CN106698175A - Magnetic unit and ring type electric permanent-magnetic chuck with same - Google Patents
Magnetic unit and ring type electric permanent-magnetic chuck with same Download PDFInfo
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- CN106698175A CN106698175A CN201510790719.4A CN201510790719A CN106698175A CN 106698175 A CN106698175 A CN 106698175A CN 201510790719 A CN201510790719 A CN 201510790719A CN 106698175 A CN106698175 A CN 106698175A
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- magnet
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- electric permanent
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Abstract
The invention provides a ring type electric permanent-magnetic chuck comprising a shell and at least one magnetic unit arranged inside the shell. The shell covers the magnetic unit, and the shell and the magnetic unit are fixed together through screws. The magnetic unit comprises a reversible magnetic ring, an irreversible magnetic ring, a magnetism conducting plate and a magnet exciting coil. The irreversible magnetic ring is inlaid into the reversible magnetic ring, and the irreversible magnetic ring and the reversible magnet ring are identical in height. The magnetism conducting plate is fixedly arranged on the two end faces, attached to each other, of the reversible magnetic ring and the irreversible magnetic ring. The magnet exciting coil is wound around the outer portion of the irreversible magnetic ring, and the irreversible magnetic ring is relatively wrapped inside the magnet exciting coil. The ring type electric permanent-magnetic chuck can conduct double-face operation; and when the ring type electric permanent-magnetic chuck works, the attraction operation force applied on a workpiece is balanced, and the attraction force is large.
Description
Technical field
The invention belongs to ring type electric permanent-magnet suction disc technical field, and in particular to a kind of magnet unit and its ring type
Electric permanent-magnet suction disc.
Background technology
Electric-controlled permanent magnetic chuck is that lifting electricity permanent magnetism is to combine electromagnetism, each individual novel hoisting apparatus of permanent magnetism.
The field structure of wherein electric-controlled permanent magnetic chuck is divided into inside and outside two parts, and outside is magnetic conduction yoke, and inside is by upper
Floor height coercive-force neodymium-ferrum-boron and pole piece, wherein Nd-Fe-B permanent magnet be distributed in pole piece side and yoke it
Between；Lower floor to its forward and reverse medium coercitive alnico magnet for magnetizing and magnet exciting coil by that can constitute.
The electric-controlled permanent magnetic chuck operationally, magnetizes using magnet exciting coil is forward and reverse to reversible magnet steel, changes ring type
The magnetic induction line distribution on electric permanent-magnet suction disc surface, so as to realize the sticking and release function of ring type electric permanent-magnet suction disc.
At present, existing electric-controlled permanent magnetic chuck, is " 201410263876.5 ", name just like number of patent application
A kind of referred to as Chinese invention patent of " ring type electric permanent-magnet suction disc ", and number of patent application is
" 201320761602.X ", entitled " one kind has the detection of full magnetic pole magnetic force and temperature detection ring type electricity permanent magnetism
The Chinese utility model patent of sucker ", the field structure of the ring type electric permanent-magnet suction disc described in both and above-mentioned institute
The structure stated is similar.Although this structure can effectively realize the function of ring type electric permanent-magnet suction disc, by
It is made up of upper and lower two-layer in the magnetic pole of composition ring type electric permanent-magnet suction disc, limits the thickness of ring type electric permanent-magnet suction disc
Degree and volume size.
Above-mentioned technical problem is directed to, people are constantly explored, and proposes that such as number of patent application is
" 201410261653.5 ", the China of entitled " a kind of pole is to parallel double magnet electric-controlled permanent magnetic chucks "
Patent of invention.The patent specifically discloses a kind of electric-controlled permanent magnetic chuck of pole to parallel double magnets, though its
Ring type electric permanent-magnet suction disc integral thickness is so reduced be arrangeding in parallel for irreversible magnet steel by reversible magnet steel,
But because coil and it is not all closely surround reversible magnet steel, reversible magnet steel away from magnet exciting coil part just not
Easily it is magnetized, causes irreversible magnet steel to magnetize uneven Uniform.Because the uneven Uniform of reversible magnet steel magnetizes, ring type
Electric permanent-magnet suction disc is just affected to the equal Uniform of the suction of workpiece, easily causes the consequence that workpiece comes off.
So coming off in order to avoid workpiece, can only ensure reversible magnetic by increasing coil turn and increase electric current
Steel fully magnetizes.Correspondingly, the size of electric current and the number of turn of coil directly affects the use longevity of coil
The volume of life and ring type electric permanent-magnet suction disc.In addition, the equal only one of which sticking of current ring type electric permanent-magnet suction disc
Face, for needing two occasions of holding face, can only take increase ring type electric permanent-magnet suction disc or using machinery
The method of structure conversion, this adds increased the cost or likelihood of failure of equipment.
The content of the invention
It is an object of the invention to provide a kind of magnet unit for solving above-mentioned technical problem and its ring type electricity
Permanent magnetic chuck.
Specifically, a kind of magnet unit, including reversible magnet ring, irreversible magnet ring, magnetic conductive board and excitation wire
Circle, the irreversible magnet ring is embedded in reversible magnet ring and both highly equal；The magnetic conductive board is fixed
Be arranged on two end faces that the reversible magnet ring fits with irreversible magnet ring；The magnet exciting coil is twined
The outside of irreversible magnet ring is wound on, and setting is wrapped up relative to irreversible magnet ring.
Used as preferred scheme of the invention, the cross section unification of the reversible magnet ring and irreversible magnet ring is set
To offer the circle or square structure of centre bore, and its magnetic induction line is distributed along short transverse.
As preferred scheme of the invention, the material of the reversible magnet ring include manganese aluminium carbon, aluminium nickel cobalt or
Siderochrome cobalt, its coercivity is 30-200kA/m.
Used as preferred scheme of the invention, the material of the irreversible magnet ring includes permanent-magnet ferrite, SmCo
Or neodymium iron boron, its coercivity is 600-2000kA/m.
The present invention also provides a kind of ring type electric permanent-magnet suction disc, including shell, and at least one above-mentioned magnetic
Property unit, wherein the shell coated magnetic unit, and be fixed with screw.
Used as preferred scheme of the invention, the electric permanent-magnet suction disc includes multiple magnet units, and described
Multiple magnet units carry out horizontal arrangement relative to shell.
Used as preferred scheme of the invention, the electric permanent-magnet suction disc includes multiple magnet units, and described
Multiple magnet units carry out longitudinal superposition relative to shell.
Due to the utilization of above-mentioned technical proposal, ring type electric permanent-magnet suction disc provided by the present invention, with existing skill
Art is compared to following advantages：1st, set by the Rational structure of magnet unit so that ring type electricity is forever
Two end faces up and down of magnetic-disc can simultaneously carry out sticking or unloading, so as to compensate for existing ring type electricity permanent magnetism
Sucker only one of which end face as working face deficiency；2nd, because whole ring type electric permanent-magnet suction disc structure is
Central Symmetry so that the magnetic line of force of the magnet unit is distributed equal Uniform, and then promotes ring type electric permanent-magnet suction disc to make
Stress balance during with workpiece；3rd, using the reversible magnet ring and the structure setting of irreversible magnet ring of ring-type, make
Obtaining the working face of the ring type electric permanent-magnet suction disc has a centre bore, and its centre bore has not only acted as isolation magnet ring
The both sides magnetic line of force, to strengthen the effect of ring type electric permanent-magnet suction disc performance, and can transporting as material
Space；4th, the magnet unit is applied in ring type electric permanent-magnet suction disc, can be by longitudinal direction superposition magnetic list
The mode of unit, improves the ring type electric permanent-magnet suction disc suction of unit area, also can be using laterally arrangement magnetic list
The mode of unit, to increase total suction of ring type electric permanent-magnet suction disc；5th, due to the magnet unit overall structure
It is simple and easy to process so that the volume of magnet unit can easily reduce or amplify, and then cause
Microelectromechanicpositioning switching device or large-scale ring can be produced using the ring type electric permanent-magnet suction disc of the magnet unit
Formula electric permanent-magnet suction disc.
Brief description of the drawings
Fig. 1 is the structural representation of magnet unit in the present invention.
Fig. 2 is structural representation when magnet unit is provided in round structure in the present invention.
Fig. 3 is structural representation when magnet unit is set to square structure in the present invention.
Fig. 4 is the magnetic flux distribution schematic diagram of ring type electric permanent-magnet suction disc provided by the present invention, the wherein ring type
Electric permanent-magnet suction disc is in unloaded state.
Fig. 5 is the magnetic flux distribution schematic diagram of ring type electric permanent-magnet suction disc provided by the present invention, the wherein ring type
Electric permanent-magnet suction disc is in sticking state.
Fig. 6 is the signal that magnet unit is assembled to ring type electric permanent-magnet suction disc with longitudinal stacked system in the present invention
Figure.
Fig. 7 is the signal that magnet unit is assembled to ring type electric permanent-magnet suction disc with horizontal arrangement mode in the present invention
Figure.
Fig. 8 is the top view of ring type electric permanent-magnet suction disc provided by the present invention.
Specific embodiment
To make the object, technical solutions and advantages of the present invention of greater clarity, with reference to specific implementation
Mode and referring to the drawings, the present invention is described in more detail.It should be understood that these descriptions are example
Property, and it is not intended to limit the scope of the present invention.Additionally, in the following description, eliminating to known knot
The description of structure and technology, to avoid unnecessarily obscuring idea of the invention.
Fig. 6-Fig. 8, ring type electric permanent-magnet suction disc 100 provided by the present invention, including shell 10 are referred to, and
Magnet unit 20 in shell 10, wherein the shell 10 includes magnet unit 20, and uses screw
30 are fixed.It is appreciated that the Circumscribed structure of the electric permanent-magnet suction disc 100 of the present embodiment its shell 10,
Specifically be matched with the structure of the magnet unit, and the shell 10 outer face and magnet unit 20 between lead to
Multiple plastic spiral silks are crossed to be fixed.
Refer to Fig. 1-Fig. 3, the magnet unit 20 specifically include reversible magnet ring 21, irreversible magnet ring 22,
Magnetic conductive board 23 and magnet exciting coil 24.The height phase of both wherein described reversible magnet ring 21 and irreversible magnet ring 22
Deng, the external diameter of the internal diameter equal to irreversible magnet ring 22 of reversible magnet ring 21, and irreversible magnet ring 22 is specifically to inlay
It is embedded in reversible magnet ring 21, it is preferable that the thickness of the irreversible magnet ring 22 is larger than described reversible
The thickness of magnet ring 21.The magnetic conductive board 23 is specifically integrally fixed at reversible magnet ring 21 with irreversible magnet ring 22
Upper and lower faces, and fitted relative to reversible magnet ring 21 and irreversible magnet ring 22；The magnet exciting coil 24
The outside of reversible magnet ring 21 is specifically wound around, and setting is wrapped up relative to irreversible magnet ring 22.
From the setting of position relationship between the combination of the specific component of above-mentioned magnet unit 20 and each component,
Magnet unit of the invention 20 is specially structure symmetrical above and below, so by the magnet unit 20 it is upper,
Lower two end faces can be used as operating surface, and then cause for the magnet unit 20 to be specifically assembled to electricity
Used in permanent magnetic chuck 100 so that two end faces up and down of the electric permanent-magnet suction disc 100 can be inhaled simultaneously
Hold or unload, so as to compensate for deficiency of the existing ring type electric permanent-magnet suction disc only one of which end face as working face.
Meanwhile, the overall structure of magnet unit 20 is simple and easy to process so that the volume of magnet unit 20 can
Easily to reduce or amplify, and then so that can using the electric permanent-magnet suction disc 100 of the magnet unit 20
To produce microelectromechanicpositioning switching device or large-scale ring type electric permanent-magnet suction disc.
Reversible magnet ring 21 of the invention and the unification of its cross section of irreversible magnet ring 22 are set on being provided with center
The circle or square structure in hole, and its magnetic induction line is distributed along short transverse so that the magnetic
The generally centrosymmetric structure of unit 20 so that the magnetic line of force of the magnet unit 20 is distributed equal Uniform, and then
Stress balance when promoting electric permanent-magnet suction disc 100 to act on workpiece；The magnetic conductive board 23 is metal soft magnetic material
Be prepared from, to play magnetic conduction yoke, the material that can specifically use include silicon steel, No. 45 steel and
A3 steel etc., the magnetic conductivity and saturation induction density of its middle low carbon steel is higher, is conducive to increase ring type electricity
The Surface field and suction of permanent magnetic chuck.The magnetic conductive board 23 is applied in the electric permanent-magnet suction disc 100,
Fixation is attached particular by screw 30 and housing 10.
Wherein, the material of the irreversible magnet ring 22 includes permanent-magnet ferrite, SmCo or neodymium iron boron, its
Coercivity is 600-2000kA/m, that is, the material of irreversible magnet ring 22 of the invention specifically can select
Permanent-magnet ferrite, SmCo or neodymium iron boron at least one.The material price of permanent-magnet ferrite is cheap,
But performance is relatively low.To improve suction, it is preferable that described irreversible magnet ring 22 uses neodymium iron boron magnetic body.
Because neodymium iron boron magnetic body has a most excellent magnetic property under normal temperature, but its magnetic property temperature influence compared with
Greatly, increase remanent magnetism with temperature and coercivity is gradually reduced, coercive force temperature coefficient about 5/1000ths is often spent.
Therefore in order to ensure (such as 100 degree) under operating temperature higher, its magnet also with certain magnetic property,
Especially coercivity is sufficiently high then to need its normal temperature magnetic property, therefore considers, the coercive of such magnet
Power is not less than 600kA/m and is advisable.Compared with 200 degree or so operating temperatures of neodymium iron boron magnetic body highest, SmCo
The coercive force temperature coefficient of magnet is extremely low, nearly 500 degree of maximum operating temperature, therefore (big for hot conditions
In 200 degree) under the ring type electric permanent-magnet suction disc that uses, it is the most suitable using SmCo.
Due to the current limit by magnet exciting coil 24 so that reversible magnet ring 21 is generally relatively low from coercivity
Permanent-magnet material, easily to carry out the commutation in magnetic field, the material of reversible magnet ring 21 of the invention is specifically wrapped
Permanent-magnet ferrite, SmCo or neodymium iron boron are included, its coercivity is 30-200kA/m.It is as high as possible to obtain
Remanent magnetism, it would however also be possible to employ alnico magnet.Five classes of remanent magnetism high and eight classes two of high-coercive force can be divided into
Kind, wherein the coercive force temperature coefficient of eight class magnets is often spent up to 2/10000ths, the temperature that works long hours can
With at 500 degree, but because its coercivity is too high, actually it is not appropriate for the application of ring type electric permanent-magnet suction disc.
It is thus more particularly suitable from five class magnet steel here, meet that coercivity is moderate, temperature in use is high, good stability
Requirement.
It is appreciated that to cause the normal work of electric permanent-magnet suction disc 100, in addition it is also necessary to a current controller (figure
Do not show), and realize the electric permanent-magnet suction disc 100 when working to workpiece by the discharge and recharge to magnet exciting coil 24
Sticking and unloading.Preferably, described controller is to export direct current using silicon controlled rectifier, is had
The functions such as sense of current switching, overcurrent protection, magnet exciting coil temperature detection and magnetic field intensity measurement.
Fig. 4, Fig. 5 are referred to, when reversible magnet ring 21 is opposite with the magnetic pole orientation of irreversible magnet ring 22, magnetic force
Line forms closed-loop path in magnet unit 20, passes through workpiece without magnetic flux substantially, now magnet unit 20 pairs
The suction very little of workpiece or close to zero；After reversely being magnetized to reversible magnet ring 21, reversible magnet ring 21 with not
The magnetic pole orientation of reversible magnet ring 22 is identical, and the magnetic field of reversible magnet ring 21 is mutually folded with the magnetic field of irreversible magnet ring 22
Plus, by workpiece, workpiece is by adhesive for a large amount of magnetic fluxs.
According to the demand for using, it specifically includes at least one magnet unit to electric permanent-magnet suction disc of the invention 100
20, and when electric permanent-magnet suction disc of the invention 100 includes multiple magnet units 20, can be by the magnetic list
Unit 20 carries out longitudinal superposition or both modes of laterally arranging are set in shell 10.Correspondingly, when outer
When multiple magnet units 20 in shell 10 carry out longitudinal direction superposition, the electric permanent-magnet suction disc 100 can be improved and worked
When to the suction of workpiece unit area, to ensure RETENTION BY SOILS of the electric permanent-magnet suction disc 100 to workpiece；When
When multiple magnet units 20 in shell 10 carry out laterally arrangement, the work of electric permanent-magnet suction disc 100 can be improved
To the suction point quantity of workpiece unit area when making, to ensure the electric permanent-magnet suction disc 100 to workpiece
RETENTION BY SOILS.
From the foregoing, it will be observed that the irreversible magnet ring 22 of composition magnet unit 20 is disposed as opening up with reversible magnet ring 21
There is the structure of centre bore so that the magnet unit 20 is assembled in shell 10 in the way of longitudinally superposition
When, can cause that the electric permanent-magnet suction disc 100 is integrally formed a centre bore for communicating, when with laterally arrangement
Mode is assemblied in when in shell 10, the centre bore that the electric permanent-magnet suction disc 100 can be caused to be integrally formed multiple points,
It is appreciated that overall centre bore its property for being formed of the electric permanent-magnet suction disc 100 be specifically dependent upon it is irreversible
The shape of magnet ring 22 and reversible magnet ring 21, and the centre bore applied on the electric permanent-magnet suction disc 100, can be with
Irreversible magnet ring 22 and reversible magnet ring 21 are played a part of to isolate the both sides magnetic line of force, to further enhance this
The performance of electric permanent-magnet suction disc 100, at the same also can as in the electric permanent-magnet suction disc 100 other peculiar parts plus
Work space.
Used as preferred scheme of the invention, electric permanent-magnet suction disc of the invention 100 is in each magnet unit 20
Thermistor 241 is posted on the surface of magnet exciting coil 24 respectively, is carried out for the temperature to magnet exciting coil 24
Monitoring, in case magnet exciting coil 24 is damaged because of high temperature.
In sum, ring type electric permanent-magnet suction disc provided by the present invention, compared with prior art with following
Advantage：1st, set by the Rational structure of magnet unit so that up and down the two of the ring type electric permanent-magnet suction disc
Individual end face can simultaneously carry out sticking or unloading, so as to compensate for existing ring type electric permanent-magnet suction disc only one of which end
Face as working face deficiency；2nd, due to symmetrical centered on whole ring type electric permanent-magnet suction disc structure so that
The magnetic line of force of the magnet unit is distributed equal Uniform, and then stress is put down when promoting ring type electric permanent-magnet suction disc effect workpiece
Weighing apparatus；3rd, using ring-type reversible magnet ring and irreversible magnet ring structure setting so that ring type electricity permanent magnetism
The working face of sucker has a centre bore, and its centre bore has not only acted as the isolation magnet ring both sides magnetic line of force, with
Strengthen the effect of ring type electric permanent-magnet suction disc performance, and space can be transported as material；4th, should
Magnet unit is applied in ring type electric permanent-magnet suction disc, can be improved by way of longitudinally superposition magnet unit
The ring type electric permanent-magnet suction disc suction of unit area, also can using laterally arrangement magnet unit by the way of, or
Magnet unit is longitudinally first superimposed, then the part after superposition is carried out the mode of horizontal arrangement again, to increase
Plus total suction of ring type electric permanent-magnet suction disc；5th, because the magnet unit overall structure is simple and easy to process,
Allow that the volume of magnet unit easily reduces or amplifies, and then cause using the magnet unit
Ring type electric permanent-magnet suction disc can produce microelectromechanicpositioning switching device or large-scale ring type electric permanent-magnet suction disc.
Preferable invention of the invention is the foregoing is only, is not intended to limit the invention, it is all in this hair
Within bright spirit and principle, any modification, equivalent substitution and improvements done etc. all should be included in hair
Within the scope of bright protection.
Claims (7)
1. a kind of magnet unit, it is characterised in that：Including reversible magnet ring, irreversible magnet ring, magnetic conduction
Plate and magnet exciting coil, the irreversible magnet ring are embedded in reversible magnet ring and both highly equal；Institute
Magnetic conductive board is stated to be fixedly provided on two end faces that the reversible magnet ring fits with irreversible magnet ring；
The magnet exciting coil is wrapped in the outside of irreversible magnet ring, and wraps up setting relative to irreversible magnet ring.
2. magnet unit according to claim 1, it is characterised in that：The reversible magnet ring and not
The cross section unification of reversible magnet ring is set on being provided with the circle or square structure of centre bore, and its
Magnetic induction line is distributed along short transverse.
3. magnet unit according to claim 2, it is characterised in that：The material of the reversible magnet ring
Material includes manganese aluminium carbon, aluminium nickel cobalt or siderochrome cobalt, and its coercivity is 30-200kA/m.
4. magnet unit according to claim 2, it is characterised in that：The irreversible magnet ring
Material include permanent-magnet ferrite, SmCo or neodymium iron boron, its coercivity be 600-2000kA/m.
5. a kind of ring type electric permanent-magnet suction disc, it is characterised in that：Including shell, and at least one
The magnet unit described in claim is stated, wherein the shell coated magnetic unit, and carried out with screw
It is fixed.
6. ring type electric permanent-magnet suction disc according to claim 5, it is characterised in that：The electric permanent magnetism
Sucker includes multiple magnet units, and described multiple magnet units carry out horizontal row relative to shell
Cloth.
7. ring type electric permanent-magnet suction disc according to claim 5, it is characterised in that：The electric permanent magnetism
Sucker includes multiple magnet units, and described multiple magnet units carry out longitudinal direction and fold relative to shell
Plus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510790719.4A CN106698175B (en) | 2015-11-17 | 2015-11-17 | Magnetic unit and ring type electric permanent magnetic chuck thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510790719.4A CN106698175B (en) | 2015-11-17 | 2015-11-17 | Magnetic unit and ring type electric permanent magnetic chuck thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106698175A true CN106698175A (en) | 2017-05-24 |
| CN106698175B CN106698175B (en) | 2022-01-18 |
Family
ID=58932219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510790719.4A Active CN106698175B (en) | 2015-11-17 | 2015-11-17 | Magnetic unit and ring type electric permanent magnetic chuck thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106698175B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110858542A (en) * | 2018-08-24 | 2020-03-03 | 创王光电股份有限公司 | Photoresist processing system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1419915A (en) * | 1973-05-25 | 1975-12-31 | Deutsche Edelstahlwerke Ag | Handling roll for conveying ferromagnetic materials |
| JP2000185890A (en) * | 1998-12-21 | 2000-07-04 | Daihatsu Motor Co Ltd | Attracting device |
| CN201647792U (en) * | 2010-04-13 | 2010-11-24 | 昆山苇一机械有限公司 | Electro-permanent magnet lifting jack |
| CN203699637U (en) * | 2013-12-16 | 2014-07-09 | 天津神封科技发展有限公司 | Vertical switch type permanent magnetic chuck |
| CN104015082A (en) * | 2014-06-13 | 2014-09-03 | 株洲悍威磁电科技有限公司 | Electric permanent magnetic chuck |
| CN204038842U (en) * | 2014-09-10 | 2014-12-24 | 浙江东亿磁业有限公司 | A kind of explosion-proof multipath magnetic circuit sucker |
| CN104854015A (en) * | 2012-11-30 | 2015-08-19 | Sgm台架股份公司 | Lifter with electropermanent magnets |
-
2015
- 2015-11-17 CN CN201510790719.4A patent/CN106698175B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1419915A (en) * | 1973-05-25 | 1975-12-31 | Deutsche Edelstahlwerke Ag | Handling roll for conveying ferromagnetic materials |
| JP2000185890A (en) * | 1998-12-21 | 2000-07-04 | Daihatsu Motor Co Ltd | Attracting device |
| CN201647792U (en) * | 2010-04-13 | 2010-11-24 | 昆山苇一机械有限公司 | Electro-permanent magnet lifting jack |
| CN104854015A (en) * | 2012-11-30 | 2015-08-19 | Sgm台架股份公司 | Lifter with electropermanent magnets |
| CN203699637U (en) * | 2013-12-16 | 2014-07-09 | 天津神封科技发展有限公司 | Vertical switch type permanent magnetic chuck |
| CN104015082A (en) * | 2014-06-13 | 2014-09-03 | 株洲悍威磁电科技有限公司 | Electric permanent magnetic chuck |
| CN204038842U (en) * | 2014-09-10 | 2014-12-24 | 浙江东亿磁业有限公司 | A kind of explosion-proof multipath magnetic circuit sucker |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110858542A (en) * | 2018-08-24 | 2020-03-03 | 创王光电股份有限公司 | Photoresist processing system |
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| Publication number | Publication date |
|---|---|
| CN106698175B (en) | 2022-01-18 |
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