CN106684239A - Extension type laminated piezoelectric actuator - Google Patents
Extension type laminated piezoelectric actuator Download PDFInfo
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- CN106684239A CN106684239A CN201710014858.7A CN201710014858A CN106684239A CN 106684239 A CN106684239 A CN 106684239A CN 201710014858 A CN201710014858 A CN 201710014858A CN 106684239 A CN106684239 A CN 106684239A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
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Abstract
The invention discloses an extension type laminated piezoelectric actuator comprising a piezoelectric element, an insulating member, a connecting member, a driving power source and a control unit. The piezoelectric element has a greater size in the length direction than in the thickness direction and in the width direction, and is used to output the extension actuation displacement. One end of the connecting member is connected with the piezoelectric element and the other end is provided with a thread opening for connecting a working device or a force sensor. The insulating member is used to provide insulation protection to prevent damage caused by high voltage breakdown. The driving power source is used to supply a high voltage electric field to the piezoelectric element, and the control unit is used to control the driving power source. The invention can directly output the extension actuation and have a large output force by utilizing the d31 effect of piezoelectric material, and is very suitable for the case where the extension actuation for, such as, a micro extension test apparatus needs to be precisely controlled.
Description
Technical field
The invention belongs to precision actuation Element Technology field, more particularly to a kind of tension type stacked piezoelectric actuator.
Background technology
At present, piezo-activator is broadly divided into two classes：The d of exportable thrust33Type stacked piezoelectric actuator and mono-/bis-piezoelectricity
Chip piezo-activator.d33Type stacked piezoelectric actuator is made up of the piezoelectric sheet that many layer sizes are fixed, and piezoelectric sheet is usual
For circular or square, using the d of piezoelectric33Effect, produces longitudinal direction elongation displacement under electric field action, thin by multi-layer piezoelectric
The superposition of piece output displacement, obtains larger longitudinal direction elongation displacement, as shown in Figure 1.Mono-/bis-piezoelectric chip actuator is by piezoelectricity
The composite construction of ceramics and cantilever beam composition, generally includes an elongated metal cantilever beam and one or two strip piezo crystals
Piece, after applying electric field, piezoelectric chip can shrink or extend, and using the enlarge-effect of cantilever beam, obtain in cantilever beam free end
Larger actuating displacement, as shown in Figure 2.
But above two class piezo-activators also have respective shortcoming, stacked piezoelectric actuator can not directly export stretching position
Move, if it is desired to export stretching displacement, lever principle need to be utilized, add other frame for movements and realize.And to mono-/bis-piezoelectric chip
Piezo-activator, although stretching displacement can be exported, but the power of output is very little, only several cattle or so.And answering at some
With in, such as in fragile material fracture behaviour in-situ test platform, it is desirable to which closely, this not only requires actuator to charger
Pulling force can be directly exported, also requires that the power for exporting is sufficiently large, in this case, the class actuator of the above two is not applied to.
The content of the invention
In view of the shortcomings of the prior art, the present invention utilizes piezoelectric d31Effect, there is provided one kind can be directly defeated
Go out the tension type stacked piezoelectric actuator of stretching actuating and exportable larger pulling force.
To solve above-mentioned technical problem, the present invention is adopted the following technical scheme that：
First, a kind of piezoelectric element, it is in thickness direction alternating layer stacked group by the first piezoelectric unit and the second piezoelectric unit
Into laminated structure, outermost two piezoelectric unit of piezoelectric element is simultaneously the first piezoelectric unit or the second piezoelectric unit, is folded
The sum of the first piezoelectric unit and the second piezoelectric unit is not less than 2 in laminar structure；The upper surface and following table of the first piezoelectric unit
Face is respectively provided with the first internal electrode and the second internal electrode, and the upper and lower surface of the second piezoelectric unit is respectively provided with second
Internal electrode and the first internal electrode；First piezoelectric unit and the second piezoelectric unit are in strip, and size is a × b × c, its
In, a:b:C=(50~100)：(5~10)：1, c is not more than 2mm.
2nd, a kind of tension type stacked piezoelectric actuator using above-mentioned piezoelectric element, including piezoelectric element, insulating part, company
Fitting, driving power supply and control unit, described piezoelectric element is in thickness side by the first piezoelectric unit and the second piezoelectric unit
To the laminated structure of alternately laminated composition, outermost two piezoelectric unit of piezoelectric element is simultaneously the first piezoelectric unit or second
Piezoelectric unit, the sum of the first piezoelectric unit and the second piezoelectric unit is not less than 2 in laminated structure；First piezoelectric unit it is upper
Surface and lower surface are respectively provided with the first internal electrode and the second internal electrode, the upper and lower surface point of the second piezoelectric unit
Dai You not the second internal electrode and the first internal electrode；First piezoelectric unit and the second piezoelectric unit are in strip, and size is a
× b × c, wherein, a:b:C=(50~100)：(5~10)：1, c is not more than 2mm；
All of first internal electrode is drawn out to the first electric-conductor, and all of second internal electrode is drawn out to second and leads
Electric part, driving power supply applies to drive to the first internal electrode and the second internal electrode respectively by the first electric-conductor and the second electric-conductor
Galvanic electricity pressure；
Two connectors are respectively arranged on piezoelectric element two ends, for piezoelectric element is connected with equipment or force transducer；
Insulating part is provided between connector and piezoelectric element, for carrying out insulation protection to connector.
Further, internal electrode not exclusively covers the length direction of piezoelectric unit, meanwhile, internal electrode is wholly or in part
Cover the width of piezoelectric unit；Here, internal electrode is the first internal electrode or the second internal electrode, and piezoelectric unit is the
One piezoelectric unit or the second piezoelectric unit；Wherein, on the first piezoelectric unit upper surface, electrode zone is located at the of non-electrode region
Side；On its lower surface, electrode zone is located at second side in non-electrode region；On second piezoelectric unit lower surface, electrode zone
Positioned at first side in non-electrode region；On its upper surface, electrode zone is located at second side in non-electrode region.Here, the first side
It is opposite side with the second side.
Further, the first electric-conductor and the second electric-conductor are respectively arranged on piezoelectric element both ends of the surface.
Further, connector is U-shaped connector.
Further, the material of connector is aluminium alloy.
Further, the material of piezoelectric unit is PZT piezoelectric ceramics of the component near quasi- homotype phase boundary.
Further, the first electric-conductor and the second electric-conductor are copper sheet.
Further, the material of insulating trip is aluminium oxide ceramics.
Further, the material of connector is aluminium alloy.
In the present invention, piezoelectric element is much larger than the size of thickness and width in the size of length direction, for exporting
Stretching actuating displacement.Connector one end connects piezoelectric element, and the other end is provided with threaded openings and passes for connecting equipment or power
Sensor.Insulating part is used for providing insulation protection, prevents high-voltage breakdown from damaging.Driving power supply is used for providing high to piezoelectric element
Piezoelectric field, control unit is used for being controlled driving power supply.
The invention has the advantages that and beneficial effect：
(1) traditional stacked actuators are based on longitudinal effect (the i.e. d of piezoelectric33Effect), and the present invention is to be based on
Transversal effect (the i.e. d of piezoelectric31Effect), can directly export stretching and activate, and with larger power output, be highly suitable for
The stretching such as microtensile test equipment activates the occasion for needing precise control.
(2) the invention provides a kind of new actuator structure, its actuation characteristic is different from traditional stacked actuators, rich
The rich species of existing piezo-activator.
(3) present configuration and processing technology are simple, advantage of lower cost.
Description of the drawings
Fig. 1 is traditional d33Type stacked piezoelectric actuator and principle schematic；
Fig. 2 is traditional bimorph piezo actuator and its principle schematic；
Fig. 3 is the concrete structure schematic diagram of actuator of the present invention；
Fig. 4 is the assembling process schematic diagram of actuator in Fig. 3；
Fig. 5 is the operation principle schematic diagram of actuator of the present invention.
In figure, 1- piezoelectric elements, 2- insulating parts, 3- connectors, 4- driving power supplies, 5- control units.
Specific embodiment
By specific embodiment, and accompanying drawing will be combined technical solution of the present invention and its technique effect done further below
Explanation.
Referring to Fig. 3, piezoelectric element (1) is in thickness direction alternating layer stacked group by the first piezoelectric unit and the second piezoelectric unit
Into laminated structure, the first piezoelectric unit refers to a kind of piezoelectric unit of polarised direction, and the second piezoelectric unit refers to another kind of polarization
The piezoelectric unit in direction.The total quantity of the first piezoelectric unit and the second piezoelectric unit is designated as n in laminated structure, and n >=2 press
Electric device (1) can be made up of first piezoelectric unit and second piezoelectric unit, it is also possible to by multiple first piezoelectricity lists
First and multiple second piezoelectric unit is constituted.The upper and lower surface of the first piezoelectric unit is respectively provided with the first internal electrode and
Two internal electrodes, the upper and lower surface of the second piezoelectric unit is respectively provided with the second internal electrode and the first internal electrode.This
In, two apparent surfaces of the upper and lower surface finger pressure electric unit in thickness direction.First piezoelectric unit and the second piezoelectricity list
Unit is much larger than the size in thickness direction and width, this enforcement in strip, i.e. piezoelectric unit in the size of length direction
The size of the first piezoelectric unit and the second piezoelectric unit is 60mm*10mm*1mm in example.
Referring to Fig. 4, the concrete assembling process of actuator of the present invention is：Through-thickness polarizes to each piezoelectric unit,
Arrow represents polarised direction in figure.The polarised direction of the first piezoelectric unit and the second piezoelectric unit is conversely, by the first piezoelectric unit
The internal electrode of upper and lower surface is designated as respectively " the electricity marked in the first internal electrode and the second internal electrode, i.e. Fig. 4
Pole ", by the internal electrode of the second piezoelectric unit upper and lower surface the second internal electrode and the first internal electrode are designated as respectively.
Using epoxy resin, by multiple first piezoelectric units, alternately bonding is first into the piezoelectricity of laminated construction with multiple second piezoelectric units
Part, the first internal electrode is contacted with the first internal electrode between the first piezoelectric unit and the second piezoelectric unit, the second internal electrode with
Second internal electrode is contacted, and the piezoelectric unit of upper and lower outermost two is simultaneously the first piezoelectric unit or the second piezoelectric unit.Here,
One internal electrode refers to negative or positive electrode, and the second internal electrode refers to negative pole or positive pole.
Piezoelectric element (1) is completed, piezoelectric element (1) internal electrode constitutes finger-type structure.After Deng epoxy resin solidification,
Each layer internal electrode is drawn in piezoelectric element (1) two sides using copper sheet, for connecting driving power supply (4).Piezoelectric element (1)
Insulating part (2) is pasted at the two ends of both ends of the surface and upper and lower surface, and in the present embodiment, insulating part (2) is alumina ceramic plate.Using ring
Connector (3) is adhered to piezoelectric element (1) two ends by oxygen tree fat, insulating part (2) for by connector (3) and piezoelectric element (1),
Copper sheet is isolated, and prevents high-voltage breakdown from damaging, so as to effective protection operator and the safety of device.In the present embodiment, even
Fitting (3) is Al-alloy metal cap.
Referring to Fig. 5, when actuator of the present invention works, applied voltage direction is identical with piezoelectric unit initial polarization direction.When
When voltage is applied on piezoelectric element by copper sheet, due to the d of piezoelectric31Effect, electric field action pushes electric material can be in X1
There is cross-direction shrinkage in direction, i.e., deform in the direction perpendicular to extra electric field, contracted length Δ L1=E3·d311·L1, its
In, E3Represent X3Direction acts on the electric field on piezoelectric unit, L1Represent piezoelectric unit in X1The length in direction；d311It is normal for piezoelectricity
Number.Can be seen that under same electric field intensity by contracted length formula, by increasing L1, you can increase the carry-out bit of actuator
Move.
For monolithic piezoelectric unit, although can be along X under electric field action1Direction exports larger contraction displacement, but
Because piezoelectric tensile strength is relatively low, power output is less.For this purpose, with reference to traditional stacked piezoelectric actuator, by multi-disc piezoelectricity list
Unit's bonding is got up.To monolithic piezoelectric unit, under permanent displacement loading, pulling force F=Sc is exported1111·d311·E3, wherein, S is
The face area of piezoelectric unit；c1111For elastic constant.Ideally, the piezoelectric element being made up of n-layer piezoelectric unit, its is total
Power output is regarded as the linear superposition of n-layer piezoelectric unit power output, i.e. nF.
Analyze more than and can be seen that, with d33Type stacked piezoelectric actuator is different, d of the present invention31Type stacked piezoelectric actuator is folded
Plus be power output, be not output displacement.D of the present invention31Type stacked piezoelectric actuator can directly export stretching displacement, and with compared with
Big power output, used as loading unit, being highly suitable for the stretching actuating such as microtensile test equipment needs precise control
Occasion.
Instantiation described herein is only explanation for example spiritual to the present invention.The technical field of the invention
Technical staff described instantiation can be made it is various modification supplement or using similar mode substitute, but
Spirit without departing from the present invention surmounts scope defined in appended claims.
Although more having used the arts such as piezoelectric element, seal, restraint device, driving power supply, control unit herein
Language, but be not precluded from using the probability of other terms.It is used for the purpose of more easily describing and explaining this using these terms
The essence of invention；It is all contrary with spirit of the invention to be construed as any additional restriction.
Claims (9)
1. a kind of piezoelectric element, is characterized in that：
Described piezoelectric element is by the first piezoelectric unit and the second piezoelectric unit in the alternately laminated lamination for constituting of thickness direction
Structure, outermost two piezoelectric unit of piezoelectric element is simultaneously the first piezoelectric unit or the second piezoelectric unit, laminated structure
In the first piezoelectric unit and the second piezoelectric unit sum be not less than 2；The upper and lower surface of the first piezoelectric unit band respectively
The upper and lower surface for having the first internal electrode and the second internal electrode, the second piezoelectric unit is respectively provided with the second internal electrode
With the first internal electrode；First piezoelectric unit and the second piezoelectric unit are in strip, and size is a × b × c, wherein, a:b:c
=(50~100)：(5~10)：1, c is not more than 2mm.
2. a kind of tension type stacked piezoelectric actuator, including piezoelectric element, insulating part, connector, driving power supply and control unit,
It is characterized in that：
Described piezoelectric element is by the first piezoelectric unit and the second piezoelectric unit in the alternately laminated lamination for constituting of thickness direction
Structure, outermost two piezoelectric unit of piezoelectric element is simultaneously the first piezoelectric unit or the second piezoelectric unit, laminated structure
In the first piezoelectric unit and the second piezoelectric unit sum be not less than 2；The upper and lower surface of the first piezoelectric unit band respectively
The upper and lower surface for having the first internal electrode and the second internal electrode, the second piezoelectric unit is respectively provided with the second internal electrode
With the first internal electrode；First piezoelectric unit and the second piezoelectric unit are in strip, and size is a × b × c, wherein, a:b:c
=(50~100)：(5~10)：1, c is not more than 2mm；
All of first internal electrode is drawn out to the first electric-conductor, and it is conductive that all of second internal electrode is drawn out to second
Part, driving power supply applies to drive to the first internal electrode and the second internal electrode respectively by the first electric-conductor and the second electric-conductor
Voltage；
Two connectors are respectively arranged on piezoelectric element two ends, for piezoelectric element is connected with equipment or force transducer；Connection
Insulating part is provided between part and piezoelectric element, for carrying out insulation protection to connector.
3. tension type stacked piezoelectric actuator as claimed in claim 1, is characterized in that：
Internal electrode not exclusively covers the length direction of piezoelectric unit, meanwhile, internal electrode covers wholly or in part piezoelectric unit
Width；Here, internal electrode is the first internal electrode or the second internal electrode, piezoelectric unit be the first piezoelectric unit or
Second piezoelectric unit；Wherein：
On first piezoelectric unit upper surface, electrode zone is located at first side in non-electrode region；On its lower surface, electrode zone position
In second side in non-electrode region；On second piezoelectric unit lower surface, electrode zone is located at first side in non-electrode region；Thereon
On surface, electrode zone is located at second side in non-electrode region.
4. tension type stacked piezoelectric actuator as claimed in claim 1, is characterized in that：
Described the first electric-conductor and the second electric-conductor is respectively arranged on piezoelectric element both ends of the surface.
5. tension type stacked piezoelectric actuator as claimed in claim 1, is characterized in that：
Described connector is U-shaped connector.
6. tension type stacked piezoelectric actuator as claimed in claim 1, is characterized in that：
The material of described piezoelectric unit is PZT piezoelectric ceramics.
7. tension type stacked piezoelectric actuator as claimed in claim 1, is characterized in that：
Described the first electric-conductor and the second electric-conductor is copper sheet.
8. tension type stacked piezoelectric actuator as claimed in claim 1, is characterized in that：
The material of described insulating trip is aluminium oxide ceramics.
9. tension type stacked piezoelectric actuator as claimed in claim 1, is characterized in that：
The material of described connector is aluminium alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710014858.7A CN106684239A (en) | 2017-01-09 | 2017-01-09 | Extension type laminated piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710014858.7A CN106684239A (en) | 2017-01-09 | 2017-01-09 | Extension type laminated piezoelectric actuator |
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| CN106684239A true CN106684239A (en) | 2017-05-17 |
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| CN201710014858.7A Pending CN106684239A (en) | 2017-01-09 | 2017-01-09 | Extension type laminated piezoelectric actuator |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107968597A (en) * | 2017-12-10 | 2018-04-27 | 绍兴康健精密不锈钢有限公司 | A kind of actuator stator based on multistage amplification principle |
| CN113013321A (en) * | 2021-02-07 | 2021-06-22 | 西安交通大学 | Preparation method of piezoelectric single crystal laminated driver |
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| JP2015070110A (en) * | 2013-09-30 | 2015-04-13 | 株式会社村田製作所 | Piezoelectric device and method of manufacturing piezoelectric device |
| CN204348762U (en) * | 2015-01-22 | 2015-05-20 | 北京大学 | A kind of piezo-activator |
| CN206441768U (en) * | 2017-01-09 | 2017-08-25 | 武汉大学 | Tension type stacked piezoelectric actuator |
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- 2017-01-09 CN CN201710014858.7A patent/CN106684239A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005192388A (en) * | 2003-12-04 | 2005-07-14 | Ngk Insulators Ltd | Ultrasonic vibration element and ultrasonic actuator using it |
| CN2899119Y (en) * | 2006-04-11 | 2007-05-09 | 中北大学 | Aluminum-based laminated high-voltage overloading electric driver |
| CN103069599A (en) * | 2010-09-14 | 2013-04-24 | 太阳诱电株式会社 | Piezoelectric element, and stacked piezoelectric structure |
| JP2015070110A (en) * | 2013-09-30 | 2015-04-13 | 株式会社村田製作所 | Piezoelectric device and method of manufacturing piezoelectric device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107968597A (en) * | 2017-12-10 | 2018-04-27 | 绍兴康健精密不锈钢有限公司 | A kind of actuator stator based on multistage amplification principle |
| CN113013321A (en) * | 2021-02-07 | 2021-06-22 | 西安交通大学 | Preparation method of piezoelectric single crystal laminated driver |
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