CN106702338A - 一种TiSiNiN纳米复合涂层及其制备方法 - Google Patents
一种TiSiNiN纳米复合涂层及其制备方法 Download PDFInfo
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- CN106702338A CN106702338A CN201611153025.0A CN201611153025A CN106702338A CN 106702338 A CN106702338 A CN 106702338A CN 201611153025 A CN201611153025 A CN 201611153025A CN 106702338 A CN106702338 A CN 106702338A
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- tisinin
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- tisini
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- 238000000576 coating method Methods 0.000 title claims abstract description 64
- 239000011248 coating agent Substances 0.000 title claims abstract description 38
- 239000002114 nanocomposite Substances 0.000 title claims abstract description 37
- 238000002360 preparation method Methods 0.000 title claims abstract description 26
- 239000011159 matrix material Substances 0.000 claims abstract description 57
- 239000002131 composite material Substances 0.000 claims abstract description 29
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 23
- 238000000151 deposition Methods 0.000 claims abstract description 21
- 230000008021 deposition Effects 0.000 claims abstract description 21
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 7
- 150000001875 compounds Chemical class 0.000 claims abstract description 7
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 6
- 238000004140 cleaning Methods 0.000 claims description 42
- 238000004544 sputter deposition Methods 0.000 claims description 25
- 150000002500 ions Chemical class 0.000 claims description 22
- 239000000203 mixture Substances 0.000 claims description 15
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 14
- 239000013077 target material Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 8
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 6
- 239000002159 nanocrystal Substances 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 abstract description 21
- 238000000034 method Methods 0.000 abstract description 8
- 238000005299 abrasion Methods 0.000 abstract description 3
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 29
- 229910008482 TiSiN Inorganic materials 0.000 description 16
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 16
- 238000005516 engineering process Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 239000012528 membrane Substances 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 230000003026 anti-oxygenic effect Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 239000011253 protective coating Substances 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 102100032047 Alsin Human genes 0.000 description 1
- 101710187109 Alsin Proteins 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 241000549556 Nanos Species 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 235000006708 antioxidants Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000002173 high-resolution transmission electron microscopy Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201611153025.0A CN106702338B (zh) | 2016-12-14 | 2016-12-14 | 一种TiSiNiN纳米复合涂层及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201611153025.0A CN106702338B (zh) | 2016-12-14 | 2016-12-14 | 一种TiSiNiN纳米复合涂层及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN106702338A true CN106702338A (zh) | 2017-05-24 |
CN106702338B CN106702338B (zh) | 2019-03-19 |
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CN201611153025.0A Active CN106702338B (zh) | 2016-12-14 | 2016-12-14 | 一种TiSiNiN纳米复合涂层及其制备方法 |
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CN (1) | CN106702338B (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111593301A (zh) * | 2020-06-01 | 2020-08-28 | 肇庆宏旺金属实业有限公司 | 一种整卷不锈钢彩色镜面抗指纹膜层加工方法 |
CN113403596A (zh) * | 2021-06-04 | 2021-09-17 | 河南科技大学 | 基于磁控溅射与超声滚压复合强化轴承套圈表面的方法 |
CN113652651A (zh) * | 2021-08-05 | 2021-11-16 | 东莞市华升真空镀膜科技有限公司 | TiAlN/TiSiNiN复合涂层、硬质涂层及其制备方法与应用 |
CN113652636A (zh) * | 2021-08-05 | 2021-11-16 | 东莞市华升真空镀膜科技有限公司 | TiAlSiBNiN纳米复合涂层及其制备方法和应用 |
CN116121702A (zh) * | 2023-03-29 | 2023-05-16 | 纳狮新材料有限公司杭州分公司 | 一种用于增强高温耐磨性的TiSiNiYN涂层 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103510061A (zh) * | 2013-10-12 | 2014-01-15 | 萨姆森涂层纳米科技(上海)有限公司 | 一种高硬度、高弹性模量TiSiN保护涂层的制备方法 |
-
2016
- 2016-12-14 CN CN201611153025.0A patent/CN106702338B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103510061A (zh) * | 2013-10-12 | 2014-01-15 | 萨姆森涂层纳米科技(上海)有限公司 | 一种高硬度、高弹性模量TiSiN保护涂层的制备方法 |
Non-Patent Citations (1)
Title |
---|
M.MISINA等: "Composite TiN–Ni thin films deposited by reactive magnetron sputter ion-plating", 《SURFACE AND COATING TECHNOLOGY》 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111593301A (zh) * | 2020-06-01 | 2020-08-28 | 肇庆宏旺金属实业有限公司 | 一种整卷不锈钢彩色镜面抗指纹膜层加工方法 |
CN113403596A (zh) * | 2021-06-04 | 2021-09-17 | 河南科技大学 | 基于磁控溅射与超声滚压复合强化轴承套圈表面的方法 |
CN113652651A (zh) * | 2021-08-05 | 2021-11-16 | 东莞市华升真空镀膜科技有限公司 | TiAlN/TiSiNiN复合涂层、硬质涂层及其制备方法与应用 |
CN113652636A (zh) * | 2021-08-05 | 2021-11-16 | 东莞市华升真空镀膜科技有限公司 | TiAlSiBNiN纳米复合涂层及其制备方法和应用 |
CN116121702A (zh) * | 2023-03-29 | 2023-05-16 | 纳狮新材料有限公司杭州分公司 | 一种用于增强高温耐磨性的TiSiNiYN涂层 |
Also Published As
Publication number | Publication date |
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CN106702338B (zh) | 2019-03-19 |
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Effective date of registration: 20240108 Address after: No. 9 Jiangnan Road, Dongshan Street, Jiangning District, Nanjing City, Jiangsu Province, 211100 Patentee after: Weng Senqi Address before: 200093 No. 516, military road, Shanghai, Yangpu District Patentee before: University of Shanghai for Science and Technology |
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Effective date of registration: 20240514 Address after: Room 105, Building 3, No. 19-1 Zhugang Road, Chang'an Town, Dongguan City, Guangdong Province, 523000 Patentee after: Dongguan Hanjia Optoelectronic Technology Co.,Ltd. Country or region after: China Address before: No. 9 Jiangnan Road, Dongshan Street, Jiangning District, Nanjing City, Jiangsu Province, 211100 Patentee before: Weng Senqi Country or region before: China |
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