CN106773397A - Array base palte and preparation method thereof, liquid crystal display device - Google Patents
Array base palte and preparation method thereof, liquid crystal display device Download PDFInfo
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- CN106773397A CN106773397A CN201611217589.6A CN201611217589A CN106773397A CN 106773397 A CN106773397 A CN 106773397A CN 201611217589 A CN201611217589 A CN 201611217589A CN 106773397 A CN106773397 A CN 106773397A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
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- Crystallography & Structural Chemistry (AREA)
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
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- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides a kind of array base palte and preparation method thereof, liquid crystal display device, it is related to display technology field, for solving the problems, such as during the compression of available liquid crystal display device because Zhou Bianqu liquid crystal arrangement disorders cause display bad.Wherein, the array base palte includes the piezoelectric part in Zhou Bianqu；The piezoelectric part includes first electrode, second electrode and the piezoelectric material layer being arranged between the first electrode and the second electrode, the first electrode is each electrically connected from the second electrode with different voltage signal ends, the first surface of the piezoelectric material layer is contacted with the first electrode, and the second surface of the piezoelectric material layer is contacted with the second electrode.Array base palte of the invention is applied in liquid crystal display device, is driven liquid crystal display device to carry out picture and is shown.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of array base palte and preparation method thereof, liquid crystal display device.
Background technology
LCDs is that a kind of to use liquid crystal be the display of material.Liquid crystal is organising between solid-state and liquid
Compound, under electric field action, liquid crystal molecule can occur the change in arrangement, so that the change by its light is influenceed, it is this
The change of light can show as the change of light and shade by the effect of polaroid.So, people just can be by the control to electric field
The light and shade change of the final control light of system, so as to reach the purpose of display image.In LCDs is applied to terminal device
When, it will usually touch-screen is sticked on LCDs, increases the application of LCDs.
It is mounted and complete mounted that the laminating type of touch-screen can substantially be divided into frame.It is to use double faced adhesive tape by touch-screen that frame is mounted
With the Four built in boundaries of LCDs, there is the space of air filling between LCDs and touch-screen, when touch-screen is subject to
During ambient pressure, touch-screen will not be directly passed to liquid crystal display due to the deformation that pressure is produced, but act on liquid first
Space between crystal display screen and touch-screen, therefore LCDs will not be made to produce compared with large deformation.This kind of laminating type liquid crystal
The anti-pressure ability of display device is preferable, but reflective obvious between LCDs and touch-screen, and display effect is poor.
With the requirement being thinned to liquid crystal display device, the laminating type of touch-screen progressively switches helps mounted, full patch
Formula is that touch-screen, LCDs pasted into a kind of mode together completely in seamless mode, complete mounted to dispense
Space between LCDs and touch-screen, makes screen thickness become thinner.
At present, due to eliminating the space between LCDs and touch-screen, when touch-screen is subject to ambient pressure, touch
Screen is touched because the deformation that pressure is produced is directly acted on liquid crystal display, liquid crystal display is produced compared with large deformation, liquid crystal
Liquid crystal at the corresponding compression of display screen will be spread from pixel region to Zhou Bianqu, cause Zhou Bianqu liquid crystal molecules to be assembled, when liquid crystal is poly-
The arrangement of liquid crystal gets muddled when collecting excessive, Zhou Bianqu and the optics of pixel region is shown difference occur, so as to cause display not
It is good, for example, it is bad water ripples occur.
The content of the invention
The present invention provides a kind of array base palte and preparation method thereof, liquid crystal display device, solves available liquid crystal display dress
Because Zhou Bianqu liquid crystal arrangement disorders cause the bad problem of display when putting compression.
To reach above-mentioned purpose, the present invention is adopted the following technical scheme that：
The first aspect of the present invention provides a kind of array base palte, including pixel region and Zhou Bianqu, the array base palte bag
Underlay substrate is included, and is arranged on the underlay substrate and in the piezoelectric part of the Zhou Bianqu；The piezoelectric part includes first
Electrode, second electrode and the piezoelectric material layer being arranged between the first electrode and the second electrode, first electricity
Pole each electrically connects from the second electrode with different voltage signal ends, the first surface of the piezoelectric material layer and described
One electrode contact, the second surface of the piezoelectric material layer is contacted with the second electrode.
Compared with prior art, in the array base palte that the present invention is provided, piezoelectric part is set in the Zhou Bianqu of array base palte, when
When array base palte is subject to ambient pressure, believed by the different voltage being connected with second electrode from the first electrode of piezoelectric part respectively
Number hold to the first electrode voltage different from second electrode applying, make to form voltage difference between first electrode and second electrode, by
Piezoelectric material layer between inverse piezoelectric effect, therefore first electrode and second electrode in the presence of extra electric field, send out by volume
It is raw to shrink, so as to produce redundant space above piezoelectric part, produced redundant space can accommodate due to ambient pressure to
The liquid crystal of Zhou Bianqu diffusions, also avoids the aggregation of Zhou Bianqu liquid crystal so that the liquid crystal arrangement of Zhou Bianqu in order, improves liquid
The picture quality of crystal device.
The second aspect of the present invention provides a kind of liquid crystal display device, including color membrane substrates, array base palte and is located in
Therebetween liquid crystal layer, the array base palte is above-mentioned array base palte.
Compared with prior art, the beneficial effect of liquid crystal display device provided by the present invention and above-mentioned array base palte
Beneficial effect is identical, will not be repeated here.
The third aspect of the present invention provides a kind of preparation method of array base palte, including：One underlay substrate is provided；Institute
The Zhou Bianqu for stating underlay substrate forms first electrode, and the first electrode is electrically connected with a voltage signal end；Described
The piezoelectric material layer being in contact with the first electrode is formed on one electrode；Formed on the piezoelectric material layer and the piezoelectricity
The second electrode that material layer is in contact, and the second electrode is electrically connected with another voltage signal end.
Compared with prior art, the beneficial effect of the preparation method of array base palte provided by the present invention and above-mentioned array
The beneficial effect of substrate is identical, will not be repeated here.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
The structural representation of the array base palte that Fig. 1 is provided by the embodiment of the present invention one；
Fig. 2 is the Volume Changes schematic diagram of piezoelectric part when array base palte is by ambient pressure in Fig. 1；
The distribution schematic diagram of the piezoelectric part of the array base palte that Fig. 3 is provided by the embodiment of the present invention one；
The distribution schematic diagram of the piezoelectric part of the array base palte that Fig. 4 is provided by the embodiment of the present invention two；
Each block diagram of the preparation method of the array base palte that Fig. 5~10 are provided by the embodiment of the present invention four.
Description of reference numerals：
2- weeks border area of 1- pixel regions
3- underlay substrate 4- piezoelectric parts
401- first electrode 402- second electrodes
403- piezoelectric material layer 4031- first surfaces
4032- second surfaces the second conductive layers of 5-
6- insulating barrier 601- filling slots
7- the first conductive layer 8- color membrane substrates
9- liquid crystal layer 10- Source and drain metal levels
11- glue frames the second conductive films of 12-
Specific embodiment
To enable the above objects, features and advantages of the present invention more obvious understandable, implement below in conjunction with the present invention
Accompanying drawing in example, is clearly and completely described to the technical scheme in the embodiment of the present invention.Obviously, described embodiment
Only a part of embodiment of the invention, rather than whole embodiments.Based on the embodiment in the present invention, the common skill in this area
All other embodiment that art personnel are obtained on the premise of creative work is not made, belongs to the model of present invention protection
Enclose.
It should be noted that in the present invention, pixel region is the region in array base palte for display picture, and Zhou Bianqu is battle array
It is used to arrange the region of edge cabling in row substrate, Zhou Bianqu is around pixel region.
Embodiment one
Referring to Fig. 1, the embodiment of the present invention one provides a kind of array base palte, including pixel region 1 and Zhou Bianqu 2, the array
Substrate includes underlay substrate 3, and is arranged on underlay substrate 3 and the piezoelectric part in Zhou Bianqu 24；Piezoelectric part 4 includes the first electricity
Pole 401, second electrode 402 and the piezoelectric material layer 403 being arranged between first electrode 401 and second electrode 402, first
Electrode 401 is each electrically connected from second electrode 402 with different voltage signal end (not shown)s, piezoelectric material layer 403
First surface 4031 is contacted with first electrode 401, and the second surface 4032 of piezoelectric material layer 403 is contacted with second electrode 402.
It should be noted that so-called " first surface " and " second surface " are to illustrate piezoelectric material layer 403 and first
Electrode 401 is two different surfaces with the surface that second electrode 402 is in contact and names.Exemplary, " first surface "
The concretely lower surface of piezoelectric material layer 403, i.e. one side of the piezoelectric material layer 403 towards underlay substrate 3；" second surface " has
Body can be the upper surface of piezoelectric material layer 403, i.e. one side of the piezoelectric material layer 403 towards liquid crystal layer 9.
In the array base palte that the embodiment of the present invention one is provided, piezoelectric part 4 is set in the Zhou Bianqu 2 of array base palte, works as array
When substrate is subject to ambient pressure, by the different electricity being connected with second electrode 402 from the first electrode 401 of piezoelectric part 4 respectively
Pressure signal end applies different voltages to first electrode 401 from second electrode 402, make first electrode 401 and second electrode 402 it
Between form voltage difference, because the piezoelectric material layer 403 between inverse piezoelectric effect, therefore first electrode 401 and second electrode 402 exists
In the presence of extra electric field, volume shrinks, produced so as to produce redundant space in the top of piezoelectric part 4 referring to Fig. 2
Redundant space can accommodate the liquid crystal spread to Zhou Bianqu 2 due to ambient pressure, also avoid the poly- of the liquid crystal of Zhou Bianqu 2
Collection so that the liquid crystal arrangement of Zhou Bianqu 2 in order, improves the picture quality of liquid crystal display device.
Further, the array base palte also includes：Arranged stacked is in the first conductive layer 7, insulating barrier 6 on underlay substrate 3
And second conductive layer 5, the first conductive layer 7 and the second conductive layer 5 are in pixel region 1；In order to simplify preparation technology, so as in array
In the preparation process of substrate, the conductive layer 7 of first electrode 401 and first can be formed simultaneously, the conductive layer of second electrode 402 and second
5 can be formed simultaneously, it is preferable that the conductive layer 7 of first electrode 401 and first is set with layer, and second electrode 402 and second is conductive
Layer 5 is set with layer.It is further preferred that the Zhou Bianqu 2 of insulating barrier 6 be provided with it is relative with first electrode 401 and second electrode 402
That answers penetrates the filling slot 601 of insulating barrier 6, and piezoelectric material layer 403 is located in filling slot 601, it is achieved thereby that piezoelectric material layer
First surface contacted with first electrode, the second surface of piezoelectric material layer is contacted with second electrode.
In order to further simplify preparation technology, first electrode 401 is connected with the first conductive layer 7；Second electrode 402 with
Second conductive layer 5 separates, and the two is connected to same voltage signal end.So, the current potential of the first conductive layer 7 and first electrode 401
Current potential it is identical, share a voltage signal end；The current potential of the second conductive layer 5 is identical with the current potential of second electrode 402, shares one
Individual voltage signal end.
Under normal circumstances, conventional array base palte includes pixel electrode and public electrode, the first conductive layer 7 concretely as
Plain electrode, the second conductive layer 5 concretely public electrode；Or, the first conductive layer 7 concretely public electrode, second is conductive
The concretely pixel electrode of layer 5.The preparation process of the first electrode of piezoelectric part and second electrode is compatible with and prepares pixel electrode
In the processing step of public electrode, so that without additionally increasing the step of first electrode and second electrode is manufactured separately.
The present embodiment is not limited specifically the arrangement of piezoelectric part 4 with quantity, it is preferable that the quantity of piezoelectric part 4 is many
It is individual, it is equally spaced in Zhou Bianqu 2, referring to Fig. 3.Multiple piezoelectric parts 4 are equally spaced in Zhou Bianqu 2, can be accommodated more
Many liquid crystal spread to Zhou Bianqu 2 due to ambient pressure, make the liquid crystal arrangement of Zhou Bianqu 2 more orderly, further improve liquid
The picture quality of crystal device.
For the selection of piezoelectric, because the preparation of liquid crystal display device inside film layer generally uses depositing operation, because
The formation material of this piezoelectric material layer 403 is preferably inorganic piezoelectric material, and inorganic piezoelectric material is inorganic molecules material, heavy
Film is more readily formed during product.
Embodiment two
The array base-plate structure of the embodiment of the present invention two is essentially identical with embodiment one, and its difference is that piezoelectric part 4 is arranged
Mode.
The piezoelectric part 4 of the embodiment of the present invention two is frame-type, referring to Fig. 4.Whole Zhou Bianqu 2 is respectively provided with piezoelectric part 4, Neng Gourong
Receive it is more due to ambient pressure to Zhou Bianqu 2 spread liquid crystal, make the liquid crystal arrangement of Zhou Bianqu 2 more orderly, further carry
The picture quality of liquid crystal display device high.
Embodiment three
The embodiment of the present invention three provides a kind of liquid crystal display device, and the liquid crystal display device includes color membrane substrates 8, array
Substrate and liquid crystal layer 9 therebetween is located in, array base palte is the array base palte of embodiment one or embodiment two.
The liquid crystal display device that the embodiment of the present invention three is provided applies the array base palte of embodiment one or embodiment two, when
When liquid crystal display device is subject to ambient pressure, by what is be connected with second electrode 402 with the first electrode 401 of piezoelectric part 4 respectively
Different voltage signal ends applies different voltages to first electrode 401 from second electrode 402, makes first electrode 401 and second
Voltage difference is formed between electrode 402, due to the piezoresistive material between inverse piezoelectric effect, therefore first electrode 401 and second electrode 402
In the presence of extra electric field, volume shrinks the bed of material 403, produced so as to produce redundant space in the top of piezoelectric part 4
Redundant space can accommodate the liquid crystal spread to Zhou Bianqu 2 due to ambient pressure, also avoid the poly- of the liquid crystal of Zhou Bianqu 2
Collection so that the liquid crystal arrangement of Zhou Bianqu 2 in order, improves the picture quality of liquid crystal display device.
The liquid crystal display device that the embodiment of the present invention three is provided is particularly suited for the touch liquid prepared with full laminating type
Crystal device.Full laminating type is that touch-screen, LCDs are pasted into one kind together completely in seamless mode
Mode, because device eliminates the space between LCDs and touch-screen, when touch-screen is subject to ambient pressure, touch-screen
Because the deformation that pressure is produced is directly acted on liquid crystal display, liquid crystal display is set to produce compared with large deformation, LCDs
Liquid crystal at corresponding compression will be spread from pixel region to Zhou Bianqu, cause Zhou Bianqu liquid crystal molecules to be assembled, when liquid crystal was assembled
The arrangement of liquid crystal gets muddled when many, Zhou Bianqu and the optics of pixel region is shown difference occur, so as to cause to show bad, example
Such as, there are water ripples bad.The liquid crystal display device provided using the embodiment of the present invention three, when touch-screen is subject to ambient pressure
When, the pressure is directly passed to liquid crystal display device by touch-screen, the volume contraction of piezoelectric part 4 with inverse piezoelectric effect, so that
In the top of piezoelectric part 4 generation redundant space, produced redundant space can be accommodated and spread to Zhou Bianqu 2 due to ambient pressure
Liquid crystal, also avoid the aggregation of the liquid crystal of Zhou Bianqu 2 so that the liquid crystal arrangement of Zhou Bianqu 2 in order, is improve with full laminating side
The picture quality of touch sensitive liquid crystal display device prepared by formula.
It should be noted that the liquid crystal display device in the present embodiment can be liquid crystal panel, Electronic Paper, mobile phone, flat board
Any product or part with display function such as computer, television set, display, notebook computer, DPF, navigator.
Example IV
The embodiment of the present invention four provides a kind of preparation method of array base palte, referring to Fig. 5~10, it is adaptable to prepares and implements
The array base palte of example one or embodiment two, the preparation method comprises the following steps：
One underlay substrate 3 is provided；
First electrode 401 is formed in the Zhou Bianqu 2 of underlay substrate 3, and first electrode 401 is electrically connected with a voltage signal end
Connect, referring to Fig. 5；
The piezoelectric material layer 403 that formation is in contact with first electrode 401 in first electrode 401, referring to Fig. 6~Fig. 8；
The second electrode 402 that formation is in contact with piezoelectric material layer 403 on piezoelectric material layer 403, and make second electrode
402 electrically connect with another voltage signal end, referring to Fig. 9~Figure 10.
In the preparation method of the array base palte that the embodiment of the present invention four is provided, first is formd in the Zhou Bianqu of array base palte
Electrode 401, piezoelectric material layer 403 and second electrode 402, three constitute piezoelectric part, so as to make piezoelectricity using inverse piezoelectric effect
The volume in portion is shunk, and redundant space is produced above piezoelectric part to accommodate the liquid spread to Zhou Bianqu due to ambient pressure
Crystalline substance, improves the picture quality of liquid crystal display device.
Further, as shown in figure 5, in order to simplify preparation technology, first electrode is formed in the Zhou Bianqu of underlay substrate 3
Also include while 401：The first conductive layer 7 is formed in the pixel region of underlay substrate 3.Specifically, this forms the first conduction simultaneously
The step of layer 7 and first electrode 401, includes：The depositing first conductive film on underlay substrate 3, the first conductive film is in pixel
Used as the first conductive layer 7, the first conductive film is in the part of Zhou Bianqu 2 as first electrode 401 for the part in area.
Further, as shown in Fig. 9~Figure 10, in order to simplify preparation technology, formed and piezoelectricity on piezoelectric material layer 403
Also include while second electrode 402 that material layer 403 is in contact：The second conductive layer 5 is formed in the pixel region of insulating barrier 6.
Specifically, the step of forming the second conductive layer 5 and second electrode 402 simultaneously includes：It is being formed with piezoelectric material layer
Depositing second conductive film 12 on 403 underlay substrate 3, the portion of material of the second conductive film 12 is removed using patterning processes,
Form the second conductive layer 5 and the second electrode in Zhou Bianqu 2 402 in pixel region.
Additionally, as shown in Figure 6 to 8, the piezoelectric that formation is in contact with first electrode 401 in first electrode 401
The step of layer 403, preferably may include：Insulation is covered on the underlay substrate for being formed with the first conductive layer 7 and first electrode 401
Layer 6；The filling slot 601 of exposure first electrode 401 is formed in the Zhou Bianqu 2 of insulating barrier 6 using patterning processes；In filling slot
601 filling piezoelectrics, form piezoelectric material layer 403.
Specific embodiment of the invention is the foregoing is only, but protection scope of the present invention is not limited thereto, it is any
Those familiar with the art the invention discloses technical scope in, the change or replacement that can be readily occurred in, all should
It is included within the scope of the present invention.Therefore, protection scope of the present invention should be with the scope of the claims
It is accurate.
Claims (12)
1. a kind of array base palte, including pixel region and Zhou Bianqu, it is characterised in that the array base palte includes underlay substrate, and
It is arranged on the underlay substrate and in the piezoelectric part of the Zhou Bianqu；The piezoelectric part include first electrode, second electrode,
And it is arranged at the piezoelectric material layer between the first electrode and the second electrode, the first electrode and the described second electricity
Extremely each electrically connected from different voltage signal ends, the first surface of the piezoelectric material layer is contacted with the first electrode, institute
The second surface for stating piezoelectric material layer is contacted with the second electrode.
2. array base palte according to claim 1, it is characterised in that the array base palte also includes：Arranged stacked is in institute
The first conductive layer on underlay substrate, insulating barrier and the second conductive layer are stated, at first conductive layer and second conductive layer
In the pixel region；
The first electrode is set with first conductive layer with layer, and the second electrode sets with second conductive layer with layer
Put.
3. array base palte according to claim 2, it is characterised in that the Zhou Bianqu of the insulating barrier is provided with and described
The one electrode filling slot that penetrates the insulating barrier corresponding with the second electrode, the piezoelectric material layer is located at the filling
In groove.
4. array base palte according to claim 2, it is characterised in that the first electrode connects with first conductive layer
It is logical；
The second electrode is separated with second conductive layer, and the two is connected to same voltage signal end.
5. array base palte according to claim 2, it is characterised in that first conductive layer is pixel electrode, described the
Two conductive layers are public electrode；
Or, first conductive layer is public electrode, and second conductive layer is pixel electrode.
6. array base palte according to claims 1 to 5, it is characterised in that the piezoelectric part quantity is multiple, equally spaced
It is arranged in the Zhou Bianqu.
7. array base palte according to claims 1 to 5, it is characterised in that the piezoelectric part is frame-type.
8. array base palte according to claims 1 to 5, it is characterised in that the formation material of the piezoelectric material layer is nothing
Machine piezoelectric.
9. a kind of liquid crystal display device, including color membrane substrates, array base palte and liquid crystal layer therebetween is located in, its feature exists
In the array base palte is the array base palte as described in any one of claim 1~8.
10. a kind of preparation method of array base palte, it is characterised in that the preparation method includes：
One underlay substrate is provided；
First electrode is formed in the Zhou Bianqu of the underlay substrate, and the first electrode is electrically connected with a voltage signal end；
The piezoelectric material layer being in contact with the first electrode is formed on the first electrode；
Form the second electrode being in contact with the piezoelectric material layer on the piezoelectric material layer, and make the second electrode with
Another voltage signal end electrical connection.
The preparation method of 11. array base paltes according to claim 10, it is characterised in that on the periphery of the underlay substrate
Area also includes while forming first electrode：The first conductive layer is formed in the pixel region of the underlay substrate；
The piezoelectric material layer being in contact with the first electrode that formed on the first electrode includes：It is described being formed with
Insulating barrier is covered on the underlay substrate of the first conductive layer and the first electrode；Using patterning processes on the periphery of the insulating barrier
Area forms the filling slot of the exposure first electrode；Piezoelectric is filled in the filling slot, piezoelectric material layer is formed；
Also include while the second electrode being in contact with the piezoelectric material layer is formed on the piezoelectric material layer：Described
The second conductive layer is formed on the pixel region of insulating barrier.
The preparation method of 12. array base paltes according to claim 11, it is characterised in that while it is conductive to form described first
The step of layer and the first electrode, includes：The depositing first conductive film on the underlay substrate, first conductive film
Used as first conductive layer, first conductive film is in the part of Zhou Bianqu as described for part in pixel region
One electrode；
The step of forming second conductive layer and the second electrode simultaneously includes：It is being formed with the lining of the piezoelectric material layer
Depositing second conductive film on substrate, the portion of material of second conductive film is removed using patterning processes, and formation is in
Second conductive layer and the second electrode in Zhou Bianqu of pixel region.
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