CN106783484A - Photocathode distribution X-ray generator and the CT equipment with the device - Google Patents
Photocathode distribution X-ray generator and the CT equipment with the device Download PDFInfo
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- CN106783484A CN106783484A CN201611162150.8A CN201611162150A CN106783484A CN 106783484 A CN106783484 A CN 106783484A CN 201611162150 A CN201611162150 A CN 201611162150A CN 106783484 A CN106783484 A CN 106783484A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/045—Electrodes for controlling the current of the cathode ray, e.g. control grids
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The present invention relates to X-ray technology field, a kind of photocathode distribution X-ray generator is disclosed, it includes：Electron emission unit, it includes driving light source, optical module and photocathode, optical module is reflected, is focused on and angle modulated to the light for driving light source transmitting, photocathode be subject to the light of optical module angle modulated to excite after in the different position launching electronics of photocathode；Plate target；Vacuum tank；Control system, it is connected with light source and optical module is driven respectively；Wherein, the light of light source transmitting is driven, by being irradiated to positions different on photocathode after optical module angle modulated, with according to focal position on predefined procedure conversion plate target.The X-ray generator that the present invention is provided can just produce the X-ray at multiple visual angles so as to improve inspection efficiency without mobile light source, and reliability and stability are high.There is system and CT equipment the invention also discloses a kind of photocathode distribution X-ray.
Description
Technical field
The present invention relates to X-ray technology field, more particularly to a kind of photocathode distribution X-ray generator, and bag
There is system in the X-ray containing photocathode distribution X-ray generator, and the CT equipment of system occurs comprising the X-ray.
Background technology
X-ray has a wide range of applications in fields such as industrial nondestructive testing, safety inspection, medical diagnosis and treatments.Especially
It is that the radioscopy imaging device being made using the high-penetration ability of X-ray is played in the every aspect of people's daily life
Important function.This kind equipment early stage be film type plane perspective imaging device, current advanced technology be digitlization, regard more
Angle and high-resolution stereoscopic imaging apparatus, such as CT (computed tomography), can obtain the three of fine definition
Dimension solid figure or sectioning image, are advanced high-end applications.
In existing CT equipment, X-ray generator needs to be moved on slip ring, in order to improve inspection speed, usual X
The movement velocity of ray generating device is very high, causes the reliability and stability reduction that equipment is overall, additionally, receiving movement velocity
Limitation, the inspection speed of CT is also restricted, therefore checks less efficient.In addition, the x-ray source of this kind equipment is in slip ring
Upper motion, causes equivalent x-ray source focus to become big so that the picture of imaging there are motion artifacts, poor definition is right
Some less contrabands there is a possibility that missing inspection.And this kind equipment can only check the thing of static (or slow motion)
Body, for the object for moving, it is virtually impossible into 3 dimensional drawing.
Using CNT as cold cathode, and array arrangement is carried out to cold cathode, using the voltage of cathode grid interpolar
Control Flied emission, so as to control each negative electrode launching electronics in order, target spot is bombarded on anode by respective sequence position, into
It is distributed X-ray source.But, there is complex manufacturing, the emissivities of CNT and life-span weak point not high.
Using hot cathode as electron emission unit, and array arrangement is carried out to hot cathode, using between hot cathode grid
Voltage control the transmitting of electronics, so as to control each negative electrode launching electronics in order, respective sequence position is pressed on anode
Bombardment target spot, as distributed X-ray source.But, there is the complicated weak point of complex manufacturing, negative electrode heat management.
The content of the invention
(1) technical problem to be solved
It is an object of the present invention to provide a kind of photocathode distribution X-ray generator, the X-ray generator without
Light source need to be moved just can produce the x-ray source at multiple visual angles to check efficiency and image definition so as to improve, and reliability with surely
Qualitative height.
It is a further object to provide a kind of photocathode comprising above-mentioned photocathode distribution X-ray generator
There is system in distributed X-ray.
There is the CT equipment of system comprising photocathode distribution X-ray it is also another object of the present invention to provide a kind of.
(2) technical scheme
In order to solve the above-mentioned technical problem, the invention provides a kind of photocathode distribution X-ray generator, wherein,
Including：
Electron emission unit, the electron emission unit includes driving light source, optical module and photocathode, the driving light
Source is used to launch light, and the optical module is used to reflect and angle modulated the light of the driving light source transmitting, institute
State photocathode and excited rear launching electronics by the light after optical module reflection and angle modulated；
Plate target, the plate target is subject to the bombardment of the electron beam of photocathode transmitting and produces X-ray；
Vacuum tank, the vacuum tank is used to encapsulate photocathode and plate target, is provided with for passing through on vacuum tank
The light entrance window of light and the X-ray exit window for passing through X-ray；
Control system, the control system is connected with the driving light source and optical module of electron emission unit respectively；
Wherein, drive light source transmitting light, by optical module reflection and angle modulated after, transmitted light entrance window and
Be irradiated to positions different on photocathode according to predefined procedure so that the photocathode in different position launching electronics, to press
According to the focal position on predefined procedure conversion plate target, so as to different position transmitting X-rays on the plate target.
Wherein, the optical module is high-velocity scanning galvanometer.
Wherein, the high-velocity scanning galvanometer includes galvanometer eyeglass, and galvanometer lens movement is connected and driven with galvanometer eyeglass
At a high speed rock motor, with high speed rock motor connection for control high speed rock the frequency of motor and the SERVO CONTROL system of angle
System, the position sensor of frequency and scanning angle for real-time monitoring galvanometer eyeglass, and obtained from the position sensor
The frequency and scanning angle of galvanometer eyeglass simultaneously feed back to the degeneration factor of servo-control system.
Wherein, also including the compensating electrode in vacuum tank, for providing suitable field intensity to photocathode.
Wherein, also including the focusing electrode in vacuum tank, for being carried out to the electron beam that the photocathode is produced
Focus on.
Wherein, high pressure is connected between the photocathode and plate target, the high pressure connection is grounded for photocathode, and plate target connects
Positive high voltage.
Wherein, high pressure is connected between the photocathode and plate target, the high pressure connection is grounded for plate target, and photocathode connects
Negative high voltage.
There is system the invention also discloses a kind of photocathode distribution X-ray, it includes multiple above-mentioned photocathodes point
Cloth X-ray generator.
Wherein, multiple photocathode distribution X-ray generators are arranged in a linear or circular arrangement.
The invention also discloses a kind of CT equipment, it includes that above-mentioned photocathode distribution X-ray occurs system.
(3) beneficial effect
The photocathode distribution X-ray generator that the present invention is provided, is adjusted by changing the scanning angle of optical module
The incidence angle of light processed so that light beats different positions on photocathode according to predefined procedure, so as to change plate target indirectly
The position of upper focus so that the distributed X-ray generator can just produce the X-ray at multiple visual angles without mobile light source, from
And improve and check efficiency and image definition, the apparatus structure is simple, system stable, reliability is high.Additionally, the device can be right
Small prohibited items are clearly distinguished and；And quick three-dimensional three-dimensional imaging can be carried out to the object for moving.
Brief description of the drawings
Fig. 1 is the structural representation of the one embodiment according to photocathode of the invention distribution X-ray generator；
Fig. 2 is the structural representation of another embodiment according to photocathode of the invention distribution X-ray generator；
Fig. 3 is the operating diagram of the high-velocity scanning galvanometer according to photocathode of the invention distribution X-ray generator；
Fig. 4 is according to the photocathode distribution X-ray generation system and its control system arranged according to straight line according to the present invention
The schematic diagram of system；
Fig. 5 is that the photocathode distribution X-ray according to annular arrangement according to the present invention occurs the schematic diagram of system；And
Fig. 6 is that the working timing figure of system occurs according to photocathode of the invention distribution X-ray.
In figure, 100：Laser；110：High-velocity scanning galvanometer；111：Galvanometer eyeglass；112：Servo-control system；113：It is high
Speed rocks motor；120：Photocathode；130：Plate target；140：Vacuum chamber；150：Laser；160：Electron beam；170：X-ray；
180：Compensating electrode；190：Focusing electrode；200：Compensation focusing power supply；210：High voltage power supply；220：High-voltage connection device.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the invention is described in further detail.Following instance
For illustrating the present invention, but it is not limited to the scope of the present invention.
In the description of the invention, it is necessary to illustrate, unless otherwise clearly defined and limited, term " installation ", " phase
Company ", " connection " should be interpreted broadly, for example, it may be being fixedly connected, or being detachably connected, or be integrally connected；Can
Being to mechanically connect, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, Ke Yishi
Two connections of element internal.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood at this
Concrete meaning in invention.
Fig. 1 shows a preferred embodiment of photocathode distribution X-ray generator of the invention, such as Fig. 1
Shown, the X-ray generator includes electron emission unit, plate target 130, vacuum tank 140 and control system (not shown).
Wherein, electron emission unit includes laser 100, high-velocity scanning galvanometer 110 and photocathode 120.Laser 100 is used to launch
Light 150, in this embodiment, laser can also be replaced with other driving light sources for launching light, specifically regarding photocathode 120
Depending on material；The high-velocity scanning galvanometer 110 is used to reflect and angle modulated the light 150 for driving light source transmitting, so that
Light is irradiated to positions different on photocathode 120；Photocathode 120 is used to be subject to the reflection of high-velocity scanning galvanometer 110 and angle to adjust
Light after system excites electronics；Plate target 130 is subject to the bombardment of the electron beam 160 of the generation of photocathode 120 and produces X-ray 170；
The vacuum tank 140 is used to encapsulate photocathode 120 and plate target 130, is provided with for transmitted light on vacuum tank 140
Light entrance window and the X-ray exit window for passing through X-ray 170；Control system respectively with the laser of electron emission unit
100 and high-velocity scanning galvanometer 110 connect, the co-ordination for controlling laser 100 and high-velocity scanning galvanometer 110 so that swash
The light that light device 100 is launched can beat the position set in advance on photocathode 120；Wherein, the light of the transmitting of laser 100
150, by after the reflection of high-velocity scanning galvanometer 110 and angle modulated, time being irradiated to according to predefined procedure through light entrance window
Different position on pole 120, the different position launching electronics of photocathode 120, with according on predefined procedure conversion plate target 130
Focal position, so as to different position transmitting X-rays 170 on the plate target 130.
Photocathode provided by the present invention distribution X-ray generator is by adjusting the scanning of high-velocity scanning galvanometer 110
Angle modulates the incidence angle of light 150 so that laser beats different positions on photocathode 120, so as to change anode indirectly
The position of focus on target 130.In the case where light source is not moved, can thus produce the X-ray 170 at multiple visual angles.
Control system includes the optical module control module being connected with high-velocity scanning galvanometer 110 and is connected with laser 100
Driving light source control module, the co-ordination of optical module control module major control optical module, drive light source control mould
The main synchronizing signal be given according to high-velocity scanning galvanometer 110 of block controls the co-ordination of laser 100, as shown in Figure 4.
The high-velocity scanning galvanometer includes galvanometer eyeglass 111, is connected and drives galvanometer eyeglass 111 to move with galvanometer eyeglass 111
High speed rock motor 113, servo-control system 112, position sensor (not shown), such as degeneration factor (not shown), Fig. 3
It is shown.Wherein, the control of servo-control system 112 rocks motor 113 at a high speed, rock at a high speed motor 113 drive galvanometer eyeglass 111 by
The frequency and angle vibration at high speed given according to servo-control system 112 are got up, and position sensor is used for real-time monitoring galvanometer eyeglass
The working status parameters such as 111 vibration angle and frequency, and by degeneration factor by the instantaneous operating conditions of galvanometer eyeglass 111
Parameter feedback is to servo-control system 112, instantaneous operating conditions parameter pair of the servo-control system 112 according to galvanometer eyeglass 111
Control parameter does corresponding adjustment, so that it is guaranteed that the vibration precision of galvanometer eyeglass 111.Photocathode distribution X-ray is filled
Putting can make 111 pairs, the galvanometer eyeglass driving light by controlling the running parameters such as the vibration angle and frequency of high-velocity scanning galvanometer
The light of the transmitting of source 110 carries out angle modulated, so that light is radiated at positions different on photocathode 120, so as in photocathode
120 different position launching electronics, realize multiple light courcess.
It should be noted that high-velocity scanning galvanometer 110 can also adjust the optical module of scanning angle using other.
Specifically, galvanometer eyeglass 111 is spatially positioned in a plane in the laser beam that different angle reflections go out, such as
Plane in Fig. 3 where three dotted lines.Assuming that from galvanometer eyeglass 111 to photocathode 120 in plane where return laser beam
Nearest laser beam is axis, then the laser beam of other angles is symmetrical on axis, it is assumed that other laser
Light beam is with the angle of axis(shown in Fig. 3, determined by galvanometer eyeglass 111, generallyLaser reflection light
The angle between plane and the plane of incidence of photocathode 120 where beam be θ (shown in Fig. 1,0 °<θ<90 °), the initial hot spot of laser is
The circle of diameter of phi, then laser beam beats the light spot shape of the diverse location on photocathode 120, and will to become one (just/tiltedly) ellipse
Round, the oval major semiaxis size is：
Short axle half-size scale is：
WhenFor 0 ° when, laser beam along axis line reflection, the spot that laser beam is beaten on photocathode 120 be one just
It is oval；WhenWhen being not 0 °, the spot that laser beam is beaten on photocathode 120 is one tiltedly oval, and tiltedly oval inclination angle
WithThe change at angle and change.Therefore electron emission face is probably that a positive ellipse is also likely to be one tiltedly oval.WhenThe change at angle
Change between -20 ° to 20 °, can be approximately consideredThereforeThe change at angle is actually to the shadow of electron beam focal spot size
Sound is very little, can not be considered.It is therefore preferable that
Photocathode distribution X-ray generator also includes the compensating electrode 180 in vacuum tank 140, compensation
Electrode 180 is used to provide a suitable field intensity to the surface of photocathode 120, it is ensured that from the electronic energy that photocathode 120 is emitted
It is accelerated as soon as possible, is drifted away from the surface of photocathode 120, reduces influence of the space-charge force to electron emission.
Further, photocathode distribution X-ray generator also includes the focusing electrode in vacuum tank 140
190, the photoelectron of the focus divergent in the form of electrostatic lenses of focusing electrode 190, so that electron beam is constrained, with plate target
The focus of moderate size and shape is obtained on 130.The electron beam of the transmitting of photocathode 120 is adjusted in the presence of focusing electrode 190
The electron beam of given shape is made, the electron beam interacts with plate target 130 and produces the X-ray of specific focal point size.
In this embodiment, high pressure is connected between photocathode 120 and plate target 130, the high-tension high pressure connection is
Photocathode 120 is grounded, and compensating electrode 180 is in positive low pressure (about 20kV) with focusing electrode 190, and plate target 130 is in positive high voltage.
Specifically, focusing electrode 190, compensating electrode 180 are connected by high-voltage connection device 220 with compensation focusing power supply 200, plate target
130 are connected by another high-voltage connection device 220 with high voltage power supply 210.
In another embodiment of the invention, plate target 130 is grounded, photocathode 120, compensating electrode 180, focusing electrode
190 are in negative high-voltage end (as shown in Figure 2).Specifically, photocathode 120, compensating electrode 180, focusing electrode 190 pass through high pressure
Attachment means 220 are connected with high voltage power supply 210.
Due to the power limit and the scanning angle of high-velocity scanning galvanometer 110 (usually ± 20 °) and speed of laser 100
Limitation, the quantity of light source realized using photocathode distribution X-ray generator is limited, in order to obtain more light
, there is system in source, it includes multiple photocathode distribution X-ray hairs the invention also discloses a kind of photocathode distribution X-ray
Generating apparatus are spliced.Alternatively, this multiple photocathode distribution X-ray generator is arranged in a linear, as shown in Figure 4.Can
Selection of land, this multiple photocathode distribution X-ray generator are arranged in a ring, as shown in Figure 5.For sake of simplicity, in Fig. 4 and Fig. 5
Only give the relativeness between laser 100, high-velocity scanning galvanometer 110, photocathode 120, compensating electrode 180, focusing electricity
The devices such as pole 190, plate target 130, high voltage power supply 210 are not given, but its method for arranging is consistent with Fig. 1.Preferably, above-mentioned multiple
Photocathode distribution X-ray generator is arranged at equal intervals.
In figures 4 and 5, it is called laser facula that our laser beat the point of launching electronics on photocathode 120, for convenience
Narration, is numbered in Fig. 4 to laser facula, laser 100 and high-velocity scanning galvanometer 110.Fig. 4 is given using 5 light
There is system, each photocathode distribution X-ray hair in the distributed X-ray that negative electrode distribution X-ray generator is spliced
The laser facula quantity of generating apparatus is 20, then the structure shown in Fig. 4 includes 100 light sources altogether.
Its workflow is approximately as the optical module control module of control system is first scanned by use requirement configuration high-speed
The vibration frequency and scanning angle of galvanometer 110, start all of vibration at high speed of high-velocity scanning galvanometer 110 and get up, and provide synchronization
Signal；After all of 110 working stability of high-velocity scanning galvanometer, light source control module is first turned on laser 100a, and control swashs
The synchronizing signal that light device 100a is given according to high-velocity scanning galvanometer 110a according to high-velocity scanning galvanometer 110a frequency (or at a high speed
The integral multiple of scanning galvanometer frequency) transmitting laser pulse, and the hot spot for completing high-velocity scanning galvanometer 110a institutes overlay area is scanned,
Laser 100a is then shut off, laser 100b is and then opened, the scanning work of laser 100a is repeated, laser is then opened
Device 100c ....After all of laser facula is fully completed scanning, the light source light extraction of a cycle is achieved that.Next it is heavy
Multiple above-mentioned work carries out the light extraction of next cycle.
Theoretical calculation is as follows.
For existing CT devices and Detection Techniques, under conditions of 10mA electronic beam currents are practiced shooting and produce X-ray, generally
It is required that the time of imaging is not less than 50 μ s, the total charge dosage for now needing electronic beam current is：
Q=I τ=5.0 × 10-7C (3)
If using lead (being not limited to) as cathode material, it is assumed that its quantum efficiency QE=5 × 10-4, galvanometer eyeglass it is anti-
Efficiency eta ≈ 1 is penetrated, then the laser light subnumber for needing is：
If the energy that the photocathode, single laser photon is driven using the Ultra-Violet Laser of wavelength X=266nm is：
The laser energy for so being needed in an imaging pulse is：
W=N0ε=4.67mJ (6)
If from single pulse energy WL=1.0mJ, pulsewidth tL=50ns, frequency fL=20kHz, wavelength X=266nm, swash
The laser of light diameter of phi=2mm, then the laser pulse number that imaging pulse (beating on same laser facula) needs is：
Assuming that light source number (laser facula number) is N=100, using 5 lasers and 5 high-velocity scanning galvanometers, then one
Individual laser and a high-velocity scanning galvanometer need cooperation to get 20 electronic launching points (laser facula), as shown in Figure 4.Together
When, the time for completing the scanning of full light sources is：
Now the general power of laser is：
PL=WL·fL=20W (9)
Further, it is also possible to pass through to improve the roughness on the surface of photocathode 120, or in the side such as surface coating of photocathode 120
Method improves the quantum efficiency of photocathode, then the time for completing a full light sources scanning can be shorter, while can also reduce sharp
The power of light.Therefore it is feasible using the scheme of the making photocathode distribution X-ray generator of photocathode 120.
Further, since the quantum efficiency QE of photocathode 120 is generally 10-4Magnitude, in laser oblique incidence to photocathode 120
Reflectivity it is relatively low, can approx think that almost all of power of laser is deposited on photocathode 120 and produces heat, that
Total heating power P of photocathode 120HThe as power P of laser 100L≈20W.And if making 100 using hot cathode
Distributed light source, it is assumed that the heating power of each hot cathode is about 8W, then total heating power is up to 800W, therefore uses light
Negative electrode 120 makes distributed X-ray source will be simply many in terms of negative electrode heat management.
Estimate below the spot size parameter and laser and photocathode 120 of laser action on photocathode 120 it
Between angle theta size.Due to the single pulse energy W of laserL=1.0mJ, pulsewidth tL=50ns, then laser pulse is acted on
The photoelectric current I of the moment of photocathode 120LFor
Assuming that the saturation photocurrent density I of the material of photocathode 120m=60A/cm2.So laser facula acts on photocathode
The area S on 120 surfaces is not less than：
Because the hot spot of laser and the effect of photocathode 120 is an ellipse, oval major semiaxis and semi-minor axis for not Wei a,
B, then have：
π·a·b≥S (12)
Formula (1), (2) are brought into above formula and can obtained：
Diameter of phi=2mm is the spot diameter of incident laser in formula.
When laser is in different anglesDuring reflection, angle, θ needs to meet：
I.e.：
θ≤61.75° (15)
Fig. 6 is given using 5 photocathode distribution X-ray generators, and each photocathode distribution X-ray is filled
There is the timing diagram of system work in the photocathode distribution X-ray for being equipped with 20 laser faculas.After system initialization, start first
All of high-velocity scanning galvanometer 110 works together, and then the synchronizing signal according to high-velocity scanning galvanometer 110 starts laser 110a
Work, the 1st to the 5th laser pulse that control laser 110a sends all is beaten in the position of laser facula 1, so as to drive time
The launching electronics of pole 120, the electronics impinges upon generation X-ray 170 on plate target 130 under the acceleration of high voltage electric field, is used as
It is imaged for the first time, referred to herein as first imaging pulse, i.e. imaging pulse 1 in Fig. 5.Then system controls laser 100a
The 6th for sending all is beaten in the position of laser facula 2 to the 10th laser pulse, repeats above-mentioned work, completes second and is imaged.When
After all laser faculas of light source cell 100a are all scanned through, laser 100a is closed, open laser 100b, repeat laser
The work of 100a, then opens laser 100c ..., until 5 lasers have all worked one time, all of laser facula
All scan through, now just complete the scanning of first time full light sources.Next again since light source cell 1 next cycle scanning
Work.
In addition, the system shown in Fig. 4 and Fig. 5 is 5 lasers for using switch operating, actually each laser in turn
Mean power be：
The invention also discloses a kind of CT equipment, it includes that photocathode distribution X-ray as described above occurs system.
Presently preferred embodiments of the present invention is the foregoing is only, is not intended to limit the invention, it is all in essence of the invention
Within god and principle, any modification, equivalent substitution and improvements made etc. should be included within the scope of the present invention.
Claims (10)
1. a kind of photocathode distribution X-ray generator, it is characterised in that including：
Electron emission unit, the electron emission unit includes driving light source, optical module and photocathode, the driving light source to use
In transmitting light, the optical module is used to reflect and angle modulated the light of the driving light source transmitting, the light
Negative electrode is excited rear launching electronics by the light after optical module reflection and angle modulated；
Plate target, the plate target is subject to the bombardment of the electron beam of photocathode transmitting and produces X-ray；
Vacuum tank, the vacuum tank is used to encapsulate photocathode and plate target, is provided with for transmitted light on vacuum tank
Light entrance window and for through X-ray X-ray exit window；
Control system, the control system is connected with the driving light source and optical module of electron emission unit respectively；
Wherein, drive light source transmitting light, by optical module reflection and angle modulated after, transmitted light entrance window and according to
Predefined procedure is irradiated to positions different on photocathode so that the photocathode in different position launching electronics, with according to pre-
The focal position on sequential transformations plate target is determined, so as to different position transmitting X-rays on the plate target.
2. photocathode as claimed in claim 1 distribution X-ray generator, it is characterised in that the optical module is height
Fast scanning galvanometer.
3. photocathode as claimed in claim 2 distribution X-ray generator, it is characterised in that the high-velocity scanning galvanometer
Including galvanometer eyeglass, it is connected and drive the high speed of galvanometer lens movement to rock motor with galvanometer eyeglass, rocking motor with high speed connects
Connect for control at a high speed rock the frequency of motor and the servo-control system of angle, for real-time monitoring galvanometer eyeglass frequency and
The position sensor of scanning angle, and obtain the frequency and scanning angle of galvanometer eyeglass from the position sensor and feed back to
The degeneration factor of servo-control system.
4. the distributed X-ray generator of photocathode as any one of claim 1-3, it is characterised in that also include
Compensating electrode in vacuum tank, for providing suitable field intensity to photocathode.
5. the distributed X-ray generator of photocathode as any one of claim 1-3, it is characterised in that also include
Focusing electrode in vacuum tank, for being focused to the electron beam that the photocathode is produced.
6. the distributed X-ray generator of photocathode as any one of claim 1-3, it is characterised in that the light
High pressure is connected between negative electrode and plate target, the high pressure connection is grounded for photocathode, and plate target connects positive high voltage.
7. the distributed X-ray generator of photocathode as any one of claim 1-3, it is characterised in that the light
High pressure is connected between negative electrode and plate target, the high pressure connection is grounded for plate target, and photocathode connects negative high voltage.
8. there is system in a kind of photocathode distribution X-ray, it is characterised in that including multiple such as any one of claim 1-7
Described photocathode distribution X-ray generator.
9. there is system in photocathode distribution X-ray as claimed in claim 8, it is characterised in that multiple photocathodes point
Cloth X-ray generator is arranged in a linear or circular arrangement.
10. a kind of CT equipment, it is characterised in that be including photocathode as claimed in claim 8 or 9 distribution X-ray
System.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107464734A (en) * | 2017-09-18 | 2017-12-12 | 同方威视技术股份有限公司 | Distributed X-ray source and its control method and CT equipment |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107464734A (en) * | 2017-09-18 | 2017-12-12 | 同方威视技术股份有限公司 | Distributed X-ray source and its control method and CT equipment |
| CN107464734B (en) * | 2017-09-18 | 2024-04-26 | 同方威视技术股份有限公司 | Distributed X-ray light source, control method thereof and CT equipment |
| CN108922842A (en) * | 2018-06-13 | 2018-11-30 | 山东航天电子技术研究所 | Modulated X-ray generator and method based on microchannel plate |
| CN112512196A (en) * | 2019-09-16 | 2021-03-16 | 清华大学 | Array type X-ray source and X-ray imaging equipment |
| RU2774675C1 (en) * | 2021-12-03 | 2022-06-21 | Александр Николаевич Якунин | Photoemitter matrix x-ray source |
| CN115524353A (en) * | 2022-11-24 | 2022-12-27 | 之江实验室 | X-ray photoacoustic and CT fusion bimodal imaging device and method |
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