CN106660722B - Sheeting separation method and its device - Google Patents
Sheeting separation method and its device Download PDFInfo
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- CN106660722B CN106660722B CN201580038140.0A CN201580038140A CN106660722B CN 106660722 B CN106660722 B CN 106660722B CN 201580038140 A CN201580038140 A CN 201580038140A CN 106660722 B CN106660722 B CN 106660722B
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- sheeting
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- top layer
- attraction
- sheetings
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H3/00—Separating articles from piles
- B65H3/08—Separating articles from piles using pneumatic force
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H3/00—Separating articles from piles
- B65H3/46—Supplementary devices or measures to assist separation or prevent double feed
- B65H3/48—Air blast acting on edges of, or under, articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H3/00—Separating articles from piles
- B65H3/46—Supplementary devices or measures to assist separation or prevent double feed
- B65H3/60—Loosening articles in piles
- B65H3/64—Loosening articles in piles by vacuum apparatus
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A kind of sheeting separation method is provided, gap can be formed between the sheeting of top layer and other sheetings, to detach the sheeting of top layer.By attracting nozzle (30) to attract the sheeting (10a) of top layer, so that sheeting (10a) is deformed towards the pressure reduction space (31a) of suction port (31), and makes to generate gap (AS) between sheeting (10a) and other sheetings (10b) being located at immediately below it.Next, in the state of attracting sheeting (10a) of top layer, keeps attraction nozzle (30) mobile and the distance between attraction nozzle (30) is made to become smaller, and make other different Area generation gaps (AS).Sheeting (10a) is set to be in the state that can be detached and take out from other sheetings (10a) as a result,.
Description
Technical field
The present invention relates to the sheeting separation sides for detaching the composite wafer material of stacking in order from top layer
Method and its device.
Background technology
As the method for detaching the composite wafer material of stacking in order from top layer, such as, it is proposed that as shown in Figure 6
Sheeting separation method scheme (patent document 1).
In the separation method of the sheeting of patent document 1 shown in Fig. 6, from sheeting (slip sheet) 110a with
When removing sheeting 110a in the laminated body that liquid crystal display panel 110b is alternately stacked, absorption layer 131 is made to be adsorbed in top layer
Sheeting 110a, then making the absorption layer 131, (interior direction) moves and makes the sheeting in a direction close to each other
110a distorts, to detach sheeting 110a.
At this point, being imported from the part for making sheeting 110a distort between sheeting 110a and liquid crystal display panel 110b
Air, releasing sheeting 110a are close to state with liquid crystal display panel 110b's.
Existing technical literature
Patent document
Patent document 1：Japanese Patent Laid-Open 2009-18898 bulletins
Invention content
The technical problems to be solved by the invention
However, the separation method of the sheeting of patent document 1 is that will have flexible sheeting 110a from as liquid
The method that crystal panel 110b has the plank separation of rigidity like that, if for example, only by the sheeting of top layer from only by having
There is the laminated body separation that flexible sheeting is constituted, then when making absorption layer 131 be moved to direction close to each other, other
Sheeting also can equally be distorted, and there are problems that air can not import between sheeting.
In order to solve the above-mentioned technical problem, the purpose of the present invention is to provide a kind of sheeting separation method and its dresses
It sets, gap can be reliably formed between the sheeting of top layer and other sheetings, to detach the thin of top layer
Sheet material.
Technical scheme applied to solve the technical problem
In order to solve the above-mentioned technical problem, the composite wafer that the sheeting separation method of the present application is used to stack
Material detaches in order from top layer, which is characterized in that has：
Nozzle attracts process, in the nozzle attracts process, using mutual from the stacking direction of the sheeting from
Interval as defined in being spaced apart is arranged and has respectively multiple attraction nozzles of the container-like suction port equipped with pressure reduction space, attracts institute
The sheeting for stating the top layer in sheeting makes the sheeting of the top layer towards the pressure reduction space of the suction port
Deformation, and make to generate gap between the sheeting of the top layer and other sheetings immediately below it；
Nozzle mobile process in the state of attracting the sheeting of the top layer, makes in the nozzle mobile process
Between multiple attraction nozzles move in the direction along the main surface of the sheeting and make multiple attraction nozzles
Distance become smaller, from different other regions in region for being attracted by the attraction nozzle, make the sheeting of the top layer
Gap is generated between other described sheetings；And
Removal process picks up the sheeting of the top layer in the removal process, and by the thin of the top layer
Sheet material is detached from other described sheetings and is taken out.
In the sheeting separation method of the present invention, preferably between the nozzle mobile process and the removal process
Having makes the attraction nozzle move the process for making multiple distances attracted between nozzle return to original sample.
It, can be flat because making the movement of attraction nozzle to make multiple distances attracted between nozzles return as former state
The sheeting after separation is taken out under state, such as transports the sheeting after taking-up under with good positional precision
One process etc. can make operational raising.
Furthermore it is preferred that being limited that will have for the position of the sheeting to be held in multiple positions of specified position
In the case of the composite wafer material separation stacked on the storage box of mechanism, from the stacking direction of the sheeting, institute
It states when so that the attraction nozzle is moved in a manner of so that multiple distances attracted between nozzle is become smaller in nozzle mobile process
The position of the attraction nozzle is the inside by connecting the region that the imaginary line of multiple position restriction mechanisms surrounds.
The inside for attracting nozzle towards the region surrounded by the imaginary line for connecting multiple position restriction mechanisms attracts fine sheet
Material, therefore, it is possible to release being close to for the sheeting near position restriction mechanism.
In order to solve the above-mentioned technical problem, the composite wafer that the sheeting separator of the present application is used to stack
Material detaches in order from top layer, which is characterized in that has：
Storage box, the storage box accommodate sheeting in the state of stacking sheeting, and with can be from top by institute
The mode for stating sheeting taking-up is constituted；
Multiple attraction nozzles, multiple attraction nozzle are mutually spaced apart defined from the stacking direction of the sheeting
Interval is arranged, and has the container-like suction port equipped with pressure reduction space respectively, in the thin slice for making the suction port and top layer
When material abuts and attracted, multiple attraction nozzle makes the sheeting of the top layer towards the decompression of the suction port
Geometric distortion, and make to generate gap between the sheeting of the top layer and other sheetings immediately below it；
Attract nozzle moving mechanism, state of the attraction nozzle moving mechanism in the sheeting for attracting the top layer
Under, so that multiple attraction nozzles is moved on the direction of the main surface along the sheeting and makes multiple attraction sprays
Distance between mouth becomes smaller, and in other regions different from the region attracted by the attraction nozzle, makes the thin slice of the top layer
Gap is generated between material and other described sheetings；And
Sheeting unloading device, the sheeting unloading device pick up the sheeting of the top layer, and by institute
The sheeting for stating top layer is detached from other described sheetings and is taken out.
In the sheeting separator of the present invention, the preferably described storage box has for by the position of the sheeting
Set the position restriction mechanism for being held in specified position.
Because the position of sheeting is held in specified position by position restriction mechanism, so even if being moved by attraction nozzle
Motivation structure or sheeting unloading device carry out separating action, the positions of other sheetings can also locate within the limits prescribed and
Will not excessively it deviate, therefore, it is possible to suitably carry out the separation of next sheeting.
Furthermore it is preferred that the sheeting has multiple holes；The storage box has position banking pin, the position banking pin
The hole of the sheeting is inserted into as the position restriction mechanism.
Because the position of sheeting is held in specified position by position banking pin, so even if being moved by attraction nozzle
Mechanism or sheeting unloading device carry out separating action, can also prevent the inside and outside overturning in the end of other sheetings or folding
It is bent.
It is preferred that being constituted the unloading device of the sheeting in a manner of attracting nozzle described in dual-purpose.
By that nozzle will be attracted to be also used as sheeting unloading device, the structure of device can be simplified, and can be real
The reduction of existing equipment cost.
Furthermore it is preferred that using the mechanism for the structure for having adsorption plate as the sheeting unloading device, the absorption
Plate can adsorb and keep the major part of the main surface of the sheeting.
By using the knot of the adsorption plate for the major part for having the main surface that can be adsorbed and keep the sheeting
The mechanism of structure can prevent the sheeting after separation sagging or bending, and can be flat as sheeting unloading device
In the state of reliably take out sheeting.In addition, the mechanism as the structure for having adsorption plate, can illustrate for example will be above-mentioned
Attract the mechanism of nozzle and the structure of the adsorption plate.
Furthermore it is preferred that have multiple injection nozzles, side side direction of multiple injection nozzle from the sheeting
The gap injection air formed between the sheeting of the top layer and other described sheetings.
By spraying air towards gap, it can expand and generate between the sheeting of top layer and other sheetings
Gap, and sheeting is inhibited to be close to once again with other sheetings, so that sheeting is can be easily separated.
Furthermore it is preferred that at least part in multiple injection nozzles with from the side side of the sheeting via
The gap and the mode towards the position restriction mechanism is constituted.
By from the side side of sheeting via the gap and towards spraying sky in a manner of position restriction mechanism
Gas, the state that the gap can be made to engage to position restriction mechanism with sheeting and be close to are difficult to the position released limitation machine
The periphery of structure is propagated, and the gap on forming position limiting mechanism periphery is easy.
In addition, in the case where using position banking pin as described above as position restriction mechanism, it is being close to state hardly possible
It is easy to form gap with the neighboring area of the position banking pin of releasing, it is especially significant.
Invention effect
The sheeting separation method of the present application attracts process to make the sheeting of top layer and be located at by nozzle
Gap is generated between other sheetings immediately below it, makes the gap in the master along sheeting by nozzle mobile process
The side on surface upwardly propagates, therefore, it is possible to expand the starting point detached between the sheeting of top layer and other sheetings.Its
As a result, by removal process, reliably the sheeting of top layer can be detached from other sheetings and taken out.
The sheeting separator of the present application is by attracting the attraction of nozzle to make sheeting and the position of top layer
Gap is generated between other sheetings immediately below it, by attracting nozzle moving mechanism to make the gap along fine sheet
The side of the main surface of material upwardly propagates, and is detached between the sheeting of top layer and other sheetings therefore, it is possible to expand
Starting point.As a result, by thin slice unloading device, reliably the sheeting of top layer can be detached from other sheetings and
It takes out.
Description of the drawings
Figure when Fig. 1 is the sheeting separator for being observed from the front embodiment of the present invention.
Fig. 2 is the attraction nozzle of sheeting separator shown in FIG. 1 viewed from above, adsorption plate, injection nozzle, position
Figure when setting banking pin and sheeting that the embodiment uses.
Fig. 3 is the figure of the sheeting separation method for illustrating embodiment of the present invention, and Fig. 3 (a) is to show that nozzle is inhaled
Draw the figure of process, Fig. 3 (b) is the figure for showing nozzle mobile process.
Fig. 4 is the figure of the sheeting separation method for illustrating embodiment of the present invention, Fig. 4 (a) and Fig. 4 (b) be by
Sequence shows the figure of removal process.
Fig. 5 is the portions the A enlarged drawing that nozzle shown in Fig. 3 (a) attracts process.
Fig. 6 is the figure for illustrating previous sheeting separator.
Specific implementation mode
Referring to Fig.1~5, the sheeting separator 1 and separation method of embodiment of the present invention are illustrated.The reality
It is rectangle to apply sheeting 10 used in mode, and the hole 11 of position limitation is provided on quadrangle (with reference to Fig. 2).Sheeting
10 have flexibility and elasticity, by way of example, can enumerate the resin flakes such as PET film or low friction rubber sheet and battery
With separator sheet etc..The thickness of sheeting 10 is, for example, 0.01mm~0.05mm.
Sheeting separator 1 has：Storage box 20, the storage box 20 accommodate the sheeting 10 stacked；Attract spray
Mouth 30, the attraction nozzle 30 are used to be formed gap AS under the sheeting 10a of top layer (with reference to Fig. 5)；Nozzle is attracted to move
Motivation structure 40, the attraction nozzle moving mechanism 40 make gap AS be moved on the direction of the main surface along sheeting 10；With
And sheeting unloading device 50, the sheeting unloading device 50 take out sheeting 10.In this embodiment, from storage
The direction that box 20 takes out sheeting 10 is vertical (upper and lower) direction.
Storage box 20 has：Storage box substrate 21, the storage box substrate 21 is for loading composite wafer material 10；And position
Limiting mechanism 22 is set, which carries out the position of sheeting 10 on the main surface direction of sheeting 10
Limitation.The structure with opening is made in the top of storage box 20, so that aftermentioned attraction nozzle 30 or sheeting unloading device
50 can come in and go out.In addition, the lower part of storage box substrate 21 can also have for making the sheeting 10a of top layer configure always
In the up-down drive device (not shown) of certain altitude.
Specifically, position restriction mechanism 22 is the columned position banking pin 22a of the tapered shape in front end, and with
The corresponding mode in position in the hole 11 of sheeting 10 is vertically disposed at the main surface of storage box substrate 21.Moreover, storage
Position banking pin 22a is inserted into the hole 11 of sheeting 10 on one side by box 20 respectively, on one side in the state of stacking sheeting 10
Accommodate sheeting 10.For example, the diameter in the hole of sheeting 10 11 is 4mm, the diameter of position banking pin 22a is 3.5mm
In the case of, there are the gaps of 0.5mm between hole 11 and position banking pin 22a, in the range of the gap, sheeting 10
Position is restricted on the main surface direction of sheeting 10.
In addition, the method for the position as limitation sheeting 10, however it is not limited to as described above by position banking pin 22a
The method for being inserted into hole 11, can also be the method for making the position restriction mechanism 22 of prism-shaped be abutted with the outside of sheeting 10.
Nozzle 30 is attracted to be arranged in a manner of being mutually spaced apart specified interval from stacking direction.Specifically, such as Fig. 2 institutes
Show, between attracting nozzle 30 to be disposed in adjacent hole 11 on the inside of each side of sheeting 10.
Attract nozzle 30 that can slide up and down to and is installed on holding component 43, it is uneven to avoid multiple height for attracting nozzles 30
It is even.In addition, being provided with for the spring 33 to attracting nozzle 30 to exert a force downwards.The attraction nozzle 30 is via cylinder mounting substrate
53, partition board 54 and L-shaped accessory 55 and be installed on and drive upside down mechanism 56.It is, for example, uniaxial machinery to drive upside down mechanism 56
Hand.So that attraction nozzle 30 is declined by making to drive upside down by mechanism 56 acts, attracts the thin slice of the front end and top layer of nozzle 30
Material 10a is abutted.
Attract nozzle 30 in its front end equipped with the container-like suction port 31 with pressure reduction space.Attracting nozzle 30
Rear end is connected with open and close valve (not shown) and Reduced pressure source in Fig. 1.As shown in Fig. 3 (a), make the fine sheet of suction port 31 and top layer
After expecting that 10a is abutted, if being attracted, pressure reduction space 31a deformations of the sheeting 10a towards suction port 31 (with reference to Fig. 5).So
Afterwards, gap AS is generated between sheeting 10a and other sheetings 10b immediately below it.Gap AS is as most
The starting point that the sheeting 10a on upper layer is detached with other sheetings 10b.
Suction port 31 has the specified volume that can accommodate the sheeting 10 being attracted in pressure reduction space 31a.Attract
The internal diameter of mouth 31 is, for example, 3mm, and the height of pressure reduction space is, for example, 3mm.In addition, suction port 31 have rigidity, be made into even if
The structure that pressure reduction space will not deform is formed in suction port 31.The wall thickness of suction port 31 is, for example, 2mm, as suction port 31
Material, such as metal and ceramics can be enumerated etc..
It is by making attraction nozzle 30 on the direction of the main surface along sheeting 10 to attract nozzle moving mechanism 40
It moves and makes above-mentioned gap AS in the mechanism for the starting point that main surface side upwardly propagates and expands separation.That is, attracting nozzle movement
Mechanism 40 is mechanism below：In other regions different from the region attracted by attraction nozzle 30, in the fine sheet of top layer
Expect to form gap AS between 10a and other sheetings 10b, and in the case that sheeting 10a is picked up, makes the thin of top layer
Sheet material 10a forms the state that can only take out sheeting 10a from other sheetings 10b separation.
Nozzle moving mechanism 40 is attracted to have：Component 43 is held, which inhales for that can slide up and down to holding
Guide nozzle 30；Horizontal cylinder 41, the horizontal cylinder 41 is for making attraction nozzle 30 be moved on main surface direction；And sliding axle
42 are held, the sliding bearing 42 is for ensuring the mobile accuracy on main surface direction.As specific action, such as Fig. 3 (b) institutes
Show, first, in the state of using attracting nozzle 30 to attract the sheeting 10a of top layer, each attraction nozzle 30 made to move,
So that multiple attract the distance between nozzle 30 to become smaller.From the point of view of the stacking direction of sheeting 10, attract in nozzle 30 at this time
Heart position is located at the inside (with reference to Fig. 2) in the region of the imaginary line VL encirclements at the center by connecting multiple position banking pin 22a.
Later, attraction nozzle 30 is made to move, so that multiple attract the distance between nozzle 30 to become larger and return to original position
(position that initial suction port 31 is abutted with sheeting 10a).The distance of the reciprocating action of attraction nozzle 30 is, for example, therebetween
0.5mm~4mm.There are gaps as described above between the hole 11 and position banking pin 22a of sheeting 10, in addition, sheeting
10 have elasticity, therefore, it is possible to make attraction nozzle 30 move defined distance.
In addition, the reciprocating action is not limited only to once, can also be multiple.In addition, being multiple situation moving back and forth
Under distance when the distance between attraction nozzle 30 being made to become larger both can be respectively different in multiple action, can also be for example to make
Original position is returned to after attracting nozzle 30 to be temporally shifted to the position than original position more lateral.
In addition, in the action of above-mentioned attraction nozzle moving mechanism 40, multiple injection nozzles 61 can also be used towards most
The gap AS injection air formed between the sheeting 10a and other sheetings 10b on upper layer.The front end of injection nozzle 61 with
The position of gap AS is accordingly configured at the outside of the side of the sheeting 10 of stacking.In the rear end and Fig. 1 of injection nozzle 61
Open and close valve and compressed air source connection (not shown).The injection of air can be discontinuously or continuous.
Thin slice unloading device 50 be for the sheeting 10a of top layer is picked up and by sheeting 10a it is thin from other
The mechanism of sheet material 10b separation and taking-up.Thin slice unloading device 50 has：Adsorption plate 51, the adsorption plate 51 can adsorb holding
The main surface of sheeting 10；And adsorption plate mobile mechanism 52, the adsorption plate mobile mechanism 52 is for making about 51 adsorption plate
It is mobile.Adsorption plate mobile mechanism 52 is, for example, vertical cylinder or linear servo-actuator.
It is provided with multiple suction holes for attracting holding sheeting 10 on adsorption plate 51, and is connected in Fig. 1 not
The open and close valve and Reduced pressure source of diagram.In addition, as shown in Fig. 2, adsorption plate 51 is provided with for avoiding attracting nozzle 30 and position limit
Notch 51a, 51b of 22a are made and sold, which attracts the region that sheeting 10 is actually used as product, i.e. fine sheet
The major part of material 10.In addition, adsorption plate 51 can be both made of porous material, it can also be can be carried out by Electrostatic Absorption
The mode of absorption is constituted.
As shown in Fig. 4 (a), as the action for taking out sheeting 10, original position is returned to making attraction nozzle 30
In the state of setting (position that initial suction port 31 is abutted with sheeting 10a), adsorption plate is made by adsorption plate mobile mechanism 52
51 decline.Then, as shown in Fig. 4 (b), after keeping sheeting 10 using adsorption plate 51, make suction by driving upside down mechanism 56
Attached plate 51 and attraction nozzle 30 rise, and sheeting 10a is made to be detached from other sheetings 10b.In addition, attracting nozzle 30
Attracting can both stop after keeping sheeting 10 using adsorption plate 51, can also be placed in detaching sheeting 10
Stop when next mounting table.
In addition it is also possible to be equipped with the injection nozzle 61 (61a) constituted in such a way：The air of injection is from sheeting
10 side side knocks position banking pin 22a via the gap AS being formed on the inside of side.Injection nozzle 61a is with following
Mode configures：It is configured at the outside of the side of sheeting 10, front end is limited towards the position being located near the side of offside
Sell 22a (with reference to Fig. 2).Open and close valve and compressed air source (not shown) connect in the rear end of injection nozzle 61a and Fig. 1.Air
Preferably intermittently spray.Thereby, it is possible to reduce the case where hole 11 of sheeting 10 is hooked in position banking pin 22a.
In sheeting separation method and device preferably, by attracting nozzle 30 to attract the thin slice of top layer
Material 10a makes pressure reduction space 31a deformations of the sheeting 10a towards suction port 31, and makes sheeting 10a and be located at it just
Gap AS is generated between other sheetings 10b of lower section.Then, in the state of attracting the sheeting 10a of top layer, make
Attract the movement of nozzle 30 and the distance between attraction nozzle 30 is made to become smaller, and makes different other Area generation gaps AS.As a result, can
Enough expand the starting point detached between the sheeting 10a and other sheetings 10b of top layer, sheeting 10a can be made to hold
It is easily separated.
In addition, the sheeting unloading device 50 of the present invention can be not only the structure taken out using adsorption plate 51, also may be used
It is constituted in a manner of attracting nozzle 30 to take out sheeting 10 by dual-purpose.
The present invention is also not limited to above-mentioned embodiment in other respects, can be added in the range of invention various
Using and deformation.
(symbol description)
1 sheeting separator
10 sheetings
The sheeting of 10a top layers
Other sheetings of 10b
11 holes
20 storage boxes
22 position restriction mechanisms
The positions 22a banking pin
30 attract nozzle
31 suction ports
31a pressure reduction spaces
33 springs
40 attract nozzle moving mechanism
41 horizontal cylinders
42 sliding bearings
43 hold component
50 sheeting unloading devices
51 adsorption plates
51a notches
52 adsorption plate mobile mechanisms
56 drive upside down mechanism
61 (61a) injection nozzles
The gaps AS.
Claims (7)
1. a kind of sheeting separation method, the composite wafer material for will be stacked on storage box divides in order from top layer
From the storage box is with multiple positions for the position of the sheeting with multiple holes to be maintained to specified position
Limiting mechanism, which is characterized in that have：
Nozzle attracts process, in the nozzle attracts process, is mutually spaced apart using from the stacking direction of the sheeting
Defined interval is arranged and has respectively multiple attraction nozzles of the container-like suction port equipped with pressure reduction space, attracts described thin
The sheeting of top layer in sheet material makes the sheeting of the top layer become towards the pressure reduction space of the suction port
Shape, and make to generate gap between the sheeting of the top layer and other sheetings immediately below it；
Nozzle mobile process in the state of attracting the sheeting of the top layer, makes multiple in the nozzle mobile process
It is described attract nozzle moved in the direction along the main surface of the sheeting and make it is multiple it is described attract nozzles between away from
From becoming smaller, in other regions different from the region attracted by the attraction nozzle, make sheeting and the institute of the top layer
It states and generates gap between other sheetings；And
Removal process picks up the sheeting of the top layer in the removal process, and by the fine sheet of the top layer
Material is detached from other described sheetings and is taken out,
The storage box has multiple position banking pins, and multiple position banking pin is distinguished as multiple position restriction mechanisms
Multiple holes of the sheeting are inserted into,
When from the stacking direction of the sheeting, in the nozzle mobile process so that between multiple attraction nozzles
The position of the attraction nozzle of the mode that becomes smaller of distance when the attraction nozzle being made to move be by connecting multiple positions
The inside in the region that the imaginary line of banking pin surrounds.
2. sheeting separation method as described in claim 1, which is characterized in that in the nozzle mobile process and described take
Go out between process, has the work for making the attraction nozzle move that multiple distances attracted between nozzle is made to return to original sample
Sequence.
3. a kind of sheeting separator, for the composite wafer material of stacking to be detached in order from top layer, feature
It is have：
Storage box, the storage box accommodate sheeting in the state of stacking sheeting, and with can will be described thin from top
The mode that sheet material is taken out is constituted；
Multiple attraction nozzles, multiple attraction nozzle are mutually spaced apart defined interval from the stacking direction of the sheeting
It is arranged, and has the container-like suction port equipped with pressure reduction space respectively, in the sheeting for making the suction port and top layer
When abutting and being attracted, multiple attraction nozzle makes the sheeting of the top layer towards the pressure reduction space of the suction port
Deformation, and make to generate gap between the sheeting of the top layer and other sheetings immediately below it；
Nozzle moving mechanism, the attraction nozzle moving mechanism is attracted to make in the state of attracting the sheeting of the top layer
Between multiple attraction nozzles move in the direction along the main surface of the sheeting and make multiple attraction nozzles
Distance become smaller, from different other regions in region for being attracted by the attraction nozzle, make the sheeting of the top layer
Gap is generated between other described sheetings；And
Sheeting unloading device, the sheeting unloading device pick up the sheeting of the top layer, and by described in most
The sheeting on upper layer is detached from other described sheetings and is taken out,
The sheeting has multiple holes,
The storage box has multiple position banking pins, and multiple position banking pin is as by the position of the sheeting
The position restriction mechanism for being maintained at specified position is inserted into multiple holes of the sheeting respectively,
The attraction nozzle moving mechanism is configured to, and makes multiple attraction nozzles movements, with from the stacking of the sheeting
Direction multiple areas for attracting the position of nozzle as the imaginary line encirclement by connecting multiple position banking pins when observing
The inside in domain.
4. sheeting separator as claimed in claim 3, which is characterized in that the unloading device of the sheeting be with
The mode of nozzle is attracted to constitute described in dual-purpose.
5. sheeting separator as claimed in claim 4, which is characterized in that use the mechanism for the structure for having adsorption plate
As the sheeting unloading device, the adsorption plate can adsorb and keep the main portion of the main surface of the sheeting
Point.
6. the sheeting separator as described in any one of claim 3 to 5, which is characterized in that have multiple injection sprays
Mouth, sheeting of multiple injection nozzle from the side side of the sheeting towards the top layer with described other are thin
The gap injection air formed between sheet material.
7. sheeting separator as claimed in claim 6, which is characterized in that at least one in multiple injection nozzles
Part be by from the side side of the sheeting via the gap and towards the position restriction mechanism in a manner of constituted
's.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-185114 | 2014-09-11 | ||
| JP2014185114 | 2014-09-11 | ||
| PCT/JP2015/072079 WO2016039045A1 (en) | 2014-09-11 | 2015-08-04 | Sheet separation method and device therefor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106660722A CN106660722A (en) | 2017-05-10 |
| CN106660722B true CN106660722B (en) | 2018-10-19 |
Family
ID=55458804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580038140.0A Active CN106660722B (en) | 2014-09-11 | 2015-08-04 | Sheeting separation method and its device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6332464B2 (en) |
| CN (1) | CN106660722B (en) |
| WO (1) | WO2016039045A1 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7154865B2 (en) * | 2018-08-01 | 2022-10-18 | 日本メクトロン株式会社 | Sheet take-out device and method for manufacturing flexible printed circuit board |
| JP6993945B2 (en) * | 2018-08-02 | 2022-01-14 | 日立チャネルソリューションズ株式会社 | Paper leaf handling device and paper leaf handling method |
| JP6944715B2 (en) * | 2018-08-13 | 2021-10-06 | 押尾産業株式会社 | Transport device |
| CN109795759A (en) * | 2019-01-29 | 2019-05-24 | 惠州市华星光电技术有限公司 | Panel solution bag apparatus and panel unpacking method |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP6332464B2 (en) | 2018-05-30 |
| WO2016039045A1 (en) | 2016-03-17 |
| CN106660722A (en) | 2017-05-10 |
| JPWO2016039045A1 (en) | 2017-04-27 |
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