CN106783484B - Photocathode distribution X-ray generator and CT equipment with the device - Google Patents
Photocathode distribution X-ray generator and CT equipment with the device Download PDFInfo
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- CN106783484B CN106783484B CN201611162150.8A CN201611162150A CN106783484B CN 106783484 B CN106783484 B CN 106783484B CN 201611162150 A CN201611162150 A CN 201611162150A CN 106783484 B CN106783484 B CN 106783484B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/045—Electrodes for controlling the current of the cathode ray, e.g. control grids
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
Abstract
The present invention relates to X-ray technology fields, disclose a kind of photocathode distribution X-ray generator comprising：Electron emission unit, it includes driving light source, optical module and photocathode, optical module is to driving the light of light source transmitting to be reflected, focused and angle modulated, photocathode position launching electronics different in photocathode after being excited by the light of optical module angle modulated；Anode target；Vacuum tank；Control system is connect with driving light source and optical module respectively；Wherein, the light of driving light source transmitting, is irradiated to position different on photocathode after optical module angle modulated, with according to focal position on predetermined order transformation anode target.X-ray generator provided by the invention, which is not necessarily to mobile light source, can generate the X-ray at multiple visual angles to improve inspection efficiency, and reliability and stability are high.The invention also discloses a kind of photocathode distribution X-ray generating system and CT equipments.
Description
Technical field
The present invention relates to X-ray technology field, more particularly to a kind of photocathode distribution X-ray generator, and packet
X-ray generating system containing the photocathode distribution X-ray generator, and include the CT equipment of the X-ray generating system.
Background technology
X-ray has a wide range of applications in fields such as industrial nondestructive testing, safety inspection, medical diagnosis and treatments.Especially
It is that radioscopy imaging device made of the high-penetration ability using X-ray is played in the every aspect of people's daily life
Important function.This kind of equipment early stage be film type plane perspective imaging device, current advanced technology be digitlization, regard more
Angle and high-resolution stereoscopic imaging apparatus, such as CT (computed tomography), can obtain high-definition three
Solid figure or sectioning image are tieed up, is advanced high-end applications.
In existing CT equipment, X-ray generator needs move on slip ring, in order to improve inspection speed, usual X
The movement velocity of ray generating device is very high, causes the reliability and stability of equipment entirety to reduce, in addition, by movement velocity
Limitation, the inspection speed of CT is also restricted, therefore checks less efficient.In addition, the x-ray source of such equipment is in slip ring
Upper movement causes equivalent x-ray source focus to become larger so that imaging picture there are motion artifacts, poor definition is right
Some smaller contrabands there is a possibility that missing inspection.And such equipment can only check the object of static (or slowly movement)
Body, for the object of movement, it is virtually impossible at 3 dimensional drawing.
Using carbon nanotube as cold cathode, and array arrangement is carried out to cold cathode, utilizes the voltage of cathode grid interpolar
Flied emission is controlled, to control each cathode launching electronics in order, bombards target spot by respective sequence position on anode, at
For distributed X-ray source.But there are production technology complexity, the emissivities of the carbon nanotube shortcomings not high with the service life.
Using hot cathode as electron emission unit, and array arrangement is carried out to hot cathode, using between hot cathode grid
Voltage control electronics transmitting, to control each cathode launching electronics in order, on anode press respective sequence position
Target spot is bombarded, distributed X-ray source is become.But there are production technology complexity, the shortcomings of cathode heat management complexity.
Invention content
(1) technical problems to be solved
It is an object of the present invention to provide a kind of photocathode distribution X-ray generator, the X-ray generator without
It light source need to be moved can generate the x-ray source at multiple visual angles to improve and check efficiency and image definition, and reliability and steady
Qualitative height.
It is a further object to provide a kind of photocathodes including above-mentioned photocathode distribution X-ray generator
Distributed X-ray generating system.
It is also another object of the present invention to provide a kind of CT equipments including photocathode distribution X-ray generating system.
(2) technical solution
In order to solve the above technical problem, the present invention provides a kind of photocathode distribution X-ray generators, wherein
Including：
Electron emission unit, the electron emission unit include driving light source, optical module and photocathode, the driving light
Source is used to carry out reflection and angle modulated, institute to the light of the driving light source transmitting for emitting light, the optical module
Photocathode is stated by launching electronics after the excitation of the light after optical module reflection and angle modulated；
Anode target, the bombardment for the electron beam which is emitted by photocathode and generate X-ray；
Vacuum tank, the vacuum tank are provided on vacuum tank for penetrating for encapsulating photocathode and anode target
The light entrance window of light and for through X-ray X-ray exit window；
Control system, the control system are connect with the driving light source and optical module of electron emission unit respectively；
Wherein, driving light source transmitting light, by optical module reflection and angle modulated after, transmitted light entrance window and
Position different on photocathode is irradiated to according to predetermined order so that the photocathode is in different position launching electronics, to press
According to the focal position on predetermined order transformation anode target, to which different positions on the anode target emits X-ray.
Wherein, the optical module is high-velocity scanning galvanometer.
Wherein, the high-velocity scanning galvanometer includes galvanometer eyeglass, is connect with galvanometer eyeglass and drives galvanometer lens movement
High speed rock motor, with rock at a high speed motor connect for control at a high speed rock the frequency of motor and the SERVO CONTROL system of angle
System, the position sensor of frequency and scanning angle for monitoring galvanometer eyeglass in real time, and obtained from the position sensor
The frequency and scanning angle of galvanometer eyeglass and the degeneration factor for feeding back to servo-control system.
Wherein, further include the compensating electrode being located in vacuum tank, for providing suitable field strength to photocathode.
Wherein, further include the focusing electrode being located in vacuum tank, the electron beam for being generated to the photocathode carries out
It focuses.
Wherein, high pressure is connected between the photocathode and anode target, the high pressure connection is grounded for photocathode, and anode target connects
Positive high voltage.
Wherein, high pressure is connected between the photocathode and anode target, the high pressure connection is grounded for anode target, and photocathode connects
Negative high voltage.
The invention also discloses a kind of photocathode distribution X-ray generating systems comprising multiple above-mentioned photocathodes point
Cloth X-ray generator.
Wherein, multiple photocathode distribution X-ray generators are arranged in a linear or circular arrangement.
The invention also discloses a kind of CT equipments comprising above-mentioned photocathode distribution X-ray generating system.
(3) advantageous effect
Photocathode distribution X-ray generator provided by the invention is adjusted by changing the scanning angle of optical module
The incidence angle of light processed so that light beats different positions on photocathode according to predetermined order, to change anode target indirectly
The position of upper focus so that the distribution X-ray generator, which is not necessarily to mobile light source, can generate the X-ray at multiple visual angles, from
And improve and check efficiency and image definition, the apparatus structure is simple, system is stable, reliability is high.In addition, the device can be right
Small prohibited items, which clearly distinguish, to be come；And quick three-dimensional three-dimensional imaging can be carried out to the object of movement.
Description of the drawings
Fig. 1 is the structural schematic diagram according to one embodiment of the photocathode distribution X-ray generator of the present invention；
Fig. 2 is the structural schematic diagram according to another embodiment of the photocathode distribution X-ray generator of the present invention；
Fig. 3 is the operating diagram according to the high-velocity scanning galvanometer of the photocathode distribution X-ray generator of the present invention；
Fig. 4 is according to the photocathode distribution X-ray generating system according to straight line arrangement of the invention and its control is
The schematic diagram of system；
Fig. 5 is the schematic diagram according to the photocathode distribution X-ray generating system according to annular arrangement of the present invention；And
Fig. 6 is the working timing figure according to the photocathode distribution X-ray generating system of the present invention.
In figure, 100：Laser；110：High-velocity scanning galvanometer；111：Galvanometer eyeglass；112：Servo-control system；113：It is high
Speed rocks motor；120：Photocathode；130：Anode target；140：Vacuum chamber；150：Laser；160：Electron beam；170：X-ray；
180：Compensating electrode；190：Focusing electrode；200：Compensate focusing power supply；210：High voltage power supply；220：High-voltage connection device.
Specific implementation mode
With reference to the accompanying drawings and examples, the specific implementation mode of the present invention is described in further detail.Following instance
For illustrating the present invention, but it is not limited to the scope of the present invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
Can also be electrical connection to be mechanical connection；It can be directly connected, can also indirectly connected through an intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Fig. 1 shows a preferred embodiment of photocathode distribution X-ray generator according to the present invention, such as Fig. 1
Shown, which includes electron emission unit, anode target 130, vacuum tank 140 and control system (not shown).
Wherein, electron emission unit includes laser 100, high-velocity scanning galvanometer 110 and photocathode 120.Laser 100 is for emitting
Light 150, in this embodiment, laser can also be replaced with the driving light source of other transmitting light, specifically regarding photocathode 120
Depending on material；The high-velocity scanning galvanometer 110 is used to carry out reflection and angle modulated to the light 150 of driving light source transmitting, so that
Light is irradiated to position different on photocathode 120；Photocathode 120 is used for by the reflection of high-velocity scanning galvanometer 110 and angle tune
Light after system excites electronics；The bombardment for the electron beam 160 that anode target 130 is generated by photocathode 120 and generate X-ray 170；
The vacuum tank 140 is provided on vacuum tank 140 for transmitted light for encapsulating photocathode 120 and anode target 130
Light entrance window and for through X-ray 170 X-ray exit window；Control system respectively with the laser of electron emission unit
100 and high-velocity scanning galvanometer 110 connect, the co-ordination for controlling laser 100 and high-velocity scanning galvanometer 110 so that swash
The light that light device 100 is launched can beat the preset position on photocathode 120；Wherein, the light that laser 100 emits
150, after the reflection of high-velocity scanning galvanometer 110 and angle modulated, time is irradiated to according to predetermined order through light entrance window
Different position on pole 120, the different position launching electronics of photocathode 120, with according on predetermined order transformation anode target 130
Focal position, to which different positions on the anode target 130 emits X-ray 170.
Photocathode distribution X-ray generator provided by the present invention by adjusting high-velocity scanning galvanometer 110 scanning
Angle modulates the incidence angle of light 150 so that laser beats different positions on photocathode 120, to change anode indirectly
The position of focus on target 130.It in the case where not moving light source, can thus generate the X-ray 170 at multiple visual angles.
Control system includes the optical module control module being connect with high-velocity scanning galvanometer 110 and is connect with laser 100
Driving light source control module, optical module control module mainly controls the co-ordination of optical module, drives light source control mould
Block mainly controls the co-ordination of laser 100 according to the synchronizing signal that high-velocity scanning galvanometer 110 provides, as shown in Figure 4.
The high-velocity scanning galvanometer includes galvanometer eyeglass 111, is connect with galvanometer eyeglass 111 and galvanometer eyeglass 111 is driven to move
High speed rock motor 113, servo-control system 112, position sensor (not shown), degeneration factor (not shown), such as Fig. 3
It is shown.Wherein, the control of servo-control system 112 high speed rocks motor 113, rock at a high speed motor 113 drive galvanometer eyeglass 111 by
The frequency and angle vibration at high speed given according to servo-control system 112 is got up, and position sensor for monitoring galvanometer eyeglass in real time
The working status parameters such as 111 vibration angle and frequency, and by degeneration factor by the instantaneous operating conditions of galvanometer eyeglass 111
Parameter feedback is to servo-control system 112, and servo-control system 112 is according to the instantaneous operating conditions parameter pair of galvanometer eyeglass 111
Control parameter does corresponding adjustment, so that it is guaranteed that the vibration precision of galvanometer eyeglass 111.The photocathode distribution X-ray fills
Setting the running parameters such as the vibration angle and frequency by controlling high-velocity scanning galvanometer can make galvanometer eyeglass 111 to the driving light
The light that source 110 emits carries out angle modulated, so that light is radiated at position different on photocathode 120, in photocathode
120 different position launching electronics realize multiple light courcess.
It should be noted that other optical modules that can adjust scanning angle can also be used in high-velocity scanning galvanometer 110.
Specifically, the laser beam that galvanometer eyeglass 111 is reflected in different angle is spatially positioned in a plane, such as
Plane in Fig. 3 where three dotted lines.Assuming that from galvanometer eyeglass 111 to photocathode 120 in plane where return laser beam
Nearest laser beam is central axes, then the laser beam of other angles is symmetrical about axis, it is assumed that other laser
Light beam and the angle of central axes areIt (shown in Fig. 3, is determined by galvanometer eyeglass 111, usuallyLaser reflection light
Angle between 120 plane of incidence of plane where beam and photocathode be θ (shown in Fig. 1,0 °<θ<90 °), the initial hot spot of laser is
The circle of diameter of phi, then laser beam beats the light spot shape of the different location on photocathode 120, will to become one (just/tiltedly) ellipse
Circle, the elliptical major semiaxis size are：
Short axle half-size scale is：
WhenWhen being 0 °, laser beam along axis line reflection, spot that laser beam is beaten on photocathode 120 be one just
It is oval；WhenWhen not being 0 °, the spot that laser beam is beaten on photocathode 120 is one tiltedly oval, and tiltedly elliptical inclination angle
WithThe variation at angle and change.Therefore it is also likely to be one tiltedly oval that electron emission face, which may be a positive ellipse,.WhenThe change at angle
Change between -20 ° to 20 °, can be approximately consideredThereforeShadow of the variation at angle actually to electron beam focal spot size
Sound is very little, can not be considered.It is therefore preferable that
The photocathode distribution X-ray generator further includes the compensating electrode 180 being located in vacuum tank 140, compensation
Electrode 180 is used to provide a suitable field strength to 120 surface of photocathode, ensures the electronics energy emitted from photocathode 120
It is accelerated as soon as possible, is drifted away from 120 surface of photocathode, reduce influence of the space-charge force to electron emission.
Further, which further includes the focusing electrode being located in vacuum tank 140
190, the photoelectron of the focus divergent in the form of electrostatic lenses of focusing electrode 190, to constrain electron beam, in anode target
The focus of moderate size and shape is obtained on 130.The electron beam that photocathode 120 emits is adjusted under the action of focusing electrode 190
The electron beam of specific shape is made, which generates the X-ray of specific focal point size with the interaction of anode target 130.
In this embodiment, high pressure is connected between photocathode 120 and anode target 130, the high pressure connection of the high voltage is
Photocathode 120 is grounded, and compensating electrode 180 is in positive low pressure (about 20kV) with focusing electrode 190, and anode target 130 is in positive high voltage.
Specifically, focusing electrode 190, compensating electrode 180 are connect by high-voltage connection device 220 with compensation focusing power supply 200, anode target
130 are connect by another high-voltage connection device 220 with high voltage power supply 210.
In another embodiment of the invention, anode target 130 is grounded, photocathode 120, compensating electrode 180, focusing electrode
190 are in negative high-voltage end (as shown in Figure 2).Specifically, photocathode 120, compensating electrode 180, focusing electrode 190 pass through high pressure
Attachment device 220 is connect with high voltage power supply 210.
Due to 110 scanning angle of power limit and high-velocity scanning galvanometer (being usually ± 20 °) and speed of laser 100
Limitation, using a photocathode distribution X-ray generator realize quantity of light source it is limited, in order to obtain more light
Source, the invention also discloses a kind of photocathode distribution X-ray generating systems comprising multiple photocathode distribution X-ray hairs
Generating apparatus is spliced.Optionally, this multiple photocathode distribution X-ray generator is arranged in a linear, as shown in Figure 4.It can
Selection of land, this multiple photocathode distribution X-ray generator is arranged in a ring, as shown in Figure 5.For sake of simplicity, in Fig. 4 and Fig. 5
The relativeness between laser 100, high-velocity scanning galvanometer 110, photocathode 120 is only gived, compensating electrode 180 focuses electricity
The devices such as pole 190, anode target 130, high voltage power supply 210 do not provide, but its method for arranging is consistent with Fig. 1.Preferably, above-mentioned multiple
Photocathode distribution X-ray generator arranged at equal intervals.
In figures 4 and 5, it is referred to as laser facula that our laser, which beat the point of launching electronics on photocathode 120, for convenience
It describes, laser facula, laser 100 and high-velocity scanning galvanometer 110 is numbered in Fig. 4.Fig. 4 gives using 5 light
The distributed X-ray generating system that cathode distribution X-ray generator is spliced, each photocathode distribution X-ray hair
The laser facula quantity of generating apparatus is 20, then structure shown in Fig. 4 includes 100 light sources in total.
Its workflow is approximately as the optical module control module of control system is first pressed requirement configuration high-speed and scanned
The vibration frequency and scanning angle of galvanometer 110 start all 110 vibration at high speed of high-velocity scanning galvanometer, and provide synchronization
Signal；After all high-velocity scanning 110 the operation is stable of galvanometer, light source control module is first turned on laser 100a, and control swashs
The synchronizing signal that light device 100a is provided according to high-velocity scanning galvanometer 110a according to high-velocity scanning galvanometer 110a frequency (or high speed
The integral multiple of scanning galvanometer frequency) transmitting laser pulse, and the hot spot for completing high-velocity scanning galvanometer 110a institutes overlay area is scanned,
It is then shut off laser 100a, and then opens laser 100b, the scanning work of laser 100a is repeated, then opens laser
Device 100c ....After all laser faculas are fully completed scanning, it is achieved that the light source light extraction of a cycle.Next weight
Multiple above-mentioned work carries out the light extraction of next cycle.
Theoretical calculation is as follows.
For existing CT devices and Detection Techniques, under conditions of 10mA electronic beam currents practice shooting and generate X-ray, usually
It is required that the time of imaging is not less than 50 μ s, the total charge dosage of electronic beam current is needed to be at this time：
τ=5.0 × 10 Q=I-7C (3)
If being used as cathode material using lead (being not limited to), it is assumed that its quantum efficiency QE=5 × 10-4, galvanometer eyeglass it is anti-
Efficiency eta ≈ 1 is penetrated, then the laser light subnumber needed is：
If driving the photocathode, the energy of single laser photon to be using the ultraviolet laser of wavelength X=266nm：
The laser energy so needed in an imaging pulse is：
W=N0ε=4.67mJ (6)
If selecting single pulse energy WL=1.0mJ, pulsewidth tL=50ns, frequency fL=20kHz, wavelength X=266nm, swash
The laser of light diameter of phi=2mm, then the laser pulse number that an imaging pulse (beating on the same laser facula) needs is：
Assuming that light source number (laser facula number) is N=100, using 5 lasers and 5 high-velocity scanning galvanometers, then one
A laser and a high-velocity scanning galvanometer, which need to coordinate, gets 20 electronic launching points (laser facula), as shown in Figure 4.Together
When, complete a full light sources scanning time be：
The general power of laser is at this time：
PL=WL·fL=20W (9)
Further, it is also possible to the roughness by improving 120 surface of photocathode, or in the side such as 120 surface coating of photocathode
Method improves the quantum efficiency of photocathode, then the time for completing the scanning of a full light sources can be shorter, while can also reduce sharp
The power of light.Therefore it is feasible to make the scheme of photocathode distribution X-ray generator using photocathode 120.
In addition, since the quantum efficiency QE of photocathode 120 is usually 10-4Magnitude, in laser oblique incidence to photocathode 120
Reflectivity it is relatively low, can approximatively think that the power that almost laser is all is deposited on photocathode 120 and generates heat, that
Total heating power P of photocathode 120HThe as power P of laser 100L≈20W.And if making 100 using hot cathode
Distributed light source, it is assumed that the heating power of each hot cathode is about 8W, then total heating power is up to 800W, therefore uses light
Cathode 120 makes distributed X-ray source will be simply many in terms of cathode heat management.
Estimate below the spot size parameter and laser and photocathode 120 of laser action on photocathode 120 it
Between angle theta size.Due to the single pulse energy W of laserL=1.0mJ, pulsewidth tL=50ns, then laser pulse acts on
The photoelectric current I of 120 moment of photocathodeLFor
Assuming that the saturation photocurrent density I of 120 material of photocathodem=60A/cm2.So laser facula acts on photocathode
The area S on 120 surfaces is not less than：
Since the hot spot that laser and photocathode 120 act on is an ellipse, elliptical major semiaxis and semi-minor axis be be not a,
B, then having：
π·a·b≥S (12)
Formula (1), (2) are brought into above formula and can obtained：
Diameter of phi=2mm is the spot diameter of incident laser in formula.
When laser is in different angleWhen reflection, angle, θ needs to meet：
I.e.：
θ≤61.75° (15)
Fig. 6 gives using 5 photocathode distribution X-ray generators, and each photocathode distribution X-ray fills
It is equipped with the sequence diagram of the photocathode distribution X-ray generating system work of 20 laser faculas.After system initialization, start first
All high-velocity scanning galvanometers 110 work together, and then start laser 110a according to the synchronizing signal of high-velocity scanning galvanometer 110
Work, the 1st to the 5th laser pulse that control laser 110a is sent out all is beaten in the position of laser facula 1, to drive time
120 launching electronics of pole, the electronics impinge upon generation X-ray 170 on anode target 130, are used as under the acceleration of high voltage electric field
It is imaged for the first time, referred to herein as first imaging pulse, i.e. imaging pulse 1 in Fig. 5.Then system control laser 100a
The the 6th to the 10th laser pulse sent out is all beaten in the position of laser facula 2, and above-mentioned work is repeated, and is completed second and is imaged.When
After all laser faculas of light source unit 100a all scan through, laser 100a is closed, opens laser 100b, repeats laser
Then laser 100c ... is opened in the work of 100a, until 5 lasers have all worked one time, all laser faculas
It all scans through, just completes the scanning of first time full light sources at this time.Next again since light source unit 1 next cycle scanning
Work.
In addition, Fig. 4 and system shown in fig. 5 are the 5 lasers switch operatings in turn used, actually each laser
Mean power be：
The invention also discloses a kind of CT equipments comprising photocathode distribution X-ray generating system as described above.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
With within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention god.
Claims (8)
1. a kind of photocathode distribution X-ray generator, which is characterized in that including：
Electron emission unit, the electron emission unit include driving light source, optical module and photocathode, and the driving light source is used
In transmitting light, the optical module is used to carry out reflection and angle modulated, the light to the light of the driving light source transmitting
Cathode is by launching electronics after the excitation of the light after optical module reflection and angle modulated；
Anode target, the bombardment for the electron beam which is emitted by photocathode and generate X-ray；
Vacuum tank, the vacuum tank are provided on vacuum tank for transmitted light for encapsulating photocathode and anode target
Light entrance window and for through X-ray X-ray exit window；
Control system, the control system are connect with the driving light source and optical module of electron emission unit respectively；
The optical module is high-velocity scanning galvanometer, and the high-velocity scanning galvanometer includes galvanometer eyeglass, is connect simultaneously with galvanometer eyeglass
Drive galvanometer lens movement high speed rock motor, with rock at a high speed motor connect for control at a high speed rock motor frequency and
The servo-control system of angle, the position sensor of frequency and scanning angle for monitoring galvanometer eyeglass in real time, and from institute
State frequency and scanning angle and the degeneration factor for feeding back to servo-control system that position sensor obtains galvanometer eyeglass；Its
In, the light that the galvanometer eyeglass is reflected in different angle is spatially positioned in a plane, and the galvanometer eyeglass is anti-
Be mapped to the photocathode nearest light and the galvanometer lens reflecting to the angle between other light of the photocathode
For
Wherein, driving light source transmitting light, by optical module reflection and angle modulated after, transmitted light entrance window and according to
Predetermined order is irradiated to position different on photocathode so that the photocathode is in different position launching electronics, with according to pre-
The focal position on sequential transformations anode target is determined, to which different positions on the anode target emits X-ray.
2. photocathode distribution X-ray generator as described in claim 1, which is characterized in that further include being located at vacuum to hold
Compensating electrode in device, for providing suitable field strength to photocathode.
3. photocathode distribution X-ray generator as described in claim 1, which is characterized in that further include being located at vacuum to hold
Focusing electrode in device, the electron beam for being generated to the photocathode are focused.
4. photocathode distribution X-ray generator as described in claim 1, which is characterized in that the photocathode and anode
High pressure is connected between target, the high pressure connection is grounded for photocathode, and anode target connects positive high voltage.
5. photocathode distribution X-ray generator as described in claim 1, which is characterized in that the photocathode and anode
High pressure is connected between target, the high pressure connection is grounded for anode target, and photocathode connects negative high voltage.
6. a kind of photocathode distribution X-ray generating system, which is characterized in that including multiple such as any one of claim 1-5
The photocathode distribution X-ray generator.
7. photocathode distribution X-ray generating system as claimed in claim 6, which is characterized in that multiple photocathodes point
Cloth X-ray generator is arranged in a linear or circular arrangement.
8. a kind of CT equipment, which is characterized in that be including photocathode distribution X-ray as claimed in claims 6 or 7
System.
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| CN107464734A (en) * | 2017-09-18 | 2017-12-12 | 同方威视技术股份有限公司 | Distributed X-ray source and its control method and CT equipment |
| CN108922842A (en) * | 2018-06-13 | 2018-11-30 | 山东航天电子技术研究所 | Modulated X-ray generator and method based on microchannel plate |
| CN112512196A (en) * | 2019-09-16 | 2021-03-16 | 清华大学 | Array type X-ray source and X-ray imaging equipment |
| CN115524353A (en) * | 2022-11-24 | 2022-12-27 | 之江实验室 | X-ray photoacoustic and CT fusion bimodal imaging device and method |
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| CN1788682A (en) * | 2004-11-02 | 2006-06-21 | 通用电气公司 | Electron emitter assembly and method for generating electron beams |
| CN101494149A (en) * | 2008-01-21 | 2009-07-29 | 通用电气公司 | Field emitter based electron source for multiple spot x-ray |
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| US8600003B2 (en) * | 2009-01-16 | 2013-12-03 | The University Of North Carolina At Chapel Hill | Compact microbeam radiation therapy systems and methods for cancer treatment and research |
| US9520260B2 (en) * | 2012-09-14 | 2016-12-13 | The Board Of Trustees Of The Leland Stanford Junior University | Photo emitter X-ray source array (PeXSA) |
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| CN1788682A (en) * | 2004-11-02 | 2006-06-21 | 通用电气公司 | Electron emitter assembly and method for generating electron beams |
| CN101494149A (en) * | 2008-01-21 | 2009-07-29 | 通用电气公司 | Field emitter based electron source for multiple spot x-ray |
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