CN1067176C - Integrated circuit mount checker - Google Patents
Integrated circuit mount checker Download PDFInfo
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- CN1067176C CN1067176C CN 95102426 CN95102426A CN1067176C CN 1067176 C CN1067176 C CN 1067176C CN 95102426 CN95102426 CN 95102426 CN 95102426 A CN95102426 A CN 95102426A CN 1067176 C CN1067176 C CN 1067176C
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- pin
- integrated circuit
- light
- ccd
- lens
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Abstract
The present invention relates to a new pin offset checker for an integrated circuit. Parallel light irradiates pins of the integrated circuit device from two different directions; a light splitting system specially designed and a lens array are utilized for dividing two rows of pins into four sections for simultaneous processing; a special symmetrical evaluation function is defined for accurately checking the positions of the pins. The present invention has the characteristics of high-capacity parallel processing, high speed and accuracy; the present invention is suitable for quickly and accurately checking the offset of the pins on a package production line of an integrated circuits in a flat type.
Description
The invention belongs to semiconductor device detecting instrument field, be applicable to quick, the accurately detection of the semiconductor integrated circuit pin deviation of planar package.
Planar package type integrated circuit is the new generation of semiconductor device, it is characterized in that integrated level can do very highly, and number of pins is many, arranges closely.In order to guarantee down together the reliability of welding sequence automatically, very high to the geometric position requirement of pin.The deviation of pin geometric position has three classes: the firstth, and off-design position, pin center claims the lead pin pitch error; The secondth, when device was set level naturally on horizontal plane, some pin lower end and the distance of placing the plane claimed from surface error; The 3rd is pin bottom and the angular error (see figure 1) of placing the plane.Wherein 1 is device, and ∑ d is the horizontal positioned plane, and C represents that from surface error, θ represents angular error, and p is the spacing of standard, and Δ p is an interval error.
In the packaging production line and the inspection center of device, requirement is measured these three kinds of errors and is screened by tolerance.Known method of measurement is optical measurement, for example measures with tool microscope, projecting apparatus, and its shortcoming is that speed is slow, is not suitable for streamline.And measuring method is difficult to measure the angular error that is positioned at interim pins.
The objective of the invention is, overcome the slow-footed shortcoming of optical measurement, adopt photoelectric measurement method, design special optical system, set up special data processing model, realize high accuracy, pin deviation measurement fast with new technical characterictic.
Integrated circuit mount checker of the present invention, constitute by light source, collimating mirror, beam splitting system, charge-coupled device (CCD), illuminating device and data handling system, its interactively each other is: four bromine tungsten filament lamps become directional light through collimating mirror, again by turning back 45 ° behind half pentagonal prism, the shadow falls of pin being blocked light formation is mapped on the imaging screen, form the perspective view of pin, this figure is divided into two passages through Amici prism, a passage is a transmitted light, through lens light array and main lens, perspective view is imaged on charge coupled device (CCD
1) target surface on, convert the signal of telecommunication to and deliver to data handling system; Another passage is a reverberation, after the reflective mirror reflection, through the lens array and the main lens of specification are imaged on (CCD equally
2) target surface on, convert the signal of telecommunication to and deliver to data handling system; Beam splitting system is to be made of an Amici prism and a speculum, imaging system is divided into two two passages of symmetry fully, respectively to tested integrated circuit 1 two opposite groups pin imaging; Lens array is one group 2 or 4 lens, is positioned on the same plane with light shaft positive cross, by center C
1, C
2, C
3And C
41/4 and 3/4 place, i.e. O of the corresponding pin of one group of opposite side of inferior optical axis alignment device
1, O
2, O
3And O
4The place; Lens centre C '
1, C '
2, C '
3, and C '
4With respect to C
1, C
2, C
3And C
4The small distance that staggers is called offset delta
1, δ
2, δ
3And δ
4Suitably select side-play amount, make device two opposite rows pin be divided into four sections, be imaged on simultaneously on the charge-coupled device (CCD) target surface, in data handling system, in a frame, handle simultaneously; Adopt directional light from two different directions the integrated circuit (IC)-components pin to be shone, two light beams of projection are directional light, and it is two to restraint directional lights by two approximate point-source of lights through what two collimating lenses and two and half pentagonal prisms formed.
New type integrated circuit pin detection device of the present invention also adopts directional light from two different directions integrated circuit (IC)-components 1 pin to be shone; The angle that described two different directions refer to two collimated light beams and is the angle of the best with 90 ° in 30 ° to 120 ° scope; This two collimated light beam is the two bundle directional lights that formed through two collimating lenses and two and half pentagonal prisms by two approximate point-source of lights; Described approximate point-source of light, the full-size that refers to the luminous element of light source should be less than 0.1 with the ratio of the focal length of collimating mirror.
The data processing method of new type integrated circuit pin detection device of the present invention has adopted with the symmetry evaluation of programme, and definition symmetry evaluation function is accurately measured the symmetrical centre of pin shade, thereby calculates whole parameters of pin deviation; Adopt directional light from two different directions the integrated circuit (IC)-components pin to be shone, two light beams of projection are directional light, and it is two to restraint directional lights by two approximate point-source of lights through what two collimating lenses and two and half pentagonal prisms formed; Beam splitting system is to be made of an Amici prism and a speculum, imaging system is divided into two two passages of symmetry fully, respectively to tested integrated circuit 1 two opposite groups pin imaging; Lens array device in each passage of design is one group 2 or 4 lens, and be positioned on usefulness one plane with light shaft positive cross, the skew of scioptics center, select suitable side-play amount, make device two opposite rows pin be divided into four sections, and be imaged on simultaneously on the charge-coupled device (CCD) target surface, promptly in data handling system, can in a frame, handle simultaneously; The shade symmetrical centre, the pin that is meant integrated circuit 1 projects on the special imaging screen under the directional light irradiation, form shade, use charge coupled device (CCD) device and data handling system that the grey scale curve of shade is sampled again, the gray value I that obtains sampling
KThe symmetry evaluation function E of definition grey scale curve
KFor
N in the formula
1And N
2Be the natural number of suitably choosing, N
2＞N
1, the symmetrical centre of shade is corresponding to E
KZero point, this point can be by E
KSample value accurately obtain through linear homing method.Technical scheme and technical characterictic to this invention is illustrated in conjunction with the accompanying drawings below:
Principle of the present invention, advantage and effect:
Above-mentioned design is fully used the target surface of CCD, and resolution is doubled.
Fig. 4 is a pin forms shade under the directional light irradiation of two bundle different directions a schematic diagram.OA is the central shaft of pin front end (being approximately a cuboid) among the figure.
Establishing ∑ d among Fig. 5 is the placement plane of device, i.e. x, y plane, and an array of pins is arranged along the x direction.Z axle and x, y planar quadrature.∑ c is an imaging screen.Directional light projects to pin on the ∑ c.
If two shade centre coordinates are respectively x ', x ", ∑ c and ∑ d are at a distance of h, and the thickness of pin is b, then the centre coordinate of this pin
X=(x '+x ")/2 (1) acoplanarity
C=z=(x″-x’)/2-(h+b/2) (2)
Different cross section is measured the z value on the y direction, is designated as { z
m, with z
mThese values are with the synthetic straight line of linear fitting, and the angle on it and x, y plane is exactly the θ (see figure 6).
Owing to following three reasons:
(1) light line degree is limited, and therefore the light beam that forms not is strict directional light;
(2) optical system exists diffraction and aberration;
(3) noise of imaging screen in scattering process,
Make the shade grey scale curve (I among Fig. 7 that obtains
k) do not have desirable straight flange, but have the easement curve of random noise.Known data processing method is by I
kMethods such as the differential maximum of sample value or differential center of gravity at first determine the accurate position at edge, and the center that defines two marginal positions then is the shade center, is called edge-detection algorithm.Because The noise, the decline of light intensity all can cause the variation of grey scale curve under the short term fluctuations of illuminance and long-term the use, thereby forms the error of edge detection.
The present invention does not adopt the edge detection scheme, and has defined the symmetry evaluation function E of grey scale curve
K, measure the symmetrical centre of shade.For k sample point,
N in the formula
1And N
2Be the natural number of suitably choosing, N
2＞N
1, draw E among Fig. 7
KCurve.Obviously, the symmetrical centre of shade is corresponding to E
KZero point, this point can be by E
KSample value accurately obtain through linear regression method.
Obviously, above-mentioned three factors that influence edge metering, influence to two edges is identical, has same symmetry, they only change the shape of grey scale curve, but do not change the position of its symmetrical centre, the symmetrical centre of calculating according to this scheme has very high accuracy and anti-interference.Therefore, this integrated circuit mount checker is applicable to quick, the accurately detection of the semiconductor integrated circuit pin deviation of planar package.
Description of drawings:
Fig. 1 planar integrated circuit pin deviation schematic diagram
1 planar integrated circuit
∑ d horizontal positioned plane
C is from surface error
The θ angular error
The spacing of p standard
Δ p interval error
Fig. 2 optical system diagram
2 light sources (bromine tungsten filament lamp), 3 collimating mirrors
4 half pentagonal prisms, 5 imaging screens
6 Amici prisms, 7 lens arrays
8 main lenss, 9 reflective mirrors
The functional schematic of Fig. 3 lens array
Fig. 4 directional light is to the projection effect of pin
The calculating of Fig. 5 pin deviation
∑ c imaging screen
Fig. 6 is by the data { z of z coordinate
mThe calculating angle
The grey scale curve of Fig. 7 pin projection image and symmetry evaluation function curve
The k sampled point
E
kThe symmetry evaluation function
I
kThe gray scale function of pin projection image
Embodiments of the invention see that Fig. 1 is to shown in Figure 7.And by the mutual alignment of foregoing each parts and the device of optical system.The actual parameter of the part that adopts is: light source 2 is 12V, 20W bromine tungsten filament lamp; The aperture of lens 3 is 27mm, and focal length is 75mm; The deflection angle of half pentagonal prism 4 is 45 °; The splitting ratio of Amici prism 6 is 1: 1; The reflectivity of reflective mirror 9 〉=98%; The focal length φ of lens array 7 is 210mm, aperture 15mm; Side-play amount is respectively δ
2=δ
3=0.5mm, δ
1=δ
4=1.5mm; The focal length of main lens 8 is 75mm, and relative aperture is 1: 1.7; The pixel count of CCD is 795 * 596.
Claims (3)
1. integrated circuit mount checker, by light source, collimating mirror, beam splitting system, charge-coupled device (CCD), illuminating device and data handling system constitute, its interactively each other is: four bromine tungsten filament lamps (2) become directional light through collimating mirror (3), again by turning back 45 ° behind half pentagonal prism (4), the shadow falls of pin being blocked light formation is mapped on the imaging screen (5), form the perspective view of pin, this figure is divided into two passages through Amici prism (6), a passage is a transmitted light, through lens array (7) and main lens (8), perspective view is imaged on charge coupled device (CCD
1) target surface on, convert the signal of telecommunication to and deliver to data handling system; Another passage is a reverberation, after reflective mirror (9) reflection, through the lens array (7) and the main lens (8) of specification are imaged on charge coupled device (CCD equally
2) target surface on, convert the signal of telecommunication to and deliver to data handling system, it is characterized in that:
1. beam splitting system is to be made of an Amici prism (6) and a speculum (9), imaging system is divided into two two passages of symmetry fully, respectively to the imaging of tested integrated circuit (1) two opposite groups pin;
2. lens array is one group 2 or 4 lens, is positioned on the same plane with light shaft positive cross, by center C
1, C
2, C
3And C
41/4 and 3/4 place, i.e. O of the corresponding pin of one group of opposite side of inferior optical axis alignment device
1, O
2, O
3And O
4The place; Lens centre C '
1, C '
2, C '
3, and C '
4With respect to C
1, C
2, C
3And C
4The small distance that staggers is called offset delta
1, δ
2, δ
3And δ
4Suitably select side-play amount, make device (1) two opposite rows pin be divided into four sections, be imaged on simultaneously on the charge-coupled device (CCD) target surface, in data handling system, in a frame, handle simultaneously;
3. adopt directional light from two different directions the integrated circuit (IC)-components pin to be shone, two light beams of projection are directional light, and it is the two bundle directional lights that formed through two collimating lenses (3) and two and half pentagonal prisms (4) by two approximate point-source of lights (2).
2. according to the described integrated circuit mount checker of claim 1, it is characterized in that: adopt directional light integrated circuit (IC)-components (1) pin to be shone from two different directions; Described two different directions, the angle that refers to two collimated light beams and are the angle of the best with 90 ° in 30 ° to 120 ° scope; This two collimated light beam is the two bundle directional lights that formed through two collimating lenses (3) and two and half pentagonal prisms (4) by two approximate point-source of lights (2); Described approximate point-source of light, the ratio that refers to the focal length of the full-size of luminous element of light source and collimating mirror (3) should be less than 0.1.
3, a kind of data processing method according to the described integrated circuit mount checker of claim 1, it is characterized in that: be to have adopted with the symmetry evaluation of programme, definition symmetry evaluation function is accurately measured the symmetrical centre of pin shade, thereby calculates whole parameters of pin deviation; Adopt directional light from two different directions the integrated circuit (IC)-components pin to be shone, two light beams of projection are directional light, and it is two to restraint directional lights by two approximate point-source of lights (2) through what two collimating lenses (3) and two and half pentagonal prisms (4) formed; Beam splitting system is to be made of an Amici prism (6) and a speculum (9), imaging system is divided into two two passages of symmetry fully, respectively to tested integrated circuit 1 two opposite groups pin imaging; Lens array device (7) in each passage of design is one group 2 or 4 lens, and be positioned on usefulness one plane with light shaft positive cross, the skew of scioptics center, select suitable side-play amount, make device (1) two opposite rows pin be divided into four sections, and be imaged on simultaneously on the charge-coupled device (CCD) target surface, promptly in data handling system, can in a frame, handle simultaneously; The shade symmetrical centre, the pin that is meant integrated circuit 1 projects on the special imaging screen (5) under the directional light irradiation, form shade, use charge coupled device (CCD) device and data handling system that the grey scale curve of shade is sampled again, the gray value I that obtains sampling
KThe symmetry evaluation function E of definition grey scale curve
KFor
N in the formula
1And N
2Be the natural number of suitably choosing, N
2＞N
1, the symmetrical centre of shade is corresponding to E
KZero point, this point can be by E
KSample value accurately obtain through linear homing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 95102426 CN1067176C (en) | 1995-03-17 | 1995-03-17 | Integrated circuit mount checker |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 95102426 CN1067176C (en) | 1995-03-17 | 1995-03-17 | Integrated circuit mount checker |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1131816A CN1131816A (en) | 1996-09-25 |
| CN1067176C true CN1067176C (en) | 2001-06-13 |
Family
ID=5074328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 95102426 Expired - Fee Related CN1067176C (en) | 1995-03-17 | 1995-03-17 | Integrated circuit mount checker |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1067176C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102594414B1 (en) * | 2018-10-24 | 2023-10-30 | 삼성전자주식회사 | Probe device and test device including the same |
| CN111065912A (en) * | 2019-12-04 | 2020-04-24 | 长江存储科技有限责任公司 | Inspection system for semiconductor device and related inspection method |
| CN117038494B (en) * | 2023-10-10 | 2023-12-15 | 天津芯成半导体有限公司 | Auxiliary intelligent detection system for chip processing industry |
-
1995
- 1995-03-17 CN CN 95102426 patent/CN1067176C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1131816A (en) | 1996-09-25 |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: DAHENG NEW EPOCH TECHNOLOGY, INC. Free format text: FORMER OWNER: DAHENG CO., CHINA |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20020111 Address after: 100086, Beijing, Zhongguancun, Haidian District No. 22, China Science Building, 11 floor Co-patentee after: Singapore National Semiconductors Patentee after: China Daheng Group, Inc. Address before: 100080 No. 29, Zhongguancun Road, Beijing Co-patentee before: Singapore National Semiconductors Patentee before: China Daheng Co., Ltd. |
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Granted publication date: 20010613 Termination date: 20100317 |