CN106756806A - A kind of evaporation coating device and organic EL display panel evaporation coating method - Google Patents
A kind of evaporation coating device and organic EL display panel evaporation coating method Download PDFInfo
- Publication number
- CN106756806A CN106756806A CN201611243953.6A CN201611243953A CN106756806A CN 106756806 A CN106756806 A CN 106756806A CN 201611243953 A CN201611243953 A CN 201611243953A CN 106756806 A CN106756806 A CN 106756806A
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- China
- Prior art keywords
- evaporation coating
- main substrate
- base plate
- coating device
- assisting base
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The invention discloses a kind of evaporation coating device and organic EL display panel evaporation coating method, evaporation coating device includes：Main substrate, assisting base plate, wherein, the main substrate includes mask plate adsorption section.Evaporation coating device and organic EL display panel evaporation coating method that the present invention is provided, effectively avoid during evaporation, and substrate is sagging due to own wt during contraposition, cause mask plate and the larger problem of substrate bit errors, improve product yield.
Description
Technical field
The present invention relates to display field, and in particular to a kind of evaporation coating device and the organic electroluminescent using the evaporation coating device
Display panel evaporation coating method.
Background technology
Display device is a kind of device of display image.In recent years, OLED (Organic Light Emitting
Diode during) display progresses into consumer goods display device market, by people cognition.OLED display has self-luminous
Characteristic.Because OLED display does not need independent light source, it can have the relative less thickness of liquid crystal display and weight
Amount.Additionally, OLED display also has rich color, voltage requirements low and the characteristic such as power saving efficiency is high.
Normally, OLED display includes multiple pixels, the light for launching different colours.Multiple pixel emission light are with aobvious
Diagram picture, TFT (Thin Film Transistor, thin film transistor (TFT)) drives each pixel.(such as pixel in addition, insulating barrier
Confining layers) region and the shape of each pixel can be limited.Further, each pixel can be positioned between its adjacent pixel.
As the application of high-definition display device is more and more extensive, the requirement to the resolution ratio of display device is also increasingly
It is high.At present, the spacing generally by reducing the size of pixel and between reducing pixel improves the mesh of display device resolution ratio to reach
, but with the continuous refinement of technology, the increase of the technology difficulty and manufacturing cost of display device can be caused.
The content of the invention
In view of this, the present invention proposes a kind of evaporation coating device and organic EL display panel evaporation coating method.
A kind of evaporation coating device, including：Main substrate, assisting base plate, wherein, the main substrate includes mask plate adsorption section.
The present invention also provides a kind of organic EL display panel evaporation coating method, including uses above-mentioned evaporation coating device.
Optionally, the organic EL display panel evaporation coating method, including：The evaporation substrate is placed on the main base
The smooth surface of plate, the adsorbent equipment of the assisting base plate is opened, and the mask plate is adsorbed, by main substrate and assisting base plate
Align, open the mask plate adsorption section, the adsorbent equipment for closing the assisting base plate is opened, and by main substrate and aid in
Substrate overturns 180 °, after removing assisting base plate, starts the evaporation of organic EL display panel.
Evaporation coating device and organic EL display panel evaporation coating method that the present invention is provided, effectively avoid and were deposited with
Cheng Zhong, substrate is sagging due to own wt during contraposition, causes mask plate and the larger problem of substrate bit errors, improves
Product yield.
Brief description of the drawings
A kind of assisting base plate sectional view of evaporation coating device that Fig. 1 is provided for the present invention；
A kind of assisting base plate schematic diagram of evaporation coating device that Fig. 2 is provided for the present invention；
A kind of main substrate sectional view of evaporation coating device that Fig. 3 is provided for the present invention；
A kind of main substrate schematic diagram of evaporation coating device that Fig. 4 is provided for the present invention；
A kind of mask plate sectional view that Fig. 5 is provided for the present invention；
A kind of mask plate schematic diagram that Fig. 6 is provided for the present invention；
A kind of organic EL display panel evaporation coating method flow chart that Fig. 7 a-7f are provided for the present invention.
Specific embodiment
Although being described in more detail to the present invention below with reference to accompanying drawings, it is preferable to carry out which show of the invention
Example, it should be understood that those skilled in the art can modify on the basis of the description, and still can realize the present invention
Advantageous effects.Therefore, following description is appreciated that the extension to the thinking of those skilled in the art, and is not intended as
Limitation of the present invention.
In order to clearly describe whole features of practical embodiments.In the following description, it is not described in detail known function
And structure, because they can make the present invention chaotic due to unnecessary details.It will be understood that opening in any practical embodiments
In hair, it is necessary to make a large amount of implementation details to realize the specific objective of developer, such as according to relevant system or relevant business
Limitation, another embodiment is changed into by one embodiment.Additionally, it should think that this development is probably complicated and expends
Time, but it is only for a person skilled in the art routine work.
The present invention is more specifically described by way of example referring to the drawings in the following passage.The present invention is made according to following explanation
Main points and feature will become apparent from.It should be noted that, accompanying drawing using very simplify in the form of and use non-accurately ratio,
Only it is used to conveniently, clearly aid in illustrating the purpose of the embodiment of the present invention.
Embodiment of the present invention provides a kind of evaporation coating device, including：Main substrate, assisting base plate, wherein, main substrate includes covering
Film version adsorption section, main substrate is oppositely arranged with assisting base plate, and mask plate adsorption section can be arranged on inside main substrate, it is also possible to set
Put on main substrate surface, in the present embodiment, this is not construed as limiting, the evaporation that the present invention is provided will be filled by accompanying drawing below
Structure is put to be elaborated.
As shown in Figure 1 and Figure 2, the assisting base plate sectional view of a kind of evaporation coating device that Fig. 1 is provided for the present invention, Fig. 2 is this hair
A kind of assisting base plate schematic diagram of the evaporation coating device of bright offer；The assisting base plate of evaporation coating device includes adsorbent equipment 101, in this reality
In applying mode, adsorbent equipment 101 is magnetic force mask plate adsorbent equipment, and magnetic force mask plate adsorbent equipment can be with the control of electric current
Produce magnetic field, the mask plate being at least partly made up of magnetic metal magnetic-adsorption.In other embodiments, adsorbent equipment
101 can also be vacuum mask plate adsorbent equipment, and adsorbent equipment is used for mask plate absorption in assisting base plate towards main substrate one
The surface 104 of side, assisting base plate also includes auxiliary para device 102, and the auxiliary para device 102 can be camera, be used for
Collection contraposition information, or alignment mark, for providing positional information.
As shown in Figure 3, Figure 4, a kind of main substrate sectional view of evaporation coating device that Fig. 3 is provided for the present invention, Fig. 4 is the present invention
A kind of main substrate schematic diagram of the evaporation coating device for providing；The main substrate of evaporation coating device includes mask plate adsorption section 201, and mask plate is inhaled
Attached portion 201 includes electromagnetic unit, and electromagnetic unit can produce magnetic field under the control of electric current, by magnetic-adsorption at least partly by
The mask plate that magnetic metal is constituted, the main substrate of evaporation coating device also includes vacuum suction portion, and vacuum suction portion is used to adsorb evaporation
Substrate, the main substrate towards the surface 204 of assisting base plate side is fixed on by evaporation substrate, and main substrate also includes alignment device
202, the alignment device 202 can be alignment mark, for providing positional information, it is also possible to camera, for gathering contraposition letter
Breath.Main substrate is that at least part of region is smooth surface towards the assisting base plate one side, and to be deposited with, substrate is smooth to be consolidated
It is scheduled on main substrate towards the surface 204 of assisting base plate side.
Above-mentioned main substrate can under mechanical action invert 180 ° with assisting base plate, that is to say, that can be located at main substrate
Assisting base plate top, it is also possible to by mechanism, main substrate is located at assisting base plate lower section.
The evaporation coating device that embodiment of the present invention is provided, by magnetic-adsorption, by mask plate absorption in main substrate side, has
Effect avoid evaporation during, substrate is sagging due to own wt during contraposition, causes mask plate and substrate to align
The larger problem of error, improves product yield.
Optionally, in embodiment of the present invention, main substrate also includes main substrate groove 203, and assisting base plate also includes auxiliary
Substrate trench 103, with further reference to Fig. 5, Fig. 6, a kind of mask plate sectional view that Fig. 5 is provided for the present invention, Fig. 6 is carried for the present invention
A kind of mask plate schematic diagram for supplying；Mask plate includes Mask portion 301 and framework 302, the size of the framework 302 and the master
Substrate trench 203, assisting base plate groove 103 match.
Embodiment of the present invention also provides a kind of organic EL display panel evaporation coating method, as shown in Fig. 7 a-7f, figure
A kind of organic EL display panel evaporation coating method flow chart that 7a-7f is provided for the present invention, the ORGANIC ELECTROLUMINESCENCE DISPLAYS
Panel evaporation coating method uses the evaporation coating device of above-mentioned offer.
Organic EL display panel evaporation coating method is specifically included：
As shown in Figure 7a, the evaporation substrate 400 is placed on the smooth surface of main substrate 200, and is deposited with substrate 400 and put
Main substrate 200 towards assisting base plate 100 one side, the adsorbent equipment of assisting base plate 100 opens, and adsorbs mask plate 300, covers
Film version 300 is located at one side of the assisting base plate 100 towards main substrate 200, as shown in Fig. 7 b, 7c, by main substrate and assisting base plate
Contraposition, and moves closer to, until mask plate 300 is fitted with evaporation substrate 400, unlatching mask plate adsorption section and main substrate it is true
Empty adsorption section, closes the adsorbent equipment of assisting base plate, as shown in figure 7d, and main substrate 200 is overturn with assisting base plate 100
180 °, and assisting base plate 100 is removed as shown in 7e, now mask plate is attracted to main substrate surface, such as Fig. 7 f with evaporation substrate
It is shown, start to be deposited with organic EL display panel by evaporation source 500.
Evaporation coating device and organic EL display panel evaporation coating method that the present invention is provided, effectively avoid and were deposited with
Cheng Zhong, substrate is sagging due to own wt during contraposition, causes mask plate and the larger problem of substrate bit errors, improves
Product yield.
In sum, although the present invention is disclosed as above with preferred embodiment, and so it is not limited to the present invention, ability
The technical staff in domain can do various changes and retouching under the premise without departing from the spirit and scope of the present invention, if therefore originally
These modifications of invention and modification belong within the scope of the claims in the present invention and its equivalent technologies, then the present invention is also intended to bag
Containing including these changes and modification.Protection scope of the present invention is defined by claim of the invention.
Claims (10)
1. a kind of evaporation coating device, it is characterised in that including：Main substrate, assisting base plate, wherein, the main substrate includes mask plate
Adsorption section.
2. evaporation coating device according to claim 1, it is characterised in that the mask plate is at least partly by magnetic metal structure
Into the mask plate adsorption section includes electromagnetic unit, and the electromagnetic unit can produce magnetic field under the control of electric current.
3. evaporation coating device according to claim 2, it is characterised in that the assisting base plate includes adsorbent equipment, the suction
Adsorption device includes vacuum mask plate adsorbent equipment or magnetic force mask plate adsorbent equipment, and the magnetic force mask plate adsorbent equipment is in electricity
Magnetic field can be produced under the control of stream.
4. evaporation coating device according to claim 1, it is characterised in that the main substrate includes vacuum suction portion, described true
Empty adsorption section is used to adsorb evaporation substrate.
5. evaporation coating device according to claim 1, it is characterised in that the main substrate is provided with alignment device.
6. evaporation coating device according to claim 5, it is characterised in that the assisting base plate is provided with and the main substrate pair
The auxiliary para device answered.
7. evaporation coating device according to claim 1, it is characterised in that the main substrate is towards the assisting base plate one side
For at least part of region is smooth surface.
8. evaporation coating device according to claim 1, it is characterised in that the main substrate can be in machine with the assisting base plate
Lower 180 ° of the reversion of tool effect.
9. a kind of organic EL display panel evaporation coating method, including use evaporation coating device as described in claim 1-7 is any.
10. organic EL display panel evaporation coating method as claimed in claim 9, it is characterised in that including：By the steaming
Plated substrate is placed on the smooth surface of the main substrate, and the adsorbent equipment of the assisting base plate is opened, and adsorbs the mask plate,
Main substrate and assisting base plate are aligned, the mask plate adsorption section is opened, the adsorbent equipment of the assisting base plate is closed, and
Main substrate and assisting base plate are overturn 180 °, after removing assisting base plate, starts the evaporation of organic EL display panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611243953.6A CN106756806A (en) | 2016-12-29 | 2016-12-29 | A kind of evaporation coating device and organic EL display panel evaporation coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611243953.6A CN106756806A (en) | 2016-12-29 | 2016-12-29 | A kind of evaporation coating device and organic EL display panel evaporation coating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106756806A true CN106756806A (en) | 2017-05-31 |
Family
ID=58928535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611243953.6A Withdrawn CN106756806A (en) | 2016-12-29 | 2016-12-29 | A kind of evaporation coating device and organic EL display panel evaporation coating method |
Country Status (1)
| Country | Link |
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| CN (1) | CN106756806A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107359285A (en) * | 2017-08-18 | 2017-11-17 | 武汉华星光电半导体显示技术有限公司 | A kind of OLED display and preparation method thereof |
| CN114924469A (en) * | 2022-05-30 | 2022-08-19 | 中国电子科技集团公司第二十九研究所 | Exposure alignment device and alignment method for solder mask layer of multilayer co-fired ceramic circuit substrate |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202658218U (en) * | 2012-04-19 | 2013-01-09 | 彩虹（佛山）平板显示有限公司 | Mask group for organic electroluminescent display evaporation |
| CN103981491A (en) * | 2014-04-30 | 2014-08-13 | 京东方科技集团股份有限公司 | Evaporating plating device |
| CN205420529U (en) * | 2016-03-16 | 2016-08-03 | 鄂尔多斯市源盛光电有限责任公司 | Evaporating plating device |
| CN206282862U (en) * | 2016-12-29 | 2017-06-27 | 长春海谱润斯科技有限公司 | A kind of evaporation coating device |
-
2016
- 2016-12-29 CN CN201611243953.6A patent/CN106756806A/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202658218U (en) * | 2012-04-19 | 2013-01-09 | 彩虹（佛山）平板显示有限公司 | Mask group for organic electroluminescent display evaporation |
| CN103981491A (en) * | 2014-04-30 | 2014-08-13 | 京东方科技集团股份有限公司 | Evaporating plating device |
| CN205420529U (en) * | 2016-03-16 | 2016-08-03 | 鄂尔多斯市源盛光电有限责任公司 | Evaporating plating device |
| CN206282862U (en) * | 2016-12-29 | 2017-06-27 | 长春海谱润斯科技有限公司 | A kind of evaporation coating device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107359285A (en) * | 2017-08-18 | 2017-11-17 | 武汉华星光电半导体显示技术有限公司 | A kind of OLED display and preparation method thereof |
| WO2019033542A1 (en) * | 2017-08-18 | 2019-02-21 | 武汉华星光电半导体显示技术有限公司 | Oled display device and manufacturing method thereof |
| CN107359285B (en) * | 2017-08-18 | 2019-03-15 | 武汉华星光电半导体显示技术有限公司 | A kind of OLED display and preparation method thereof |
| US10714711B2 (en) | 2017-08-18 | 2020-07-14 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Method of making OLED display device having first substrate aligning accurately with mask plates |
| CN114924469A (en) * | 2022-05-30 | 2022-08-19 | 中国电子科技集团公司第二十九研究所 | Exposure alignment device and alignment method for solder mask layer of multilayer co-fired ceramic circuit substrate |
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| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information |
Inventor after: Cai Hui Inventor before: Guo Jianhua |
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| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20170531 |
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| WW01 | Invention patent application withdrawn after publication |