CN106645211B - For correcting the detection jig and method of the scanning sensor of dry ecthing board - Google Patents
For correcting the detection jig and method of the scanning sensor of dry ecthing board Download PDFInfo
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- CN106645211B CN106645211B CN201611235859.6A CN201611235859A CN106645211B CN 106645211 B CN106645211 B CN 106645211B CN 201611235859 A CN201611235859 A CN 201611235859A CN 106645211 B CN106645211 B CN 106645211B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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Abstract
The invention discloses a kind of for correcting the detection jig and method of the scanning sensor of dry ecthing board.The detection jig of scanning sensor provided by the present invention for correcting dry ecthing board includes the detection carrier for passing in and out the transmission cavity of dry ecthing board, and it is mounted on the transparent detection plate on detection carrier, the material of the transparent detection plate is acrylic board, the structure size of the transparent detection plate and the scanning area of the scanning sensor above the transmission cavity of installation site and dry ecthing board on detection carrier are adapted, by replacing traditional glass substrate with transparent detection plate, the damage of glass substrate is effectively prevented, and shortens the improvement time.The method of the scanning sensor of correction dry ecthing board provided by the invention is by comparing the first signal value A, second signal value B, and the reference value C of dry ecthing board, it can effectively differentiate whether scanning sensor needs to correct, and correcting process can be simplified, shorten the improvement time.
Description
Technical field
The present invention relates to the scanning sensor technical fields of correction dry ecthing board, especially a kind of for correcting dry ecthing
The detection jig and method of the scanning sensor of board.
Background technique
Currently, dry ecthing board (Dry Etcher) is widely used in the processing and making process of glass substrate, glass
Glass substrate is that (Thin Film Transistor-Liquid Crystal Display, tft liquid crystal are aobvious by TFT-LCD
Show device) important component of panel.
Firstly, glass substrate is by transmission cavity and is sent in the processing chamber of dry ecthing board, glass substrate exists
Processing is etched in the processing chamber (Process Chamber) of dry ecthing board；Glass substrate processing procedure in the process chamber
It finishes and then is run carrier to be transmitted back in the transmission cavity of dry ecthing board, generally in the transmission cavity of dry ecthing board
The two sides of top surface one scanning sensor is respectively set, when glass substrate is scanned the scanning area of sensor, by sweeping
Retouch whether the glass substrate after sensor inspection process finishes has breakage, for example detection glass substrate whether there is unfilled corner.
Scanning sensor is it sometimes appear that detect inaccurate phenomenon, so needing the testing result of running check scanning sensor whether quasi-
Really, it and is corrected.
Traditional antidote is to be adjusted using glass substrate to scanning sensor, and there are following two for this method
Disadvantage: first is that the damage of glass substrate is easily caused, to cause the serious waste of material；Second is that being adjusted using glass substrate
When whole, time-consuming for manual manipulation glass substrate, influences the normal working hour of dry ecthing board.
For these reasons, it is necessary to provide a kind of detection jig for correcting the scanning sensor of dry ecthing board and
Method.
Summary of the invention
The invention mainly solves the technical problem of providing a kind of for correcting the inspection of the scanning sensor of dry ecthing board
Using intensity biggish acrylic board production breakage will not occur for measurement fixture and method, the transparent detection plate of the detection jig, and
Size is smaller, and easy to carry and installation will not occupy the working time of too many dry ecthing board to the correction of dry ecthing board.Solution
Correction is certainly carried out to the scanning sensor of dry ecthing board using glass substrate in the prior art and be easy to cause the broken of glass substrate
The problem of damage and influence activity duration.
In order to solve the above technical problems, an aspect of of the present present invention be to provide it is a kind of for correcting the scanning of dry ecthing board
The jig of sensor, which includes the detection carrier for passing in and out the transmission cavity of dry ecthing board, and is mounted on the inspection
Survey carrier on transparent detection plate, the material of the transparent detection plate is acrylic board, and the structure size of the transparent detection plate and
The scanning area of scanning sensor above the transmission cavity of installation site and dry ecthing board on the detection carrier is mutually fitted
Match.
In another embodiment of the detection jig of scanning sensor of the present invention for correcting dry ecthing board, the inspection
Survey the transmission being used for as bearing glass substrate in dry ecthing board that carrier is mounted in the driving device of dry ecthing board
The operation carrier moved in cavity.
In another embodiment of the detection jig of scanning sensor of the present invention for correcting dry ecthing board, the fortune
Row carrier includes equally distributed multiple branch arms, in the branch arm in the outside which is connected to the operation carrier,
The outer edge of the transparent detection plate is placed on the outer edge of the operation carrier to the distance and glass substrate of the branch arm on the outside of this
The distance of branch arm on the outside of to this is identical.
In another embodiment of the detection jig of scanning sensor of the present invention for correcting dry ecthing board, this is thoroughly
Clamping structure of the one side edge setting of bright detection plate for being connected to the transparent detection plate in the operation carrier.
In another embodiment of the detection jig of scanning sensor of the present invention for correcting dry ecthing board, the card
Binding structure is the card slot to match with the branch arm in the outside of the operation carrier, and the card slot is by two interval verticals in the transparent inspection
The side plate of the surface setting of drafting board is constituted, and two side plates and the transparent detection plate are integrally formed and are arranged.
In another embodiment of the detection jig of scanning sensor of the present invention for correcting dry ecthing board, the inspection
Barb is provided with beyond separate transparent detection plate of two of the measurement fixture side plates.
In another embodiment of the detection jig of scanning sensor of the present invention for correcting dry ecthing board, this is thoroughly
The length of bright detection plate is less than the length of dry ecthing board glass substrate detected.
In another embodiment of the detection jig of scanning sensor of the present invention for correcting dry ecthing board, this is thoroughly
Bright detection plate with a thickness of 1mm, the width range of the transparent detection plate is 100mm~300mm, length range be 300mm~
500mm。
In order to solve the above technical problems, another aspect of the present invention is to provide a kind of detection jig being somebody's turn to do to dry etcher
The scanning sensor of platform is corrected, specifically includes the following steps:
The operation carrier is mounted in the driving device of dry ecthing board, and the transparent detection plate is connected to the operation
On carrier, the driving device of operation dry ecthing board drives the operation carrier mobile, and the transparent detection plate is made gradually to move and lead to
The scanning area of the scanning sensor of overdrying etching machine；
Before the transparent detection plate is by the scanning area of the scanning sensor of dry ecthing board, dry ecthing board is swept
It retouches sensor and generates the first signal value A, and first signal value A is recorded by the controller of dry ecthing board；It is transparent at this
When detection plate passes through the scanning area of the scanning sensor of dry ecthing board, the scanning sensor of dry ecthing board generates the second letter
Number value B, and second signal value B is recorded by the controller of dry ecthing board；
The reference value C that the first signal value A and second signal value B is set with the controller by dry ecthing board
It is compared,
If the first signal value A is greater than reference value C and reference value C is greater than second signal value B, which is passed
Sensor is normal,
If being unsatisfactory for the first signal value A greater than reference value C and reference value C being greater than second signal value B, until
It takes one of following measures correct to normally to the scanning sensor of dry ecthing board less: checking dry ecthing board
Transmit the transmission cavity of the transparent panel of cavity top surface, the reflector of the transmission inside cavity of dry ecthing board and dry ecthing board
It is dirty whether the surface of the light emitting source above body has, and if there is dirty, then cleans out；Replace the scanning sensing of dry ecthing board
Device；Adjust the angle between the light emitting source and the reflector；Reference value C is reset.
The beneficial effects of the present invention are: the detection of the scanning sensor provided by the present invention for correcting dry ecthing board is controlled
Tool includes the detection carrier of the transmission cavity of disengaging dry ecthing board, and is mounted on the transparent detection plate detected on carrier, should
Transparent detection plate is made of acrylic board, and the structure size of transparent detection plate and installation site on detection carrier and dry
The scanning area of scanning sensor above the transmission cavity of etching machine is adapted.It is traditional by being replaced with transparent detection plate
Glass substrate corrects scanning sensor, effectively prevents the damage of glass substrate, while also shortening the improvement time, avoids delaying dry
The normal operation of etching machine.Before scanning area by comparing the scanning sensor that transparent detection plate passes through dry ecthing board
When the scanning area for the scanning sensor that the first signal value A of scanning sensor generation, transparent detection plate pass through dry ecthing board
The reference value C of the controller setting for the second signal value B and dry ecthing board that scanning sensor generates, can effectively differentiate
Whether scanning sensor, which needs, is corrected, and can simplify correcting process, shortens the improvement time.
Detailed description of the invention
Fig. 1 is the schematic diagram that glass substrate is placed in the operation carrier of dry ecthing board；
Fig. 2 is the signal that the operation carrier drive glass substrate of dry ecthing board enters the transmission cavity of dry ecthing board
Figure；
Fig. 3 is the schematic diagram of the detection jig embodiment 1 of scanning sensor of the present invention for correcting dry ecthing board；
Fig. 4 is that detection of the present invention in the detection jig embodiment 1 for the scanning sensor for correcting dry ecthing board is controlled
Tool enters the schematic diagram of the transmission cavity of dry ecthing board；
Fig. 5 is the portion the A enlarged drawing in Fig. 4；
Fig. 6 is the transparent inspection in the detection jig embodiment 1 of scanning sensor of the present invention for correcting dry ecthing board
The perspective view of drafting board；
Fig. 7 is the present invention for transparent detection in the detection jig embodiment 1 for the scanning sensor for correcting dry ecthing board
The schematic diagram of another arrangement of the plate in operation carrier；
Fig. 8 is the present invention for transparent detection in the detection jig embodiment 2 for the scanning sensor for correcting dry ecthing board
The perspective view of plate；
Fig. 9 is the schematic diagram of the detection jig embodiment 3 of scanning sensor of the present invention for correcting dry ecthing board；
Figure 10 is the flow diagram of the detection method of scanning sensor of the present invention for correcting dry ecthing board.
Specific embodiment
To facilitate the understanding of the present invention, in the following with reference to the drawings and specific embodiments, the present invention will be described in more detail.
A better embodiment of the invention is given in the attached drawing.But the invention can be realized in many different forms, and unlimited
In this specification described embodiment.On the contrary, purpose of providing these embodiments is makes to the disclosure
Understand more thorough and comprehensive.
It should be noted that unless otherwise defined, all technical and scientific terms used in this specification with belong to
The normally understood meaning of those skilled in the art of the invention is identical.Used term in the description of the invention
It is the purpose in order to describe specific embodiment, is not intended to the limitation present invention.
It please refers to shown in Fig. 1 and Fig. 2, current method is: choosing the operation load that 1 sheet glass substrate is put in dry ecthing board
On body, manual operation operation carrier enters and exits the transmission cavity of dry ecthing board, thus judges scanning sensor
Whether testing result is accurate, and is corrected.As shown in Figure 1, operation carrier is arranged in 1 front end of driving device of dry ecthing board
2, operation carrier 2 is made of the branch arm 201 of four root long strips, and the length L21 of branch arm 201 is 2396mm, branch arm 201
Width W22 is 60mm, chooses one piece of glass substrate 3 and is adjusted to scanning sensor, wherein the length L31 of glass substrate 3 is
1850mm, the width W32 of glass substrate 3 are 1500mm, the distance M33 of the nearest branch arm 201 of the Edge Distance of glass substrate 3
For 170mm, O-ring 203 is set in branch arm 201, O-ring 203 is soft rubber material, under the action of O-ring 203,
Glass substrate 3 with branch arm 201 is soft contacts, the movement of operation carrier 2 drives glass substrate 3 to enter the transmission cavity of dry ecthing board
In body, and by the scanning area of scanning sensor, scanning sensor detects the edge of glass substrate 3, according to detection
As a result, judging whether to need to correct.
As shown in Fig. 2, the top of the transmission cavity 4 of dry ecthing board is arranged in scanning sensor 5, the top of cavity 4 is transmitted
Be additionally provided with light emitting source 6 on face 401, top surface 401 be it is transparent, the detection light that light emitting source 6 issues can pass through top surface 401, pass
It send and is provided with reflector 7 in cavity 4, the light for issuing light emitting source 6 is reflected into scanning sensor 5.
When detecting glass substrate 3, glass substrate 3 is placed on to four root long strips of the operation carrier 2 of dry ecthing board
In branch arm 201, glass substrate 3 enters the transmission cavity 4 of dry ecthing board under the drive of the operation carrier 2 of dry ecthing board
In, the detection light that light emitting source 6 issues successively is irradiated on reflector 7 through the top surface 401 and glass substrate 3 of transmission cavity 4, and
It is reflected afterwards by reflector 7,5 actual sensed of scanning sensor is the reflected light of reflector 7 and obtains to reflection light
Detected signal value.
Currently, glass substrate for commercial applications, primary thickness is 0.7mm and 0.6mm, and will be marched toward thinner
The processing procedure of (such as 0.4mm) thickness.Since glass substrate 3 is very thin, and its area becomes greatly, and glass substrate 3 is easy to damage,
Correction adjustment is carried out to scanning sensor using glass substrate to need to shift from one place to another glass substrate, and transmits the space of cavity
It is limited, and glass substrate area is larger, take whole piece glass substrate to be placed on to be easy to cause in transmission cavity and collide with, so entirely
Correction adjustment process is easy to damage glass substrate.
Embodiment 1
It is controlled also referring to the detection that Fig. 3 to Fig. 7, Fig. 3 are scanning sensor of the present invention for correcting dry ecthing board
Has the schematic diagram of embodiment 1, Fig. 4 is the detection jig embodiment 1 of scanning sensor of the present invention for correcting dry ecthing board
In detection jig enter dry ecthing board transmission cavity schematic diagram, Fig. 5 is the portion the A enlarged drawing in Fig. 4, and Fig. 6 is this hair
The perspective view of transparent detection plate in the bright detection jig embodiment 1 for correcting the scanning sensor of dry ecthing board, Fig. 7 are
Transparent detection plate is in operation carrier in the detection jig embodiment 1 for the scanning sensor that the present invention is used to correct dry ecthing board
Another arrangement schematic diagram.
The detection jig of the scanning sensor for being used to correct dry ecthing board includes the transmission cavity for passing in and out dry ecthing board
The detection carrier of body, and the transparent detection plate 8 being mounted on detection carrier, transparent detection plate 8 are made of acrylic board.
As shown in figure 3, the detection carrier in the present embodiment using the operation carrier 2 of dry ecthing board as detection jig,
In this way, operation carrier 2 includes equally distributed multiple branch arms 201, transparent detection plate 8 is connected to the outside of operation carrier 2
In branch arm, operation carrier 2 drives X-direction transmission of the transparent detection plate 8 in Fig. 3.Using the operation carrier 2 of dry ecthing board
Instead of detecting carrier, the jig is made to be not required to that detection carrier is in addition arranged.
The material of transparent detection plate 8 is acrylic board, and the light transmittance and glass substrate of acrylic board are close, so using should
Detection jig is when correcting scanning sensor, the light transmittance of transparent detection plate 8 close to glass substrate light transmittance, and sub- gram
Power plate intensity is good, is hardly damaged.
As shown in figure 4, the structure size of transparent detection plate 8 and installation site and dry ecthing board in operation carrier 2
The scanning area of scanning sensor 5 of the top of transmission cavity 4 be adapted, i.e., transparent detection plate 8 enters the biography of dry ecthing board
Send the scanning area that scanning sensor 5 is had to pass through in cavity 4.As shown in figure 5, the outer edge of transparent detection plate 8 is carried to operation
Glass substrate 3 is placed on the edge of operation carrier 2 to the branch arm in outside in the distance W2 and Fig. 1 of the branch arm 201 in 2 outside of body
201 distance 303 is identical, in this way, when being corrected to scanning sensor 5, between transparent detection plate 8 and scanning sensor 5
The positional relationship of positional relationship simulation glass substrate 3 and scanning sensor 5, and the thickness of transparent detection plate 8 and transparency and glass
Glass substrate is close, so, after jig correction, scanning sensor can accurately detect glass substrate.
It is preferred scheme with the operation carrier 2 of dry ecthing board substitution detection carrier, in other embodiments, detection carries
Body can be set to other shapes or structure, as long as detection carrier, which is able to drive transparent detection plate 8, passes in and out dry ecthing board
Transmission cavity.It also can satisfy using the other kinds of detection carrier in addition made and scanning sensor 5 rectified
Positive requirement, for example a component identical with detection 201 structure of branch arm of carrier is only set as detection carrier.
As shown in fig. 6, the one side edge of transparent detection plate 8 is arranged for transparent detection plate 8 to be connected to operation carrier 2
Clamping structure, which is the card slot 801 to match with the branch arm 201 of operation carrier 2, and card slot 801 is by between two
It is constituted every the side plate 10 of the surface setting perpendicular to transparent detection plate 8, two side plates 10 are parallel to each other, and card slot 801 is used for will be saturating
Bright 8 level of detection plate is fastened in the operation carrier 2 of detection jig.Two side plates 10 and transparent detection plate 8, which are integrally formed, to be arranged,
Compare fastening on this spline structure, the rupture between transparent detection plate 8 and side plate 10 will not occur easily.
It should be noted that the relationship between card slot 801 and transparent detection plate 8 is not limited to mode shown in fig. 6, as long as card
The operation that transparent detection plate 8 can be fastened on detection jig by the connection relationship and positional relationship of slot 801 and transparent detection plate 8 carries
It on body, and meet the requirements transparent 8 holding level of detection plate can, for example, in other embodiments, the bottom surface of card slot 801
Keep vertical with transparent detection plate 8, card slot 801 is fastened in the short transverse of operation carrier, and setting in this way can also make transparent
Detection plate 8 keeps horizontal.
The purpose for making transparent 8 holding of detection plate level is the laying method for simulating glass substrate in operation carrier 2, glass
Substrate is lain in a horizontal plane in operation carrier 2 before having detected whether breakage, so also wanting when detecting to sensor
Simulate this placement status.
As shown in figure 5, the range of the length D of transparent detection plate 8 is 300mm~500mm, as shown in fig. 6, card slot 801
Width W1 and the width of branch arm 201 are 60mm.
As shown in fig. 7, being corrected in order to two scanning sensors 5 simultaneously to 4 top of transmission cavity, can transport
One piece of transparent detection plate 8 is installed respectively in the branch arm 201 of the two sides of row carrier 2.
The jig passes through replaces traditional glass substrate to correct scanning sensor with transparent detection plate, effectively prevents glass
The damage of substrate, while also shortening the improvement time, avoid the normal operation for delaying dry ecthing board.
Embodiment 2
Referring to Fig. 8, Fig. 8 is the detection jig embodiment 2 of scanning sensor of the present invention for correcting dry ecthing board
In transparent detection plate perspective view.In the present embodiment, detect beyond the separate transparent detection plate 8 of two side plates 10 of jig
It is provided with barb 11, the purpose of setting barb 11 is to fasten card slot 801 more when being fastened on the operation carrier of detection jig, is protected
The horizontally disposed of transparent detection plate 8 is demonstrate,proved, the transparent detection plate of this structure type is needed by the end of the branch arm of operation carrier
It is arranged, and transparent detection plate 8 can be hung upside down in the operation carrier of detection jig.
Embodiment 3
Referring to Fig. 9, Fig. 9 is the detection jig embodiment 3 of scanning sensor of the present invention for correcting dry ecthing board
Schematic diagram.In the present embodiment, the length of transparent detection plate 8 is less than the length of dry ecthing board glass substrate detected, does
When the scanning sensor of etching machine detects glass substrate, glass substrate covers whole service carrier 2 substantially, that is,
4 with branch arm 201 all in the lower section of glass substrate, but transparent detection plate 8 is only 1/50 or so of glass substrate area, transparent inspection
The range of the width W3 of drafting board 8 is 100mm~300mm, and the range of length W4 is 300mm~500mm, transparent detection plate 8
With a thickness of 1mm, the area of transparent detection plate is small, convenient for taking, corrects very convenient.Transparent detection plate 8 is preferably cuboid,
Transparent detection plate 8 simulates glass substrate, smooth surface, and thickness is smaller.
The present invention also provides a kind of sides corrected using above-mentioned detection jig to the scanning sensor of dry ecthing board
Method, referring to Fig. 10, Figure 10 is the process signal of the detection method of scanning sensor of the present invention for correcting dry ecthing board
Figure, specific step is as follows for this method:
Operation carrier is mounted in the driving device of dry ecthing board by step S1, and transparent detection plate is connected to fortune
On row carrier, the driving device of operation dry ecthing board drives operation carrier mobile, moves through transparent detection plate gradually
The scanning area of the scanning sensor of dry ecthing board.
Step S2, before transparent detection plate is by the scanning area of the scanning sensor of dry ecthing board, dry etcher
The scanning sensor of platform generates the first signal value A, passes through the scanning area of the scanning sensor of dry ecthing board in transparent detection plate
When domain, the scanning sensor of dry ecthing board generates second signal value B.Specifically, pass through dry etcher in transparent detection plate
Before the scanning area of the scanning sensor of platform, the scanning sensor of dry ecthing board generates the first signal value A, at this point, shining
The light in source, which is only reflected by reflector, reaches scanning sensor, so the light sensation value of scanning sensor is larger, i.e. the first signal
Value A is larger, then records the first signal value A by the controller of dry ecthing board；Pass through dry ecthing board in transparent detection plate
Scanning sensor scanning area when, the scanning sensor of dry ecthing board generates second signal value B, at this point, light emitting source
Light is needed through transparent detection version, then reaches scanning sensor by reflector reflection light again, so scanning sensor
Light sensation value is smaller, i.e., second signal value B is smaller, records second signal value B by the controller of dry ecthing board.
Step S3, by the preset reference value C of controller of the first signal value A and second signal value B and dry ecthing board
It is compared, and judges whether to meet A > C > B.If A > C > B, scanning sensor is normal, otherwise, if A be less than or equal to C, and/
Or C is less than or equal to B, then scanning sensor is abnormal.
Table 1 is please referred to, table 1 is the parameter for carrying out house of correction record to different scanning sensor using above-mentioned detection jig
Value.
What the first signal value A and second signal value B was represented is the photosensitive value of scanning sensor, is passed through in transparent detection plate dry
Before the scanning area of the scanning sensor of etching machine, the light that the light emitting source above the transmission cavity of dry ecthing board issues is passed
Being sent to scanning sensor can hinder together less, so the first signal value of photosensitive value A of scanning sensor is maximum at this time, and transparent
Light emitting source when detection plate passes through the scanning area of the scanning sensor of dry ecthing board, above the transmission cavity of dry ecthing board
The light of sending, which is transmitted to scanning sensor, mostly to be hindered together, so the photosensitive value of scanning sensor the and signal value B at this time
It is minimum.But the photosensitive value of scanning sensor cannot be too big or too small, otherwise cannot normally detect glass substrate whether there is
The defects of unfilled corner, so to set a reference value C as reference.First signal value A is scanned in no glass substrate and is passed
The size of the influence value of sensor, for the range of A value generally between 2500-3500, reference value C is 300- smaller than the first signal value A
400, so the range of reference value C is 2100-3200.
Table 1
As can be seen from Table 1, when correcting to different scanning sensor, it is big that 6 groups of data all meet the first signal value A
In reference value C and reference value C is greater than second signal value B, illustrates that these scanning sensors are normal.
If scanning sensor is abnormal, at least take one of following measures to the scanning sensor of dry ecthing board
Correct to normal: checking the transparent panel of the transmission cavity top surface of dry ecthing board, the transmission inside cavity of dry ecthing board
Reflector and dry ecthing board transmission cavity above light emitting source surface whether have it is dirty, if there is dirty, then clearly
Reason is clean；Replace the scanning sensor of dry ecthing board；Adjust the angle between light emitting source and reflector；Reference value C is carried out
It resets.
Based on above embodiments, the jig of the scanning sensor provided by the present invention for correcting dry ecthing board include into
The operation carrier of the transmission cavity of dry ecthing board out, and the transparent detection plate being mounted in operation carrier, the transparent detection
Plate is made of acrylic board, the structure size of transparent detection plate and installation site and dry ecthing board in operation carrier
The scanning area of scanning sensor above transmission cavity is adapted.By replacing traditional glass substrate to rectify with transparent detection plate
Positive scanning sensor, effectively prevents the damage of glass substrate, while also shortening the improvement time, avoids delaying dry ecthing board
Normal operation.Scanning sensor before scanning area by comparing the scanning sensor that transparent detection plate passes through dry ecthing board
The scanning sensor when scanning area for the scanning sensor that the first signal value A of generation, transparent detection plate pass through dry ecthing board
The reference value C of the controller setting of the second signal value B and dry ecthing board of generation, can effectively differentiate scanning sensor
Whether need to correct, and correcting process can be simplified, shortens the improvement time.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent transformation made by bright specification and accompanying drawing content, is applied directly or indirectly in other relevant technical fields, and includes
In scope of patent protection of the invention.
Claims (9)
1. a kind of for correcting the detection jig of the scanning sensor of dry ecthing board, which is characterized in that the detection jig packet
The detection carrier of the transmission cavity of disengaging dry ecthing board is included, and the transparent detection plate being mounted on the detection carrier, institute
The material for stating transparent detection plate is acrylic board, the structure size of the transparent detection plate and the installation on the detection carrier
Position is adapted with the scanning area of the scanning sensor above the transmission cavity of the dry ecthing board, and the detection carrier is
It is mounted in the driving device of dry ecthing board and is used to move in the transmission cavity of dry ecthing board as bearing glass substrate
Dynamic operation carrier.
2. according to claim 1 for correcting the detection jig of the scanning sensor of dry ecthing board, which is characterized in that
The operation carrier includes equally distributed multiple branch arms, and the transparent detection plate is connected to the outside of the operation carrier
In branch arm, the distance and glass substrate of branch arm of the outer edge of the transparent detection plate to the outside are placed on the fortune
The outer edge of row carrier to the outside branch arm distance it is identical.
3. according to claim 2 for correcting the detection jig of the scanning sensor of dry ecthing board, which is characterized in that
The clamping knot for being connected to the transparent detection plate in the operation carrier is arranged in the one side edge of the transparent detection plate
Structure.
4. according to claim 3 for correcting the detection jig of the scanning sensor of dry ecthing board, which is characterized in that
The clamping structure is the card slot to match with the branch arm in the outside of the operation carrier, and the card slot is by perpendicular to described
Spaced two side plates in the surface of bright detection plate are constituted, and the side plate and the transparent detection plate are integrally formed.
5. according to claim 4 for correcting the detection jig of the scanning sensor of dry ecthing board, which is characterized in that
The bottom edge of two side plates of the detection jig is provided with barb.
6. it is according to any one of claims 2 to 5 for correcting the detection jig of the scanning sensor of dry ecthing board,
It is characterized in that, the length of the transparent detection plate is less than the length of dry ecthing board glass substrate detected.
7. according to claim 6 for correcting the detection jig of the scanning sensor of dry ecthing board, which is characterized in that
The transparent detection plate with a thickness of 1mm, width range is 100mm~300mm, and length range is 300mm~500mm.
8. a kind of method for correcting the scanning sensor of dry ecthing board, which is characterized in that the method is wanted using right
Detection jig described in asking 7 corrects the scanning sensor of dry ecthing board, specifically includes the following steps:
The transparent detection plate is connected in the operation carrier of the dry ecthing board, operates the driving of dry ecthing board
Device drives the operation carrier mobile, and the transparent detection plate is made to pass through the scanning of the scanning sensor of the dry ecthing board
Region；
Before the transparent detection plate is by the scanning area of the scanning sensor of dry ecthing board, the scanning of dry ecthing board
Sensor generates the first signal value A, and records the first signal value A by the controller of dry ecthing board；Described
When bright detection plate passes through the scanning area of the scanning sensor of dry ecthing board, the scanning sensor of dry ecthing board generates second
Signal value B, and the second signal value B is recorded by the controller of dry ecthing board；
The reference value C that the controller of the first signal value A and second signal value B and dry ecthing board is set is carried out
It compares, if A > C > B, the scanning sensor is normal, otherwise, described if A is less than or equal to C and/or C and is less than or equal to B
Scanning sensor is abnormal.
9. the method according to claim 8 for correcting the scanning sensor of dry ecthing board, which is characterized in that if institute
Scanning sensor exception is stated, then at least takes one of following measures to correct the scanning sensor of dry ecthing board:
Check the transmission transparent panel of cavity top surface of the dry ecthing board, the transmission inside cavity of dry ecthing board it is reflective
It is dirty whether the surface of the light emitting source above the transmission cavity of plate and dry ecthing board has, and if there is dirty, then cleaning is dry
Only；
Replace the scanning sensor of dry ecthing board；
Adjust the angle between the light emitting source and the reflector；
The reference value C is reset.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611235859.6A CN106645211B (en) | 2016-12-28 | 2016-12-28 | For correcting the detection jig and method of the scanning sensor of dry ecthing board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| CN102033073A (en) * | 2010-12-08 | 2011-04-27 | 北大方正集团有限公司 | Method for determining performance of automatic optical detection equipment and standard film |
| CN102144156A (en) * | 2008-09-10 | 2011-08-03 | 夏普株式会社 | Evaluation device, calibration method, calibration program, and recording medium |
| CN102156357A (en) * | 2011-02-25 | 2011-08-17 | 深圳市华星光电技术有限公司 | Automatic optical checking device and correction method thereof |
| CN102435616A (en) * | 2011-09-08 | 2012-05-02 | 上海华力微电子有限公司 | Novel monitoring method of stability of crystal edge detector |
| CN104713584A (en) * | 2013-12-17 | 2015-06-17 | 致茂电子股份有限公司 | Correcting method for optical detecting device |
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| US7848561B2 (en) * | 2005-12-30 | 2010-12-07 | Honeywell International Inc. | Determining capability of an on-line sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102144156A (en) * | 2008-09-10 | 2011-08-03 | 夏普株式会社 | Evaluation device, calibration method, calibration program, and recording medium |
| CN102033073A (en) * | 2010-12-08 | 2011-04-27 | 北大方正集团有限公司 | Method for determining performance of automatic optical detection equipment and standard film |
| CN102156357A (en) * | 2011-02-25 | 2011-08-17 | 深圳市华星光电技术有限公司 | Automatic optical checking device and correction method thereof |
| CN102435616A (en) * | 2011-09-08 | 2012-05-02 | 上海华力微电子有限公司 | Novel monitoring method of stability of crystal edge detector |
| CN104713584A (en) * | 2013-12-17 | 2015-06-17 | 致茂电子股份有限公司 | Correcting method for optical detecting device |
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