CN106735864B - 同轴实时检测的振镜扫描激光加工方法及装置 - Google Patents
同轴实时检测的振镜扫描激光加工方法及装置 Download PDFInfo
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- CN106735864B CN106735864B CN201611197180.2A CN201611197180A CN106735864B CN 106735864 B CN106735864 B CN 106735864B CN 201611197180 A CN201611197180 A CN 201611197180A CN 106735864 B CN106735864 B CN 106735864B
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- 238000012545 processing Methods 0.000 title claims abstract description 116
- 238000001514 detection method Methods 0.000 claims abstract description 50
- 238000000034 method Methods 0.000 claims abstract description 38
- 238000005516 engineering process Methods 0.000 claims abstract description 20
- 238000005457 optimization Methods 0.000 claims abstract description 6
- 238000006073 displacement reaction Methods 0.000 claims description 25
- 230000005540 biological transmission Effects 0.000 claims description 19
- 230000008569 process Effects 0.000 claims description 16
- 238000003754 machining Methods 0.000 claims description 8
- 239000006185 dispersion Substances 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 230000007306 turnover Effects 0.000 claims description 3
- 238000011156 evaluation Methods 0.000 claims 1
- 238000001914 filtration Methods 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000002366 time-of-flight method Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 238000012271 agricultural production Methods 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/60—Preliminary treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
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CN201810232197.XA CN108406092B (zh) | 2016-12-22 | 2016-12-22 | 一种同轴实时检测的振镜扫描激光加工方法 |
CN201611197180.2A CN106735864B (zh) | 2016-12-22 | 2016-12-22 | 同轴实时检测的振镜扫描激光加工方法及装置 |
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Families Citing this family (27)
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CN109317821A (zh) * | 2017-07-24 | 2019-02-12 | 北京中科镭特电子有限公司 | 一种激光焊接系统 |
CN107790895A (zh) * | 2017-11-01 | 2018-03-13 | 中国振华(集团)新云电子元器件有限责任公司(国营第四三二六厂) | 电极箔的切割装置及其切割方法 |
CN109827517B (zh) * | 2017-11-23 | 2020-07-31 | 沈阳新松机器人自动化股份有限公司 | 一种铸件内腔机器人检测机构 |
CN108051880B (zh) * | 2017-12-08 | 2020-01-21 | 苏州大学 | 一种金属多面扫描棱镜的加工方法 |
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CN109604819B (zh) * | 2018-12-12 | 2019-12-03 | 中国科学院西安光学精密机械研究所 | 一种激光加工方法及系统 |
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CN111673288A (zh) * | 2020-06-30 | 2020-09-18 | 李杏璇 | 一种自动准焦打标切割系统 |
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CN112676676A (zh) * | 2020-12-16 | 2021-04-20 | 武汉逸飞激光股份有限公司 | 极耳焊接方法 |
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CN116604174A (zh) * | 2023-05-12 | 2023-08-18 | 苏州智巨源自动化科技有限公司 | 铝边框激光打标机 |
CN116833576A (zh) * | 2023-08-21 | 2023-10-03 | 广东工业大学 | 一种闭环反馈式激光精密加工方法及设备 |
CN117102712B (zh) * | 2023-10-24 | 2024-02-20 | 宁德时代新能源科技股份有限公司 | 激光加工质量监测系统、方法、处理设备及可读存储介质 |
CN117182358B (zh) * | 2023-11-02 | 2024-01-26 | 无锡超通智能制造技术研究院有限公司 | 一种精细金属掩膜版激光加工装置及其加工方法 |
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CN203599712U (zh) * | 2013-10-31 | 2014-05-21 | 东莞市乐琪光电科技有限公司 | 同轴检测的激光打标机 |
CN104439695A (zh) * | 2013-09-16 | 2015-03-25 | 大族激光科技产业集团股份有限公司 | 一种激光加工系统的视觉检测装置 |
CN106216831A (zh) * | 2016-08-22 | 2016-12-14 | 大族激光科技产业集团股份有限公司 | 激光加工系统及激光调焦方法 |
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WO2009047350A1 (en) * | 2007-10-11 | 2009-04-16 | National University Of Ireland, Galway | A system and method for monitoring a laser drilling process |
CN101856773B (zh) * | 2010-04-22 | 2012-08-22 | 广州中国科学院工业技术研究院 | 一种激光加工初始位置的对焦定位方法 |
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JP5252026B2 (ja) * | 2011-05-10 | 2013-07-31 | パナソニック株式会社 | レーザ溶接装置及びレーザ溶接方法 |
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2016
- 2016-12-22 CN CN201611197180.2A patent/CN106735864B/zh not_active Expired - Fee Related
- 2016-12-22 CN CN201810232197.XA patent/CN108406092B/zh active Active
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CN101913105A (zh) * | 2010-08-16 | 2010-12-15 | 合肥工业大学 | 用于数控机床在位测量的非接触三维光学测头及测量方法 |
CN104439695A (zh) * | 2013-09-16 | 2015-03-25 | 大族激光科技产业集团股份有限公司 | 一种激光加工系统的视觉检测装置 |
CN203599712U (zh) * | 2013-10-31 | 2014-05-21 | 东莞市乐琪光电科技有限公司 | 同轴检测的激光打标机 |
CN106216831A (zh) * | 2016-08-22 | 2016-12-14 | 大族激光科技产业集团股份有限公司 | 激光加工系统及激光调焦方法 |
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CN108406092A (zh) | 2018-08-17 |
CN106735864A (zh) | 2017-05-31 |
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