CN106653658A - Cover plate applied to wet process equipment - Google Patents
Cover plate applied to wet process equipment Download PDFInfo
- Publication number
- CN106653658A CN106653658A CN201611216388.4A CN201611216388A CN106653658A CN 106653658 A CN106653658 A CN 106653658A CN 201611216388 A CN201611216388 A CN 201611216388A CN 106653658 A CN106653658 A CN 106653658A
- Authority
- CN
- China
- Prior art keywords
- nut
- bolt
- cover plate
- wet method
- method equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 37
- 238000009833 condensation Methods 0.000 abstract description 10
- 230000005494 condensation Effects 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 2
- 238000007790 scraping Methods 0.000 abstract 5
- 238000001039 wet etching Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B35/00—Screw-bolts; Stay-bolts; Screw-threaded studs; Screws; Set screws
- F16B35/04—Screw-bolts; Stay-bolts; Screw-threaded studs; Screws; Set screws with specially-shaped head or shaft in order to fix the bolt on or in an object
- F16B35/06—Specially-shaped heads
Abstract
A cover plate applied to wet process equipment comprises a cover body, a bolt, a first nut, a second nut and a scraping plate, wherein a head of the bolt is arranged at an outer side of the cover plate body, the scraping plate and a screw rod of the bolt are arranged at an inner side of the cover plate body, the first nut, the second nut and the scraping plate sleeve the screw rod of the bolt, and the scarping plate is arranged between the first nut and the second nut. When a demand is required, the head of the bolt is lifted, the bolt is rotated, moisture condensation on the cover plate body is scraped, the cover plate is simple and convenient, and power saving and environment friendliness are saved; a groove is formed in the center of the scraping plate, the depth of the groove is higher than the heights of the nuts, and the influence of the nuts on the condensation scarping effect of the scraping plate is prevented; and the head of the bolt is arranged in a hexagonal shape, and the bolt is convenient to lift and rotate.
Description
Technical field
The present invention is applied in LCD industries, is related to a kind of equipment of wet method cover plate.Specifically it is used to improve with regard to a kind of
The equipment of wet method cover plate condensation.
Background technology
In current LCD industry, wet etching equipment includes cover plate, when cover plate is designed, it is main consider it is following some：1st, prevent
Only liquid splash goes out wet etching equipment；2nd, environment in wet etching equipment is kept to stablize；3rd, the safety of personnel is ensured.Cause
This, in current LCD industry, wet method equipment deck design is：One piece of common PVC board, and the induction apparatuss for being arranged on PVC board surrounding
(Sensor), PVC board is used to cover wet method equipment, prevents the impact of liquid splash and outer bound pair equipment, keeps equipment internal ring
Border is stablized, and induction apparatuss are used to prevent from artificially raising cover plate, timely automated closing cover plate.But it is this design have one it is very bright
Aobvious problem：Cover plate condenses.
And cover plate condensation can cause very serious impact：Because in process of production, engineer needs to confirm internal unit
Situation, whether such as nozzle (Nozzle) have a blocking, and whether substrate transmission normal etc..And due to the impact of cover plate condensation,
The situation that cannot see device interior is caused, quality or unit exception occur cannot find in time, cause loss to expand.
The content of the invention
It is an object of the invention to improve the situation of wet method equipment cover plate condensation, the condensation inside cover plate is removed in time, make
Obtaining engineer can clearly confirm the internal state of wet method equipment, understand device interior situation, and designing one kind can strike off knot
The cover plate of dew.
The object of the invention to solve the technical problems employs the following technical solutions realization.
A kind of cover plate for being applied to wet method equipment, including cover board body, bolt, the first nut, the second nut and scraper plate；
Cover plate described in bolt-through, and the head of the bolt is arranged on the spiral shell of cover board body outside, scraper plate and bolt
Bar is located at cover board body inner side；
First nut, scraper plate and the second nut are sleeved on successively on the screw rod of bolt.
The object of the invention to solve the technical problems can also be realized using following technical measures.
The described cover plate for being applied to wet method equipment, wherein, the scraper plate central authorities be provided with for place the first nut or
The groove of the second nut, the opening of the groove is towards cover board body.
The described cover plate for being applied to wet method equipment, wherein, pass through screw rod first is provided with described groove and is led to
Hole.
The described cover plate for being applied to wet method equipment, wherein, the depth of the groove is more than the first nut or the second nut
Highly.
The described cover plate for being applied to wet method equipment, wherein, the chi of the size of the groove and nut placed within
It is very little identical.
The described cover plate for being applied to wet method equipment, wherein, the screw rod is provided with thread segment, the length of the thread segment
For 1/3rd of screw rod total length, and the thread segment is positioned close to the position of screw rod tail.
The described cover plate for being applied to wet method equipment, wherein, the length of the thread segment more than the first nut height, the
The height of two nuts and the summation of scraper thickness.
The described cover plate for being applied to wet method equipment, wherein, the head of the bolt is regular hexagon.
The described cover plate for being applied to wet method equipment, wherein, being provided with the cover board body passes through the screw rod of bolt
The second through hole.
The described cover plate for being applied to wet method equipment, wherein, also including the knob for rotor segment, the knob is arranged
In bolt head.
The present invention has advantages below and beneficial effect：When needing, bolt head is lifted, swivel bolt, scraper plate will be covered
Condensation on plate is scraped off.The height of the groove arranged in scraper plate central authorities so can more than the height of the first nut and the second nut
Make scraper plate fully and cover plate is combined, fully hang dew；
By the head of bolt be set to hexagon can convenient use person lift and rotate；
The cover plate for being applied to wet method equipment of the present invention is manual operation, installs simple, easy to use, energy-conserving and environment-protective.
Description of the drawings
Hereinafter the present invention will be described in more detail based on embodiment and refer to the attached drawing.Wherein：
Fig. 1 is the use state schematic diagram of the cover plate that the present invention is applied to wet method equipment.
Fig. 2 is another use state schematic diagram of the cover plate that the present invention is applied to wet method equipment.
In the accompanying drawings, identical part uses identical reference.Accompanying drawing is not according to actual ratio.
Specific embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in figure 1, the present invention is with regard to a kind of cover plate for being applied to wet method equipment：Including the bolt on cover board body 2
1st, the first nut 4, the second nut 5 and scraper plate 3；
The stud of bolt 1 runs through cover plate 2, and the head of bolt 1 is located at the screw rod of the outside of cover board body 2, scraper plate 3 and bolt 1
Positioned at the inner side of cover board body 3；
First nut 4, the second nut 5 and scraper plate 3 are sleeved on the screw rod of bolt 1, and the scraper plate 3 is arranged on described
Between first nut 4 and the second nut 5.
The central authorities of the scraper plate 3 be provided with for place the first nut groove 6, the opening of the groove 6 towards cover plate, if
Putting groove 6 prevents the first nut from affecting the use of scraper plate.
The first through hole (not drawing out in figure) for passing through the screw rod of bolt is provided with described groove 6.
The depth of the groove 6 is more than the first nut or the second height of nut.So arranging can enable scraper plate effective
And cover board body contact, abundant cleaning condensation.
The size of the groove 6 is identical with the first nut 4 and the second nut 5, and such design can enable nut
It is placed in groove, the use length that scraper plate can be made again is not affected.
Thread segment is provided with the screw rod of the nut 6, described screw thread segment length is 1/3rd of screw rod total length,
And the thread segment is positioned close to the position of screw rod tail.
The length of the thread segment is more than the total of height, the height of the second nut 5 and the thickness of scraper plate 3 of the first nut 4
With.
First nut 4 is identical with the size of the second nut 5.
The head of the bolt 1 is regular hexagon.So arrange can be to lift scraper plate and rotation during the use of convenient use person
Turn scraper plate.
The second through hole for passing through bolt 1 is provided with the cover plate 2.
The described cover plate for being applied to wet method equipment, wherein, also including the knob for rotor segment, the knob is arranged
In bolt head.
The diameter of the second through hole that bolt 1 passes through of making on the cover board body is identical with the diameter of the screw rod of bolt, institute
State and the first through hole for passing through the screw rod of bolt is provided with groove 6, the diameter phase of the diameter of first through hole and the screw rod of screw rod
Together, can so avoid that aperture is excessive to cause to be subjected to displacement in horizontal direction.
During installation, by the screw rod of bolt 1 through the second through hole being arranged on cover board body 2, the first nut rotation 4 is gone to
On the screw rod of bolt 1, until rotating to screw thread near the edge of bolt head side, then tighten.
Then scraper plate is sleeved on the screw rod of bolt 1, finally the second nut 5 is rotated to the screw rod of bolt, until
It is adjacent to scraper plate.
When not working, the head of bolt 1 is positioned on cover board body 2 and is contacted with cover board body 2, the first nut 4, scrapes
The nut 5 of plate 3 and second is naturally drooped because of gravity.
As shown in Fig. 2 the use state of the cover plate of wet method equipment is applied to for the present invention with reference to figure
During work, lift the head of bolt 1, make scraper plate 3 be adjacent to cover board body 2, the head of swivel bolt 1, until completing knot
The cleaning of dew.Then bolt head is placed on cover board body naturally, completes to scrape dew operation.Bolt head is lifted, is rotated
Bolt, scrapes off the condensation on cover board body, such to be set to manual operation, installs simple and convenient, power saving environmental protection.
In scraper plate central authorities, groove is set, and depth of groove is more than height of nut, it is to avoid nut affects scraper plate to scrape dew effect.
Rotation when using for convenience, also can be formulated with knob in the head of bolt 1, and knob is sleeved on positive the six of bolt
In the forming head portion of side, coordinate rotation.
The central authorities of the knob are provided with the hexagon mating holes for being engaged with bolt head, when using, by six sides
Shape mating holes is arranged on bolt head, rotary knob, completes to scrape dew operation.
The height of the groove that the present invention is arranged in scraper plate central authorities so can more than the height of the first nut and the second nut
Make scraper plate fully and cover plate is combined, fully scrape dew；
By the head of bolt be set to hexagon can convenient use person lift and rotate；
The cover plate for being applied to wet method equipment of the present invention is manual operation, installs simple, easy to use, energy-conserving and environment-protective.
Although by reference to preferred embodiment, invention has been described, in the situation without departing from the scope of the present invention
Under, various improvement can be carried out to it and part therein can be replaced with equivalent.Especially, as long as there is no structure punching
Prominent, the every technical characteristic being previously mentioned in each embodiment can combine in any way.The invention is not limited in text
Disclosed in specific embodiment, but including all technical schemes for falling within the scope of the appended claims.
Claims (10)
1. a kind of cover plate for being applied to wet method equipment, it is characterised in that the cover plate include cover board body, bolt, the first nut,
Second nut and scraper plate；
Cover board body described in bolt-through, and the head of the bolt is arranged on the spiral shell of cover board body outside, scraper plate and bolt
Bar is located at cover board body inner side；
First nut, scraper plate and the second nut are sleeved on successively on the screw rod of bolt, and the scraper plate can relatively described cover plate
Body rotates in horizontal plane.
2. the cover plate for being applied to wet method equipment according to claim 1, it is characterised in that：The scraper plate central authorities are provided with use
In the groove for placing the first nut or the second nut, the opening of the groove is towards cover board body.
3. the cover plate for being applied to wet method equipment according to claim 2, it is characterised in that：Being provided with the groove makes spiral shell
The first through hole that bar passes through.
4. the cover plate for being applied to wet method equipment according to claim 2, it is characterised in that：The depth of the groove is more than the
The height of one nut or the second nut.
5. the cover plate for being applied to wet method equipment according to claim 2, it is characterised in that：The shape of the groove and placement
The first nut or the shape of the second nut in the inner is identical.
6. the cover plate for being applied to wet method equipment according to any one of claim 1 to 5, it is characterised in that：On the screw rod
Thread segment is provided with, the length of the thread segment is 1/3rd of screw rod total length, and the thread segment is positioned close to screw rod
The position of afterbody.
7. the cover plate for being applied to wet method equipment according to claim 6：Characterized in that, the length of the thread segment is more than
The summation of the height of the first nut, the height of the second nut and scraper thickness.
8. the cover plate for being applied to wet method equipment according to claim 1：It is characterized in that：The head of the bolt is positive six
Side shape.
9. the cover plate for being applied to wet method equipment according to claim 1, it is characterised in that：It is provided with the cover board body
The second through hole for passing through the screw rod of bolt.
10. the cover plate for being applied to wet method equipment according to claim 1, it is characterised in that：Also include for rotor segment
Knob, the knob is arranged on bolt head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611216388.4A CN106653658B (en) | 2016-12-26 | 2016-12-26 | Cover plate applied to wet process equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611216388.4A CN106653658B (en) | 2016-12-26 | 2016-12-26 | Cover plate applied to wet process equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106653658A true CN106653658A (en) | 2017-05-10 |
| CN106653658B CN106653658B (en) | 2019-12-31 |
Family
ID=58827962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611216388.4A Active CN106653658B (en) | 2016-12-26 | 2016-12-26 | Cover plate applied to wet process equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106653658B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109585331A (en) * | 2017-09-29 | 2019-04-05 | 台湾积体电路制造股份有限公司 | Integrated circuit production system with adjustable gas injector |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2900525Y (en) * | 2006-04-12 | 2007-05-16 | 唐山钢铁股份有限公司 | Down loading scraper machine for coke cooling platform |
| KR20070071300A (en) * | 2005-12-30 | 2007-07-04 | 박준석 | Double sexangle screw |
| CN201237438Y (en) * | 2008-05-27 | 2009-05-13 | 宝山钢铁股份有限公司 | Triangular scraping board apparatus for sintering device |
| CN104966690A (en) * | 2015-07-24 | 2015-10-07 | 京东方科技集团股份有限公司 | Etching device and application method therefor |
-
2016
- 2016-12-26 CN CN201611216388.4A patent/CN106653658B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070071300A (en) * | 2005-12-30 | 2007-07-04 | 박준석 | Double sexangle screw |
| CN2900525Y (en) * | 2006-04-12 | 2007-05-16 | 唐山钢铁股份有限公司 | Down loading scraper machine for coke cooling platform |
| CN201237438Y (en) * | 2008-05-27 | 2009-05-13 | 宝山钢铁股份有限公司 | Triangular scraping board apparatus for sintering device |
| CN104966690A (en) * | 2015-07-24 | 2015-10-07 | 京东方科技集团股份有限公司 | Etching device and application method therefor |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109585331A (en) * | 2017-09-29 | 2019-04-05 | 台湾积体电路制造股份有限公司 | Integrated circuit production system with adjustable gas injector |
| CN109585331B (en) * | 2017-09-29 | 2020-11-20 | 台湾积体电路制造股份有限公司 | Semiconductor manufacturing apparatus and method for semiconductor manufacturing |
| US11043388B2 (en) | 2017-09-29 | 2021-06-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit fabrication system with adjustable gas injector and method utilizing the same |
| US11670490B2 (en) | 2017-09-29 | 2023-06-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit fabrication system with adjustable gas injector |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106653658B (en) | 2019-12-31 |
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| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
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| GR01 | Patent grant |