CN101459020B

CN101459020B - Process for slow wave structure manufacturing

Info

Publication number: CN101459020B
Application number: CN2009100007438A
Authority: CN
Inventors: 吴华夏; 方卫; 邓清东; 侯信磊; 赵艳珩; 李�荣; 任振国; 卢希跃
Original assignee: Anhui East China Institute of Optoelectronic Technology
Current assignee: Anhui East China Institute of Optoelectronic Technology
Priority date: 2009-01-09
Filing date: 2009-01-09
Publication date: 2010-12-08
Anticipated expiration: 2029-01-09
Also published as: CN101459020A

Abstract

A technique process for manufacturing slow wave structures belongs to the field of vacuum electric apparatus, which comprises examining, cleaning, assembling and brazing parts of a slow wave structure, the steps of the assembling and brazing process comprise plating silver on surfaces of the parts of the slow wave structure by a vacuum evaporation type, wherein the thickness of plating silver is controlled during the range of 1 micrometer, performing centering assembly to the slow wave structure, welding in a hydrogen furnace under the temperature of 850 DEG C, and coating a metal case outside the welded slow wave structure. The technique process for manufacturing slow wave structures is fine in integral centering property, high in vacuum air tightness and strong in mechanical firmness, saves cost, reduces assembly difficulty, and increases percent of pass.

Description

The process that a kind of slow wave structure is made

Technical field

The invention belongs to the vacuum electron device field, the process that particularly a kind of slow wave structure is made.

Background technology

For the slow wave structure of high power travelling wave tube, what use morely is to adopt coupling cavity slow wave structure form, and Hughes's type slow wave structure is used more in coupled-cavity TWT.The schematic diagram of Hughes's type slow wave structure is by shown in Figure 1.

Compare with the device of millimeter wave band, the travelling wave tube of centimeter wave wave band because electronic beam radius is bigger, needed pack magnetic field a little less than, so that the Outside Dimensions of coupling cavity can be done is relatively large.From manufacturing process, do both to make the soldering of slow wave structure easier like this, slow wave structure is more firm, and can more easily realize the focusing that annotate electronics in magnetic field; And the travelling wave tube of millimeter wave band, because electronic beam radius is less, the pack magnetic field that needs is very big, so that the Outside Dimensions of coupling cavity must be done is little.Bring very big difficulty for like this assembling and the soldering of slow wave structure: at first diminish owing to Outside Dimensions, the mechanically stable reduction of part, part is easy to generate distortion, brings big difficulty for the assembling of slow wave structure; Secondly because Outside Dimensions diminishes, scolder can flow to slow wave structure inside after melting easily, has changed the size of slow wave structure; The 3rd, because the part overall dimensions diminishes, make the whole mechanically stable variation of the slow wave structure after the soldering, leak gas easily and deform.Though behind the disperse oxygen-free copper of adopt strengthening slow wave structure bulk strength situation is made moderate progress, effect is very unobvious, and manufacturing cost improves greatly, therefore, must seek solution from the manufacturing process angle.

Summary of the invention

The technical issues that need to address of the present invention are, mechanical strength at the high power travelling wave tube slow wave structure descends, the centering assembling brings under certain situation of difficult, how to improve structural relation, under the situation that does not influence the slow wave structure inside dimension, strengthen the mechanical strength of slow wave structure, how under the little situation of accessory size, assemble out the good slow wave structure of mechanically stable and air-tightness.

Method of the present invention is based on following understanding: because the accessory size of millimeter wave slow wave system is little, after the soldering, easily influences the dimensional accuracy of slow wave system, thereby influence the parameters of whole slow wave system.And because the size of part is little, vacuum-tightness is difficult to guarantee.So in order to make after the soldering size of system unaffected, guarantee the air-tightness and the mechanically stable of system, can add the good shell of one deck vacuum-tightness and mechanically stable in the outside of slow wave system.The present invention relies on following technical scheme to realize, the process that a kind of Hughes's type coupling cavate slow wave structure is made comprises component test, cleaning, assembling and the soldering of slow wave structure, it is characterized in that assembling and brazing process are operated according to the following steps:

1. with the part of slow wave structure, carry out electroplate with the mode of vacuum evaporation, silver-plated THICKNESS CONTROL is in 1 micrometer range;

2. carry out the centering assembling of slow wave structure;

3. in the hydrogen stove, weld under 850 ℃ of temperature;

4. put Can outside the slow wave structure that welds, the internal diameter size of this Can and slow wave structure outside dimension match to guarantee the vacuum-tightness and the mechanically stable of slow wave structure.

Adopt this mode to weld and assemble, the size of slow wave is unaffected after not only can realizing welding, and the silver-plated conductivity that can also increase piece surface of piece surface, reduces lossy microwave.Vacuum-tightness and mechanically stable in order to guarantee slow wave structure add shell in the outside of slow wave structure.Shell adopts the method for spinning to process, and both can guarantee vacuum-tightness, mechanically stable, and shell wall is thin, does not influence the realization in strong-focusing magnetic field.The material of shell can be selected monel for use.The internal diameter size of described slow wave structure overcoat Can will match with the slow wave structure outside dimension.

Adopt the slow wave structure of shell encapsulation, whole centering performance is good, the vacuum-tightness height, and mechanically stable is strong; Save cost, reduce assembly difficulty, improve qualification rate.

Description of drawings

Fig. 1 a is the front view of the schematic diagram of Hughes's type slow wave structure;

Fig. 1 b is the end view of the schematic diagram of Hughes's type slow wave structure;

Fig. 2 is slow wave structure welding schematic diagram;

Fig. 3 is inserted in shell assembling schematic diagram for slow wave structure;

Fig. 4 is the slow wave structure manufacturing process flow diagram.

Embodiment

With reference to Fig. 1 a, Fig. 1 b, represent the front view and the end view of traditional Hughes's type slow wave structure schematic diagram.It is the coupling cavate slow wave structure that is applied to high power travelling wave tube, with reference to Fig. 2, Fig. 3, be illustrated in the assembling and the welding schematic diagram of the slow wave structure of using in the high power travelling wave tube, the upper and lower chamber plate of coupling cavity in the 1 expression slow wave structure among the figure, it is folded mutually successively with chamber sidewall 2, periodically form continuous slow wave structure, have coupling aperture 3 above the plate of chamber, be used for the microwave power coupling, the position in adjacent coupled hole is staggered, 4 is the overcoat shell, is used to increase the intensity and the sealing property of whole slow wave structure.With reference to Fig. 4, the process chart in the expression slow wave structure manufacture process.

Claims

1. the process made of Hughes's type coupling cavate slow wave structure, comprise component test, cleaning, assembling and the soldering of slow wave structure, it is characterized in that, assembling and brazing process are operated according to the following steps: a. carries out electroplate with the part of slow wave structure with the mode of vacuum evaporation, and silver-plated THICKNESS CONTROL is in 1 micrometer range; B. carry out the centering assembling of slow wave structure; C. in the hydrogen stove, weld under 850 ℃ of temperature; D. put Can outside the slow wave structure that welds, the internal diameter size of this Can will match with the slow wave structure outside dimension.