CN206282862U - A kind of evaporation coating device - Google Patents
A kind of evaporation coating device Download PDFInfo
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- CN206282862U CN206282862U CN201621464876.2U CN201621464876U CN206282862U CN 206282862 U CN206282862 U CN 206282862U CN 201621464876 U CN201621464876 U CN 201621464876U CN 206282862 U CN206282862 U CN 206282862U
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- coating device
- evaporation coating
- main substrate
- mask plate
- base plate
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Abstract
The utility model discloses a kind of evaporation coating device, including：Main substrate, assisting base plate, wherein, the main substrate includes mask plate adsorption section.The evaporation coating device that the utility model is provided, effectively avoids during evaporation, and substrate is sagging due to own wt during contraposition, causes mask plate and the larger problem of substrate bit errors, improves product yield.
Description
Technical field
The utility model is related to display field, and in particular to a kind of evaporation coating device.
Background technology
Display device is a kind of device of display image.In recent years, OLED (Organic Light Emitting
Diode during) display progresses into consumer goods display device market, by people cognition.OLED display has self-luminous
Characteristic.Because OLED display does not need independent light source, it can have the relative less thickness of liquid crystal display and weight
Amount.Additionally, OLED display also has rich color, voltage requirements low and the characteristic such as power saving efficiency is high.
Normally, OLED display includes multiple pixels, the light for launching different colours.Multiple pixel emission light are with aobvious
Diagram picture, TFT (Thin Film Transistor, thin film transistor (TFT)) drives each pixel.(such as pixel in addition, insulating barrier
Confining layers) region and the shape of each pixel can be limited.Further, each pixel can be positioned between its adjacent pixel.
As the application of high-definition display device is more and more extensive, the requirement to the resolution ratio of display device is also increasingly
It is high.At present, the spacing generally by reducing the size of pixel and between reducing pixel improves the mesh of display device resolution ratio to reach
, but with the continuous refinement of technology, the increase of the technology difficulty and manufacturing cost of display device can be caused.
Utility model content
In view of this, the utility model proposes a kind of evaporation coating device.
A kind of evaporation coating device, including：Main substrate, assisting base plate, wherein, the main substrate includes mask plate adsorption section.
The utility model provide evaporation coating device, effectively avoid evaporation during, substrate during contraposition due to
Own wt and it is sagging, cause mask plate and the larger problem of substrate bit errors, improve product yield.
Brief description of the drawings
A kind of assisting base plate sectional view of evaporation coating device that Fig. 1 is provided for the utility model；
A kind of assisting base plate schematic diagram of evaporation coating device that Fig. 2 is provided for the utility model；
A kind of main substrate sectional view of evaporation coating device that Fig. 3 is provided for the utility model；
A kind of main substrate schematic diagram of evaporation coating device that Fig. 4 is provided for the utility model；
A kind of mask plate sectional view that Fig. 5 is provided for the utility model；
A kind of mask plate schematic diagram that Fig. 6 is provided for the utility model.
Specific embodiment
Although being described in more detail to the utility model below with reference to accompanying drawings, which show of the present utility model
Preferred embodiment, it should be understood that those skilled in the art can modify on the basis of the description, and still can be real
Existing advantageous effects of the present utility model.Therefore, following description is appreciated that the expansion to the thinking of those skilled in the art
Exhibition, and be not intended as to limitation of the present utility model.
In order to clearly describe whole features of practical embodiments.In the following description, it is not described in detail known function
And structure, because they can make the utility model chaotic due to unnecessary details.It will be understood that in any practical embodiments
Exploitation in, it is necessary to make a large amount of implementation details to realize the specific objective of developer, such as according to relevant system or relevant business
The limitation of industry, another embodiment is changed into by one embodiment.Additionally, it should think this development be probably it is complicated and
It is time-consuming, but it is only for a person skilled in the art routine work.
The utility model is more specifically described by way of example referring to the drawings in the following passage.This is made according to following explanation
The main points and feature of utility model will become apparent from.It should be noted that, accompanying drawing is in the form of simplifying very much and using non-essence
Accurate ratio, is only used to conveniently, clearly aid in illustrating the purpose of the utility model embodiment.
The utility model implementation method provides a kind of evaporation coating device, including：Main substrate, assisting base plate, wherein, main substrate bag
Mask plate adsorption section is included, main substrate is oppositely arranged with assisting base plate, mask plate adsorption section can be arranged on inside main substrate, also may be used
To be arranged on main substrate surface, in the present embodiment, this is not construed as limiting, the utility model will be provided by accompanying drawing below
Evaporation coating device structure elaborated.
As shown in Figure 1 and Figure 2, the assisting base plate sectional view of a kind of evaporation coating device that Fig. 1 is provided for the utility model, Fig. 2 is
A kind of assisting base plate schematic diagram of evaporation coating device that the utility model is provided；The assisting base plate of evaporation coating device includes adsorbent equipment
101, in the present embodiment, adsorbent equipment 101 is magnetic force mask plate adsorbent equipment, and magnetic force mask plate adsorbent equipment is in electric current
Magnetic field can be produced under control, the mask plate being at least partly made up of magnetic metal magnetic-adsorption.In other embodiment
In, adsorbent equipment 101 can also be vacuum mask plate adsorbent equipment, and adsorbent equipment is used for mask plate absorption in assisting base plate face
To the surface 104 of main substrate side, assisting base plate also includes auxiliary para device 102, and the auxiliary para device 102 can be to take the photograph
As head, for gathering contraposition information, or alignment mark, for providing positional information.
As shown in Figure 3, Figure 4, a kind of main substrate sectional view of evaporation coating device that Fig. 3 is provided for the utility model, Fig. 4 is this
A kind of main substrate schematic diagram of evaporation coating device that utility model is provided；The main substrate of evaporation coating device includes mask plate adsorption section 201,
Mask plate adsorption section 201 includes electromagnetic unit, and electromagnetic unit can produce magnetic field under the control of electric current, by magnetic-adsorption extremely
The mask plate that small part is made up of magnetic metal, the main substrate of evaporation coating device also includes vacuum suction portion, and vacuum suction portion is used for
Absorption evaporation substrate, the main substrate towards the surface 204 of assisting base plate side is fixed on by evaporation substrate, and main substrate also includes
Alignment device 202, the alignment device 202 can be alignment mark, for providing positional information, it is also possible to camera, for adopting
Collection contraposition information.Main substrate is that at least part of region is smooth surface towards the assisting base plate one side, to be deposited with substrate
Smooth is fixed on main substrate towards the surface 204 of assisting base plate side.
Above-mentioned main substrate can under mechanical action invert 180 ° with assisting base plate, that is to say, that can be located at main substrate
Assisting base plate top, it is also possible to by mechanism, main substrate is located at assisting base plate lower section.
The evaporation coating device that the utility model implementation method is provided, by magnetic-adsorption, by mask plate absorption in main substrate one
Side, effectively avoids during evaporation, and substrate is sagging due to own wt during contraposition, causes mask plate and substrate
The larger problem of bit errors, improves product yield.
Optionally, in the utility model implementation method, main substrate also includes main substrate groove 203, and assisting base plate also includes
Assisting base plate groove 103, with further reference to Fig. 5, Fig. 6, a kind of mask plate sectional view that Fig. 5 is provided for the utility model, Fig. 6 is
A kind of mask plate schematic diagram that the utility model is provided；Mask plate includes Mask portion 301 and framework 302, the framework 302
Size matches with the main substrate groove 203, assisting base plate groove 103.
Evaporation coating device and organic EL display panel evaporation coating method that the utility model is provided, effectively avoid steaming
During plating, substrate is sagging due to own wt during contraposition, causes mask plate and the larger problem of substrate bit errors,
Improve product yield.
In sum, although the utility model is disclosed as above with preferred embodiment, and so it is not limited to this practicality
New, those skilled in the art can do various changes with profit on the premise of spirit and scope of the present utility model are not departed from
Decorations, if therefore these modifications of the present utility model and modification belong to the scope of the utility model claim and its equivalent technologies
Within, then the utility model is also intended to comprising these changes and modification.Protection domain of the present utility model is new with this practicality
The claim of type is defined.
Claims (8)
1. a kind of evaporation coating device, it is characterised in that including：Main substrate, assisting base plate, wherein, the main substrate includes mask plate
Adsorption section.
2. evaporation coating device according to claim 1, it is characterised in that the mask plate is at least partly by magnetic metal structure
Into the mask plate adsorption section includes electromagnetic unit, and the electromagnetic unit can produce magnetic field under the control of electric current.
3. evaporation coating device according to claim 2, it is characterised in that the assisting base plate includes adsorbent equipment, the suction
Adsorption device includes vacuum mask plate adsorbent equipment or magnetic force mask plate adsorbent equipment, and the magnetic force mask plate adsorbent equipment is in electricity
Magnetic field can be produced under the control of stream.
4. evaporation coating device according to claim 1, it is characterised in that the main substrate includes vacuum suction portion, described true
Empty adsorption section is used to adsorb evaporation substrate.
5. evaporation coating device according to claim 1, it is characterised in that the main substrate is provided with alignment device.
6. evaporation coating device according to claim 5, it is characterised in that the assisting base plate is provided with and the main substrate pair
The auxiliary para device answered.
7. evaporation coating device according to claim 1, it is characterised in that the main substrate is towards the assisting base plate one side
For at least part of region is smooth surface.
8. evaporation coating device according to claim 1, it is characterised in that the main substrate can be in machine with the assisting base plate
Lower 180 ° of the reversion of tool effect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621464876.2U CN206282862U (en) | 2016-12-29 | 2016-12-29 | A kind of evaporation coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621464876.2U CN206282862U (en) | 2016-12-29 | 2016-12-29 | A kind of evaporation coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206282862U true CN206282862U (en) | 2017-06-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621464876.2U Active CN206282862U (en) | 2016-12-29 | 2016-12-29 | A kind of evaporation coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206282862U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756806A (en) * | 2016-12-29 | 2017-05-31 | 长春海谱润斯科技有限公司 | A kind of evaporation coating device and organic EL display panel evaporation coating method |
-
2016
- 2016-12-29 CN CN201621464876.2U patent/CN206282862U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756806A (en) * | 2016-12-29 | 2017-05-31 | 长春海谱润斯科技有限公司 | A kind of evaporation coating device and organic EL display panel evaporation coating method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information |
Inventor after: Cai Hui Inventor before: Guo Jianhua |
|
| CB03 | Change of inventor or designer information | ||
| CP03 | Change of name, title or address |
Address after: 130000 building A5, phase I, Beihu science and Technology Park, 3333 Shengbei street, Beihu science and Technology Development Zone, Changchun City, Jilin Province Patentee after: Changchun hiprunsi Technology Co., Ltd Address before: 130000 1-3 / F, building A5, North Lake Science and Technology Park, 3333 Shengbei street, Gaoxin North District, Changchun City, Jilin Province Patentee before: CHANGCHUN HAIPURUNSI TECHNOLOGY Co.,Ltd. |
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| CP03 | Change of name, title or address |