CN106639791A - Observing window seal structure and device with the same structure thereof - Google Patents
Observing window seal structure and device with the same structure thereof Download PDFInfo
- Publication number
- CN106639791A CN106639791A CN201710054587.8A CN201710054587A CN106639791A CN 106639791 A CN106639791 A CN 106639791A CN 201710054587 A CN201710054587 A CN 201710054587A CN 106639791 A CN106639791 A CN 106639791A
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- Prior art keywords
- sight glass
- observation window
- observation
- chamber
- passage
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Classifications
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- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/54—Fixing of glass panes or like plates
- E06B3/58—Fixing of glass panes or like plates by means of borders, cleats, or the like
- E06B3/62—Fixing of glass panes or like plates by means of borders, cleats, or the like of rubber-like elastic cleats
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- Engineering & Computer Science (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Securing Of Glass Panes Or The Like (AREA)
Abstract
The invention provides an observing window seal structure and device with the same structure. The observing window seal structure is used to install on an observing passage of a cavity chamber which includes a step mating face; the observing window seal structure comprises a first circular gasket which attaches the step mating faces observing glasses which comprises a first surface and a second surface relatively, the first surface faces the cavity chamber, an aperture is formed between edges around the second surface and observe passage; a seal ring installed inside the aperture completely touches with observing glasses and inner wall of observing passage; as well as a stop dog around observing passage stalled on the wall of the cavity chamber is covered aperture at least and sealed with the first surface of the observing glass. The observing window seal structure has the advantage of being convenient in installation,simple in taking down seal ring and good in sealing performance.
Description
Technical field
The present invention relates to a kind of observation window sealing structure and the equipment with the sealing structure.
Background technology
(Plasma Enhanced Chemical Vapor Deposition, plasma enhanced chemical is meteorological for PECVD
Precipitation equipment) often apply in TFT-LCD (Thin Film Transistor-Liquid Crystal Display, film crystal
Pipe liquid crystal display), in thin film solar industry, act as the plated film on substrate.Coating process is in closed processing chamber
Carry out, in some cases, the state in processing chamber, for example：Substrate breakage, center pin cap (Center pin cap) take off
Fall, be grounded (Grounding) fracture etc., need naked eyes to confirm.Generally, observation window (View is set on processing chamber wall body
Window), for checking the situation of chamber interior.Because PECVD device carries out plasma chemistry under vacuum, hot environment
Vapour deposition, this observation window need to have vacuum sealing, high temperature resistant, corrosion-resistant, filter UV radiation, can printing opacity the features such as.
The structural representation of observation window sealing structure in PECVD device is illustrated in figure 1 in prior art.As shown in figure 1,
In prior art, the passage for installing observation window, the passage are offered on the chamber wall body of the processing chamber of PECVD device
For stepped passageway, its aperture on the inside of chamber is pacified less than the aperture on the outside of chamber, sealing structure from chamber outside
Dress.Observation window sealing structure mainly includes：Packing ring 10, thin sheet glass 20, O-ring seal (O-ring) 30, filter UV glass 40,
Block 50, block packing ring 60 and block lock screw 70 etc..
The installation process of observation window sealing structure is in prior art PECVD device：
The first step, the mounting gasket 10 on the cascaded surface of stepped passageway；Second step, in the outer installation thin sheet glass of packing ring 10
20；3rd step, in the surrounding of thin sheet glass 20 O-ring seal 30 that seals is installed；4th step, installs and filters UV glass
40；5th step, installs outermost block packing ring 60 and block 50, and block 50 is inwardly extruded under the effect of lock screw 70, entered
And making the inclined plane of filtration UV glass 40 extrude O-ring seal 30, O-ring seal 30 is contacted with thin sheet glass 20 and vias inner walls
To reach sealing effectiveness.
5～8 observation windows are generally housed in PECVD device, with long-time high temperature, corrosive environment used in, O-shaped sealing
Circle is corroded, and leakage (Leak) occurs, so O-ring seal needs periodic replacement.
In prior art PECVD device there is problems with observation window sealing structure：
1), O-ring seal installation difficulty：O-ring seal is installed on the inside of passage, is needed in advance by O-ring seal and thin slice
The surrounding wall body of glass and passage is fitted completely, but O-ring seal is easily sagging, when filtration UV glass is inwardly extruded, O-shaped sealing
The sagging part of circle contacts with UV glass fronts are filtered, and O-ring seal is not carried out being contacted with wall body extruding, it is impossible to reach sealing
Effect, repeated disassembled and assembled increases task difficulty；
2), O-ring seal is removed difficult：O-ring seal under long-time high temperature extrusion, generally with vias inner walls and thin slice
Glass sticks together, and is not easily taken out.Block is removed in outside, and without stress point, current method can only be struck with hard thing from chamber inner side
Hit；
3), filter UV glass and thin sheet glass is easily rupturable, loss is big：When operation is removed, UV glass and thin slice glass are filtered
Glass is easily broken, and causes damage, and processing chamber is more in PECVD device, again many per chamber observation window quantity, and filter UV glass with
The cost of thin sheet glass is again high, this considerably increases loss amount；
4) operation after, can only beginning to speak：Outside block is pulled down, and filters UV glass without stress point, after can only beginning to speak, will from inner side
The glass of bonding is tapped.
As can be seen here, in prior art there is O-ring seal and take out difficult in PECVD device, easily cause filter UV glass and
Thin sheet glass ruptures, the problems such as the replacement operation time is long.
The content of the invention
It is an object of the invention to provide a kind of observation window sealing structure and the equipment with the sealing structure, installation side
Just, it is and readily removable except sealing ring, good seal performance.
Technical scheme provided by the present invention is as follows：
A kind of observation window sealing structure, for being installed on the observation passage of chamber, the observation passage is included around shape
Step fitting surface on the inwall in the observation passage, the step fitting surface is towards chamber outside；The observation
Window sealing structure includes：
First packing ring of ring-type, first packing ring is adjacent to and is assemblied on the step fitting surface；
The sight glass of the side away from the chamber of first packing ring is installed on, the sight glass includes relatively
First surface and second surface, the first surface is towards the chamber, the edge of the second surface and the sight
Gap is formed between the inwall for examining passage；
Sealing ring, the sealing ring is placed in the gap, and with the sight glass and the observation passage in
Wall is completely attached to；
And, around the block that the surrounding of the observation passage is arranged, the block is installed on the wall body of the chamber,
And the block at least covers the gap, seal and the first surface of the sight glass between.
Further, completely attach between the surrounding of the first surface of the sight glass and first packing ring.
Further, the sight glass is formed with ledge structure, the step in the edge of the second surface
The step surface of structure is located at the step surface and described second towards the outside of the chamber on the outer peripheral face of the sight glass
Part between surface forms the first side wall, the sealing ring and the first side wall, the step surface and the observation passage
Inwall completely attach to.
Further, the outside dimension of sealing ring preset value less than the width in the gap, the preset value can
So that the sealing ring is squeezed in the gap.
Further, the second pad for sealing is provided between the second surface of the block and the sight glass
Circle.
Further, the block is fixed on the wall body of the chamber by block securing member.
Further, width of the gap at any position of the surrounding along the observation passage is predetermined width
Value.
Further, the sight glass includes multiple sides, wherein the chamfer shape between two neighboring side is circle
Sliding easement curve shape, and it is described observation passage shape match with the edge shape of the sight glass so that the seam
Width of the gap at any position of the surrounding along the observation passage is predetermined width value.
Further, the sealing ring is O-ring seal；First packing ring is Teflon packing ring；The sight glass
For the filter glass of the light of preset wavelength can be filtered.
A kind of equipment with observation window sealing structure, the equipment includes chamber and is installed on the chamber as above
Described observation window sealing structure.
Beneficial effects of the present invention are as follows：
Observation window sealing structure provided by the present invention, compared to observation window sealing structure of the prior art, installs step
It is rapid few, can minimum four step complete installation process, install more easy；When needing to remove replacing sealing ring, it is only necessary to will most
The block in outside is dismantled, and can be taken out sealing ring with point hook, easy to remove without the need for sight glass and the first packing ring etc. are taken out
Operation；Need not begin to speak, the replacement operation of sealing ring can be carried out from chamber outside, lift operating efficiency；Additionally, with prior art in
Observation window sealing structure compare, farther away from chamber interior environment, resistance to corrosion strengthens sealing ring；Additionally, with existing skill
Observation window sealing structure in art is compared, and can save one block of thin glass, cost-effective, and be completely avoid in prior art and torn open
The possibility of glass rupture when sealing ring takes out in glass is changed, is greatly saved and is used consuming cost；Additionally, provided by the present invention
Observation window sealing structure, sealing ring forms sealing, it is ensured that close by the gap being squeezed between sight glass and observation passage
Envelope effect, and under the differential pressure action of chamber medial and lateral, sealing effectiveness is more preferably.
Description of the drawings
Fig. 1 represents the structural representation of the observation window sealing structure in prior art in PECVD device；
Fig. 2 represents the structural representation of the observation window sealing structure provided in the embodiment of the present invention；
Fig. 3 represents the structural representation of observation window sealing structure provided in the embodiment of the present invention when sealing ring is not installed
Figure；
Fig. 4 represents the side view of Fig. 3.
Specific embodiment
To make purpose, technical scheme and the advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
Accompanying drawing, the technical scheme of the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is this
Bright a part of embodiment, rather than the embodiment of whole.Based on described embodiments of the invention, ordinary skill
The every other embodiment that personnel are obtained, belongs to the scope of protection of the invention.
There are problems that O-ring seal is dismounted for observation window sealing structure in PECVD device in prior art, this
Invention provides a kind of observation window sealing structure, easy for installation and readily removable except sealing ring, good seal performance.
The observation window sealing structure that the embodiment of the present invention is provided can apply to the PECVD high to sealing requirements and set
On standby chamber wall body, can also be applied to other needs in the equipment for install observation window.It is often necessary to install the chamber of observation window
It is provided for that the observation passage of observation window is installed on the wall body of room, in general, the observation passage is designed as stepped passageway, its
Less than the aperture on the outside of chamber, formation is looped around the step on the inwall of the observation passage in aperture on the inside of chamber
Fitting surface, and the step fitting surface is towards chamber outside.
As shown in Fig. 2 the observation window sealing structure that the embodiment of the present invention is provided includes：
First packing ring 100 of ring-type, first packing ring 100 is adjacent to and is assemblied on the step fitting surface；
It is installed on the sight glass 200 of the side away from the chamber of first packing ring 100, the sight glass
200 include relative first surface 201 and second surface 202, and the first surface 201 is towards the chamber, second table
Gap 700 is formed between the inwall of the edge in face 202 and the observation passage A；
Sealing ring 300, the sealing ring 300 is placed in the gap 700, and with the sight glass 200 and described
The inwall of observation passage A is completely attached to；
And, around the block 400 that the surrounding of the observation passage A is arranged, the block 400 is installed on the chamber
On wall body, and the block 400 at least covers the gap 700, and the first surface 201 of the sight glass 200 between
Sealing.
Observation window sealing structure provided by the present invention, when mounted, first, the first packing ring 100 of ring-type is assemblied in
In observation passage A on apparatus cavity wall body, and it is close to the step fitting surface in observation passage A；Then, then by sight glass
200 first surface 201 is installed on sight glass 200 in the observation passage A (as shown in Figure 3) towards chamber inner side；
Then, sealing ring 300 (preferably O-ring seal 300) is filled in sight glass 200 second surface 202 edge with
It is in the gap 700 formed between the inwall of observation passage A and complete with the inwall of the sight glass 200 and the observation passage A
Full connected, to reach sealing effectiveness；Finally, outermost block 400 is installed, sight glass 200 is fixed on into observation passage A
It is interior.When needing to remove replacing sealing ring 300, it is only necessary to which outermost block 400 is dismantled, being hooked with point can be by sealing ring 300
Take out, without the need for packing ring 100 of sight glass 200 and first etc. is taken out, you can remove sealing ring 300.
As can be seen here, observation window sealing structure provided by the present invention, ties compared to observation window of the prior art sealing
Structure, installation steps are few, can minimum four step complete installation process, install more easy；
When needing to remove replacing sealing ring 300, it is only necessary to which outermost block 400 is dismantled, will can be sealed with point hook
Circle 300 takes out, without the need for packing ring 100 of sight glass 200 and first etc. is taken out, easy dismounting operation；
Also, need not begin to speak, the replacement operation of sealing ring 300 can be carried out from chamber outside, lift operating efficiency；
Additionally, compared with observation window sealing structure of the prior art, in observation window sealing structure provided by the present invention
Sealing ring 300 is farther away from chamber interior environment, for example, Plasma (plasma) ring of the within the chamber high temperature of PECVD device
Border, resistance to corrosion strengthens；
Additionally, observation window sealing structure provided by the present invention is compared with observation window sealing structure of the prior art, it is close
Envelope principle is different, can save one block of thin glass, cost-effective, and completely avoid change in prior art sealing ring 300 will
The possibility of glass rupture when glass takes out, greatly saves and uses consuming cost；
Additionally, observation window sealing structure provided by the present invention, sealing ring 300 by be squeezed into sight glass 200 with
Gap 700 between observation passage A, forms sealing, it is ensured that sealing effectiveness, and under the differential pressure action of chamber medial and lateral, sealing effect
Fruit is more preferably；Additionally, it is different from the sealing principle of observation window sealing structure of the prior art, when outside block 400 is installed, block
400 are not subject to extruding force substantially, can still ensure sealing effectiveness.
In embodiment provided by the present invention, it is preferred that as shown in Fig. 2 the first surface of the sight glass 200
Completely attach between 201 surrounding and first packing ring 100.
Using such scheme, between the surrounding of the first surface 201 of the sight glass 200 and the first packing ring 100 directly
Contact sealing, wherein first packing ring 100 can adopt Teflon packing ring, when the sealing structure is applied in PECVD device
When, stop F ion (fluorine ion) can be played, slow down corrosion of the F ion to sealing ring 300, additionally, outermost block 400 is pacified
After dress, its effect for stopping fluorine ion can be improved by the first packing ring 100 of extruding inner side.
It should be appreciated that in actual applications, can with the sight glass 200 and first packing ring 100 it
Between set up other structures according to the actual requirements, the present invention is not defined to this to this.
Additionally, in embodiment provided by the present invention, it is preferred that as shown in Fig. 2 the sight glass 200 is described
The edge of second surface 202 is formed with ledge structure, and the step surface 2021 of the ledge structure is towards the outer of the chamber
Side, the part being located between the step surface 2021 and the second surface 202 on the outer peripheral face of the sight glass 200 is formed
The first side wall 2022, the sealing ring 300 and the first side wall 2022, the step surface 2021 and the observation passage A
Inwall is completely attached to.
Using such scheme, the sight glass 200 is designed as the glass blocks of stepped ramp type, the four of its second surface 202
Ledge structure is formed in circumferential edges, by forming the gap between the observation passage A on the ledge structure and chamber wall body
700, this structure is relatively simple, and the sight glass 200 easily makes, and sealing ring 300 is easily filled in；And sealing ring 300 can
Closely to connect between the inwall and the first side wall 2022, the step surface 2021 of sight glass 200 of observing passage A
Touch, form the sealing of 3 faces, it is ensured that sealing effectiveness.
It should be noted that in other embodiments of the invention, for the second surface 202 of the sight glass 200
Edge and the observation passage A between formed gap 700 concrete form be not defined, other can also be adopted
Structure, for example：The neighboring of the sight glass 200 can also be to be to be formed in the position near the second surface 202
Tapered slope structure so that the area of second surface 202 is less than the area of first surface 201, and forms the gap 700.
Additionally, in embodiment provided by the present invention, it is preferred that the outside dimension of the sealing ring 300 is than the seam
The little preset value of width of gap 700, the preset value enables to the sealing ring 300 and is squeezed in the gap 700.
Using such scheme, the outside dimension for designing the sealing ring 300 is more smaller than the width in gap 700 so that sealing
Circle 300 can be extruded just to be filled in gap 700, it is ensured that the sealing ring 300 and the first side wall 2022, the step
The inwall of face 2021 and the observation passage A is in close contact, and forms 3 face sealing effectiveness.
Additionally, in embodiment provided by the present invention, it is preferred that as shown in Fig. 2 the block 400 and the observation
The second packing ring 500 for sealing is provided between the second surface 202 of glass 200.
Using such scheme, second surface of the second packing ring 500 in the block 400 and the sight glass 200
Sealing function is played between 202, effect of the buffering block 400 to the extruding of sight glass 200 is also acted as.
Additionally, in embodiment provided by the present invention, the block 400 is fixed on described by the securing member of block 400
On the wall body of chamber.Preferably, as shown in Fig. 2 the securing member of the block 400 is included for the block 400 to be screwed in institute
State the fastening bolt 600 on the wall body of chamber.Using such scheme, block 400 can be screwedly mounted on by fastening bolt 600
On the wall body of chamber, it is easy to dismounting.
Additionally, in embodiment provided by the present invention, it is preferred that as shown in Figure 3 and Figure 4, the gap 700 is along institute
Width at any position of the surrounding for stating observation passage A is predetermined width value.Preferably, the sight glass 200 includes
Multiple sides, wherein the chamfer shape between two neighboring side is round and smooth easement curve shape, and the shape of the observation passage A
Shape matches with the edge shape of the sight glass 200, so that the gap 700 is in the surrounding along the observation passage A
Width at any position is predetermined width value.
Using such scheme, it is designed by the shape to sight glass 200, by sight glass 200 in prior art
Right angle angle between two neighboring side is improved to round and smooth easement curve shape, accordingly by the observation passage on chamber wall body
A is designed as matching to cause to be formed between sight glass 200 and observation passage A inwalls with the edge shape of the sight glass 200
Gap 700 it is uniform, it is ensured that sealing property.
As shown in figure 4, in a kind of specific embodiment provided by the present invention, the sight glass 200 can be a length
Strip, it includes two relative long sides and two relative minor faces, and the long side of two of which is straight flange, and two minor faces are circular arc
Side, and long side and the junction of minor face are rounding off curve-like.
Of course, it should be understood that in actual applications, the sight glass 200 can also be that four sides are straight flange,
Or, the sight glass 200 can also be that two long sides and two minor faces are arc-shaped (for example：Outside the sight glass 200
Shape is oval or circular), or, two long sides of the sight glass 200 are arc-shaped, and two minor faces are straight flange etc., only need to be
It is smooth curve shape at the chamfering on adjacent both sides, it is uniform to ensure the gap 700.
In addition it is also necessary to explanation is, it is preferred that the sight glass 200 is the mistake of the light that can filter preset wavelength
Filter glass.The light of wherein described preset wavelength can be UV light, and can also be needs and to filter out other pre- according to physical device
The light of standing wave length.
Additionally, a kind of equipment with observation window sealing structure is additionally provided in embodiments of the invention, the equipment bag
Include chamber and the observation window sealing structure as above being installed on the chamber.The equipment can be PECVD device,
Can be that other need to install observation window, and the equipment higher to sealing requirements.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, on the premise of without departing from the technology of the present invention principle, some improvement and replacement can also be made, these improve and replace
Also should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of observation window sealing structure, for being installed on the observation passage of chamber, the observation passage is included around formation
Step fitting surface on the inwall of the observation passage, the step fitting surface is towards chamber outside；Characterized in that,
The observation window sealing structure includes：
First packing ring of ring-type, first packing ring is adjacent to and is assemblied on the step fitting surface；
The sight glass of the side away from the chamber of first packing ring is installed on, the sight glass includes relative
One surface and second surface, the first surface is towards the chamber, and the edge of the second surface is logical with the observation
Gap is formed between the inwall in road；
Sealing ring, the sealing ring is placed in the gap, and complete with the inwall of the sight glass and the observation passage
Full connected；
And, around the block that the surrounding of the observation passage is arranged, the block is installed on the wall body of the chamber, and institute
State block and at least cover the gap, seal and the first surface of the sight glass between.
2. observation window sealing structure according to claim 1, it is characterised in that
Completely attach between the surrounding of the first surface of the sight glass and first packing ring.
3. observation window sealing structure according to claim 1, it is characterised in that
The sight glass is formed with ledge structure, the step surface court of the ledge structure in the edge of the second surface
To the outside of the chamber, the part being located on the outer peripheral face of the sight glass between the step surface and the second surface
The first side wall is formed, the sealing ring connects completely with the inwall of the first side wall, the step surface and the observation passage
Touch.
4. observation window sealing structure according to claim 1, it is characterised in that
The outside dimension of sealing ring preset value less than the width in the gap, the preset value enables to the sealing ring
It is squeezed in the gap.
5. observation window sealing structure according to claim 1, it is characterised in that
The second packing ring for sealing is provided between the second surface of the block and the sight glass.
6. observation window sealing structure according to claim 1, it is characterised in that
The block is fixed on the wall body of the chamber by block securing member.
7. observation window sealing structure according to claim 1, it is characterised in that
Width of the gap at any position of the surrounding along the observation passage is predetermined width value.
8. observation window sealing structure according to claim 7, it is characterised in that
The sight glass includes multiple sides, wherein the chamfer shape between two neighboring side is round and smooth easement curve
Shape, and it is described observation passage shape match with the edge shape of the sight glass so that the gap is along the sight
Width at any position of the surrounding for examining passage is predetermined width value.
9. observation window sealing structure according to claim 1, it is characterised in that
The sealing ring is O-ring seal；First packing ring is Teflon packing ring；The sight glass is can to filter default
The filter glass of the light of wavelength.
10. a kind of equipment with observation window sealing structure, it is characterised in that the equipment includes chamber and is installed on the chamber
The observation window sealing structure as described in any one of claim 1 to 9 on room.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710054587.8A CN106639791B (en) | 2017-01-24 | 2017-01-24 | Observation window sealing structure and equipment with the sealing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710054587.8A CN106639791B (en) | 2017-01-24 | 2017-01-24 | Observation window sealing structure and equipment with the sealing structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106639791A true CN106639791A (en) | 2017-05-10 |
| CN106639791B CN106639791B (en) | 2018-08-03 |
Family
ID=58841211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710054587.8A Expired - Fee Related CN106639791B (en) | 2017-01-24 | 2017-01-24 | Observation window sealing structure and equipment with the sealing structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106639791B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109702447A (en) * | 2019-02-20 | 2019-05-03 | 中国船舶科学研究中心（中国船舶重工集团公司第七0二研究所） | A kind of ball crown type observation window sealing ring more changing device and replacing options |
| CN111703582A (en) * | 2020-06-29 | 2020-09-25 | 中国人民解放军第五七一九工厂 | Repairing method for observation window of high-temperature photosensimeter of aircraft engine |
| CN114876325A (en) * | 2022-05-12 | 2022-08-09 | 安徽唯嵩光电科技有限公司 | Quick-change glass window and color sorter |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19918802A1 (en) * | 1998-01-17 | 2000-11-02 | Robby Ebert | Large area vacuum laser beam processing apparatus, e.g. for micro structuring semiconductor wafer surfaces, has a rotating window disk sealed by an O-ring seal and provided with a smaller window |
| CN201545908U (en) * | 2009-08-25 | 2010-08-11 | 东莞宏威数码机械有限公司 | Cavity observation window |
| CN202483386U (en) * | 2011-12-19 | 2012-10-10 | 深圳市中兴昆腾有限公司 | Self-fastening type observation window structure |
| CN202832007U (en) * | 2012-09-13 | 2013-03-27 | 沈阳远大铝业工程有限公司 | Two-dimensional adjustable unit window |
| CN204002412U (en) * | 2014-08-14 | 2014-12-10 | 中国船舶重工集团公司第七一九研究所 | A kind of airtight withstand voltage observation port under water |
| CN104694902A (en) * | 2015-03-19 | 2015-06-10 | 中国建材国际工程集团有限公司 | Cavity protection and monitoring device for vacuum coating production line |
-
2017
- 2017-01-24 CN CN201710054587.8A patent/CN106639791B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19918802A1 (en) * | 1998-01-17 | 2000-11-02 | Robby Ebert | Large area vacuum laser beam processing apparatus, e.g. for micro structuring semiconductor wafer surfaces, has a rotating window disk sealed by an O-ring seal and provided with a smaller window |
| CN201545908U (en) * | 2009-08-25 | 2010-08-11 | 东莞宏威数码机械有限公司 | Cavity observation window |
| CN202483386U (en) * | 2011-12-19 | 2012-10-10 | 深圳市中兴昆腾有限公司 | Self-fastening type observation window structure |
| CN202832007U (en) * | 2012-09-13 | 2013-03-27 | 沈阳远大铝业工程有限公司 | Two-dimensional adjustable unit window |
| CN204002412U (en) * | 2014-08-14 | 2014-12-10 | 中国船舶重工集团公司第七一九研究所 | A kind of airtight withstand voltage observation port under water |
| CN104694902A (en) * | 2015-03-19 | 2015-06-10 | 中国建材国际工程集团有限公司 | Cavity protection and monitoring device for vacuum coating production line |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109702447A (en) * | 2019-02-20 | 2019-05-03 | 中国船舶科学研究中心（中国船舶重工集团公司第七0二研究所） | A kind of ball crown type observation window sealing ring more changing device and replacing options |
| EP3858539A4 (en) * | 2019-02-20 | 2022-01-12 | China Ship Scientific Research Center (the 702 Institute of China Shipbuilding Industry Corporation) | Spherical crown-type observation window sealing ring replacement apparatus and replacement method |
| CN111703582A (en) * | 2020-06-29 | 2020-09-25 | 中国人民解放军第五七一九工厂 | Repairing method for observation window of high-temperature photosensimeter of aircraft engine |
| CN114876325A (en) * | 2022-05-12 | 2022-08-09 | 安徽唯嵩光电科技有限公司 | Quick-change glass window and color sorter |
| CN114876325B (en) * | 2022-05-12 | 2023-09-19 | 安徽唯嵩光电科技有限公司 | Quick-change glass window and color selector |
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| CN106639791B (en) | 2018-08-03 |
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