JPS6288382A - Electrostriction effect element - Google Patents
Electrostriction effect elementInfo
- Publication number
- JPS6288382A JPS6288382A JP60230212A JP23021285A JPS6288382A JP S6288382 A JPS6288382 A JP S6288382A JP 60230212 A JP60230212 A JP 60230212A JP 23021285 A JP23021285 A JP 23021285A JP S6288382 A JPS6288382 A JP S6288382A
- Authority
- JP
- Japan
- Prior art keywords
- silver
- sintered body
- conductor layers
- laminated sintered
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000694 effects Effects 0.000 title claims description 19
- 239000004020 conductor Substances 0.000 claims abstract description 26
- 239000000919 ceramic Substances 0.000 claims abstract description 18
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229920000620 organic polymer Polymers 0.000 claims description 27
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 11
- 229910052709 silver Inorganic materials 0.000 abstract description 11
- 239000004332 silver Substances 0.000 abstract description 11
- 238000013508 migration Methods 0.000 abstract description 8
- 230000005012 migration Effects 0.000 abstract description 8
- 239000012535 impurity Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 239000002585 base Substances 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- YACLQRRMGMJLJV-UHFFFAOYSA-N chloroprene Chemical compound ClC(=C)C=C YACLQRRMGMJLJV-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical group CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- -1 inbutylene Chemical compound 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Laminated Bodies (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業−ヒの利用分野〕
本発明は圧電アクチュエータに用いられる電歪効果素子
の構造に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application in Industry] The present invention relates to the structure of an electrostrictive element used in a piezoelectric actuator.
最近、インパクト形ドットプリンタヘッドの印字ワイヤ
を駆動するアクチュエータは、従来の電磁力利用したも
のから圧電効果を利用するものへと移行が始まっている
。この圧電アクチュエータは発熱が少なく、捷た小形で
高速駆動が可能なため、光または磁気ディスク●ヘッド
，各種光学装置．精密工作機械およびＴ，Ｓｒ用露光装
首婢の精密位置決め装置、その他の機械的駆動素子とし
てもきわめて有望ネκされているものである。Recently, actuators for driving printing wires in impact-type dot printer heads have begun to shift from conventional ones that utilize electromagnetic force to those that utilize piezoelectric effects. This piezoelectric actuator generates little heat, is compact, and can be driven at high speed, so it can be used for optical or magnetic disk heads, and various optical devices. It is also extremely promising for use in precision machine tools, precision positioning devices for T and Sr exposure equipment, and other mechanical drive elements.
しかしながら、圧電効果による機械的変位は本質的にき
わめて小ざいのでアクチュエータの駆動源となるべき電
歪効果素子には、例えば、昭和５８年９月発行の［重子
通信学会誌１が開示するように、圧電セラミック部材と
内部電極導体とを超多重に積層して圧電の縦効果を高め
た構造のものが、通常用いられている。すなわち、この
電歪効果素子はペロブスカイト結晶構造をもつ多成分固
容体セラミック粉末に有機バインダを混合してグリーン
シート化し、その上に銀電極導体層をペースト状に塗布
した彼数十層（例えば７２層）に積層して焼結したもの
である。この焼結体は焼成された銀電極導体層を一層お
きに交互に接続して２つのくし歯形内部電極を形威し外
部から９０層程度の直流電圧を与えると、約８μｍの静
的変位を容易に発生する。従って、「てこ装置」との併
用により−Ｃ１本質的にきわめて小さい圧電効果の機械
的変位の問題点は一応解決されている。However, since the mechanical displacement caused by the piezoelectric effect is essentially extremely small, the electrostrictive effect element that is to be the drive source of the actuator is, for example, A structure in which piezoelectric ceramic members and internal electrode conductors are laminated in multiple layers to enhance the piezoelectric longitudinal effect is commonly used. That is, this electrostrictive effect element is made by mixing multi-component solid ceramic powder with a perovskite crystal structure with an organic binder to form a green sheet, and then applying a silver electrode conductor layer in the form of a paste on top of the green sheet. (layers) and sintered. This sintered body forms two comb-shaped internal electrodes by connecting the fired silver electrode conductor layers alternately every other layer, and when a DC voltage of about 90 layers is applied from the outside, a static displacement of about 8 μm is generated. It occurs easily. Therefore, the problem of the mechanical displacement of -C1, which is essentially a very small piezoelectric effect, has been solved to some extent by using it in combination with a "lever device".
１、かしこの焼結体から々る電歪効果素子は、内部電極
を形成する金属部材に銀が使用されているので湿性昇囲
気内においてマイグレーシロンを生じ圧電セラミック部
材の側面を著Ｌ＜汚染する。1. Since the electrostrictive effect element made from this sintered body uses silver in the metal member forming the internal electrode, migration occurs in a humid atmosphere and causes significant contamination on the side surface of the piezoelectric ceramic member. do.
すなわち、銀電極導体層の端部は積層焼結体の側面に全
て露出しているのでマイグレーションヲ生じ易く、汚染
された圧電、セラミック部材の側面はその絶縁特性を急
激に低下せしめる。従って、耐湿試験を行なうと側面ま
たけ角隅で放電するものが続出］−１歩溜りおよび信頼
性に大きな障害を与える。That is, since the ends of the silver electrode conductor layer are all exposed on the side surface of the laminated sintered body, migration is likely to occur, and the contaminated side surface of the piezoelectric or ceramic member rapidly deteriorates its insulating properties. Therefore, when a moisture resistance test is performed, discharge occurs repeatedly at the sides and corners]-1, which causes a stagnation and a major problem in reliability.
〔発明の目的〕
本発明の目的は、上５１；の情況に鑑み、内部電接を形
成する銀導体層端部のマイグレーションを防止した積層
焼結体からなる電歪効果素子を提供することである。[Object of the Invention] In view of the above circumstances, an object of the present invention is to provide an electrostrictive effect element made of a laminated sintered body that prevents migration of the end portion of a silver conductor layer forming an internal electrical connection. be.
本発明の電歪効果素子は、圧電セラミック部材と銀−パ
ラジウム電、極導体層とを交互に重ね合わせた積層焼結
体と、積層焼結体の対向する側面にそれぞれ設けられた
絶縁層を介し銀−パラジウム電極体を一層おきに交互に
接続して２つのく【７歯形内部電極を構成せしめる一対
の外部電極層と、積層焼結体の側面に弾性を有する有機
高分子膜と１層以上の有機高分子膜とを被覆することを
特徴とする。The electrostrictive effect element of the present invention includes a laminated sintered body in which piezoelectric ceramic members and silver-palladium conductor layers are alternately stacked, and insulating layers provided on opposing sides of the laminated sintered body. A pair of external electrode layers constitute two 7-tooth-shaped internal electrodes by alternately connecting silver-palladium electrode bodies every other layer, and a layer of an organic polymer film having elasticity on the side surface of the laminated sintered body. It is characterized in that it is coated with the above organic polymer film.
すなわち、本発明によｆＬＪｄ稍層焼結体の側面に露出
する蛙−パラジウム電、極導体層の端部け２層以上の有
機高分子膜で被覆される。こねらの有機高分子膜のうち
下地の役割をけたす有機高分子膜はナトリウム、塩素な
どの不純物及び水分を極端に減ら［２、さらに有機高分
子膜が弾性を有する天然ゴムやイソプレン、ブタジェン
、シリコーン。That is, according to the present invention, the ends of the frog-palladium electrode conductor layer exposed on the side surface of the fLJd solid layer sintered body are coated with two or more layers of organic polymer film. Among Konera's organic polymer films, the organic polymer film that plays the role of a base can extremely reduce impurities such as sodium and chlorine, as well as water [2. ,silicone.
ウレタン、クロロブレン、アクリル、イソブチレン、フ
ッ素系などから選らばれた有機高分子を採用（７、上地
の有機高分子膜は有機高分子の架橋を多くすることによ
り密度の高いポリイミド、エポキシ、フェノールなどの
有機高分子膜を採用した。Adopts organic polymers selected from urethane, chloroprene, acrylic, isobutylene, fluorine, etc. An organic polymer membrane was used.
この下地有機高分子膜は不純物を減らしであるために釧
のマイグレーションを防止され、さらにセラミックの伸
縮時セラミックと有機高分子膜との間にセン断応力が加
わっても、弾性を有して応力に対して十分に伸びるため
、セラミックと有機高分子膜との接着が維持され水分子
がセラミックと有機高分子膜の界面にトラップされるこ
とがない。上地用の有機高分子膜は膜密度が高いために
、透水率が小さく、下地用の有機高分子膜との効果が合
わされて銀のマイグレーションを防止出来る。This base organic polymer film has reduced impurities, which prevents the migration of the wire, and even when shear stress is applied between the ceramic and the organic polymer film when the ceramic expands and contracts, it has elasticity and is able to withstand stress. Since the ceramic and organic polymer film can be sufficiently stretched, adhesion between the ceramic and the organic polymer film is maintained, and water molecules are not trapped at the interface between the ceramic and the organic polymer film. Since the organic polymer film for the top layer has a high film density, its water permeability is low, and this combined effect with the organic polymer film for the bottom layer can prevent silver migration.
以下、図面を参照して本発明の詳細な説明する。Hereinafter, the present invention will be described in detail with reference to the drawings.
第１図は本発明の一吹施例を示す斜視図で、電歪効果素
子１００Ｍ’２つの厚い圧電セラミック部材ＡＩおよび
Ａ、の間に薄い圧電セラミック部材ａＩ〜ａゎと錯−パ
ラジウム％を極導体層ｂ Ｉ ””’ ｂｎ＋１とを交
互に重ね合わせた積層焼結体と、絶縁層１１〜Ｉｎ＋１
を下地として欽−パラジウム電、極導体層ｂ１〜Ｅ）ｎ
＋１の奇数番目および偶数番目をそれぞれ積層焼結体の
側面上で共通接続して２つの＜ Ｌ歯形内部電極を構成
せしめる一対の外部電極導体層１および２と、積層焼結
体の１１１１面の全てに露出する釧−パラジウム電極導
体層１） Ｉ”” ））ｎ＋１の端部および外部電極導
体層１および２の全露出面をそれぞれ被榎する有機高分
子Ｊ！１３及び４とを含む。FIG. 1 is a perspective view showing a one-shot embodiment of the present invention, in which thin piezoelectric ceramic members aI to aゎ and complex palladium % are placed between two thick piezoelectric ceramic members AI and A of an electrostrictive effect element 100M'. A laminated sintered body in which polar conductor layers b I ""' bn+1 are alternately stacked, and insulating layers 11 to In+1
As a base layer, conductor layers b1 to E)n are formed.
A pair of external electrode conductor layers 1 and 2 are connected in common on the side surfaces of the laminated sintered body to form two < L tooth-shaped internal electrodes, and the 1111 side of the laminated sintered body is The organic polymer J! covers the entire exposed end of the Plate-palladium electrode conductor layer 1) I""))n+1 and the entire exposed surface of the external electrode conductor layers 1 and 2, respectively. 13 and 4.
本実施例の電歪効果素子１００け、まずペロプスカイト
結晶構造を多成分固溶体セラミックの粉末（例えばＰｂ
（Ｚｒ、ＴＩ）０３）に有機バインター（例えばポリビ
ニール・ブチラール樹脂）の粉末を混合してグリーンシ
ートを作り、この上に銀ペーストを印刷塗布した稜、６
０〜８０層に積層して高温焼結（例えばＬ０００℃以−
ト）を行なうことによって積層焼結体が形成される。こ
の積層焼結技術によれば、厚さ約Ｑ、 ｌ ＩＩＩの薄
い圧電セラミック部材ど膜厚約０００５關の＠電極導体
層とを交互に重ね合わせた積層焼結体の大きなブロック
を容易に得ることができる。ついでこのブロックの対向
する側面には、銀ペーストの印刷塗布および焼成により
外部電極導体層の一対を含んでこれを小ブロックに分割
する。この分割された積層焼結体にまず下地用有機高分
子膜としてアルカリ及びハロゲン成分を５ｐｐｍ以下に
おさえたウレタン樹脂を被覆する。積層焼結体の上下面
にテープをけちつけ、温度６０℃に加温した下地用ウレ
タン樹脂ワニス中に浸漬移染り出し、温度１５０°Ｃ１
時間３０分の条件で乾燥する。次に粉体塗装法によりエ
ポキシ樹脂を約０３闘被覆して上地用有機高分子膜を形
成した。100 electrostrictive effect elements of this example were prepared by first forming a perovskite crystal structure into a multi-component solid solution ceramic powder (for example, Pb).
(Zr, TI) 03) mixed with powder of organic binder (e.g. polyvinyl butyral resin) to make a green sheet, and then silver paste was printed and applied on top of the green sheet, 6
Laminated in 0 to 80 layers and sintered at high temperature (for example, L000℃ or higher)
By performing (g), a laminated sintered body is formed. According to this laminated sintering technique, it is easy to obtain a large block of laminated sintered bodies in which thin piezoelectric ceramic members with a thickness of about Q, lIII and electrode conductor layers with a thickness of about 0005 mm are alternately stacked. be able to. Then, opposite sides of this block contain a pair of external electrode conductor layers by printing and baking a silver paste to divide it into small blocks. The divided laminated sintered body is first coated with a urethane resin containing alkali and halogen components of 5 ppm or less as an underlying organic polymer film. Tape was applied to the top and bottom surfaces of the laminated sintered body, and the tape was immersed in urethane resin varnish for the base heated to 60°C, and the dye was transferred to a temperature of 150°C.
Dry for 30 minutes. Next, an epoxy resin was coated for about 30 minutes using a powder coating method to form an organic polymer film for the top layer.
このようにして作成された電歪効果素子１００に温度４
０°０．湿度９０〜９５チＲＨ，電圧１００ＶＤＣを印
加（２て試駆を行っても５００時間まで絶縁不良は発生
１７庁かった。以上は２層の有機高分子膜を植機した場
合を説明したが、３層以上の有機高分子膜を被覆した場
合も同様の幼芽がおる。The electrostrictive effect element 100 created in this way is heated to a temperature of 4
0°0. Applying a humidity of 90 to 95 degrees RH and a voltage of 100 VDC (even after 2 test runs, there were 17 cases of insulation failure up to 500 hours. The above describes the case where two layers of organic polymer film were implanted. , Similar young buds are produced when the plant is coated with three or more layers of organic polymer film.
また本実施例では下地用有機高分子膜と１．てウレタン
樹脂、上地用有機高分子膜としてエポキシ樹脂を用いた
が、これ以外にも下地用として天然ゴムヤイソプレン、
ブタジェン、シリコーン、クロロプレン、アクリル、イ
ンブチレン、フッ素系などから選ばｈた有機高分子１．
−Ｉ−地相としてフェノールの有機高分子膜を用い“Ｃ
も同様の効果がある。In addition, in this example, the base organic polymer film and 1. We used urethane resin and epoxy resin as the organic polymer film for the top layer, but we also used natural rubber isoprene,
Organic polymer selected from butadiene, silicone, chloroprene, acrylic, inbutylene, fluorine, etc. 1.
-I- Using an organic polymer film of phenol as the ground phase, “C
has the same effect.
以上詳細に説明１〜たように、本発明によればきわめて
簡単な手段により銀−パラジウム電極導体層の銀材によ
るマイグレーシーンを有効確実に防止し得るので圧電素
子の信頼性を著しく高めることができ、例えば圧電縦効
果を充分に活用した圧電アクチュエータを歩溜りよく生
産し得る顕著なる効果を有する。As described above in detail from 1 to 1, according to the present invention, the migration scene due to the silver material of the silver-palladium electrode conductor layer can be effectively and reliably prevented by extremely simple means, thereby significantly increasing the reliability of the piezoelectric element. This has a remarkable effect, for example, in making it possible to produce piezoelectric actuators that fully utilize the piezoelectric longitudinal effect at a high yield.
第１図は本発明の一実施例の電歪効果素子の断面図であ
る。
１００・・・・・・電歪効果素子、１，２・・・・・・
外部電極導体層、３・・・・・・下地用有機高分子膜、
４・・・・・・上地用有機高分子膜、Ａ Ｉ ＋ Ａ
２ ＋ ８１＋ ８６ ・・・・・・圧電セラミック部
材、ｂ１〜ｂｎ＋１’・・・・・銀−パラジウム電極導
体層（内部軍、極）、１１〜Ｉｎ＋１・・・・・・ガラ
ス絶縁層。
μｐFIG. 1 is a sectional view of an electrostrictive element according to an embodiment of the present invention. 100... Electrostrictive effect element, 1, 2...
External electrode conductor layer, 3... organic polymer film for base,
4... Organic polymer film for top layer, A I + A
2+81+86...Piezoelectric ceramic member, b1-bn+1'...Silver-palladium electrode conductor layer (inner force, pole), 11-In+1...Glass insulating layer. μp
Claims (1)
互に重ね合わせた積層焼結体と、前記積層焼結体の対向
する側面にそれぞれ設けられた絶縁層を介し前記銀−パ
ラジウム電極導体層を一層おきに、交互に接続して２つ
のくし歯形内部電極を構成せしめる一対の外部電極導体
層と、前記積層焼結体の側面に弾性を有する有機高分子
膜と１層以上の有機高分子膜とを被覆することを特徴と
する電歪効果素子。A laminated sintered body in which piezoelectric ceramic members and silver-palladium electrode conductor layers are stacked alternately, and the silver-palladium electrode conductor layer is layered through insulating layers provided on opposing sides of the laminated sintered body, respectively. a pair of external electrode conductor layers which are alternately connected to constitute two comb-shaped internal electrodes; an organic polymer film having elasticity on the side surface of the laminated sintered body; and one or more organic polymer films. An electrostrictive effect element characterized by being coated with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60230212A JPH0680846B2 (en) | 1985-10-15 | 1985-10-15 | Electrostrictive effect element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60230212A JPH0680846B2 (en) | 1985-10-15 | 1985-10-15 | Electrostrictive effect element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6288382A true JPS6288382A (en) | 1987-04-22 |
| JPH0680846B2 JPH0680846B2 (en) | 1994-10-12 |
Family
ID=16904324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60230212A Expired - Lifetime JPH0680846B2 (en) | 1985-10-15 | 1985-10-15 | Electrostrictive effect element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0680846B2 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02240976A (en) * | 1989-03-15 | 1990-09-25 | Tokin Corp | Laminated type piezoelectric actuator |
| JPH0485976A (en) * | 1990-07-30 | 1992-03-18 | Fujitsu Ltd | Laminated type piezoelectric element |
| JPH04283975A (en) * | 1990-10-29 | 1992-10-08 | Trw Inc | Sealed ceramic device and burying method to composite structure |
| EP0587192A1 (en) * | 1988-07-08 | 1994-03-16 | Fujitsu Limited | Electro-distortion device |
| US5925971A (en) * | 1996-09-12 | 1999-07-20 | Murata Manufacturing Co., Ltd. | Piezoelectric resonator and electronic component containing same |
| US6617762B2 (en) * | 2000-08-03 | 2003-09-09 | Nec Tokin Ceramics Corporation | Microactuator device with a countermeasure for particles on a cut face thereof |
| US6661158B2 (en) * | 2000-12-28 | 2003-12-09 | Denso Corporation | Piezoelectric device and method for producing the same |
| US6845920B2 (en) | 2001-04-19 | 2005-01-25 | Denso Corporation | Piezoelectric element and injector using the same |
| US7358653B2 (en) * | 2005-11-02 | 2008-04-15 | Murata Manufacturing Co., Ltd. | Piezoelectric element |
| EP1981097A3 (en) * | 2007-04-10 | 2009-01-07 | Robert Bosch Gmbh | Piezoelectric actuator |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5486688U (en) * | 1977-12-02 | 1979-06-19 | ||
| JPS5571571U (en) * | 1978-11-09 | 1980-05-16 | ||
| JPS59175176A (en) * | 1983-03-24 | 1984-10-03 | Nec Corp | Manufacture of electrostrictive effect element |
| JPS59218784A (en) * | 1983-05-26 | 1984-12-10 | Nippon Soken Inc | Laminated ceramic piezoelectric element |
| JPS6021578A (en) * | 1983-07-15 | 1985-02-02 | Omron Tateisi Electronics Co | Piezoelectric bimorph |
-
1985
- 1985-10-15 JP JP60230212A patent/JPH0680846B2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5486688U (en) * | 1977-12-02 | 1979-06-19 | ||
| JPS5571571U (en) * | 1978-11-09 | 1980-05-16 | ||
| JPS59175176A (en) * | 1983-03-24 | 1984-10-03 | Nec Corp | Manufacture of electrostrictive effect element |
| JPS59218784A (en) * | 1983-05-26 | 1984-12-10 | Nippon Soken Inc | Laminated ceramic piezoelectric element |
| JPS6021578A (en) * | 1983-07-15 | 1985-02-02 | Omron Tateisi Electronics Co | Piezoelectric bimorph |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0587192A1 (en) * | 1988-07-08 | 1994-03-16 | Fujitsu Limited | Electro-distortion device |
| JPH02240976A (en) * | 1989-03-15 | 1990-09-25 | Tokin Corp | Laminated type piezoelectric actuator |
| JPH0485976A (en) * | 1990-07-30 | 1992-03-18 | Fujitsu Ltd | Laminated type piezoelectric element |
| JPH04283975A (en) * | 1990-10-29 | 1992-10-08 | Trw Inc | Sealed ceramic device and burying method to composite structure |
| US5925971A (en) * | 1996-09-12 | 1999-07-20 | Murata Manufacturing Co., Ltd. | Piezoelectric resonator and electronic component containing same |
| US6617762B2 (en) * | 2000-08-03 | 2003-09-09 | Nec Tokin Ceramics Corporation | Microactuator device with a countermeasure for particles on a cut face thereof |
| US6661158B2 (en) * | 2000-12-28 | 2003-12-09 | Denso Corporation | Piezoelectric device and method for producing the same |
| US6845920B2 (en) | 2001-04-19 | 2005-01-25 | Denso Corporation | Piezoelectric element and injector using the same |
| US7358653B2 (en) * | 2005-11-02 | 2008-04-15 | Murata Manufacturing Co., Ltd. | Piezoelectric element |
| EP1981097A3 (en) * | 2007-04-10 | 2009-01-07 | Robert Bosch Gmbh | Piezoelectric actuator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0680846B2 (en) | 1994-10-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |