CN106643497B - The Micro-dimension detection method of random reconstruct Micro-dimension detection device based on magnetic fluorescent microspheres - Google Patents
The Micro-dimension detection method of random reconstruct Micro-dimension detection device based on magnetic fluorescent microspheres Download PDFInfo
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- CN106643497B CN106643497B CN201611228129.3A CN201611228129A CN106643497B CN 106643497 B CN106643497 B CN 106643497B CN 201611228129 A CN201611228129 A CN 201611228129A CN 106643497 B CN106643497 B CN 106643497B
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- fluorescent microspheres
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- 239000004005 microsphere Substances 0.000 title claims abstract description 51
- 238000001514 detection method Methods 0.000 title claims abstract description 20
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 238000005259 measurement Methods 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 10
- 239000002245 particle Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000005284 excitation Effects 0.000 abstract description 3
- 230000007812 deficiency Effects 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 37
- 238000004804 winding Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000011806 microball Substances 0.000 description 2
- 239000012472 biological sample Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001298 force spectroscopy Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000010358 mechanical oscillation Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Random reconstruct Micro-dimension detection device and method based on magnetic fluorescent microspheres, belongs to production piece Micro-dimension detection field, in order to solve the deficiencies in the prior art place.Excitation light beam is to dichroscope, exciting light light beam is enabled to irradiate magnetic fluorescent microspheres through object lens, and it is made to launch magnetic field strength and magnetic direction that fluorescence repeatedly changes two layers of controllable magnetic pole at random, so that generating random changing magnetic field in sample room, magnetic fluorescent microspheres random movement in solution is controlled；The picture of several different moments fluorescence hot spots is acquired using CCD, magnetic fluorescent microspheres are obtained along the position of optical axis axial direction according to the light distribution of hot spot, magnetic fluorescent microspheres are obtained along the position of optical axis radial direction according to the position of hot spot, carry out image reconstruction, sample message is obtained, the dimensional measurement of sample is completed.The present invention is suitable for chemistry and field of biomedicine.
Description
Technical field
The invention belongs to production piece Micro-dimension detection fields, relate generally to a kind of random weight based on magnetic fluorescent microspheres
Structure Micro-dimension detection method.
Background technique
Magnetic fluorescent microspheres are mainly used in chemistry and field of biomedicine at present, are usually used in the purification of biological sample, carefully
Born of the same parents' separation and single molecule force spectroscopy etc., and the present invention measures magnetic fluorescent microspheres applied to production piece size three-dimensional.
Presently the most effective micro-dimension production piece method for three-dimensional measurement is to utilize miniature three coordinate measuring machine and contact
Formula probe sensor-based system combines to measure.The measurement method measuring principle is that external movement mechanism drives probe to contact quilt
It surveys part and generates touching survey signal, probe sensor-based system detects the signal, and records the position coordinates of probe gauge head at this time.According to
This experimentation replacement position measures again, finally obtains a large amount of probe location coordinates, is fitted weight to position coordinates
Structure obtains the three-dimensional dimension information of measured workpiece.
Bibliography (nanometer coordinate measuring system [D] University Of Tianjin of the super of Wu Zhi based on three-dimensional micro-touch gauge head,
2011.) current situation of nanometer coordinate measuring machine and three-dimensional micro-touch gauge head is discussed in, it is noted that a variety of to be applied to micro-dimension
The probe sensor-based system of production piece measurement, probe all have elongate rod-like structures.
Existing probe described in above-mentioned document is disadvantageous in that: (1) probe manufacturing difficulty is big and its gauge head size
Larger, application range is limited；(2) measurement is limited by measured workpiece aspect ratio and probe intrinsic frequency；(3) measurement relies on high-precision
Spend the carrying of movement mechanism.
Summary of the invention
The purpose of the present invention is in view of the above-mentioned problems of the prior art, design provides one kind based on magnetic fluorescent microspheres
Random reconstruct Micro-dimension detection method.
Random reconstruct Micro-dimension detection device of the present invention based on magnetic fluorescent microspheres includes dichroscope 2, object
Mirror 3, sample room 5, two layers of controllable magnetic pole 7, collecting lens 9 and CCD10；
CCD10, collecting lens 9, dichroscope 2, object lens 3 and sample room 5 are from top to bottom successively arranged along optical axis；
Exciting light light beam 1 is incident upon dichroscope 2, after the reflection of dichroscope 2, is incident in sample room 5 by object lens 3,
The solution containing multiple magnetic fluorescent microspheres 6 is filled in sample room 5,
It two layers of controllable about 7 parallel alignment of magnetic pole and is uniformly arranged on around sample room 5,
Magnetic fluorescent microspheres 6 under the effect of exciting light light beam 1 fluorescent light beam 8 that inspires successively by object lens 3 and two to
It is assembled after Look mirror 2 through collecting lens 9, images in CCD10, used magnetic fluorescent microsphere (6) particle size is less than 50 microns.
Micro-dimension detection method based on above-mentioned apparatus are as follows:
It is partially immersed in sample 4 is to be measured in the solution containing magnetic fluorescent microspheres 6, adjusts exciting light light beam
1 light intensity, and exciting light light beam 1 is made to be incident upon dichroscope 2 enables exciting light light beam 1 through object lens 3 to irradiate magnetic fluorescence micro-
Ball 6, and it is made to launch fluorescent light beam 8, repeatedly change the magnetic field strength and magnetic direction of two layers of controllable magnetic pole 7 at random, so that
Random changing magnetic field is generated in sample room 5, controls the random movement in solution of magnetic fluorescent microspheres 6；
During changes of magnetic field, the picture of several different moments fluorescence hot spots is acquired using CCD10,
Magnetic fluorescent microspheres 6 are obtained along the position of optical axis axial direction according to the light distribution of fluorescence hot spot in every piece image,
Magnetic fluorescent microspheres 6 are obtained along the position of optical axis radial direction according to the position of fluorescence hot spot in every piece image,
Image reconstruction is carried out along the position of optical axis axially and radially according to magnetic fluorescent microspheres 6 in every piece image, is obtained
Sample message completes the dimensional measurement of sample 4.
The invention has the advantages that (1) forms a kind of contact type probe without measuring staff, conventional probe major diameter is breached
Than concepts such as, frequency responses, expands measurement application range and improve measuring speed；(2) and at work height is not depended on
The carrying of precise movements mechanism, therefore avoid error caused by mechanical oscillation；(3) gauge head size, that is, magnetic fluorescent microspheres size
Measurement can be unfolded in very little in minimum measurement space.
Detailed description of the invention
Fig. 1 is the random reconstruct Micro-dimension detection device schematic three dimensional views based on magnetic fluorescent microspheres
Fig. 2 is that CCD acquires a photo and is fitted magnetic fluorescent microspheres position view
Fig. 3 is CCD multi collect and carries out image reconstruction schematic diagram
Specific embodiment
Specific embodiment 1: illustrating present embodiment in conjunction with Fig. 1 to Fig. 3, based on magnetic glimmering described in present embodiment
The random reconstruct Micro-dimension detection device of light microballoon includes: dichroscope 2, object lens 3, sample room 5, two layers of controllable magnetic pole 7, collects
Lens 9 and CCD10；
CCD10, collecting lens 9, dichroscope 2, object lens 3 and sample room 5 are from top to bottom successively arranged along optical axis；
Exciting light light beam 1 is incident upon dichroscope 2, after the reflection of dichroscope 2, is incident in sample room 5 by object lens 3,
The solution containing a large amount of magnetic fluorescent microspheres 6 is filled in sample room 5,
It two layers of controllable about 7 parallel alignment of magnetic pole and is uniformly arranged on around sample room 5,
Magnetic fluorescent microspheres 6 under the effect of exciting light light beam 1 fluorescent light beam 8 that inspires successively by object lens 3 and two to
It is assembled after Look mirror 2 through collecting lens 9, images in CCD10.
The working principle of above-mentioned apparatus are as follows:
Magnetic fluorescent microspheres solution is housed in sample room 5, a large amount of magnetic fluorescent microspheres 6 are contained in solution, exciting light 1 passes through
Beam splitter 2 reflects, and is projected to sample room 5 by object lens 3, magnetic fluorescent microspheres 6 generate fluorescence, fluorescence under the irradiation of exciting light
Immersion objective 3 is returned through along optical path, is then collected the collection of lens 8 through beam splitter 2, CCD9 is for acquiring image.It carries out
When measurement, sample 4 is put into sample room 5, random changing magnetic field is applied by controllable magnetic pole 7, then it is a large amount of magnetic glimmering
Light microballoon 6 just generates random movement, multiple photos is acquired by CCD10, by the microballoon position in the multiple pictures collected
The radial position for being fitted to obtain magnetic fluorescent microspheres 6 is set, the axial direction of magnetic fluorescent microspheres 6 is obtained according to fluorescent intensity size
Position, and carry out image reconstruction and sample three-dimensional information can be obtained, complete measurement.
Fig. 2 show the image of fitting 6 position of magnetic fluorescent microspheres after CCD one acquisition.
As shown in figure 3, after CCD carries out multi collect and being fitted magnetic fluorescent microspheres position, image reconstruction is then carried out
Obtain can be obtained by the dimension information of clearly sample 4, sample profile is as shown in phantom in FIG..
In present embodiment, CCD is can be used in CCD10, and the quantity of every layer of controllable magnetic pole 7 is greater than or equal to two.
The driving method of controllable magnetic pole 7 is axially to be finely divided driving using current phasor method, controls each phase of input
Electric current in excitation winding makes it zero to that can have multiple stable intermediate current states between maximum phase current, so accordingly
Magnetic vector amplitude and direction there is also multiple stable intermediate state, magnetic field that the exciting current of multiple and different windings generates
Carry out it is vector superposed, to realize subdivision.The stress size of its resultant vector amplitude decision magnetic fluorescent microspheres 6, and adjacent two
A resultant magnetic field vector angle determines the Impact direction of magnetic fluorescent microspheres 6.Likewise, in the axial direction, parallel alignment
The driving current of upper layer and lower layer excitation winding is proportional, and the magnetic field that the exciting current of axial winding generates carries out in the axial direction
It is vector superposed, to realize axially driving.
Specific embodiment 2: present embodiment is the Micro-dimension detection method based on one described device of embodiment, it should
Method are as follows:
It is partially immersed in sample 4 is to be measured in the solution containing magnetic fluorescent microspheres 6, adjusts exciting light light beam
1 light intensity, and exciting light light beam 1 is made to be incident upon dichroscope 2 enables exciting light light beam 1 through object lens 3 to irradiate magnetic fluorescence micro-
Ball 6, and it is made to launch fluorescent light beam 8, repeatedly change the magnetic field strength and magnetic direction of two layers of controllable magnetic pole 7 at random, so that
Random changing magnetic field is generated in sample room 5, controls the random movement in solution of magnetic fluorescent microspheres 6；
During changes of magnetic field, the picture of several different moments fluorescence hot spots is acquired using CCD10,
Magnetic fluorescent microspheres 6 are obtained along the position of optical axis axial direction according to the light distribution of fluorescence hot spot in every piece image,
Magnetic fluorescent microspheres 6 are obtained along the position of optical axis radial direction according to the position of fluorescence hot spot in every piece image,
Image reconstruction is carried out along the position of optical axis axially and radially according to magnetic fluorescent microspheres 6 in every piece image, is obtained
Sample message completes the dimensional measurement of sample 4.
Claims (3)
1. the Micro-dimension detection method of the random reconstruct Micro-dimension detection device based on magnetic fluorescent microspheres, which includes: two
To Look mirror (2), object lens (3), sample room (5), two layers of controllable magnetic pole (7), collecting lens (9) and CCD (10)；
CCD (10), collecting lens (9), dichroscope (2), object lens (3) and sample room (5) are from top to bottom successively arranged along optical axis；
Exciting light light beam (1) is incident upon dichroscope (2), after dichroscope (2) reflection, is incident to sample room by object lens (3)
(5) in, the solution containing multiple magnetic fluorescent microspheres (6) is filled in sample room (5),
Two layers of controllable magnetic pole (7) parallel alignment and is uniformly arranged on around sample room (5) up and down,
Magnetic fluorescent microspheres (6) in the case where exciting light light beam (1) acts on the fluorescent light beam (8) that inspires successively by object lens (3) and
Dichroscope (2) is assembled by collecting lens (9), images in CCD (10)；
It is characterized in that, this method are as follows:
It is partially immersed in sample (4) is to be measured in the solution containing magnetic fluorescent microspheres (6), adjusts exciting light light beam
(1) light intensity, and exciting light light beam (1) is made to be incident upon dichroscope (2), so that exciting light light beam (1) can be irradiated through object lens (3)
Magnetic fluorescent microspheres (6), and it is made to launch fluorescent light beam (8), repeatedly change the magnetic field strength of two layers of controllable magnetic pole (7) at random
And it is random in solution to control magnetic fluorescent microspheres (6) so that generating random changing magnetic field in sample room (5) for magnetic direction
It is mobile；
During changes of magnetic field, the picture of several different moments fluorescence hot spots is acquired using CCD (10),
Magnetic fluorescent microspheres (6) are obtained along the position of optical axis axial direction, root according to the light distribution of fluorescence hot spot in every piece image
Magnetic fluorescent microspheres (6) are obtained along the position of optical axis radial direction according to the position of fluorescence hot spot in every piece image,
Image reconstruction is carried out along the position of optical axis axially and radially according to magnetic fluorescent microspheres (6) in every piece image, obtains sample
Product information completes the dimensional measurement of sample (4).
2. the Micro-dimension detection of the random reconstruct Micro-dimension detection device according to claim 1 based on magnetic fluorescent microspheres
Method, which is characterized in that used magnetic fluorescent microsphere (6) particle size is less than 50 microns.
3. the Micro-dimension detection side of the random reconstruct Micro-dimension detection device based on magnetic fluorescent microspheres according to claim 1
Method, which is characterized in that the quantity of every layer of controllable magnetic pole (7) is greater than two.
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| CN201611228129.3A CN106643497B (en) | 2016-12-27 | 2016-12-27 | The Micro-dimension detection method of random reconstruct Micro-dimension detection device based on magnetic fluorescent microspheres |
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| CN201611228129.3A CN106643497B (en) | 2016-12-27 | 2016-12-27 | The Micro-dimension detection method of random reconstruct Micro-dimension detection device based on magnetic fluorescent microspheres |
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| CN106643497B true CN106643497B (en) | 2019-01-22 |
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|---|---|---|---|---|
| CN101099104A (en) * | 2004-11-24 | 2008-01-02 | 巴特尔纪念研究所 | Optical system for cell imaging |
| CN101743467A (en) * | 2007-06-04 | 2010-06-16 | 马里兰大学生物技术研究所 | Fluorescence microscope in a microwave cavity |
| CN102253193A (en) * | 2010-05-20 | 2011-11-23 | 上海医脉赛科技有限公司 | Magnetic fluorescent kit for rapidly detecting microbes as well as preparation method and use method thereof |
| CN102445161A (en) * | 2010-10-01 | 2012-05-09 | 汤学成 | Method for observing thick tissue three-dimensional structure |
| CN204874484U (en) * | 2015-04-20 | 2015-12-16 | 南京康芯微健康科技有限公司 | Rare cell automation equipment of catching |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6093903A (en) * | 1983-10-28 | 1985-05-25 | Hitachi Ltd | Shape confirming/dimension measuring apparatus for photoresist film |
| JPH1019532A (en) * | 1996-07-04 | 1998-01-23 | Nireco Corp | Method for measuring pattern of photoresist |
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2016
- 2016-12-27 CN CN201611228129.3A patent/CN106643497B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101099104A (en) * | 2004-11-24 | 2008-01-02 | 巴特尔纪念研究所 | Optical system for cell imaging |
| CN101743467A (en) * | 2007-06-04 | 2010-06-16 | 马里兰大学生物技术研究所 | Fluorescence microscope in a microwave cavity |
| CN102253193A (en) * | 2010-05-20 | 2011-11-23 | 上海医脉赛科技有限公司 | Magnetic fluorescent kit for rapidly detecting microbes as well as preparation method and use method thereof |
| CN102445161A (en) * | 2010-10-01 | 2012-05-09 | 汤学成 | Method for observing thick tissue three-dimensional structure |
| CN204874484U (en) * | 2015-04-20 | 2015-12-16 | 南京康芯微健康科技有限公司 | Rare cell automation equipment of catching |
Non-Patent Citations (1)
| Title |
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| 微流控芯片荧光检测系统研究进展;张雯等;《理化检验-化学分册》;20111231;第47卷;第1495-1500页 |
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