friction wear-resistant coating.
Accompanying drawing explanation
Fig. 1 is the structural representation of workpiece one embodiment depositing carbon back anti-friction wear-resistant coating of the present invention;
Fig. 2 is carbon back anti-friction wear-resistant coating one embodiment of the present invention cross-sectional view under the microscope.
Embodiment
The present invention is described in detail below in conjunction with embodiment.It should be noted that, when not conflicting, the embodiment in the application and the feature in embodiment can combine mutually.
See Fig. 1 and Fig. 2, the invention provides a kind of carbon back anti-friction wear-resistant coating, this carbon back anti-friction wear-resistant coating is by the multi-layer film structure of tack coat 200 with working lining 300 alternating deposit; Tack coat 200 is the film of a kind of simple substance in Ti, Cr, W element or nitride or carbide, or is the film of Si element; Working lining 300 is class graphite amorphous carbon film, and in class graphite amorphous carbon film, the atomic percentage conc of graphite-structure is greater than 70%.Wherein, class graphite amorphous carbon film is also known as GLC(Graphite-like carbon) film, its main component is graphite-structure (i.e. sp
2key).Tack coat 200 does not have strict restriction with the cycle index of working lining 300 alternating deposit, is determined on a case-by-case basis, and preferably, tack coat 200 is 10 ~ 30 times with the cycle index of working lining 300 alternating deposit.
It should be noted that, in carbon back anti-friction wear-resistant coating of the present invention, the material of different tack coat 200 can be identical, also can be different.
As a kind of embodiment, the thickness of carbon back anti-friction wear-resistant coating is 10 μm ~ 50 μm, and hardness is 10GPa ~ 20GPa, and cut bonding force is greater than 50N, and the frictional coefficient in water surrounding is less than 0.1, and the wear rate in water surrounding is less than 10
-16m
3n
-1m
-1the order of magnitude.It should be noted that, the water surrounding measuring frictional coefficient and wear rate is herein distilled water environment.
Prepare the carbon back anti-friction wear-resistant coating of excellent performance, the thickness of every one deck tack coat 200 and every one deck working lining 300 has strict regulation, the cohesiveness of coating, anti-friction wear-resistant characteristic and corrosion resistance characteristic just can be made to obtain maximum performance, draw in conjunction with the physics of used tack coat 200 and working lining 300, chemical property and great many of experiments: the thickness of every one deck tack coat 200 is 100nm ~ 400nm, the thickness of every one deck working lining 300 is 1000nm ~ 2000nm, and described tack coat 200 is 1:5 ~ 1:10 with the Thickness Ratio of adjacent described working lining 300.
Present invention also offers a kind of preparation method of above-mentioned carbon back anti-friction wear-resistant coating, comprise the following steps: matrix 100 is carried out pre-treatment; Plasma clean is carried out on matrix 100 surface complete to pre-treatment; In the matrix 100 surface deposition above-mentioned carbon back anti-friction wear-resistant coating after plasma cleaning.Usually, the matrix 100 in the present invention is water surrounding friction pair component, as hard sealed valve, water lubricated bearing and water surrounding gear class driving member etc.Carbon back anti-friction wear-resistant of the present invention is coated with the workpiece that the working-surface being deposited upon matrix 100 can obtain having excellent tribology performance.
In the preparation process in accordance with the present invention, the object of pre-treatment and plasma clean allows matrix 100 expose fresh surface, and follow-up deposition is carried out smoothly, also can increase matrix 100 and the cohesiveness being coated with interlayer simultaneously, improve the quality of product, strengthen work-ing life.
As a kind of embodiment, the pre-treatment of matrix 100 comprises the following steps: first select conventional detergent to carry out preliminary treatment to matrix 100, with the greasy dirt removing matrix 100 surface and the foreign material adsorbed in processing, transport or long-time put procedure; Then carry out sandblasting to matrix 100 surface through preliminary treatment, to remove the rusty stain on its surface, zone of oxidation and machining burr, in this treatment step, blasting pressure is preferably 0.2MPa ~ 0.5MPa; Adopt industrial detergent to carry out ultrasonic cleaning to the matrix 100 through sandblasting again, remove the physical and chemical adsorption thing on its surface further, preferably, the ultrasonic cleaning time is 5min ~ 30min; The matrix 100 plasma water rinsing of finally ultrasonic cleaning being crossed is placed on baking oven, and its surface of heating, drying is water stain, and preferably, oven temperature is 50 DEG C ~ 80 DEG C.Wherein in an embodiment, the part run of the optional such scheme of pre-treatment of matrix 100, particular case is determined according to the practical situation of matrix 100.
As a kind of embodiment, plasma clean comprises the following steps: be placed on the specimen holder in magnetic control sputtering system vacuum chamber by matrix 100 complete for pre-treatment, vacuumize; Treat that vacuum chamber internal gas pressure is evacuated to 5 × 10
-3pa and following time, pass into Ar gas and adjustable pressure to 1Pa ~ 10Pa; Open grid bias power supply, adjustment bias voltage is 500V ~ 1000V, and bias voltage dutycycle is 40% ~ 60%; Ar gas is activated into plasma body under electric field action, and matrix 100 surface complete to pre-treatment etches, and etching time is 5min ~ 50min.Plasma clean utilizes high-energy particle bombardment matrix 100 surface, the stain remained or oxide skin can be removed, make matrix 100 surface have higher cleanliness factor, strengthen the deposition quality of follow-up coating in pre-treatment.
Compared to class graphite amorphous carbon coating, tack coat 200 in the present invention and between actual water surrounding friction pair component material (stainless steel, titanium alloy, engineering ceramics etc.), there is better consistency, in order to improve the bonding force between coating and matrix 100, first at the matrix 100 surface deposition tack coat 200 after plasma cleaning, carry out the deposition of working lining 300 again, then successively alternating deposit tack coat 200 and working lining 300.
As a kind of embodiment, carbon back anti-friction wear-resistant coating adopts magnetron sputtering technique deposition.Concrete operation step is as follows:
First metal or nonmetal target power supply is opened at matrix 100 surface deposition tack coat 200, then open graphite target power supply on tack coat 200, deposit class graphite amorphous carbon layer, successively alternating deposit tack coat 200 and class graphite linings form the carbon back anti-friction wear-resistant coating of heavy thickness subsequently.
Wherein, the film of the metal simple-substance of Ti, Cr, W adopts the sputtering sedimentation acquisition under an ar atmosphere of intermediate frequency or magnetically controlled DC sputtering technology; The film of nonmetal Si adopts the sputtering sedimentation acquisition under an ar atmosphere of radio frequency or magnetically controlled DC sputtering technology; The film of the nitride of Ti, Cr, W adopts intermediate frequency or direct current reaction magnetron sputtering technology at N
2under atmosphere, sputtering sedimentation obtains; The film of the carbide of Ti, Cr, W adopts intermediate frequency or direct current reaction magnetron sputtering technology at C
2h
2under atmosphere, sputtering sedimentation obtains; Class graphite amorphous carbon film adopts the sputtering sedimentation acquisition under an ar atmosphere of magnetically controlled DC sputtering technology.
As a kind of embodiment, in the deposition process of tack coat 200 and working lining 300, in the vacuum chamber of magnetron sputtering equipment, gaseous tension is 0.5Pa ~ 1.5Pa; The electric current of medium frequency magnetron sputtering power supply is 1.5A ~ 2.5A, and the electric current of D. C magnetic control sputter power source is 1.0A ~ 2.0A, and the power of rf magnetron sputtering power supply is 300W ~ 500W.
As a kind of embodiment, in the deposition process of tack coat 200 and working lining 300, institute's biasing is the pulsed bias of 400V ~ 600V, and bias voltage dutycycle is 40% ~ 60%.
Carbon back anti-friction wear-resistant coating of the present invention, by the alternating deposit of tack coat 200 and working lining 300, achieve the heavy thickness preparation of class graphite amorphous carbon coating, the water surrounding tribological property of class graphite amorphous carbon coating excellence is made to be able to long lifetime stable performance, and the multiple solutions of alternating deposit design, further increase class graphite amorphous carbon coating in various water-based fluid environment corrosion-resistant/erosional competency.
The preparation of carbon back anti-friction wear-resistant coating of the present invention divides three steps to carry out, and the first step is the pre-treatment of matrix 100, and second step is the plasma cleaning of matrix 100, and the 3rd step is the alternating deposit of tack coat 200 and working lining 300.Describe in detail below in conjunction with specific embodiment.
Embodiment 1
The hard trim of titanium alloy ball valve is prepared above-mentioned carbon back anti-friction wear-resistant coating.In this embodiment, matrix 100 is titanium alloy ball valve, and tack coat 200 is metal Ti film, and metal Ti film becomes thickness to be the compound coating of 45 μm with class graphite amorphous carbon film alternating deposit, concrete implementation step is as follows:
1) pre-treatment
Select conventional detergent process matrix 100, the greasy dirt on the hard trim of removing titanium alloy ball valve and the foreign material adsorbed in processing, transport or long-time put procedure; Then sandblasting is carried out to the hard trim of titanium alloy ball valve, removing oxide film and machining burr; Adopt the hard trim of industrial cleaning agent ultrasonic cleaning titanium alloy ball valve again, remove the physical and chemical adsorption thing on surface further; Finally use the hard trim of rinsed with deionized water titanium alloy ball valve, put into baking oven, heating, drying surface is water stain.In this embodiment, blasting pressure is 0.3MPa, and the ultrasonic cleaning time is 20min, and oven temperature is 80 DEG C.
2) plasma clean
Titanium alloy ball valve complete for pre-treatment is placed on the specimen holder in magnetic control sputtering system vacuum chamber, vacuumizes; Treat that vacuum chamber internal gas pressure is evacuated to 5 × 10
-3time, pass into Ar gas and adjustable pressure to 1.0Pa; Open grid bias power supply, adjustment bias voltage is 1000V, and bias voltage dutycycle is 50%; Ar gas is activated into plasma body under electric field action, and etch the hard trim of the complete titanium alloy ball valve of pre-treatment, etching time is 10min.
3) magnetron sputtering alternating deposit
Ti target and graphite target are arranged on the corresponding target position of magnetron sputtering equipment respectively.Wherein, Ti target connects medium frequency magnetron sputtering power supply, and graphite target connects D. C magnetic control sputter power source, and the pressure keeping Ar gas in vacuum chamber is 1.0Pa.
First open intermediate frequency power supply, the hard trim of the titanium alloy ball valve through plasma cleaning deposits the metal Ti film of 200nm, as tack coat 200.In deposition process, the electric current arranging intermediate frequency power supply is 2.0A, and the pulsed bias that titanium alloy ball valve applies is 500V, and bias voltage dutycycle is 50%.
Subsequently at the class graphite amorphous carbon film of metal Ti film surface deposition 1300nm.In deposition process, direct supply electric current is 1.2A, and the pulsed bias that titanium alloy ball valve applies is 500V, and bias voltage dutycycle is 50%.
Alternating deposit metal Ti film and class graphite amorphous carbon film successively, 30 all after dates that circulate obtain the carbon back anti-friction wear-resistant coating that thickness is 45 μm.
Embodiment 2
Above-mentioned carbon back anti-friction wear-resistant coating is prepared on the surface of silicon nitride ceramics water lubricated bearing rolling body.In this embodiment, matrix 100 is silicon nitride ceramics water lubricated bearing rolling body, and tack coat 200 is Si film, and Si film becomes thickness to be the compound coating of 45 μm with class graphite amorphous carbon film alternating deposit, concrete implementation step is as follows:
1) pre-treatment
Adopt industrial cleaning agent ultrasonic cleaning silicon nitride ceramics water lubricated bearing rolling body, remove the physical and chemical adsorption thing on its surface; Then use rinsed with deionized water silicon nitride ceramics water lubricated bearing rolling body, put into baking oven, heating, drying surface is water stain.In this embodiment, the ultrasonic cleaning time is 20min, and oven temperature is 60 DEG C.
2) plasma clean
Silicon nitride ceramics water lubricated bearing rolling body complete for pre-treatment is placed on the specimen holder in magnetic control sputtering system vacuum chamber, vacuumizes; Treat that vacuum chamber internal gas pressure is evacuated to 5 × 10
-3time, pass into Ar gas and adjustable pressure to 1.0Pa; Open grid bias power supply, adjustment bias voltage is 1000V, and bias voltage dutycycle is 50%; Ar gas is activated into plasma body under electric field action, and etch the surface of the complete silicon nitride ceramics water lubricated bearing rolling body of pre-treatment, etching time is 10min.
3) magnetron sputtering alternating deposit
Si target and graphite target are arranged on the corresponding target position of magnetron sputtering equipment respectively.Wherein, Si target connects rf magnetron sputtering power supply, and graphite target connects D. C magnetic control sputter power source, and the pressure keeping Ar gas in vacuum chamber is 1.0Pa.
First radio-frequency power supply is opened, at the Si film of the surface deposition 300nm of the silicon nitride ceramics water lubricated bearing rolling body through plasma cleaning, as tack coat 200.In deposition process, arranging radio frequency power is 300W, and the pulsed bias that silicon nitride ceramics water lubricated bearing rolling body applies is 500V, and bias voltage dutycycle is 50%.
Subsequently at the class graphite amorphous carbon film of Si film surface deposition 1200nm.In deposition process, arranging direct supply electric current is 1.2A, and the pulsed bias that silicon nitride ceramics water lubricated bearing rolling body applies is 500V, and bias voltage dutycycle is 50%.
Alternating deposit Si film and class graphite amorphous carbon film successively, 30 all after dates that circulate obtain the carbon back anti-friction wear-resistant coating that thickness is 45 μm.
Embodiment 3
The working face of stainless steel gear is prepared above-mentioned carbon back anti-friction wear-resistant coating.In this embodiment, matrix 100 is stainless steel gear, and tack coat 200 is CrN film, and CrN film becomes thickness to be the compound coating of 40 μm with class graphite amorphous carbon film alternating deposit, concrete implementation step is as follows:
1) pre-treatment
Select conventional detergent process matrix 100, the greasy dirt on the working face of removing stainless steel gear and the foreign material adsorbed in processing, transport or long-time put procedure; Then sandblasting is carried out to the working face of stainless steel gear, removing oxide film and machining burr; Adopt the working face of industrial cleaning agent ultrasonic cleaning stainless steel gear again, remove the physical and chemical adsorption thing on surface further; Finally with the working face of rinsed with deionized water rust steel gear, put into baking oven, heating, drying surface is water stain.In this embodiment, blasting pressure is 0.3MPa, and the ultrasonic cleaning time is 30min, and oven temperature is 80 DEG C.
2) plasma clean
Stainless steel gear complete for pre-treatment is placed on the specimen holder in magnetic control sputtering system vacuum chamber, vacuumizes; Treat that vacuum chamber internal gas pressure is evacuated to 5 × 10
-3time, pass into Ar gas and adjustable pressure to 1.0Pa; Open grid bias power supply, adjustment bias voltage is 1000V, and bias voltage dutycycle is 50%; Ar gas is activated into plasma body under electric field action, and etch the working face of the complete stainless steel gear of pre-treatment, etching time is 20min.
3) magnetron sputtering alternating deposit
Cr target and graphite target are arranged on the corresponding target position of magnetron sputtering equipment respectively.Wherein, Cr target connects medium frequency magnetron sputtering power supply, and graphite target connects D. C magnetic control sputter power source, passes into N in vacuum chamber
2gas also keeps pressure to be 1.5Pa.
First open intermediate frequency power supply, the working face of the stainless steel gear through plasma cleaning deposits the CrN film of 400nm, as tack coat 200.In deposition process, the electric current arranging intermediate frequency power supply is 2.5A, and the pulsed bias that titanium alloy ball valve applies is 500V, and bias voltage dutycycle is 50%.
Subsequently at the class graphite amorphous carbon film of CrN film surface deposition 1600nm.In deposition process, arranging direct supply electric current is 1.2A, and titanium alloy ball valve applies the pulsed bias of 500V, and bias voltage dutycycle is 50%.
Alternating deposit CrN film and class graphite amorphous carbon film successively, 30 all after dates that circulate obtain the carbon back anti-friction wear-resistant coating that thickness is 40 μm.
In above embodiment tack coat 200 and the thickness of working lining 300 in deposition process constant, as a kind of embodiment, in deposition process, tack coat 200 thickness is constant, the thickness of working lining 300 successively successively decreases (thickness as tack coat 200 keeps 300nm constant, and along with the carrying out of deposition, working lining 300 is progressively reduced to 1000nm by 2000nm), then can strengthen the bonding force of coating entirety, thus make coating have more stable mechanical property and tribological property.
Utilize carbon back anti-friction wear-resistant coating of the present invention, stability and the work-ing life of the water surrounding friction pair component such as hard sealed valve, water lubricated bearing and water surrounding gear class driving member can be significantly improved, have a good application prospect in the water surrounding mechanical systems such as nuclear power equipment, fluid transmission equipment, petrochemical complex equipment and marine engineering equipment.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (9)
1. a carbon back anti-friction wear-resistant coating, is characterized in that, is the multi-layer film structure by tack coat and working lining alternating deposit;
Described tack coat is the film of a kind of simple substance in Ti, Cr, W element or nitride or carbide, or is the film of Si element;
Described working lining is class graphite amorphous carbon film, and in described class graphite amorphous carbon film, the atomic percentage conc of graphite-structure is greater than 70%.
2. carbon back anti-friction wear-resistant coating according to claim 1, is characterized in that, the thickness of described carbon back anti-friction wear-resistant coating is 10 μm ~ 50 μm, hardness is 10GPa ~ 20GPa, cut bonding force is greater than 50N, and the frictional coefficient in water surrounding is less than 0.1, and the wear rate in water surrounding is less than 10
-16m
3n
-1m
-1the order of magnitude.
3. carbon back anti-friction wear-resistant coating according to claim 1, it is characterized in that, described in every one deck, the thickness of tack coat is 100nm ~ 400nm, and described in every one deck, the thickness of working lining is 1000nm ~ 2000nm, and the Thickness Ratio of described tack coat and adjacent described working lining is 1:5 ~ 1:10.
4. carbon back anti-friction wear-resistant coating according to claim 1, is characterized in that, the cycle index of described tack coat and described working lining alternating deposit is 10 ~ 30 times.
5. a preparation method for the carbon back anti-friction wear-resistant coating described in any one of claim 1-4, is characterized in that, comprise the following steps:
Matrix is carried out pre-treatment;
The matrix surface complete to pre-treatment carries out plasma clean;
In the carbon back anti-friction wear-resistant coating described in the matrix surface deposition after plasma cleaning.
6. preparation method according to claim 5, is characterized in that, the pre-treatment of described matrix comprises the following steps:
1. matrix described in conventional detergent process is selected;
2. sandblasting is carried out to the matrix surface that 1. step obtains;
3. industrial cleaning agent is adopted to carry out ultrasonic cleaning to the matrix that 2. step obtains;
4. the matrix that 3. step obtains is placed on baking oven through rinsed with deionized water, heating, drying surface is water stain.
7. preparation method according to claim 5, is characterized in that, described plasma clean comprises the following steps:
Matrix complete for pre-treatment is placed on the specimen holder in magnetic control sputtering system vacuum chamber, vacuumizes; Treat that vacuum chamber internal gas pressure is evacuated to 5 × 10
-3during below Pa, pass into Ar gas and adjustable pressure to 1Pa ~ 10Pa; Open grid bias power supply, adjustment bias voltage is 500V ~ 1000V, and bias voltage dutycycle is 40% ~ 60%; Ar gas is activated into plasma body under electric field action, and the matrix surface complete to described pre-treatment etches, and etching time is 5min ~ 50min.
8. preparation method according to claim 5, is characterized in that, described carbon back anti-friction wear-resistant coating adopts magnetron sputtering technique deposition;
Wherein, the film of the simple substance of Ti, Cr, W adopts the sputtering sedimentation acquisition under an ar atmosphere of intermediate frequency or magnetically controlled DC sputtering technology; The film of nonmetal Si adopts the sputtering sedimentation acquisition under an ar atmosphere of radio frequency or magnetically controlled DC sputtering technology; The film of the nitride of Ti, Cr, W adopts intermediate frequency or direct current reaction magnetron sputtering technology at N
2under atmosphere, sputtering sedimentation obtains; The film of the carbide of Ti, Cr, W adopts intermediate frequency or direct current reaction magnetron sputtering technology at C
2h
2under atmosphere, sputtering sedimentation obtains; Class graphite amorphous carbon film adopts the sputtering sedimentation acquisition under an ar atmosphere of magnetically controlled DC sputtering technology.
9. preparation method according to claim 5, is characterized in that, in the deposition process of described carbon back anti-friction wear-resistant coating, concrete technology parameter is as follows:
In the vacuum chamber of magnetron sputtering equipment, gaseous tension is 0.5Pa ~ 1.5Pa; The electric current of medium frequency magnetron sputtering power supply is 1.5A ~ 2.5A, and the electric current of D. C magnetic control sputter power source is 1.0A ~ 2.0A, and the power of rf magnetron sputtering power supply is 300W ~ 500W; Power source bias is the pulsed bias of 400V ~ 600V, and bias voltage dutycycle is 40% ~ 60%.
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| CN114231898A (en) * | 2021-12-24 | 2022-03-25 | 中国电子科技集团公司第十四研究所 | High-precision high-wear-resistance titanium alloy gear forming method |
| CN115821206A (en) * | 2022-12-08 | 2023-03-21 | 中国科学院宁波材料技术与工程研究所 | Ultra-thick carbon-based composite coating with heterogeneous multilayer structure and preparation method and application thereof |
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| CN106756839A (en) * | 2016-11-16 | 2017-05-31 | 中国科学院宁波材料技术与工程研究所 | A kind of matrix surface has coating of wear-corrosion resistance and preparation method thereof |
| CN106756839B (en) * | 2016-11-16 | 2019-09-13 | 中国科学院宁波材料技术与工程研究所 | A kind of matrix surface has the coating and preparation method thereof of wear-corrosion resistance |
| CN108456883A (en) * | 2017-02-20 | 2018-08-28 | 中国科学院宁波材料技术与工程研究所 | A kind of preparation method of the carbon-based anti-friction wear-resistant film of matrix surface |
| CN107757730A (en) * | 2017-11-02 | 2018-03-06 | 江苏友邦精工实业有限公司 | A kind of novel cabin front suspension puts installing mechanism |
| CN110129727A (en) * | 2019-05-22 | 2019-08-16 | 上海佑戈金属科技有限公司 | The preparation method of pre-coated metal winding for fuel battery metal double polar plate |
| CN110894593B (en) * | 2019-11-29 | 2022-03-04 | 岭南师范学院 | Steel collar containing graphite-like carbon coating and preparation method thereof |
| CN110894593A (en) * | 2019-11-29 | 2020-03-20 | 岭南师范学院 | Steel collar containing graphite-like carbon coating and preparation method thereof |
| CN111005000A (en) * | 2019-12-25 | 2020-04-14 | 广东省新材料研究所 | Low-stress tetrahedral amorphous carbon composite membrane and preparation method thereof |
| CN111005000B (en) * | 2019-12-25 | 2021-12-28 | 广东省科学院新材料研究所 | Low-stress tetrahedral amorphous carbon composite membrane and preparation method thereof |
| CN112410727A (en) * | 2020-11-11 | 2021-02-26 | 中国科学院合肥物质科学研究院 | Novel WCrSiN gradient coating and preparation method thereof |
| CN112410727B (en) * | 2020-11-11 | 2023-04-21 | 中国科学院合肥物质科学研究院 | Novel WCrSiN gradient coating and preparation method thereof |
| CN114231898A (en) * | 2021-12-24 | 2022-03-25 | 中国电子科技集团公司第十四研究所 | High-precision high-wear-resistance titanium alloy gear forming method |
| CN115821206A (en) * | 2022-12-08 | 2023-03-21 | 中国科学院宁波材料技术与工程研究所 | Ultra-thick carbon-based composite coating with heterogeneous multilayer structure and preparation method and application thereof |
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