CN106733549A - A kind of film layer restorative procedure and system - Google Patents
A kind of film layer restorative procedure and system Download PDFInfo
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- CN106733549A CN106733549A CN201710022883.XA CN201710022883A CN106733549A CN 106733549 A CN106733549 A CN 106733549A CN 201710022883 A CN201710022883 A CN 201710022883A CN 106733549 A CN106733549 A CN 106733549A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/005—Repairing damaged coatings
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30121—CRT, LCD or plasma display
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Abstract
This application provides a kind of film layer restorative procedure and system, it is used to improve film layer coating homogeneity, so as to avoid the bad generations such as LCD image quality inequality, white point, dim spot, lifts product yield and the market competitiveness, a kind of film layer restorative procedure that the application is provided includes:Whether detection film layer defective region, when the defective region of the film layer is detected, determines the first size and first position coordinate of each defect area;According to the first size of each defect area, it is determined that repairing the reparation parameter of each defect area;According to the reparation parameter and the first position coordinate of each defect area of each defect area of reparation for determining, the film layer is repaired.
Description
Technical field
The application is related to display technology field, more particularly to a kind of film layer restorative procedure and system.
Background technology
Thin Film Transistor-LCD (Thin Film Transistor Liquid Crystal Display, TFT-
LCD) there is small volume, low in energy consumption, radiationless, development at full speed has been obtained in recent years, have become in the market and show
The main flow of device.
Polyimides (PI) is one of critical material in liquid crystal display device process of alignment, and during the coating of PI film layers, example
Such as there is substantial amounts of organic film (ORG) via, matrix (Matrix) hole in TFT side, cause TFT side thicknesses of layers difference compared with
Greatly, hole vicinity PI thicknesses of layers is relatively thin when PI film layers are coated, the surface irregularity of PI film layers, that is, there is the painting of PI film layers
Cover uneven problem.But also it is used to solve the uneven problem of PI film layers coating at present without effective processing mode, and the coating of PI film layers is not
By bad generations such as caused LCD image quality inequality, white point, dim spots, product yield and the market competitiveness are had a strong impact on.
Certainly, similarly there is film layer coating not for other film layers (such as protective layer (Over Coat, OC film layer))
Equal problem, same influence product yield and the market competitiveness.
Based on this, the uneven problem of film layer coating how is solved, be those skilled in the art's technical problem urgently to be resolved hurrily.
The content of the invention
The embodiment of the present application provides a kind of film layer restorative procedure and system, is used to improve film layer coating homogeneity, so that
The bad generations such as LCD image quality inequality, white point, dim spot are avoided, product yield and the market competitiveness is lifted.
A kind of film layer restorative procedure that the embodiment of the present application is provided includes:
Whether detection film layer defective region, when the defective region of the film layer is detected, determines each defect area
First size and first position coordinate;
According to the first size of each defect area, it is determined that repairing the reparation parameter of each defect area;
According to the reparation parameter and the first position coordinate of each defect area of each defect area of reparation for determining, repair described
Film layer.
The film layer restorative procedure that the embodiment of the present application is provided, by detecting the whether defective region of film layer, detecting
When stating the defective region of film layer, the first size and first position coordinate of each defect area are determined;According to each defect area
First size, it is determined that repairing the reparation parameter of each defect area;Reparation parameter according to each defect area of reparation for determining and
The first position coordinate of each defect area, repairs the film layer, therefore can improve film layer coating homogeneity, so as to avoid LCD
The bad generations such as image quality inequality, white point, dim spot, lift product yield and the market competitiveness.
It is preferred that the whether defective region of the detection film layer, including:
The pictorial information of the film layer is gathered, the pictorial information is carried out with the zero defect film layer pictorial information for prestoring
Compare, determine the whether defective region of the film layer.
It is preferred that the first size according to each defect area, it is determined that the reparation parameter of each defect area is repaired,
Including:
Judge that information determines each defect according to the first size of each defect area, and defect rank set in advance
First defect rank in region;
It is right with reparation parameter according to the first defect rank of each defect area, and defect rank set in advance
Should be related to, it is determined that repairing the reparation parameter of each defect area.
It is preferred that it is determined that after the first defect rank of each defect area, and it is determined that repairing the reparation of each defect area
Before parameter, the method also includes:
The pictorial information of the film layer with defect area is carried out with the zero defect film layer pictorial information for prestoring
Compare, determine second size and second place coordinate of each defect area, according to the second size of each defect area, and
Defect rank set in advance judges that information determines the second defect rank of each defect area, by the second of each defect area
Defect rank is compared with the first defect rank, and the second place coordinate of each defect area and first position are sat
Mark is compared, if both all sames, performs and determines the step of repairing the reparation parameter of each defect area, otherwise, points out to use
Family is processed.
With it, it is determined that before the reparation parameter for repairing each defect area, to the defect rank of each defect area
Tested with position coordinates, to prevent erroneous judgement, such that it is able to improve the accuracy of detection.
It is preferred that it is determined that after the first defect rank of each defect area, the method also includes:
Defect area with different defect ranks is labeled as different colors, and is shown described with defect area
Film layer picture.
With it, the defect area with different defect ranks is labeled as different colors, and displaying has
The picture of the film layer of defect area, so intuitively can show defect information to user.
The embodiment of the present application additionally provides a kind of film layer repair system, and the system includes:
Detection unit, for detecting the whether defective region of film layer;
Defect area information determination unit, for when the defective region of the film layer is detected, determining each defect area
First size and first position coordinate;
Parameter determination unit is repaired, for the first size according to each defect area, it is determined that repairing each defect area
Reparation parameter;
Unit is repaired, for the reparation parameter according to each defect area of reparation for determining and the first position of each defect area
Coordinate, repairs the film layer.
The film layer repair system that the embodiment of the present application is provided, by detecting the whether defective region of film layer, detecting
When stating the defective region of film layer, the first size and first position coordinate of each defect area are determined;According to each defect area
First size, it is determined that repairing the reparation parameter of each defect area;Reparation parameter according to each defect area of reparation for determining and
The first position coordinate of each defect area, repairs the film layer, therefore can improve film layer coating homogeneity, so as to avoid LCD
The bad generations such as image quality inequality, white point, dim spot, lift product yield and the market competitiveness.
It is preferred that the detection unit specifically for:
The pictorial information of the film layer is gathered, the pictorial information is carried out with the zero defect film layer pictorial information for prestoring
Compare, determine the whether defective region of the film layer.
It is preferred that the reparation parameter determination unit includes:First repairs parameter determination subelement and second repairs parameter
Determination subelement;Wherein,
The first reparation parameter determination subelement is used for:According to the first size of each defect area, and in advance
The defect rank of setting judges that information determines the first defect rank of each defect area;
The second reparation parameter determination subelement is used for:According to the first defect rank of each defect area, and
Defect rank set in advance and the corresponding relation for repairing parameter, it is determined that repairing the reparation parameter of each defect area.
It is preferred that the second reparation parameter determination subelement is additionally operable to:
The pictorial information of the film layer with defect area is carried out with the zero defect film layer pictorial information for prestoring
Compare, determine second size and second place coordinate of each defect area, according to the second size of each defect area, and
Defect rank set in advance judges that information determines the second defect rank of each defect area, by the second of each defect area
Defect rank is compared with the first defect rank, and the second place coordinate of each defect area and first position are sat
Mark is compared, if both all sames, performs and determines the step of repairing the reparation parameter of each defect area, otherwise, points out to use
Family is processed.
The film layer repair system provided due to the embodiment of the present application it is determined that before the reparation parameter for repairing each defect area,
Defect rank and position coordinates to each defect area are tested, to prevent erroneous judgement, such that it is able to improve the standard of detection
True property.
It is preferred that the film layer repair system also includes:Display unit;The display unit is used for:
Defect area with different defect ranks is labeled as different colors, and is shown described with defect area
Film layer picture.
Because the defect area with different defect ranks can be labeled as different colors by display unit, and show
The picture of the film layer with defect area, so intuitively can show defect information to user.
Brief description of the drawings
A kind of schematic flow sheet of film layer restorative procedure that Fig. 1 is provided for the embodiment of the present application;
The structural representation of the first film layer repair system that Fig. 2 is provided for the embodiment of the present application;
Second structural representation of film layer repair system that Fig. 3 is provided for the embodiment of the present application;
The structural representation of the third film layer repair system that Fig. 4 is provided for the embodiment of the present application;
The first structural representation of film layer prosthetic device in the film layer repair system that Fig. 5 is provided for the embodiment of the present application;
Second structural representation of film layer prosthetic device in the film layer repair system that Fig. 6 is provided for the embodiment of the present application;
The third structural representation of film layer prosthetic device in the film layer repair system that Fig. 7 is provided for the embodiment of the present application;
4th kind of structural representation of film layer prosthetic device in the film layer repair system that Fig. 8 is provided for the embodiment of the present application;
The overall flow schematic diagram of the PI film layers reparation that Fig. 9 is provided for the embodiment of the present application.
Specific embodiment
The embodiment of the present application provides a kind of film layer restorative procedure and system, is used to improve film layer coating homogeneity, so that
The bad generations such as LCD image quality inequality, white point, dim spot are avoided, product yield and the market competitiveness is lifted.
Below in conjunction with the accompanying drawing in the embodiment of the present application, the technical scheme in the embodiment of the present application is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only some embodiments of the present application, rather than whole embodiments.It is based on
Embodiment in the application, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of the application protection.
It should be noted that the thickness and shape of each device do not reflect actual proportions in illustrations, purpose is to show
Meaning explanation teachings herein.
Referring to a kind of film layer restorative procedure that Fig. 1, the embodiment of the present application are provided, comprise the following steps:
Whether S101, detection film layer defective region, when the defective region of the film layer is detected, determine each defect area
The first size and first position coordinate in domain;
Wherein, above-mentioned film layer for example can be PI film layers, OC film layers etc..
S102, the first size according to each defect area, it is determined that repairing the reparation parameter of each defect area;
Wherein, repairing parameter can for example include:Spray pressure and spray time.
S103, reparation parameter and the first position coordinate of each defect area according to each defect area of reparation for determining, repair
The multiple film layer.
There is the film layer of defect area by above-mentioned method reparation, therefore film layer coating homogeneity can be improved, so that
The bad generations such as LCD image quality inequality, white point, dim spot are avoided, product yield and the market competitiveness is lifted.
It should be noted that the position coordinates of defect area refers generally to the center point coordinate of defect area, but the application reality
Apply example and be not limited to center point coordinate, if simply center point coordinate, the ratio of precision of reparation is higher.
In a better embodiment, whether the defective region of film layer is detected in above-mentioned steps S101, including:
The pictorial information of the film layer is gathered, the pictorial information is carried out with the zero defect film layer pictorial information for prestoring
Compare, determine the whether defective region of the film layer.If the defective region of film layer, carries out film layer reparation, if film layer zero defect
Region, then continue follow-up technique.
The pictorial information of the above-mentioned film layer that will be collected is compared with the zero defect film layer pictorial information for prestoring, really
Whether the fixed defective region of the film layer, for example, can include:
The gray value of the picture pixels point of the film layer that will be collected and identical bits in the zero defect film layer picture for prestoring
Whether the gray value of the pixel at the place of putting is compared, and determines the defective region of the film layer.
It is of course also possible to take other modes to judge the whether defective region of film layer, the embodiment of the present application to this not
Limit.
In a better embodiment, according to the first size of each defect area in above-mentioned steps S102, it is determined that repairing
The reparation parameter of multiple each defect area, can include:
Judge that information determines each defect according to the first size of each defect area, and defect rank set in advance
First defect rank in region;
It is right with reparation parameter according to the first defect rank of each defect area, and defect rank set in advance
Should be related to, it is determined that repairing the reparation parameter of each defect area.
Wherein, defect rank set in advance judges that information can for example include:Complete area free from defect, judges defect area
The defect rank in domain is zero level (L0);The size of defect area is 2~6 μm, and the defect rank for judging defect area is one-level
(L1);The size of defect area is 6~10 μm, judges that the defect rank of defect area is two grades (L2);The size of defect area
It is 10~20 μm, judges that the defect rank of defect area is three-level (L3);The size of defect area is more than 20 μm, judges defect
The defect rank in region is level Four (L4).
It should be noted that size value is corresponding with defect rank in above-mentioned defect rank judgement information set in advance closing
System is simply illustrated, and occurrence can be set according to actual conditions, and the embodiment of the present application is not limited this.
Defect rank set in advance can for example be drawn with the corresponding relation for repairing parameter by limited trials.
Certainly, according to the first size of each defect area in above-mentioned steps S102, it is determined that repairing each defect area
Parameter is repaired, can also be included:
According to the first size of each defect area, and defect area set in advance size with repair parameter
Corresponding relation, it is determined that repairing the reparation parameter of each defect area.The embodiment of the present application is not limited this.
In a better embodiment, in order to prevent erroneous judgement, the accuracy of detection is improved, it is determined that each defect area
The first defect rank after, and it is determined that before the reparation parameter for repairing each defect area, the method can also include:
The pictorial information of the film layer with defect area is carried out with the zero defect film layer pictorial information for prestoring
Compare, determine second size and second place coordinate of each defect area, according to the second size of each defect area, and
Defect rank set in advance judges that information determines the second defect rank of each defect area, by the second of each defect area
Defect rank is compared with the first defect rank, and the second place coordinate of each defect area and first position are sat
Mark is compared, if both all sames, performs and determines the step of repairing the reparation parameter of each defect area, otherwise, points out to use
(i.e. the second defect rank is differed and/or second place coordinate and first position coordinate not phase with the first defect rank for family treatment
Meanwhile, point out user's treatment).
In a better embodiment, in order to intuitively give user displaying defect information, it is determined that each defect area the
After one defect rank, the method can also include:
Defect area with different defect ranks is labeled as different colors, and is shown described with defect area
Film layer picture.
For example:Labeled as green, L2 is labeled as cyan to L1, and L3 is labeled as yellow, and L4 is labeled as purple.
In a better embodiment, in order to further improve film layer coating homogeneity, after the film layer is repaired, the party
Method also includes:Again whether the defective region of the film layer is detected.If detecting the defective region of film layer to proceed to repair, because
This can further improve film layer coating homogeneity.
Based on same inventive concept, referring to Fig. 2, the embodiment of the present application additionally provides a kind of film layer repair system, for solving
Certainly film layer coats uneven problem, and the system includes:
Detection unit 01, for detecting the whether defective region of film layer;
Defect area information determination unit 02, for when the defective region of the film layer is detected, determining each defect area
The first size and first position coordinate in domain;
Parameter determination unit 03 is repaired, for the first size according to each defect area, it is determined that repairing each defect area
The reparation parameter in domain;
Unit 04 is repaired, for the reparation parameter according to each defect area of reparation for determining and first of each defect area
Coordinate is put, the film layer is repaired.
The film layer repair system reparation provided by the embodiment of the present application has the film layer of defect area, therefore can improve
Film layer coats homogeneity, so as to avoid the bad generations such as LCD image quality inequality, white point, dim spot, lifts product yield and market competition
Power.
In a better embodiment, detection unit 01 specifically for:
The pictorial information of the film layer is gathered, the pictorial information is carried out with the zero defect film layer pictorial information for prestoring
Compare, determine the whether defective region of the film layer.
Wherein, the pictorial information of the collection of detection unit 01 film layer can for example include:Detection unit 01 passes through optical lens
(such as ccd sensor camera lens) is scanned according to the fixed cycle to the substrate (such as glass substrate) for scribbling film layer (such as PI film layers)
Take pictures, obtain the pictorial information of film layer.
Above-mentioned detection unit 01 for example can be used for:The gray value of the picture pixels point of the film layer that will be collected with deposit in advance
The gray value of the pixel in the zero defect film layer picture of storage at same position is compared, and determines whether the film layer is defective
Region.
In a better embodiment, as shown in Fig. 2 repair parameter determination unit 03 including:First repairs parameter determination
Subelement 031 and second repairs parameter determination subelement 032.
Wherein, the first reparation parameter determination subelement 031 is used for:According to the first size of each defect area, and
Defect rank set in advance judges that information determines the first defect rank of each defect area;
Second reparation parameter determination subelement 032 is used for:According to the first defect rank of each defect area, and in advance
The defect rank for first setting and the corresponding relation for repairing parameter, it is determined that repairing the reparation parameter of each defect area.
In a better embodiment, in order to prevent erroneous judgement, the accuracy of detection is improved, second repairs parameter determination
Subelement 032 is additionally operable to:
The pictorial information of the film layer with defect area is carried out with the zero defect film layer pictorial information for prestoring
Compare, determine second size and second place coordinate of each defect area, according to the second size of each defect area, and
Defect rank set in advance judges that information determines the second defect rank of each defect area, by the second of each defect area
Defect rank is compared with the first defect rank, and the second place coordinate of each defect area and first position are sat
Mark is compared, if both all sames, performs and determines the step of repairing the reparation parameter of each defect area, otherwise, points out to use
Family is processed.
In a better embodiment, in order to intuitively show defect information to user, as shown in figure 3, above-mentioned film layer is repaiied
Complex system also includes:Display unit 05;The display unit 05 is used for:Defect area with different defect ranks is labeled as
Different colors, and show the picture of the film layer with defect area.
In a better embodiment, in order to further improve film layer coating homogeneity, after the film layer is repaired, detection
Unit 01 is additionally operable to:Again whether the defective region of the film layer is detected.
In a preferred embodiment, as shown in figure 4, the embodiment of the present application provide film layer repair system, including:Automatic light
Learn detecting system 11 (Automatic Optic Inspection, AOI), computer analysis system 12 and film layer prosthetic device 13.
As shown in figure 4, above-mentioned detection unit 01, defect area information determination unit 02, first repair parameter determination
Unit 031 and display unit 05 can be arranged in AOI11, and the second reparation parameter determination subelement 032 can be arranged on computer
In analysis system 12, repairing unit 04 can be arranged on film layer prosthetic device 13.
The film layer repair system that certain the embodiment of the present application is provided can also be combined by other devices, or entirely
A device is made, the embodiment of the present application is not limited this.
In a better embodiment, repairing parameter includes:Spray pressure and spray time, film layer prosthetic device 13 are wrapped
Include:Nozzle 131, the cylinder 132 for adjusting spray pressure, and it is arranged on the film layer reparation between nozzle 131 and cylinder 132
Liquid storage chamber 133, as shown in Figure 5.
In a better embodiment, in order that film layer coating it is more homogeneous, referring to Fig. 6, film in film layer prosthetic device 13
Layer is repaired and film layer reparation liquid filter chamber 134 is provided between liquid storage chamber 133 and nozzle 131.Liquid filter chamber 134 is repaired by film layer
Filtered to repairing liquid, repaired using the reparation liquid after filtering, so may be such that film layer coating is more homogeneous.
In a better embodiment, in order to realize automatically adjusting reparation parameter, referring to Fig. 7, film layer prosthetic device 13 is also
Can include:Spray time for controlling nozzle 131, and control cylinder 132 moves to adjust the spray in the exit of nozzle 131
Apply the control unit 135 of pressure.
In a better embodiment, the spray pressure of nozzle exit is adjusted for the ease of control unit, referring to Fig. 8,
Film layer prosthetic device 13 can also include:Spray pressure for measuring the exit of nozzle 131, and measurement data is fed back into control
The pressure sensor 136 of unit processed 135.
Next by taking PI film layers as an example, illustrate that the film layer repair system provided using the embodiment of the present application is entered with reference to accompanying drawing 9
The overall flow that row PI film layers are repaired, its flow comprises the following steps:
S201, AOI gather the pictorial information of PI film layers;
The pictorial information of the PI film layers that S202, AOI will be collected enters with the zero defect PI film layer pictorial informations for prestoring
Whether row compares, and determines the defective region of the PI film layers;
S203, AOI determine first size and the first position of each defect area when the defective region of PI film layers is detected
Coordinate;
S204, AOI judge that information is true according to the first size of each defect area, and defect rank set in advance
First defect rank of fixed each defect area, and the defect area information of each defect area is sent to computer analysis system;
Wherein, defect area information includes:First defect rank of defect area, the first position coordinate of defect area and
The pictorial information of the film layer with defect area;
Defect area with different defect ranks is labeled as different colors by S205, AOI, and shows there is defect
The picture of the PI film layers in region;
S206, computer analysis system will receive described in have defect area film layer pictorial information with prestore
Zero defect PI film layer pictorial informations be compared, second size and second place coordinate of each defect area are determined, according to true
Second size of fixed each defect area, and defect rank set in advance judges that information determines that the second of each defect area lacks
Fall into grade;
S207, computer analysis system are by the second defect rank of each defect area and the first defect rank for receiving
It is compared, and the second place coordinate of each defect area is compared with the first position coordinate for receiving, if
Both all sames, then perform step S208, otherwise, performs step S209.
S208, computer analysis system are according to the first defect rank of each defect area for receiving and set in advance
Defect rank and the corresponding relation of reparation parameter, it is determined that repairing the reparation parameter of each defect area, and send out to film layer prosthetic device
Spraying is sent to instruct;
Wherein, repairing parameter is:Spray pressure and spray time;Spraying instruction includes:The spray pressure of each defect area,
Spray time and position coordinates.
For example:The size of defect area judges that defect rank is L3 at 10~20 μm, and spray pressure corresponding with L3 is
5Mpa, spray time is 3~6s.
S209, prompting user's treatment;
S210, film layer prosthetic device repair PI film layers according to the spraying instruction for receiving.
It is pointed out that after step S210 is performed, step S201 is re-executed, until AOI detects the PI film layers
Area free from defect.
In sum, in the technical scheme that the embodiment of the present application is provided, by detecting the whether defective region of film layer, in inspection
When measuring the defective region of the film layer, the first size and first position coordinate of each defect area are determined;According to described each scarce
The first size in region is fallen into, it is determined that repairing the reparation parameter of each defect area;According to the reparation of each defect area of reparation for determining
The first position coordinate of parameter and each defect area, repairs the film layer, therefore can improve film layer coating homogeneity, so as to keep away
Exempt from the bad generations such as LCD image quality inequality, white point, dim spot, lift product yield and the market competitiveness.
Obviously, those skilled in the art can carry out the essence of various changes and modification without deviating from the application to the application
God and scope.So, if these modifications of the application and modification belong to the scope of the application claim and its equivalent technologies
Within, then the application is also intended to comprising these changes and modification.
Claims (10)
1. a kind of film layer restorative procedure, it is characterised in that the method includes:
Whether detection film layer defective region, when the defective region of the film layer is detected, determines the first of each defect area
Size and first position coordinate;
According to the first size of each defect area, it is determined that repairing the reparation parameter of each defect area;
According to the reparation parameter and the first position coordinate of each defect area of each defect area of reparation for determining, the film is repaired
Layer.
2. method according to claim 1, it is characterised in that the whether defective region of detection film layer, including:
The pictorial information of the film layer is gathered, the pictorial information is compared with the zero defect film layer pictorial information for prestoring
Compared with determining the whether defective region of the film layer.
3. method according to claim 2, it is characterised in that the first size according to each defect area, really
The reparation parameter of the multiple each defect area of periodical repair, including:
Judge that information determines each defect area according to the first size of each defect area, and defect rank set in advance
The first defect rank;
According to the first defect rank of each defect area, and defect rank set in advance and the corresponding pass for repairing parameter
System, it is determined that repairing the reparation parameter of each defect area.
4. method according to claim 3, it is characterised in that it is determined that after the first defect rank of each defect area, and
It is determined that before the reparation parameter for repairing each defect area, the method also includes:
The pictorial information of the film layer with defect area is compared with the zero defect film layer pictorial information for prestoring,
Second size and second place coordinate of each defect area are determined, according to the second size of each defect area, and in advance
The defect rank of setting judges that information determines the second defect rank of each defect area, by the second defect of each defect area
Grade is compared with the first defect rank, and the second place coordinate of each defect area and first position coordinate are entered
Row compares, if both all sames, performs and determines the step of repairing the reparation parameter of each defect area, otherwise, points out at user
Reason.
5. the method according to claim 3 or 4, it is characterised in that it is determined that after the first defect rank of each defect area,
The method also includes:
Defect area with different defect ranks is labeled as different colors, and shows the film with defect area
The picture of layer.
6. a kind of film layer repair system, it is characterised in that the system includes:
Detection unit, for detecting the whether defective region of film layer;
Defect area information determination unit, for when the defective region of the film layer is detected, determining the of each defect area
One size and first position coordinate;
Parameter determination unit is repaired, for the first size according to each defect area, it is determined that repairing repairing for each defect area
Multiple parameter;
Unit is repaired, for being sat according to the reparation parameter of each defect area of reparation and the first position of each defect area that determine
Mark, repairs the film layer.
7. film layer repair system according to claim 6, it is characterised in that the detection unit specifically for:
The pictorial information of the film layer is gathered, the pictorial information is compared with the zero defect film layer pictorial information for prestoring
Compared with determining the whether defective region of the film layer.
8. film layer repair system according to claim 7, it is characterised in that the reparation parameter determination unit includes:The
One repairs parameter determination subelement and second repairs parameter determination subelement;Wherein,
The first reparation parameter determination subelement is used for:According to the first size of each defect area, and preset
Defect rank judge that information determines the first defect rank of each defect area;
The second reparation parameter determination subelement is used for:According to the first defect rank of each defect area, and in advance
The defect rank of setting and the corresponding relation for repairing parameter, it is determined that repairing the reparation parameter of each defect area.
9. film layer repair system according to claim 8, it is characterised in that described second repairs parameter determination subelement also
For:
The pictorial information of the film layer with defect area is compared with the zero defect film layer pictorial information for prestoring,
Second size and second place coordinate of each defect area are determined, according to the second size of each defect area, and in advance
The defect rank of setting judges that information determines the second defect rank of each defect area, by the second defect of each defect area
Grade is compared with the first defect rank, and the second place coordinate of each defect area and first position coordinate are entered
Row compares, if both all sames, performs and determines the step of repairing the reparation parameter of each defect area, otherwise, points out at user
Reason.
10. film layer repair system according to claim 8 or claim 9, it is characterised in that the film layer repair system also includes:
Display unit;The display unit is used for:
Defect area with different defect ranks is labeled as different colors, and shows the film with defect area
The picture of layer.
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