CN106691394A - high resolution long focal depth OCT imaging system based on optical path code and method thereof - Google Patents
high resolution long focal depth OCT imaging system based on optical path code and method thereof Download PDFInfo
- Publication number
- CN106691394A CN106691394A CN201710086522.1A CN201710086522A CN106691394A CN 106691394 A CN106691394 A CN 106691394A CN 201710086522 A CN201710086522 A CN 201710086522A CN 106691394 A CN106691394 A CN 106691394A
- Authority
- CN
- China
- Prior art keywords
- light
- sample
- beam splitter
- broadband
- resolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
- A61B5/0062—Arrangements for scanning
- A61B5/0066—Optical coherence imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0075—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. increasing, the depth of field or depth of focus
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Chemical & Material Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Optics & Photonics (AREA)
- Biophysics (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a high resolution long focal depth OCT imaging system based on an optical path code and a method thereof. A light source output beam is encoded to be multiple light beams with different optical paths by using an optical path encoder, these optical beams are focused at different depths of a sample for OCT imaging; then sample images acquired by irradiating the OCT image by light in every light beam focal depth range are acquired and assembled, thus a high-resolution sample image within a big depth scale is acquired. For the optical path code can cause the loss a part of imaging range, a detecting arm applies an orthogonal chromatic dispersion spectrograph with ultra-high spectral resolution to detect, and the spectral signal that the spectrograph involves in is finally sent to a computer; the rapid reestablishment of the high-resolution long focal depth image is realized on the computer. The high resolution long focal depth OCT imaging system can distinguish the sample information of the light beam at different depths under different coding optical paths by using the ultra-long measurement range of the orthogonal chromatic dispersion spectrograph, thus the focal depth is greatly improved.
Description
Technical field
The invention belongs to Optical Coherence Tomography Imaging Technology, optical microphotograph imaging technique technical field, and in particular to a kind of
High-resolution Diode laser OCT image system and method based on path encoding.
Background technology
Depth of focus (depth of focus, DOF) is an important parameter for influenceing optical system imaging quality, extended focal depth
It is to ensure that imaging optical system has one of important technology of preferable image quality in the larger context.Depth of focus DOF and transverse direction
The relation of resolution ax x can be expressed as：DOF=π Δs x2/2λ0, wherein λ0It is the centre wavelength of light source.It can be seen that depth of focus is with horizontal stroke
Reduce to the raising of resolution ratio, using the bigger focusing objective len of numerical aperture, the lateral resolution of system can be improved, but
Depth of focus is also reduced simultaneously, the region lateral resolution that result in outside depth of focus can decline rapidly.
Optical coherent chromatographic imaging (Optical Coherence Tomography, abbreviation OCT) can be realized to nontransparent
Institutional framework inside high scattering material carries out noncontact, not damaged, high-resolution imaging with physiological function.Light beam defocus condition
Under the OCT image that obtains have greater attenuation in resolution ratio and contrast compared to the OCT image obtained in light beam focal depth range,
Therefore, in order to obtain the measured OCT image of matter, hot spot is needed to keep constant in longer-range, but Diode laser is also implied that
Limit the resolution ratio of imaging.Propose to expand the depth of focus of OCT systems, Schmitt et al. and reference mirror is fixed to sample
The method of the displacement platform of arm imaging object lens realizes dynamic focusing, or by changing the shape of MEMS distorting lens, real-time control is burnt
Dynamic focusing is realized in point position, but the structure of the method is more complicated, limits sweep speed.Z.Ding is proposed based on axle
The OCT systems of axicon lens realize the big depth of field horizontal resolution imaging high, and in the focal depth range of 6mm, lateral resolution maintains 10 μ
M or so.But axial cone mirror energy utilization efficiency is than relatively low, and depth of focus expands that multiple is higher, and energy utilization efficiency is lower, is not suitable for
To the biological sample of power sensitive.
The content of the invention
The purpose of the present invention is directed to the deficiencies in the prior art, there is provided a kind of high-resolution Diode laser based on path encoding
OCT image system and method.The present invention uses tool by the parallel focus illumination to sample different depth position on feeler arm
The cross dispersion spectrometer for having overlength to detect range carries out spectrographic detection to distinguish by multiple light beams gained image of path encoding,
The high-resolution Diode laser OCT image of sample can be realized.
The technical solution adopted in the present invention is：
A kind of high-resolution Diode laser OCT image system based on path encoding, including wideband light source, band pass filter,
One speculum, the first broadband beam splitter, the second broadband beam splitter, the first condenser lens, path encoding device, the 3rd broadband light
Beam splitter, two-dimensional scanning mirrors, the second condenser lens, the second speculum, the 3rd speculum, the 4th speculum, one-dimensional precise are put down
Moving stage, cross dispersion spectrometer and computer；
The spatial light that wideband light source sends is by after band pass filter, the first broadband light beam splitting being reflexed to by the first speculum
On device, sample arm is formed by the light of the first broadband light beam splitter reflection, ginseng is formed by the light of the first broadband beam splitter transmission
Examine light path.
The sample arm：Path encoding is focused on by the first condenser lens by the transmitted light of the second broadband beam splitter
On device.Path encoding device is the glass plate of a two sides plated film, and beam incident surface is highly reflecting films, and another side is total reflection film.Return
The path encoding light for returning transmitted through the 3rd broadband beam splitter, then is shaken after the second broadband light beam splitter reflection by two-dimensional scan
It is irradiated on testing sample after mirror and the second condenser lens.The sample signal light of return is by after the second broadband light beam splitter reflection
It is transferred in cross dispersion spectrometer.
The reference path：In succession by the 3rd after the transmitted light of the first broadband beam splitter is reflected by the second speculum
Speculum and the 4th speculum reflect, then are transferred in cross dispersion spectrometer after the 3rd broadband beam splitter transmission.3rd
Speculum and the 4th speculum are placed on one-dimensional precise translation stage, and the mobile translation stage is adjustable sample arm and reference light
The optical path difference on road.
Sample light enters feeler arm after being interfered with reference light, is converted into electric signal and is transmitted by cross dispersion spectrometer
Processed in computer.
High-resolution Diode laser OCT image method based on path encoding is comprised the following steps：
Step one：In the sample arm of high-resolution Diode laser OCT image system, using path encoding device to testing sample
Illumination light be modulated, incident light forms the different virtual image light of multiple light paths after the multiple reflections on path encoding device two sides
Source.After these virtual image light sources are through optical system imaging, the different depth position of sample is focused on.
Step 2：In the feeler arm of high-resolution Diode laser OCT image system, using with ultraspectral resolution ratio just
Crosslinked dispersion spectrometer is detected, and the spectrometer has the measurement range of overlength, is used to distinguish the sample under different coding light path
Product information, to realize longitudinal parallel detecting of interference spectrum signal.
Step 3：Fourier transformation is carried out to the testing sample interference spectrum that detection is obtained, you can obtain multiple beam illumination
Under the conditions of sample image.The sample image that different light beams are obtained is distributed in different depth position, chooses each light beam depth of focus model
Enclose sample image that interior light obtains and splice, you can obtain the sample image under high-resolution, Diode laser beam lighting.
Compared with background technology, the invention has the advantages that：
1. the present invention is distinguished under different coding light path using the measurement range of cross dispersion spectrometer overlength, focuses on difference
Sample message obtained by the light beam of depth, can greatly improve depth of focus.
2. the present invention is in imaging, it is not necessary to mobile example or condenser lens, only needs single measurement to be capable of achieving sample
High-resolution Diode laser OCT image, with image taking speed faster.
3., compared to methods such as the illumination of axial cone mirror, phase-modulations, beam quality of the invention is higher, therefore detection efficient
It is higher.
Brief description of the drawings
Fig. 1 is system architecture principle schematic of the invention；
Fig. 2 is path encoding schematic diagram in the present invention；
Fig. 3 is sample multifocal illumination schematic diagram in the present invention；
Fig. 4 is the schematic diagram that multiple beam sample image is distributed in space encoder in the present invention；
Fig. 5 is sample image reconstruction schematic diagram in the present invention.
In figure：1st, wideband light source, 2, bandpass filter, the 3, first speculum, the 4, first broadband beam splitter, 5, second is wide
Band beam splitter, the 6, first condenser lens, 7, path encoding device, the 8, second speculum, the 9, the 3rd speculum, the 10, the 4th reflection
Mirror, 11, one-dimensional precise translation stage, the 12, the 3rd broadband beam splitter, 13, two-dimensional scanning mirrors, the 14, second condenser lens, 15,
Testing sample, 16, cross dispersion spectrometer, 17, computer.
Specific embodiment
The present invention is further illustrated with example is implemented below in conjunction with the accompanying drawings：
As shown in figure 1, the high-resolution Diode laser OCT image system based on path encoding includes 1, wideband light source, 2, band logical
Optical filter, the 3, first speculum, the 4, first broadband beam splitter, the 5, second broadband beam splitter, the 6, first condenser lens, 7, light
Journey encoder, the 8, second speculum, the 9, the 3rd speculum, the 10, the 4th speculum, 11, one-dimensional precise translation stage, the 12, the 3rd is wide
Band beam splitter, 13, two-dimensional scanning mirrors, the 14, second condenser lens, 15, testing sample, 16, cross dispersion spectrometer, 17,
Computer.
The spatial light that wideband light source 1 sends is by after band pass filter 2, broadband beam splitter 4 being reflexed to by speculum 3
On, the light reflected by broadband beam splitter 4 forms sample arm, and the light transmitted by broadband beam splitter 4 forms reference path.
The sample arm：Lens 6 are focused by the transmitted light of broadband beam splitter 5 to focus on path encoding device 7.
As shown in Fig. 2 glass plate of the path encoding device 7 for a two sides plated film, beam incident surface is highly reflecting films, and another side is total reflection
Film.Incident light forms the virtual image light source that multiple light paths are different, position is different after the multiple reflections on the two sides of path encoding device 7,
As shown in Fig. 2 by taking four virtual image light sources as an example：Virtual image light source 1, virtual image light source 2, virtual image light source 3, virtual image light source 4, correspond to respectively
Four coded beams for returning：Light beam 1, light beam 2, light beam 3, light beam 4, encoded light reflected by broadband beam splitter 5 after transmitted through
Broadband beam splitter 12, then be irradiated to 15 on testing sample by after two-dimensional scanning mirrors 13 and condenser lens 14.Virtual image light source
1st, virtual image light source 2, virtual image light source 3, virtual image light source 4 are imaged on sample different depth position respectively, as shown in figure 3, in sample
Space forms focus 1, focus 2, focus 3, focus 4.The sample signal light of return is transmitted by after the reflection of broadband beam splitter 12
To in cross dispersion spectrometer 16.
The reference path：In succession by the He of speculum 9 after the transmitted light of broadband beam splitter 4 is reflected by speculum 8
Speculum 10 reflects, then is transferred in cross dispersion spectrometer 16 after the transmission of broadband beam splitter 12.Speculum 9 and speculum
10 are placed on one-dimensional precise translation stage 11, and the mobile translation stage is the optical path difference of adjustable sample arm and reference path.
Sample light enters feeler arm after being interfered with reference light, is converted into electric signal and is passed by cross dispersion spectrometer 16
It is defeated to being processed in computer 17.
High-resolution Diode laser OCT image method based on path encoding is comprised the following steps：
Step one：In the sample arm of high-resolution Diode laser OCT image system, using path encoding device to testing sample
Illumination light be modulated, incident light forms that multiple light paths are different after the multiple reflections on path encoding device two sides, position not
Same virtual image light source.After these virtual image light sources are through optical system imaging, the different depth position of sample space, such as Fig. 3 are focused on
Shown, the spacing between these focuses constitutes light by the spacing between virtual image light source and condenser lens 6 and condenser lens 14
System is determined, it is assumed that encoder thickness is t, and refractive index is n, and the focal length of condenser lens 6 is f1, the focal length of condenser lens 14 is f2, then
Spacing between adjacent focal spots can be expressed as：
Δzf=2tf2 2/nf1 2 (1)
Step 2：In the feeler arm of high-resolution Diode laser OCT image system, using with ultraspectral resolution ratio just
Crosslinked dispersion spectrometer is detected, and the spectrometer has the measurement range of overlength, is used to distinguish the sample under different coding light path
Product information, to realize longitudinal parallel detecting of interference spectrum signal.
Step 3：Fourier transformation is carried out to the testing sample interference spectrum that detection is obtained, you can obtain multiple beam illumination
Under the conditions of sample image.As shown in figure 4, four subgraphs obtained by space encoder, four light beams：Subgraph 1, subgraph 2, son
Fig. 3 and subgraph 4 are coded in different light path positions.Spacing between adjacent subgraph can be expressed as：
Δzs=nt (2),
In sample space, the only sample in certain light beam focal depth range could be by high-quality beam lighting, gained
To imaging results be only with high-resolution.I.e. each subgraph has one section of high-resolution imaging region, the sample in the region
Product are by the light irradiation in correspondence light beam focal depth range, as shown in figure 4, four light beams have four sections of depth of focus inner regions, adjacent son
The spacing of figure high-resolution imaging regional center position can be expressed as：
Δ d=Δs zs-Δzf(3),
The depth of focus inner region imaging results of four subgraphs are stitched together, as shown in Figure 5, you can reconstruct depth model long
Enclose, high-resolution imaging results.
Claims (2)
1. a kind of high-resolution Diode laser OCT image system based on path encoding, including wideband light source, band pass filter, first
Speculum, the first broadband beam splitter, the second broadband beam splitter, the first condenser lens, path encoding device, the 3rd broadband light point
Beam device, two-dimensional scanning mirrors, the second condenser lens, the second speculum, the 3rd speculum, the 4th speculum, one-dimensional precise translation
Platform, cross dispersion spectrometer and computer；
The spatial light that wideband light source sends is by after band pass filter, the first broadband beam splitter being reflexed to by the first speculum
On, sample arm is formed by the light of the first broadband light beam splitter reflection, reference is formed by the light of the first broadband beam splitter transmission
Light path；
The sample arm：Path encoding device is focused on by the first condenser lens by the transmitted light of the second broadband beam splitter
On；Path encoding device is the glass plate of a two sides plated film, and beam incident surface is highly reflecting films, and another side is total reflection film；Return
Path encoding light by after the second broadband light beam splitter reflection transmitted through the 3rd broadband beam splitter, then by two-dimensional scanning mirrors
It is irradiated on testing sample with after the second condenser lens；The sample signal light of return after the second broadband light beam splitter reflection by passing
In the defeated spectrometer to cross dispersion；
The reference path：In succession by the 3rd reflection after the transmitted light of the first broadband beam splitter is reflected by the second speculum
Mirror and the 4th speculum reflect, then are transferred in cross dispersion spectrometer after the 3rd broadband beam splitter transmission；3rd reflection
Mirror and the 4th speculum are placed on one-dimensional precise translation stage, and the mobile translation stage is adjustable sample arm and reference path
Optical path difference；
Sample light enters feeler arm after being interfered with reference light, is converted into electric signal by cross dispersion spectrometer and is transferred to meter
Processed in calculation machine.
2. a kind of high-resolution Diode laser OCT image method based on path encoding according to claim 1, its feature exists
In the method specifically includes following steps：
Step one：In the sample arm of high-resolution Diode laser OCT image system, using path encoding device to the photograph of testing sample
Mingguang City is modulated, and incident light forms the different virtual image light source of multiple light paths after the multiple reflections on path encoding device two sides；
After these virtual image light sources are through optical system imaging, the different depth position of sample is focused on；
Step 2：In the feeler arm of high-resolution Diode laser OCT image system, the orthogonal color with ultraspectral resolution ratio is used
Dispersive spectrometer is detected, and the spectrometer has the measurement range of overlength, is used to distinguish the sample letter under different coding light path
Breath, to realize longitudinal parallel detecting of interference spectrum signal；
Step 3：Fourier transformation is carried out to the testing sample interference spectrum that detection is obtained, you can obtain multiple beam lighting condition
Under sample image；The sample image that different light beams are obtained is distributed in different depth position, chooses in each light beam focal depth range
Sample image that light is obtained simultaneously splices, you can obtain the sample image under high-resolution, Diode laser beam lighting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710086522.1A CN106691394B (en) | 2017-02-17 | 2017-02-17 | High-resolution long-focal-depth OCT imaging system and method based on optical path coding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710086522.1A CN106691394B (en) | 2017-02-17 | 2017-02-17 | High-resolution long-focal-depth OCT imaging system and method based on optical path coding |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106691394A true CN106691394A (en) | 2017-05-24 |
| CN106691394B CN106691394B (en) | 2023-04-18 |
Family
ID=58911747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710086522.1A Active CN106691394B (en) | 2017-02-17 | 2017-02-17 | High-resolution long-focal-depth OCT imaging system and method based on optical path coding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106691394B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108742531A (en) * | 2018-06-05 | 2018-11-06 | 清华大学深圳研究生院 | A kind of imaging modification method based on a wide range of OCT scan |
| CN109297599A (en) * | 2018-11-09 | 2019-02-01 | 福州大学 | OCT conjugation mirror image can be eliminated determines difference linear array spectral coverage OCT device and method |
| CN109341518A (en) * | 2018-08-22 | 2019-02-15 | 深圳市斯尔顿科技有限公司 | OCT detection device and microscopic carvings equipment |
| CN111122568A (en) * | 2018-11-01 | 2020-05-08 | 华中科技大学苏州脑空间信息研究院 | High-flux optical tomography method and imaging system |
| CN113317784A (en) * | 2021-06-08 | 2021-08-31 | 南京师范大学 | Micron-scale linear focusing scanning microspectrum optical coherence tomography system |
| CN113767274A (en) * | 2019-08-23 | 2021-12-07 | 西门子股份公司 | Gas analyzer |
| CN114081444A (en) * | 2021-11-15 | 2022-02-25 | 北京理工大学 | OCT imaging system and method based on integral transformation principle |
| CN117297555A (en) * | 2023-11-29 | 2023-12-29 | 北京理工大学 | Spectrum processing system based on parallel light calculation and application of spectrum processing system in OCT |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1915164A (en) * | 2006-09-08 | 2007-02-21 | 浙江大学 | Method and system for expanding dynamic range in tomography of optical coherent |
| US20070086011A1 (en) * | 2005-09-30 | 2007-04-19 | Fuji Photo Film Co., Ltd. | Optical tomography method |
| CN101214145A (en) * | 2008-01-03 | 2008-07-09 | 中国科学院上海光学精密机械研究所 | Frequency domain optical coherence tomography method and system with large detection depth |
| CN101732035A (en) * | 2009-11-26 | 2010-06-16 | 浙江大学 | Method and system for optical super resolution based on optical path encoding and coherent synthesis |
| CN207071084U (en) * | 2017-02-17 | 2018-03-06 | 浙江大学 | A kind of high-resolution Diode laser OCT image system based on path encoding |
-
2017
- 2017-02-17 CN CN201710086522.1A patent/CN106691394B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070086011A1 (en) * | 2005-09-30 | 2007-04-19 | Fuji Photo Film Co., Ltd. | Optical tomography method |
| CN1915164A (en) * | 2006-09-08 | 2007-02-21 | 浙江大学 | Method and system for expanding dynamic range in tomography of optical coherent |
| CN101214145A (en) * | 2008-01-03 | 2008-07-09 | 中国科学院上海光学精密机械研究所 | Frequency domain optical coherence tomography method and system with large detection depth |
| CN101732035A (en) * | 2009-11-26 | 2010-06-16 | 浙江大学 | Method and system for optical super resolution based on optical path encoding and coherent synthesis |
| CN207071084U (en) * | 2017-02-17 | 2018-03-06 | 浙江大学 | A kind of high-resolution Diode laser OCT image system based on path encoding |
Non-Patent Citations (1)
| Title |
|---|
| 商在明等: "基于光程编码与相干合成的三维超分辨术" * |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108742531A (en) * | 2018-06-05 | 2018-11-06 | 清华大学深圳研究生院 | A kind of imaging modification method based on a wide range of OCT scan |
| CN109341518A (en) * | 2018-08-22 | 2019-02-15 | 深圳市斯尔顿科技有限公司 | OCT detection device and microscopic carvings equipment |
| CN111122568A (en) * | 2018-11-01 | 2020-05-08 | 华中科技大学苏州脑空间信息研究院 | High-flux optical tomography method and imaging system |
| CN111122568B (en) * | 2018-11-01 | 2022-04-22 | 华中科技大学苏州脑空间信息研究院 | High-flux optical tomography method and imaging system |
| CN109297599A (en) * | 2018-11-09 | 2019-02-01 | 福州大学 | OCT conjugation mirror image can be eliminated determines difference linear array spectral coverage OCT device and method |
| CN109297599B (en) * | 2018-11-09 | 2023-08-18 | 福州大学 | Phased-difference linear array spectral domain OCT device and method capable of eliminating OCT conjugate mirror image |
| CN113767274A (en) * | 2019-08-23 | 2021-12-07 | 西门子股份公司 | Gas analyzer |
| CN113317784A (en) * | 2021-06-08 | 2021-08-31 | 南京师范大学 | Micron-scale linear focusing scanning microspectrum optical coherence tomography system |
| CN114081444A (en) * | 2021-11-15 | 2022-02-25 | 北京理工大学 | OCT imaging system and method based on integral transformation principle |
| CN117297555A (en) * | 2023-11-29 | 2023-12-29 | 北京理工大学 | Spectrum processing system based on parallel light calculation and application of spectrum processing system in OCT |
| CN117297555B (en) * | 2023-11-29 | 2024-02-09 | 北京理工大学 | Spectrum processing system based on parallel light calculation and application of spectrum processing system in OCT |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106691394B (en) | 2023-04-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106691394A (en) | high resolution long focal depth OCT imaging system based on optical path code and method thereof | |
| CN103926225B (en) | A kind of fluorescent emission differential microscopic method based on evanescent wave illumination and device | |
| CN109115804B (en) | Device and method for quantitatively detecting subsurface defects of glass | |
| EP2327954A1 (en) | Apparatus for OCT imaging with axial line focus for improved resolution and depth of field | |
| KR101336048B1 (en) | Optical tomographic imaging method and optical tomographic imaging apparatus | |
| CN104482880B (en) | Laser stimulated emission depletion three-dimensional super-resolution light splitting pupil differential confocal imaging method and device | |
| US20130010286A1 (en) | Method and device of differential confocal and interference measurement for multiple parameters of an element | |
| CN101983313A (en) | Apparatus and method for measuring surface topography of an object | |
| CN111344559B (en) | Defect detection method and defect detection system | |
| CN104062233A (en) | Precise surface defect scattering three-dimensional microscopy imaging device | |
| CN103115580B (en) | Based on three-dimensional hole shape detection method and the system of optical coherence tomography scanning | |
| CN110160440B (en) | Three-dimensional color dynamic imaging device and method based on frequency domain OCT technology | |
| CN104482881B (en) | Laser stimulated emission depletion three-dimensional super-resolution differential confocal imaging method and device | |
| CN106290227B (en) | Terahertz wave reflection imaging device and method | |
| WO2013091584A1 (en) | Method and device for detecting defects in substrate | |
| CN113317784A (en) | Micron-scale linear focusing scanning microspectrum optical coherence tomography system | |
| CN210036591U (en) | Three-dimensional color dynamic imaging device based on frequency domain OCT technology | |
| CN207071084U (en) | A kind of high-resolution Diode laser OCT image system based on path encoding | |
| CN104490362A (en) | High-transverse-resolution optical coherence chromatography system based on photon nanometer spraying | |
| JP2010217124A (en) | Shape measurement device and method | |
| JP2018054448A (en) | Spectrum measurement method | |
| US20190167109A1 (en) | Full-field interferential imaging systems and methods | |
| CN109238131A (en) | A kind of optical coherence tomography method and system of transverse direction super-resolution | |
| CN110470639B (en) | Multimode scanning microscope imaging system based on laser-induced photo-thermal effect | |
| KR101911592B1 (en) | Optical inspection apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |