CN106803491A - A kind of slow lifting rack for cleaning - Google Patents
A kind of slow lifting rack for cleaning Download PDFInfo
- Publication number
- CN106803491A CN106803491A CN201710148913.1A CN201710148913A CN106803491A CN 106803491 A CN106803491 A CN 106803491A CN 201710148913 A CN201710148913 A CN 201710148913A CN 106803491 A CN106803491 A CN 106803491A
- Authority
- CN
- China
- Prior art keywords
- base plate
- plate
- lifting
- hoisting frame
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 24
- 230000007423 decrease Effects 0.000 abstract description 3
- 239000000047 product Substances 0.000 description 22
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
- B66F7/02—Lifting frames, e.g. for lifting vehicles; Platform lifts with platforms suspended from ropes, cables, or chains or screws and movable along pillars
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
- B66F7/28—Constructional details, e.g. end stops, pivoting supporting members, sliding runners adjustable to load dimensions
Abstract
The invention provides a kind of slow lifting rack for cleaning, including hoisting frame, the electric machine assembly below hoisting frame and product film magazine；Described carries the lower section that stature is located at described product film magazine, carries described product film magazine；Described electric machine assembly is located at the lower section of described hoisting frame, is connected with described hoisting frame by crawler belt.The slow lifting rack for cleaning of one kind that the present invention is provided slowly can smoothly lift by motor slow-speed or decline whole hoisting frame, product is stably put into solution, rotating speed is reduced by electric machine assembly, ensure that the space of hoisting frame may be limited in rinse bath simultaneously, the stationarity of lifting is improved, the quality of product is improved.
Description
Technical field
The present invention relates to a kind of rack for cleaning, more particularly to a kind of slow lifting rack for cleaning.
Background technology
During production of electronic components, the cleaning of silicon chip is most important, and the purpose of cleaning is to eliminate absorption in silicon chip
Each pollutant on surface, and the suede structure that can reduce surface sunshine reflection is manufactured, and the clean level of cleaning is direct
Affect the yield rate and reliability of cell piece.Making herbs into wool is first technique for manufacturing crystal silicon battery, also known as " surface-texturing ".
Effective suede structure causes that incident light, in silicon chip surface multiple reflections and refraction, increased the absorption of light, reduces reflectivity,
It is favorably improved the performance of battery.In the prior art by introducing hydrochloric acid pipeline and hydrofluoric acid pipeline simultaneously in hydrochloric acid trough,
Hydrofluoric acid pipeline and hydrochloric acid pipeline are introduced in hydrofluoric acid groove simultaneously, so that it is molten with the mixing of hydrofluoric acid easily to obtain hydrochloric acid
Liquid, conveniently carries out the cleaning of above-mentioned fine-hair maring using monocrystalline silicon slice.But silicon chip liquid level in hydrochloric acid trough is disturbed during actually cleaning
It is dynamic larger, so as to the trickle component for being opposite to silicon chip therein is likely to cause certain deformation etc..
Existing technological means is slowly to be put into rinse bath product film magazine by the crawl of manipulator, this from upper
And under modes of emplacement easily liquid level is disturbed, while take out when product position in the solution can also be disturbed,
Cause liquid surface fluctuation very big, influence the final product quality of silicon chip.
If can realize effect of slow lifting by slow-speed motor, but the decelerator of electric drilling match takes up room very
Greatly, in the case of being all solution in rinse bath, it is difficult to be distributed, for how to utilize motor rotation to turn into producer in the confined space
A great problem in manufacturing equipment.
The content of the invention
The technical problems to be solved by the invention are：A kind of slow lifting rack for cleaning is provided, product film magazine is placed in clearly
Wash and solution is placed and taken out in frame, the slow and steady of lifting process is ensured in the presence of slow-speed motor, reduce to liquid level
Disturbance.
In order to solve the above technical problems, the technical scheme is that：A kind of slow lifting rack for cleaning, including hoisting frame,
Electric machine assembly and product film magazine below hoisting frame；Described carries the lower section that stature is located at described product film magazine, carries
Described product film magazine；Described electric machine assembly is located at the lower section of described hoisting frame, is connected with described hoisting frame by crawler belt
Connect.
Described hoisting frame includes movable base plate, lifting sliding rail, sliding shelling plate, lifting tackle, limit top plate, spacing bottom
Plate, longitudinal base plate and transverse bottom plate；Described movable base plate be located at hoisting frame bottom, offseted with described spacing base plate
Touch；Described lifting sliding rail through described movable base plate, is engaged, described movable base plate with described movable base plate vertically
On described lifting sliding rail slidably；Described sliding shelling plate is located on described lifting sliding rail, is slided with described lifting
Rail is engaged, while being fixedly connected with described spacing base plate；Described limit top plate is located at the top of described lifting sliding rail,
It is fixedly connected with described lifting sliding rail；Described lifting tackle is located at the both sides of described limit top plate, spacing with described
Top board is fixedly connected, while being connected with described movable base plate and electric machine assembly respectively by crawler belt；Described spacing base plate position
In the lower section of described sliding shelling plate, one end is connected with described lifting sliding rail, and lower section offsets with described movable base plate
Touch, one end is horizontal-extending, is fixedly connected with described sliding shelling plate；Described longitudinal base plate perpendicular to described spacing base plate,
It is fixedly connected with described longitudinal base plate；Described transverse bottom plate is parallel with described spacing base plate, with described longitudinal base plate
It is fixedly connected.
Further, it is provided with sliding shaft on described movable base plate；Described sliding shaft has two, symmetrical
On described movable base plate, it is connected with described lifting tackle by crawler belt.
Further, the quantity of described lifting sliding rail, sliding shelling plate, spacing base plate and lifting tackle is consistent,
It is two, is symmetrically distributed in the both sides of described hoisting frame.
Further, some through holes are provided with described sliding shelling plate.
Further, the quantity of described longitudinal base plate is no less than four, the bottom phase of profile and described product film magazine
Coordinate.
Further, the quantity of described transverse bottom plate is no less than four, and the longitudinal base plate described in two is distributed in two-by-two
Between.
Further, described electric machine assembly includes electric baseboard, drive shaft, motor main shaft, decelerator, transmission
Pulley, spindle housing and rotating shaft base plate；Described electric baseboard is located at the bottom of described electric machine assembly, with described rotating shaft bottom
Plate is fixedly connected；Motor is located on described electric baseboard, is fixed by described motor main shaft and described decelerator
Connection；Described drive shaft extends through described decelerator to the both sides of described decelerator；Spindle housing be located at institute
The one end for the drive shaft stated, described drive shaft passes through described spindle housing；Described rotating shaft base plate is located at described turning
The lower section of pedestal, is fixedly connected with described spindle housing and electric baseboard；Described driven pulley is located at described drive shaft
One end outside, while positioned at the outside of described spindle housing, be fixedly connected with described drive shaft, by crawler belt with it is described
Hoisting frame connection.
Further, the quantity of described spindle housing and driven pulley is consistent, and is two, is symmetrically distributed in described
Decelerator both sides.
Compared with prior art, the slow lifting rack for cleaning of one kind that the present invention is provided can be slowly steady by motor slow-speed
Ground lifting declines whole hoisting frame, and product is stably put into solution, by electric machine assembly reduction rotating speed, while guarantee is carried
The space for rising frame may be limited in rinse bath, improve the stationarity of lifting, improve the quality of product.
Brief description of the drawings
Fig. 1 shows front view of the invention.
Fig. 2 shows left view of the invention.
Fig. 3 shows top view of the invention.
Fig. 4 shows the front view of electric machine assembly of the invention.
Wherein：1. product film magazine, 2. hoisting frame, 3. electric machine assembly, 4. movable base plate, 5. lifting sliding rail, 6. sliding shelling plate,
7. lifting tackle, 8. spacing base plate, 9. limit top plate, 10. longitudinal base plate, 11. transverse bottom plates, 12. through holes, 13. driven pulleies,
14. spindle housing, 15. drive shafts, 16. decelerators, 17. motor main shafts, 18. rotating shaft base plates, 19. electric baseboards, 20. are slided
Dynamic rotating shaft.
Specific embodiment
As illustrated, a kind of slow lifting rack for cleaning, including hoisting frame 2, the electric machine assembly 3 below hoisting frame and product
Product film magazine 1；Described carries the lower section that stature 2 is located at described product film magazine 1, described product film magazine 1 is carried, as mobile
Main body is used；Described electric machine assembly 3 is located at the lower section of described hoisting frame 2, is connected with described hoisting frame 2 by crawler belt,
Power needed for lifting is provided.
Described hoisting frame 2 includes movable base plate 4, lifting sliding rail 5, sliding shelling plate 6, lifting tackle 7, limit top plate 9, limit
Position base plate 8, longitudinal base plate 10 and transverse bottom plate 11；Described movable base plate 4 be located at hoisting frame 2 bottom, it is and described
Spacing base plate 8 is inconsistent, is pulled by crawler belt and is lifted or down maneuver, drives whole described hoisting frame 2 to rise or fall；
Described lifting sliding rail 5 through described movable base plate 4, is engaged, described movable base plate with described movable base plate 4 vertically
4 on described lifting sliding rail 5 slidably, used as the track of elevating movement；Described sliding shelling plate 6 is located at described
On lifting sliding rail 5, it is engaged with described lifting sliding rail 5, while being fixedly connected with described spacing base plate 8, there is provided described
Transverse strength when hoisting frame 2 is moved, keeps the stability of described product film magazine 1；Described limit top plate 9 is located at described
The top of lifting sliding rail 5, is fixedly connected with described lifting sliding rail 5, the lifting height of the described hoisting frame 2 of limitation；Described
Lifting tackle 7 is located at the both sides of described limit top plate 9, is fixedly connected with described limit top plate 9, while being distinguished by crawler belt
It is connected with described movable base plate 4 and electric machine assembly 3, motor imparts power to institute when rotating by described electric machine assembly 3
The movable base plate 4 stated, described movable base plate 4 is moved and drives whole described hoisting frame 2 to move；Described is spacing
Base plate 8 is located at the lower section of described sliding shelling plate 6, and one end is connected with described lifting sliding rail 5, lower section and described shifting
Dynamic base plate 4 is inconsistent, and one end is horizontal-extending, is fixedly connected with described sliding shelling plate 6, used as the bottom of described product film magazine 1
Plate support is used；Described longitudinal base plate 10 is fixedly connected perpendicular to described spacing base plate 8 with described spacing base plate 8, makees
For longitudinal base of described product film magazine 1 is used；Described transverse bottom plate 11 is parallel with described spacing base plate 8, and described
Longitudinal base plate 10 be fixedly connected, used as the transverse base of described product film magazine 1.
Further, sliding shaft 20 is provided with described movable base plate 4；Described sliding shaft 20 has two, right
Title is distributed on described movable base plate 4, is connected with described lifting tackle 7 by crawler belt, and crawler belt is fixed on described slip
In rotating shaft 20, draw high or decline by described lifting tackle.
Further, the quantity of described lifting sliding rail 5, sliding shelling plate 6, spacing base plate 8 and lifting tackle 7 keeps one
Cause, be two, be symmetrically distributed in the both sides of described hoisting frame 2, keep the stabilization of whole described hoisting frame 2.
Further, some through holes 12 are provided with described sliding shelling plate 6, for penetrating into and discharging the molten of cleaning
Liquid.
Further, the quantity of described longitudinal base plate 10 is no less than four, the bottom of profile and described product film magazine 1
It is engaged, fixed described product film magazine 1, it is ensured that the hoisting frame 2 described in can carry the product piece described in multiple
Box 1.
Further, the quantity of described transverse bottom plate 11 is no less than four, and the longitudinal bottom described in two is distributed in two-by-two
Between plate 10, the product film magazine 1 described in multiple can be carried.
Further, described electric machine assembly 3 includes electric baseboard 19, drive shaft 15, motor main shaft 17, deceleration
Device 16, driven pulley 13, spindle housing 14 and rotating shaft base plate 18；Described electric baseboard 19 is located at described electric machine assembly 3 most
Lower section, is fixedly connected with described rotating shaft base plate 18, is used as the fixed base plate of motor；Motor is located at described electric baseboard
On 19, it is fixedly connected with described decelerator 16 by described motor main shaft 17, for providing power；Described transmission
Rotating shaft 15 extends, for transmitting described motor master through described decelerator 16 to the both sides of described decelerator 16
The moment of torsion transmitted on axle 17；Spindle housing 14 be located at one end of described drive shaft 15, described drive shaft 15 is passed through
Described spindle housing 14, for the drive shaft 15 described in fixation；Described rotating shaft base plate 18 is located at described spindle housing 14
Lower section, is fixedly connected with described spindle housing 14 and electric baseboard 19, is used as the fixed base plate of described spindle housing 14；Institute
The driven pulley 13 stated is located at one end outside of described drive shaft 15, while positioned at the outside of described spindle housing 14, with
Described drive shaft 15 is fixedly connected, and is connected with described hoisting frame 2 by crawler belt, for transmitting mobile power.
Further, described spindle housing 14 and the quantity of driven pulley 13 are consistent, and are two, are symmetrically distributed in
The both sides of described decelerator 16, it is corresponding with described lifting tackle 7, it is ensured that the two ends translational speed of described hoisting frame 2
Unanimously.
When using, described lifting tackle 7, driven pulley 13 and sliding shaft 20 are connected by crawler belt；Described driving
Electric machine main shaft 17 is opened, and by the described reduction rotating speed of decelerator 16, is delivered on described drive shaft 15, enters described
The rotation of driven pulley 13 drives crawler belt, so as to drive described lifting tackle 7 to rotate, crawler belt pulls described sliding shaft 20
Motion upwards, drives described movable base plate 4 to move upwards, drives described spacing base plate 8 to move up, and described slip
Backplate 6 is fixedly connected with described spacing base plate 8, is moved upwards by described spacing base plate 8, and upward active force is disperseed
Onto described sliding shelling plate 6, so that by the whole described stable upward sliding of hoisting frame 2, the purpose of lifting is reached, under
During drop, by the limitation of the self gravitation and described spacing base plate 8 of described hoisting frame 2, by its slow decline.
By the way that motor and decelerator to be placed in the bottom of rinse bath, space is saved by outer track transmission, while logical
Itself mechanism design for crossing hoisting frame ensures the stationarity of motion so as to achieve the goal.
It is last it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention and non-limiting technical side
Case, it will be understood by those within the art that, those modify or equivalent to technical scheme, and
The objective and scope of the technical program are not departed from, all should be covered in the middle of scope of the presently claimed invention.
Claims (8)
1. it is a kind of slowly to lift rack for cleaning, it is characterised in that electric machine assembly and product including hoisting frame, below hoisting frame
Film magazine；Described carries the lower section that stature is located at described product film magazine, carries described product film magazine；Described electric machine assembly position
In the lower section of described hoisting frame, it is connected with described hoisting frame by crawler belt；
Described hoisting frame includes movable base plate, lifting sliding rail, sliding shelling plate, lifting tackle, limit top plate, spacing base plate, vertical
To base plate and transverse bottom plate；Described movable base plate be located at hoisting frame bottom, it is inconsistent with described spacing base plate；Institute
The lifting sliding rail stated through described movable base plate, is engaged with described movable base plate vertically, and described movable base plate is in institute
On the lifting sliding rail stated slidably；Described sliding shelling plate is located on described lifting sliding rail, with described lifting sliding rail phase
Coordinate, while being fixedly connected with described spacing base plate；Described limit top plate is located at the top of described lifting sliding rail, with institute
The lifting sliding rail stated is fixedly connected；Described lifting tackle is located at the both sides of described limit top plate, with described limit top plate
It is fixedly connected, while being connected with described movable base plate and electric machine assembly respectively by crawler belt；Described spacing base plate is located at institute
The lower section of the sliding shelling plate stated, one end is connected with described lifting sliding rail, and lower section is inconsistent with described movable base plate, and one
End is horizontal-extending, is fixedly connected with described sliding shelling plate；Described longitudinal base plate is and described perpendicular to described spacing base plate
Longitudinal base plate be fixedly connected；Described transverse bottom plate is parallel with described spacing base plate, is fixed with described longitudinal base plate and connected
Connect.
2. one kind as claimed in claim 1 is slow lifts rack for cleaning, it is characterised in that be provided with cunning on described movable base plate
Dynamic rotating shaft；Described sliding shaft has two, is symmetrically distributed on described movable base plate, is slided with described lifting by crawler belt
Wheel connection.
3. lifting rack for cleaning as claimed in claim 1 a kind of slow, it is characterised in that described lifting sliding rail, sliding shelling plate,
The quantity of spacing base plate and lifting tackle is consistent, and is two, is symmetrically distributed in the both sides of described hoisting frame.
4. the slow lifting rack for cleaning of one kind as described in claim 1 or 3, it is characterised in that set on described sliding shelling plate
There are some through holes.
5. one kind as claimed in claim 1 is slow lifts rack for cleaning, it is characterised in that the quantity of described longitudinal base plate is many
In four, profile is engaged with the bottom of described product film magazine.
6. one kind as claimed in claim 1 is slow lifts rack for cleaning, it is characterised in that the quantity of described transverse bottom plate is many
In four, it is distributed in two-by-two between the longitudinal base plate described in two.
7. one kind as claimed in claim 1 is slow lifts rack for cleaning, it is characterised in that described electric machine assembly includes motor bottom
Plate, drive shaft, motor main shaft, decelerator, driven pulley, spindle housing and rotating shaft base plate；Described electric baseboard is located at
The bottom of described electric machine assembly, is fixedly connected with described rotating shaft base plate；Motor is located on described electric baseboard, is passed through
Described motor main shaft is fixedly connected with described decelerator；Decelerator of the described drive shaft described in, to institute
The both sides of the decelerator stated extend；Spindle housing be located at one end of described drive shaft, described drive shaft passes through institute
The spindle housing stated；Described rotating shaft base plate is located at the lower section of described spindle housing, is fixed with described spindle housing and electric baseboard
Connection；Described driven pulley is located at one end outside of described drive shaft, while positioned at the outside of described spindle housing, with
Described drive shaft is fixedly connected, and is connected with described hoisting frame by crawler belt.
8. lifting rack for cleaning as claimed in claim 7 a kind of slow, it is characterised in that described spindle housing and driven pulley
Quantity is consistent, and is two, is symmetrically distributed in the both sides of described decelerator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710148913.1A CN106803491B (en) | 2017-03-14 | 2017-03-14 | Slowly promote wash rack |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710148913.1A CN106803491B (en) | 2017-03-14 | 2017-03-14 | Slowly promote wash rack |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106803491A true CN106803491A (en) | 2017-06-06 |
| CN106803491B CN106803491B (en) | 2023-11-03 |
Family
ID=58988063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710148913.1A Active CN106803491B (en) | 2017-03-14 | 2017-03-14 | Slowly promote wash rack |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106803491B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107742659A (en) * | 2017-09-25 | 2018-02-27 | 常州捷佳创精密机械有限公司 | A kind of control method of technology groove mechanical arm speed |
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| JPH0897180A (en) * | 1994-09-28 | 1996-04-12 | Dainippon Screen Mfg Co Ltd | Substrate treating apparatus |
| JPH09236382A (en) * | 1996-02-29 | 1997-09-09 | Shimatani Giken:Kk | Liquid removal device, liquid removal method and vacuum drying system |
| JP2000197858A (en) * | 1994-06-08 | 2000-07-18 | Dainippon Screen Mfg Co Ltd | Apparatus for treating substrate |
| JP2001328797A (en) * | 2000-05-22 | 2001-11-27 | Matoba Denki Seisakusho:Kk | Lift device for storage |
| CN101972751A (en) * | 2010-06-30 | 2011-02-16 | 张家港市超声电气有限公司 | Slow lifting mechanism |
| CN203285113U (en) * | 2013-06-06 | 2013-11-13 | 四川五新智能设备有限公司 | Single-motor driving type lifting transversely-moving stopping device |
| CN205056600U (en) * | 2015-09-08 | 2016-03-02 | 上海科伟达超声波科技有限公司 | Slowly, draw hoist mechanism |
| CN205324269U (en) * | 2015-12-24 | 2016-06-22 | 杭州天时轻工机械有限公司 | Soak formula belt cleaning device |
| CN206595234U (en) * | 2017-03-14 | 2017-10-27 | 苏州聚晶科技有限公司 | A kind of slow lifting rack for cleaning |
-
2017
- 2017-03-14 CN CN201710148913.1A patent/CN106803491B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000197858A (en) * | 1994-06-08 | 2000-07-18 | Dainippon Screen Mfg Co Ltd | Apparatus for treating substrate |
| JPH0897180A (en) * | 1994-09-28 | 1996-04-12 | Dainippon Screen Mfg Co Ltd | Substrate treating apparatus |
| JPH09236382A (en) * | 1996-02-29 | 1997-09-09 | Shimatani Giken:Kk | Liquid removal device, liquid removal method and vacuum drying system |
| JP2001328797A (en) * | 2000-05-22 | 2001-11-27 | Matoba Denki Seisakusho:Kk | Lift device for storage |
| CN101972751A (en) * | 2010-06-30 | 2011-02-16 | 张家港市超声电气有限公司 | Slow lifting mechanism |
| CN203285113U (en) * | 2013-06-06 | 2013-11-13 | 四川五新智能设备有限公司 | Single-motor driving type lifting transversely-moving stopping device |
| CN205056600U (en) * | 2015-09-08 | 2016-03-02 | 上海科伟达超声波科技有限公司 | Slowly, draw hoist mechanism |
| CN205324269U (en) * | 2015-12-24 | 2016-06-22 | 杭州天时轻工机械有限公司 | Soak formula belt cleaning device |
| CN206595234U (en) * | 2017-03-14 | 2017-10-27 | 苏州聚晶科技有限公司 | A kind of slow lifting rack for cleaning |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107742659A (en) * | 2017-09-25 | 2018-02-27 | 常州捷佳创精密机械有限公司 | A kind of control method of technology groove mechanical arm speed |
| WO2019056633A1 (en) * | 2017-09-25 | 2019-03-28 | 常州捷佳创精密机械有限公司 | Method for controlling speed of process tank robotic arm |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106803491B (en) | 2023-11-03 |
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