CN106683958A - Preparation method of compound pipe shell and helix traveling wave tube - Google Patents
Preparation method of compound pipe shell and helix traveling wave tube Download PDFInfo
- Publication number
- CN106683958A CN106683958A CN201710068273.3A CN201710068273A CN106683958A CN 106683958 A CN106683958 A CN 106683958A CN 201710068273 A CN201710068273 A CN 201710068273A CN 106683958 A CN106683958 A CN 106683958A
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- pipe shell
- shell
- preparation
- composite pipe
- bar
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- 238000002360 preparation method Methods 0.000 title claims abstract description 36
- 150000001875 compounds Chemical class 0.000 title abstract 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052802 copper Inorganic materials 0.000 claims abstract description 23
- 239000010949 copper Substances 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 18
- 229910000792 Monel Inorganic materials 0.000 claims abstract description 10
- 238000005520 cutting process Methods 0.000 claims abstract description 7
- 239000002131 composite material Substances 0.000 claims description 59
- 238000003466 welding Methods 0.000 claims description 15
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 11
- 229910052739 hydrogen Inorganic materials 0.000 claims description 11
- 239000001257 hydrogen Substances 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 10
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 238000001291 vacuum drying Methods 0.000 claims description 5
- 238000005476 soldering Methods 0.000 abstract description 3
- 230000007547 defect Effects 0.000 abstract description 2
- 238000003754 machining Methods 0.000 abstract 2
- 239000005749 Copper compound Substances 0.000 abstract 1
- 150000001880 copper compounds Chemical class 0.000 abstract 1
- 238000009713 electroplating Methods 0.000 abstract 1
- 230000004907 flux Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000011257 shell material Substances 0.000 description 119
- 239000006185 dispersion Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010930 yellow gold Substances 0.000 description 1
- 229910001097 yellow gold Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/12—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microwave Tubes (AREA)
Abstract
The invention provides a preparation method of a compound pipe shell. The preparation method comprises the following steps: machining an outer pipe shell bar material and an inner pipe shell bar material to form a compound pipe shell prefabricated member, and heating the compound pipe shell prefabricated member so that the inner pipe shell bar material is melted and is welded with the inner wall of the outer pipe shell bar material without a gap; cutting and machining the compound pipe shell prefabricated member so as to obtain a compound pipe shell. The method that an oxygen-free copper bar material is fused is adopted, the fused oxygen-free copper bar material is welded with the inner wall of the outer pipe shell together, so that the defect that the gap exists between the inner pipe shell and the outer pipe shell is avoided; the copper compound pipe shell is embedded, so that the radiating performance of a pure copper pipe shell is achieved, and greatly exceeds the radiating performance of a pure Monel pipe shell assembly; without the need of electroplating or a soldering flux, the compound pipe shell is simple to manufacture and low in cost, the overall performance of the traveling wave tube can be comprehensively improved, the compound pipe shell has extremely high economic value, and the method can be used for preparing pipe shells of helix traveling wave tubes and also can be used for preparing compound collector electrodes of the helix traveling wave tubes.
Description
Technical field
The present invention relates to space travelling wave tube technology, more particularly to the preparation side of a kind of composite pipe shell and helix TWT
Method.
Background technology
Helix TWT has the advantages that broadband, high-gain and high power, is that important microwave frequency power is amplified
Device, is widely used in now satellite communication system.Slow-wave component is the key components of helix TWT, and its effect is
The energy exchange between moving electron and high frequency field is realized, its performance quality directly decides homogeneous tube level.Slow-wave component
Heat dispersion be not only determine travelling-wave tube average output power principal element, be also directly affect travelling-wave tube job stability with
The key factor of reliability.With developing rapidly for modern science and technology, in the urgent need to the helix TWT of higher performance, research and
The heat dispersion for improving slow-wave component is just particularly important.
As shown in figure 1, helix TWT is made up of electron gun 1, slow-wave component 2, collector 4.As shown in Fig. 2 spiral
Line slow-wave structure is generally made up of helix 6, supporting rod 7 and shell 5, and electron beam 3 is exchanged with microwave signal in slow-wave component 2
Energy.Helix tinsel coiling is formed, as individual elongated spring, it is necessary to appropriate mode it is clamped and is fixed
In travelling-wave tube, the usual Ceramics material of supporting rod, to prevent electromagnetic wave outside from radiating, in addition it is also necessary to there is the metal of coaxial placement
Shielding shell.In the development process of helix TWT find, the key for realizing high-power output be success design
With produce good thermally-conductive interface.Interface between helix and supporting rod and supporting rod and Can, is to limit traveling wave
The key of pipe heat-sinking capability.The selection of Can needs to consider that whether material has enough mechanical strengths, nonmagnetic, good
Heat conductivity and elevated temperature strength.Shell is made generally from materials such as Monel, oxygen-free copper, rustless steels.Monel and not
Rust steel has high intensity, high ductility, high solderability and excellent anti-corrosion capability.Copper product has conductive and heat conduction energy well
Power, but its mechanical strength is not high, easily causes shell to deform.Machine components as helix TWT important component part,
Its technique, progressively improving for material will produce extreme influence to the further development of helix TWT.Single metal material
There is excellent performance in one aspect, and there is the defect that cannot be overcome on the other hand, thus to updating more preferably material
The requirement of material is particularly strong.Composite is able in recent years fast development as a not only long but also brand-new subject, and
Each different field is increasingly widely applied.
Existing composite pipe shell is, using Monel or stainless steel material, with hot spinning mode outer pipe shell woollen to be drawn.Adopt
With oxygenless copper material, interior shell woollen is drawn with hot spinning mode, shell woollen outer surface in gained is silver-plated.Interior shell is pre-
Product is put in outer pipe shell in slide fit form, then composite pipe shell prefabricated component is put in hydrogen stove or vacuum drying oven and is heated to appropriate temperature
Degree so that the copper in silver-colored and interior shell woollen of the plating on shell woollen in oxygen-free copper forms yellow gold, and prior to anaerobic
Copper melts, so as to outer pipe shell is welded with interior shell woollen as solder.The composite pipe shell through welding has been obtained to this
Prefabricated component.Outer pipe shell and interior shell woollen, such as the welding of laser welding, electronics note and hydrogen arc weldering can also be welded with method for distinguishing
Deng.Finally composite pipe shell prefabricated component is processed with wire cutting method, cut out on its interior shell specific needed for the travelling-wave tubies such as fin
Structure, so as to be finally obtained composite pipe shell.
But outer pipe shell is consolidated with interior shell using methods such as soldering, laser welding, the welding of electronics note and hydrogen arc welderings
When being connected together, gap is certainly existed between inside and outside shell, so as to reduce the heat-sinking capability of composite pipe shell.
The content of the invention
(1) technical problem to be solved
In order to solve the problems referred to above of prior art presence, the invention provides a kind of composite pipe shell and helix TWT
Preparation method.
(2) technical scheme
The invention provides a kind of preparation method of composite pipe shell, it is adaptable to the preparation of helix TWT shell, including：
Step S1：Processing outer pipe shell bar；
Step S2：Shell bar in processing；
Step S3：Form composite pipe shell prefabricated component；
Step S4：The composite pipe shell prefabricated component is heated, interior shell bar is melted and is formed with outer pipe shell bar inwall
Do not have apertured welding；
Step S5：Cutting composite pipe shell prefabricated component；
Step S6：Processing composite pipe shell prefabricated component, obtains composite pipe shell.
Present invention also offers a kind of preparation method of helix TWT, shell therein is by above-mentioned preparation method system
It is standby.
(3) beneficial effect
From above-mentioned technical proposal as can be seen that the preparation method of the composite pipe shell of the present invention and helix TWT have with
Lower beneficial effect：
(1) using by oxygen-free copper bar melt method, weld together with outer pipe shell inwall, rather than using soldering,
The methods such as laser welding, the welding of electronics note and hydrogen arc weldering are fixed together outer pipe shell with interior shell, it is to avoid several sides below
There is gap between the inside and outside shell that method is caused.
(2) heat dispersion that copper composite pipe shell has reached fine copper shell is embedded, substantially exceeds pure Monel shell component
Heat-sinking capability.
(3) different from existing composite pipe shell preparation method, it is not necessary to electroplate, it is not required that solder, it makes simple, into
This is cheap, the overall performance of travelling-wave tube can be comprehensively improved, with very high economic worth.
(4) composite pipe shell preparation method of the invention both can be used for preparing the shell of helix TWT, it is also possible to use
In the composite collection pole for preparing helix TWT.
Description of the drawings
Fig. 1 is existing helix TWT structural representation；
Fig. 2 is existing common shell structure schematic diagram；
Fig. 3 is the composite pipe shell preparation method flow chart of the embodiment of the present invention；
Fig. 4 a to Fig. 4 f are composite pipe shell structural representation corresponding with composite pipe shell preparation method each stage；
Fig. 5 is the composite pipe shell structural representation prepared by the composite pipe shell preparation method of the embodiment of the present invention；
Fig. 6 is the experiment comparison diagram of the heat dispersion using different shells.
【Symbol description】
1- electron guns；2- slow-wave components；3- electron beams；4- collectors；5- shells；6- helixes；7- supporting rods；8- outer tubes
Shell；Shell in 9-；10- fins.
Specific embodiment
The composite pipe shell preparation method of the helix TWT of the present invention, composite pipe shell includes outer pipe shell and interior shell, root
Should be compatible and this premise that is complementing one another according to the performance requirement of composite and the group element material of composition composite,
Through testing repeatedly, interior envelope material is oxygen-free copper, and outer pipe shell material is Monel or magnetism-free stainless steel, is allowed to both maintain illiteracy
Like this or magnetism-free stainless steel intensity, and the excellent heat conductivity performance with copper.By the way that oxygen-free copper is melted, enter with outer pipe shell inwall
Row seamless welding, realizes the Monel or magnetism-free stainless steel of outer pipe shell and the connection of the oxygen-free copper of interior shell.
To make the object, technical solutions and advantages of the present invention become more apparent, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail.
Referring to Fig. 3, first embodiment of the invention provides a kind of preparation method of composite pipe shell, the composite pipe shell prepared
As the shell of helix TWT, including：
Step S1：Processing outer pipe shell bar.
Specifically, outer pipe shell bar car is made into tubbiness shell as shown in fig. 4 a with lathe, and is cleaned.Outer pipe shell
The metal tube material for selecting Monel or magnetism-free stainless steel equal strength high.
Step S2：Shell bar in processing.
Wherein, interior shell bar is cut into the length matched with the tubbiness shell of step S1, as shown in Figure 4 b, interior shell rod
Material external diameter is less than the internal diameter of outer pipe shell bar, and is cleaned.Interior shell selects the high metal bar materials of thermal conductivity such as oxygen-free copper.
Step S3：Form composite pipe shell prefabricated component.
In the tubbiness shell of the outer pipe shell that the interior shell bar shown in Fig. 4 b is put into shown in Fig. 4 a, formed as illustrated in fig. 4 c
Composite pipe shell prefabricated component.
Step S4：Welding composite pipe shell prefabricated component.
Above-mentioned composite pipe shell prefabricated component is put in hydrogen stove or vacuum drying oven the temperature for being heated to oxygen-free copper fusing so that anaerobic
Copper rod material melts and is formed with outer pipe shell bar inwall and do not have apertured welding, as shown in figure 4d.Wherein, vacuum drying oven vacuum exists
1×10-2Pa to 1 × 10-3Between pa, the dew point of hydrogen of hydrogen stove is less than -70 DEG C, and heating-up temperature should be at 1100 DEG C -1150 DEG C.
Step S5：Cutting composite pipe shell prefabricated component.
The composite pipe shell prefabricated component lathe that step S4 is obtained is cut into Len req, obtains the multiple tube shown in Fig. 4 e
Shell prefabricated component.
Step S6：Processing composite pipe shell prefabricated component, obtains composite pipe shell.
With the composite pipe shell prefabricated component shown in wire cutting method manuscript 4e, on its interior shell the helixes such as fin are cut out
Ad hoc structure needed for travelling-wave tube, as shown in fig. 4f, so as to be finally obtained composite pipe shell as shown in Figure 5.
The composite pipe shell that said method is prepared is as shown in Figure 5.8 is outer pipe shell in figure, and 9 is interior shell, and 10 is fin, 6
For helix, 7 is supporting rod.Outer pipe shell 8 and interior shell 9 are all tubulose, and the internal diameter of outer pipe shell 8 is consistent with the external diameter of interior shell 9, inner tube
In outer pipe shell inner chamber, the internal face of outer pipe shell 8 is closely welded together valve jacket with the outer peripheral face of interior shell 9.It is interior made by the present invention
Embedding copper composite pipe shell has reached the heat dispersion of fine copper shell, substantially exceeds the heat-sinking capability of pure Monel shell component, such as Fig. 6
It is shown.
Method of the present invention using the fusing of oxygen-free copper bar is welded together with outer pipe shell inwall, rather than adopt pricker
The methods such as weldering, laser welding, the welding of electronics note and hydrogen arc weldering are fixed together outer pipe shell with interior shell, it is to avoid this several side
There is gap, simple, low cost of the invention substantially increases helix traveling wave between the inside and outside shell that method is caused
The heat dispersion of pipe, and then the life-span of device is substantially prolongs, great economic benefit is produced, with very high economic worth.
The composite pipe shell that said method is prepared can be used as the shell of helix TWT, it is also possible to used as spiral
The composite collection pole of line travelling-wave tube uses, i.e., above-mentioned preparation method is applicable not only to the preparation of helix TWT shell, equally
Suitable for the preparation of helix TWT composite collection pole.
Second embodiment of the invention provides a kind of preparation method of helix TWT, shell therein and/or collection
Pole is prepared by the preparation method of first embodiment, including the slow-wave component of the shell is assembled into spiral with electron gun, collector
Line travelling-wave tube.
So far, the present embodiment has been described in detail already in connection with accompanying drawing.According to above description, those skilled in the art
The preparation method of the composite pipe shell of the present invention and helix TWT should be had and clearly be recognized.
It should be noted that in accompanying drawing or description text, the implementation for not illustrating or describing is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.Additionally, above-mentioned definition to each element and not only limiting
Various concrete structures, shape or the mode mentioned in embodiment, those of ordinary skill in the art can be carried out simply more to it
Change or replace, for example：
(1) direction term mentioned in embodiment, for example " on ", D score, "front", "rear", "left", "right" etc., be only ginseng
The direction of accompanying drawing is examined, not for limiting the scope of the invention；
(2) above-described embodiment can be based on design and the consideration of reliability, and the collocation that is mixed with each other is used or and other embodiment
Mix and match is used, i.e., the technical characteristic in different embodiments can freely form more embodiments.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail it is bright, should be understood that the foregoing is only the present invention specific embodiment, be not limited to the present invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc., should be included in the guarantor of the present invention
Within the scope of shield.
Claims (10)
1. a kind of preparation method of composite pipe shell, it is adaptable to the preparation of helix TWT shell, it is characterised in that include：
Step S1：Processing outer pipe shell bar；
Step S2：Shell bar in processing；
Step S3：Form composite pipe shell prefabricated component；
Step S4：The composite pipe shell prefabricated component is heated, interior shell bar is melted and is formed with outer pipe shell bar inwall does not have
The welding in gap；
Step S5：Cutting composite pipe shell prefabricated component；
Step S6：Processing composite pipe shell prefabricated component, obtains composite pipe shell.
2. preparation method as claimed in claim 1, it is characterised in that the outer pipe shell bar is Monel or magnetism-free stainless steel
Material, said inner tube shell bar is oxygenless copper material.
3. preparation method as claimed in claim 2, it is characterised in that step S4 includes：The composite pipe shell is prefabricated
Part is put in hydrogen stove or vacuum drying oven the temperature for being heated to oxygen-free copper fusing so that the fusing of interior shell bar and with outer pipe shell bar in
Wall is formed does not have apertured welding.
4. preparation method as claimed in claim 3, it is characterised in that heating-up temperature is 1100 DEG C -1150 DEG C；Vacuum drying oven it is true
Reciprocal of duty cycle is 1 × 10-2Pa to 1 × 10-3Between pa, the dew point of hydrogen of hydrogen stove is less than -70 DEG C.
5. preparation method as claimed in claim 1, it is characterised in that step S1 includes：With lathe by outer pipe shell bar
Car is made tubbiness shell and is cleaned.
6. preparation method as claimed in claim 5, it is characterised in that step S2 includes：By interior shell bar be cut into
The length that tubbiness shell matches, interior shell bar external diameter is less than the internal diameter of outer pipe shell bar, and is cleaned.
7. preparation method as claimed in claim 1, it is characterised in that step S3 includes：Interior shell bar is put into outer
In shell bar, composite pipe shell prefabricated component is formed；Step S5 includes：Composite pipe shell prefabricated component lathe is cut into required length
Degree.
8. preparation method as claimed in claim 1, it is characterised in that step S6 includes：It is multiple with wire cutting method processing
Shell prefabricated component is closed, on its interior shell fin is cut out.
9. preparation method as claimed in claim 1, it is characterised in that the composite pipe shell for helix TWT shell
And/or composite collection pole.
10. a kind of preparation method of helix TWT, it is characterised in that shell therein and/or collector are by claim 1
Into 9 prepared by arbitrary preparation method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710068273.3A CN106683958B (en) | 2017-02-07 | 2017-02-07 | The preparation method of composite pipe shell and helix TWT |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710068273.3A CN106683958B (en) | 2017-02-07 | 2017-02-07 | The preparation method of composite pipe shell and helix TWT |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106683958A true CN106683958A (en) | 2017-05-17 |
| CN106683958B CN106683958B (en) | 2019-02-15 |
Family
ID=58859340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710068273.3A Active CN106683958B (en) | 2017-02-07 | 2017-02-07 | The preparation method of composite pipe shell and helix TWT |
Country Status (1)
| Country | Link |
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| CN (1) | CN106683958B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1571096A (en) * | 2003-07-21 | 2005-01-26 | 中国科学院电子学研究所 | Combined extrusion method using transition cellpacking to realize helical slow-wave structure |
| CN1681070A (en) * | 2004-04-09 | 2005-10-12 | 中国科学院电子学研究所 | Composite casing of travelling-wave tube |
| CN104485270A (en) * | 2014-11-10 | 2015-04-01 | 安徽华东光电技术研究所 | Manufacturing process of slow wave system for helix travelling wave tube |
| CN106271428A (en) * | 2016-08-31 | 2017-01-04 | 安徽华东光电技术研究所 | Method for processing composite slow wave tube shell |
-
2017
- 2017-02-07 CN CN201710068273.3A patent/CN106683958B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1571096A (en) * | 2003-07-21 | 2005-01-26 | 中国科学院电子学研究所 | Combined extrusion method using transition cellpacking to realize helical slow-wave structure |
| CN1681070A (en) * | 2004-04-09 | 2005-10-12 | 中国科学院电子学研究所 | Composite casing of travelling-wave tube |
| CN104485270A (en) * | 2014-11-10 | 2015-04-01 | 安徽华东光电技术研究所 | Manufacturing process of slow wave system for helix travelling wave tube |
| CN106271428A (en) * | 2016-08-31 | 2017-01-04 | 安徽华东光电技术研究所 | Method for processing composite slow wave tube shell |
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| CN106683958B (en) | 2019-02-15 |
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Effective date of registration: 20210305 Address after: 250101 Room 101, 1st floor, building 15, No.9, Kuangyuan Road, Gongye North Road, Wangsheren street, Licheng District, Jinan City, Shandong Province Patentee after: Shandong Microwave Vacuum Technology Co.,Ltd. Address before: 100190 No. 19 West North Fourth Ring Road, Haidian District, Beijing Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences Effective date of registration: 20210305 Address after: 100190 No. 19 West North Fourth Ring Road, Haidian District, Beijing Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences Address before: 100190 No.19, Beisihuan West Road, Haidian District, Beijing Patentee before: Institute of Electronics, Chinese Academy of Sciences |