CN106773397B - Array substrate, preparation method thereof and liquid crystal display device - Google Patents

Array substrate, preparation method thereof and liquid crystal display device Download PDF

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Publication number
CN106773397B
CN106773397B CN201611217589.6A CN201611217589A CN106773397B CN 106773397 B CN106773397 B CN 106773397B CN 201611217589 A CN201611217589 A CN 201611217589A CN 106773397 B CN106773397 B CN 106773397B
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electrode
array substrate
layer
conductive layer
piezoelectric material
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CN106773397A (en
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刘智
王辉
张朝科
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BOE Technology Group Co Ltd
Hefei BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Hefei BOE Optoelectronics Technology Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Geometry (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The invention provides an array substrate, a preparation method thereof and a liquid crystal display device, relates to the technical field of display, and is used for solving the problem of poor display caused by disordered arrangement of liquid crystals in a peripheral area when the conventional liquid crystal display device is pressed. The array substrate comprises a piezoelectric part positioned in a peripheral area; the piezoelectric part comprises a first electrode, a second electrode and a piezoelectric material layer arranged between the first electrode and the second electrode, wherein the first electrode and the second electrode are respectively and electrically connected with different voltage signal ends, a first surface of the piezoelectric material layer is in contact with the first electrode, and a second surface of the piezoelectric material layer is in contact with the second electrode. The array substrate is applied to a liquid crystal display device and drives the liquid crystal display device to display pictures.

Description

Array substrate, preparation method thereof and liquid crystal display device
Technical Field
The invention relates to the technical field of display, in particular to an array substrate, a preparation method thereof and a liquid crystal display device.
Background
A liquid crystal display is a display using liquid crystal as a material. Liquid crystals are organic compounds between solid and liquid states, and under the action of an electric field, liquid crystal molecules change in arrangement, so that the change of light passing through the liquid crystal molecules is affected, and the change of light can be represented as a change of brightness through the action of a polarizer. Therefore, people can finally control the brightness change of the light through controlling the electric field, thereby achieving the purpose of displaying images. When the liquid crystal display is applied to the terminal equipment, a touch screen is usually attached to the liquid crystal display, so that the applicability of the liquid crystal display is improved.
The touch panel can be applied in a frame-type or a full-type manner. The frame paste type touch screen is fixed with four sides of the liquid crystal display screen by using double-sided adhesive, and air filled gaps exist between the liquid crystal display screen and the touch screen. The bonding mode liquid crystal display device has good compression resistance, but the reflection between the liquid crystal display screen and the touch screen is obvious, and the display effect is poor.
With the requirement of thinning the liquid crystal display device, the bonding mode of the touch screen is gradually switched into a full bonding mode, and the full bonding mode is a mode of completely bonding the touch screen and the liquid crystal display together in a seamless mode, so that a gap between the liquid crystal display and the touch screen is omitted, and the thickness of the screen is thinner.
At present, because the gap between the liquid crystal display screen and the touch screen is omitted, when the touch screen is subjected to external pressure, the deformation of the touch screen caused by the pressure directly acts on the liquid crystal display, so that the liquid crystal display generates larger deformation, liquid crystal at the pressed position corresponding to the liquid crystal display screen is diffused from a pixel area to a peripheral area, liquid crystal molecules in the peripheral area are gathered, when the liquid crystal is gathered too much, the arrangement of the liquid crystal is disordered, the optical display of the peripheral area and the pixel area is different, and thus poor display is caused, for example, poor water ripple is generated.
Disclosure of Invention
The invention provides an array substrate, a preparation method thereof and a liquid crystal display device, which solve the problem of poor display caused by disordered arrangement of liquid crystals in a peripheral area when the conventional liquid crystal display device is pressed.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the first aspect of the invention provides an array substrate, which comprises a pixel area and a peripheral area, wherein the array substrate comprises a substrate and a piezoelectric part arranged on the substrate and positioned in the peripheral area; the piezoelectric part comprises a first electrode, a second electrode and a piezoelectric material layer arranged between the first electrode and the second electrode, wherein the first electrode and the second electrode are respectively and electrically connected with different voltage signal ends, a first surface of the piezoelectric material layer is in contact with the first electrode, and a second surface of the piezoelectric material layer is in contact with the second electrode.
Compared with the prior art, in the array substrate provided by the invention, the piezoelectric part is arranged in the peripheral area of the array substrate, when the array substrate is subjected to external pressure, different voltage signal ends respectively connected with the first electrode and the second electrode of the piezoelectric part apply different voltages to the first electrode and the second electrode, so that a voltage difference is formed between the first electrode and the second electrode, and the volume of the piezoelectric material layer between the first electrode and the second electrode is contracted under the action of an external electric field due to the inverse piezoelectric effect, so that an redundant space is generated above the piezoelectric part, and the generated redundant space can accommodate liquid crystal diffused to the peripheral area due to the external pressure, so that the aggregation of the liquid crystal in the peripheral area is avoided, the liquid crystal in the peripheral area is orderly arranged, and the picture quality of the liquid crystal display device is improved.
The second aspect of the present invention provides a liquid crystal display device, which includes a color film substrate, an array substrate and a liquid crystal layer sandwiched therebetween, wherein the array substrate is the above-mentioned array substrate.
Compared with the prior art, the liquid crystal display device has the same beneficial effects as those of the array substrate, and the detailed description is omitted.
The third aspect of the present invention provides a method for manufacturing an array substrate, including: providing a substrate base plate; forming a first electrode in the peripheral area of the substrate base plate, and enabling the first electrode to be electrically connected with a voltage signal end; forming a piezoelectric material layer on the first electrode in contact with the first electrode; and forming a second electrode which is contacted with the piezoelectric material layer on the piezoelectric material layer, and electrically connecting the second electrode with the other voltage signal end.
Compared with the prior art, the preparation method of the array substrate has the same beneficial effects as those of the array substrate, and the preparation method is not repeated here.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an array substrate according to an embodiment of the present invention;
FIG. 2 is a schematic diagram illustrating a volume change of the piezoelectric portion of the array substrate in FIG. 1 when the array substrate is subjected to an external pressure;
FIG. 3 is a schematic diagram illustrating a distribution of piezoelectric portions of an array substrate according to an embodiment of the present invention;
fig. 4 is a schematic distribution diagram of a piezoelectric portion of an array substrate according to a second embodiment of the present invention;
fig. 5 to 10 are diagrams illustrating steps of a method for manufacturing an array substrate according to a fourth embodiment of the present invention.
Reference numerals illustrate:
1-pixel region 2-peripheral region
3-substrate 4-piezoelectric portion
401-first electrode 402-second electrode
403-piezoelectric Material layer 4031-first surface
4032 second surface 5 second conductive layer
6-insulating layer 601-filled trench
7-first conducting layer 8-color film substrate
9-liquid crystal layer 10-source drain metal layer
11-rubber frame 12-second conductive film
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, the following description of the embodiments accompanied with the accompanying drawings will be given in detail. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the invention, the pixel area is an area for displaying a picture in the array substrate, the peripheral area is an area for arranging edge routing in the array substrate, and the peripheral area surrounds the pixel area.
Example 1
Referring to fig. 1, an embodiment of the present invention provides an array substrate, including a pixel region 1 and a peripheral region 2, the array substrate includes a substrate 3, and a piezoelectric portion 4 disposed on the substrate 3 and located in the peripheral region 2; the piezoelectric portion 4 includes a first electrode 401, a second electrode 402, and a piezoelectric material layer 403 disposed between the first electrode 401 and the second electrode 402, the first electrode 401 and the second electrode 402 are each electrically connected to a different voltage signal terminal (not shown in the figure), a first surface 4031 of the piezoelectric material layer 403 is in contact with the first electrode 401, and a second surface 4032 of the piezoelectric material layer 403 is in contact with the second electrode 402.
The terms "first surface" and "second surface" are used to describe that the surfaces of the piezoelectric material layer 403 that are in contact with the first electrode 401 and the second electrode 402 are two different surfaces. By way of example, the "first surface" may in particular be the lower surface of the layer of piezoelectric material 403, i.e. the side of the layer of piezoelectric material 403 facing the substrate 3; the "second surface" may specifically be an upper surface of the piezoelectric material layer 403, i.e. a side of the piezoelectric material layer 403 facing the liquid crystal layer 9.
In the array substrate provided in the first embodiment of the present invention, the piezoelectric portion 4 is disposed in the peripheral area 2 of the array substrate, when the array substrate is subjected to external pressure, different voltages are applied to the first electrode 401 and the second electrode 402 through different voltage signal terminals respectively connected to the first electrode 401 and the second electrode 402 of the piezoelectric portion 4, so that a voltage difference is formed between the first electrode 401 and the second electrode 402, and due to the inverse piezoelectric effect, the volume of the piezoelectric material layer 403 between the first electrode 401 and the second electrode 402 is shrunk under the action of the external electric field, see fig. 2, so that an excessive space is generated above the piezoelectric portion 4, and the generated excessive space can accommodate liquid crystals that diffuse into the peripheral area 2 due to the external pressure, so that aggregation of the liquid crystals in the peripheral area 2 is avoided, and the liquid crystals in the peripheral area 2 are orderly arranged, and the picture quality of the liquid crystal display device is improved.
Further, the array substrate further includes: a first conductive layer 7, an insulating layer 6, and a second conductive layer 5 which are stacked and arranged on the substrate 3, the first conductive layer 7 and the second conductive layer 5 being in the pixel region 1; in order to simplify the manufacturing process so that the first electrode 401 and the first conductive layer 7 may be simultaneously formed and the second electrode 402 and the second conductive layer 5 may be simultaneously formed during the manufacturing process of the array substrate, it is preferable that the first electrode 401 is provided in the same layer as the first conductive layer 7 and the second electrode 402 is provided in the same layer as the second conductive layer 5. Further preferably, the peripheral region 2 of the insulating layer 6 is provided with a filling groove 601 penetrating the insulating layer 6 corresponding to the first electrode 401 and the second electrode 402, and the piezoelectric material layer 403 is positioned in the filling groove 601, so that the first surface of the piezoelectric material layer is brought into contact with the first electrode, and the second surface of the piezoelectric material layer is brought into contact with the second electrode.
To further simplify the manufacturing process, the first electrode 401 communicates with the first conductive layer 7; the second electrode 402 is isolated from the second conductive layer 5, both of which are connected to the same voltage signal terminal. Thus, the potential of the first conductive layer 7 is the same as that of the first electrode 401, and the first conductive layer and the first electrode share a voltage signal terminal; the second conductive layer 5 has the same potential as the second electrode 402 and shares a voltage signal terminal.
In general, the conventional array substrate includes a pixel electrode and a common electrode, and the first conductive layer 7 may be a pixel electrode and the second conductive layer 5 may be a common electrode; alternatively, the first conductive layer 7 may be a common electrode, and the second conductive layer 5 may be a pixel electrode. The preparation steps of the first electrode and the second electrode of the piezoelectric portion are compatible with the process steps of preparing the pixel electrode and the common electrode, so that the steps of separately preparing the first electrode and the second electrode are not required to be additionally added.
The arrangement and the number of the piezoelectric portions 4 are not particularly limited in this embodiment, and preferably, the piezoelectric portions 4 are arranged in plural at equal intervals in the peripheral region 2, see fig. 3. The plurality of piezoelectric parts 4 are arranged at equal intervals in the peripheral area 2, so that more liquid crystals which are diffused to the peripheral area 2 due to external pressure can be accommodated, the liquid crystals in the peripheral area 2 are arranged more orderly, and the picture quality of the liquid crystal display device is further improved.
For the selection of the piezoelectric material, since a deposition process is generally used for preparing the internal film layer of the liquid crystal display device, the material for forming the piezoelectric material layer 403 is preferably an inorganic piezoelectric material, and the inorganic piezoelectric material is an inorganic small molecular material, so that a film is more easily formed in the deposition process.
Example two
The structure of the array substrate according to the second embodiment of the present invention is substantially the same as that of the first embodiment, and the difference is that the piezoelectric portions 4 are arranged.
The piezoelectric portion 4 of the second embodiment of the present invention is a frame, see fig. 4. The whole peripheral region 2 is provided with the piezoelectric part 4, so that more liquid crystals which are diffused to the peripheral region 2 due to external pressure can be contained, the liquid crystals in the peripheral region 2 are arranged more orderly, and the picture quality of the liquid crystal display device is further improved.
Example III
The third embodiment of the invention provides a liquid crystal display device, which comprises a color film substrate 8, an array substrate and a liquid crystal layer 9 sandwiched between the color film substrate 8 and the array substrate, wherein the array substrate is the array substrate of the first embodiment or the second embodiment.
When the liquid crystal display device provided by the third embodiment of the present invention is applied to the array substrate of the first embodiment or the second embodiment, when the liquid crystal display device is subjected to external pressure, different voltages are applied to the first electrode 401 and the second electrode 402 through different voltage signal terminals respectively connected with the first electrode 401 and the second electrode 402 of the piezoelectric portion 4, so that a voltage difference is formed between the first electrode 401 and the second electrode 402, and due to the inverse piezoelectric effect, the volume of the piezoelectric material layer 403 between the first electrode 401 and the second electrode 402 is contracted under the action of the external electric field, so that an excessive space is generated above the piezoelectric portion 4, and the generated excessive space can accommodate liquid crystals which diffuse to the peripheral region 2 due to the external pressure, so that aggregation of the liquid crystals in the peripheral region 2 is avoided, the liquid crystals in the peripheral region 2 are orderly arranged, and the picture quality of the liquid crystal display device is improved.
The liquid crystal display device provided by the third embodiment of the invention is particularly suitable for a touch liquid crystal display device prepared in a full-lamination mode. The full-attaching mode is a mode that the touch screen and the liquid crystal display screen are completely attached together in a seamless mode, and because the device omits a gap between the liquid crystal display screen and the touch screen, when the touch screen is subjected to external pressure, the touch screen directly acts on the liquid crystal display due to deformation generated by the pressure, so that the liquid crystal display generates larger deformation, liquid crystal at a pressed position corresponding to the liquid crystal display screen is diffused from a pixel area to a peripheral area, liquid crystal molecules in the peripheral area are gathered, when the liquid crystal is gathered excessively, the arrangement of the liquid crystal is disordered, the optical display of the peripheral area and the pixel area is different, and thus poor display, for example, poor water ripple, is generated. When the touch screen is subjected to external pressure, the touch screen directly transmits the pressure to the liquid crystal display device, and the piezoelectric part 4 with the inverse piezoelectric effect is contracted in volume, so that an extra space is generated above the piezoelectric part 4, the generated extra space can contain liquid crystal which is diffused to the peripheral area 2 due to the external pressure, aggregation of the liquid crystal in the peripheral area 2 is avoided, the liquid crystal in the peripheral area 2 is orderly arranged, and the picture quality of the touch type liquid crystal display device prepared in a full-lamination mode is improved.
It should be noted that, the liquid crystal display device in this embodiment may be any product or component with a display function, such as a liquid crystal panel, an electronic paper, a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, and a navigator.
Example IV
The fourth embodiment of the present invention provides a method for preparing an array substrate, referring to fig. 5 to 10, which is suitable for preparing the array substrate of the first embodiment or the second embodiment, and the method for preparing the array substrate comprises the following steps:
providing a substrate base plate 3;
forming a first electrode 401 in the peripheral region 2 of the substrate 3, and electrically connecting the first electrode 401 with a voltage signal terminal, see fig. 5;
forming a piezoelectric material layer 403 in contact with the first electrode 401 on the first electrode 401, see fig. 6 to 8;
a second electrode 402 is formed on the piezoelectric material layer 403 in contact with the piezoelectric material layer 403, and the second electrode 402 is electrically connected to the other voltage signal terminal, see fig. 9 to 10.
In the method for manufacturing an array substrate according to the fourth embodiment of the present invention, the first electrode 401, the piezoelectric material layer 403, and the second electrode 402 are formed in the peripheral area of the array substrate, so that the volume of the piezoelectric portion is contracted by using the inverse piezoelectric effect, and an extra space is generated above the piezoelectric portion to accommodate the liquid crystal that diffuses into the peripheral area due to the external pressure, thereby improving the picture quality of the liquid crystal display device.
Further, as shown in fig. 5, in order to simplify the manufacturing process, the first electrode 401 is formed in the peripheral region of the substrate 3, and includes: a first conductive layer 7 is formed in the pixel region of the substrate 3. Specifically, the step of simultaneously forming the first conductive layer 7 and the first electrode 401 includes: a first conductive film is deposited on the substrate base 3, a portion of the first conductive film in the pixel region serves as the first conductive layer 7, and a portion of the first conductive film in the peripheral region 2 serves as the first electrode 401.
Further, as shown in fig. 9 to 10, in order to simplify the manufacturing process, the second electrode 402 that contacts the piezoelectric material layer 403 is formed on the piezoelectric material layer 403, and further includes: a second conductive layer 5 is formed in the pixel region of the insulating layer 6.
Specifically, the step of simultaneously forming the second conductive layer 5 and the second electrode 402 includes: a second conductive film 12 is deposited on the substrate base 3 on which the piezoelectric material layer 403 is formed, and a part of the material of the second conductive film 12 is removed by a patterning process, forming a second conductive layer 5 in the pixel region and a second electrode 402 in the peripheral region 2.
Further, as shown in fig. 6 to 8, the step of forming the piezoelectric material layer 403 in contact with the first electrode 401 on the first electrode 401 may preferably include: an insulating layer 6 is covered on the substrate board on which the first conductive layer 7 and the first electrode 401 are formed; forming a filling groove 601 exposing the first electrode 401 in the peripheral region 2 of the insulating layer 6 using a patterning process; the filling groove 601 is filled with a piezoelectric material, and the piezoelectric material layer 403 is formed.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present invention should be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (12)

1. An array substrate comprises a pixel area and a peripheral area, and is characterized by comprising a substrate and a piezoelectric part arranged on the substrate and positioned in the peripheral area; the piezoelectric part comprises a first electrode, a second electrode and a piezoelectric material layer arranged between the first electrode and the second electrode, wherein the first electrode and the second electrode are respectively and electrically connected with different voltage signal ends, a first surface of the piezoelectric material layer is contacted with the first electrode, and a second surface of the piezoelectric material layer is contacted with the second electrode;
the array substrate further comprises a source-drain metal layer arranged on the substrate, and the source-drain metal layer is located in the pixel region.
2. The array substrate of claim 1, further comprising: laminating a first conductive layer, an insulating layer, and a second conductive layer disposed on the substrate, the first conductive layer and the second conductive layer being in the pixel region;
the first electrode and the first conductive layer are arranged in the same layer, and the second electrode and the second conductive layer are arranged in the same layer.
3. The array substrate according to claim 2, wherein a peripheral region of the insulating layer is provided with a filling groove penetrating the insulating layer corresponding to the first electrode and the second electrode, and the piezoelectric material layer is located in the filling groove.
4. The array substrate of claim 2, wherein the first electrode is in communication with the first conductive layer;
the second electrode is separated from the second conductive layer, and the second electrode and the second conductive layer are connected to the same voltage signal terminal.
5. The array substrate of claim 2, wherein the first conductive layer is a pixel electrode and the second conductive layer is a common electrode;
or, the first conductive layer is a common electrode, and the second conductive layer is a pixel electrode.
6. The array substrate according to any one of claims 1 to 5, wherein the number of the piezoelectric portions is plural and is arranged at equal intervals in the peripheral region.
7. The array substrate according to any one of claims 1 to 5, wherein the piezoelectric portion is frame-shaped.
8. The array substrate according to any one of claims 1 to 5, wherein the piezoelectric material layer is formed of an inorganic piezoelectric material.
9. A liquid crystal display device comprising a color film substrate, an array substrate and a liquid crystal layer sandwiched therebetween, wherein the array substrate is the array substrate according to any one of claims 1 to 8.
10. The preparation method of the array substrate is characterized by comprising the following steps:
providing a substrate base plate;
forming a first electrode in the peripheral area of the substrate base plate, and enabling the first electrode to be electrically connected with a voltage signal end;
forming a piezoelectric material layer on the first electrode in contact with the first electrode;
and forming a second electrode which is contacted with the piezoelectric material layer on the piezoelectric material layer, and electrically connecting the second electrode with the other voltage signal end.
11. The method for manufacturing an array substrate according to claim 10, further comprising, while forming the first electrode in the peripheral region of the substrate: forming a first conductive layer in a pixel region of the substrate;
the forming a piezoelectric material layer on the first electrode in contact with the first electrode includes: covering an insulating layer on the substrate with the first conductive layer and the first electrode; forming a filling groove exposing the first electrode in the peripheral area of the insulating layer by using a patterning process; filling piezoelectric materials in the filling grooves to form piezoelectric material layers;
forming a second electrode on the piezoelectric material layer in contact with the piezoelectric material layer, and simultaneously comprising: and forming a second conductive layer on the pixel region of the insulating layer.
12. The method of manufacturing an array substrate according to claim 11, wherein the step of simultaneously forming the first conductive layer and the first electrode comprises: depositing a first conductive film on the substrate, wherein the part of the first conductive film in the pixel area is used as the first conductive layer, and the part of the first conductive film in the peripheral area is used as the first electrode;
the step of simultaneously forming the second conductive layer and the second electrode includes: and depositing a second conductive film on the substrate with the piezoelectric material layer, and removing part of the material of the second conductive film by using a patterning process to form the second conductive layer in the pixel area and the second electrode in the peripheral area.
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Publication number Priority date Publication date Assignee Title
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CN101650503A (en) * 2008-08-15 2010-02-17 奇美电子股份有限公司 Thin film transistor array substrate and LCD
CN102707470A (en) * 2012-04-01 2012-10-03 京东方科技集团股份有限公司 Liquid crystal panel, liquid crystal display and manufacturing method
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