CN104694902A - Cavity protection and monitoring device for vacuum coating production line - Google Patents
Cavity protection and monitoring device for vacuum coating production line Download PDFInfo
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- CN104694902A CN104694902A CN201510120799.2A CN201510120799A CN104694902A CN 104694902 A CN104694902 A CN 104694902A CN 201510120799 A CN201510120799 A CN 201510120799A CN 104694902 A CN104694902 A CN 104694902A
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- chamber
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Abstract
The invention discloses a cavity protection and monitoring device for a vacuum coating production line. The device comprises a curtain board, a seal ring, a quick release connector, a magnetofluid sealing piece, a clamping ring, a handle, a stop dog, a steel cable baffle ring, a windscreen, a seal ring, observation glass, a rubber gasket and a flange cover, wherein a first protection structure consists of the steel cable baffle ring, the windscreen, the seal ring, the observation glass, the rubber gasket and the flange cover, and a second protection structure consists of the curtain board, the seal ring, the quick lease connector, the magnetofluid sealing piece, the clamping ring, the handle and the stop dog. According to the cavity protection and monitoring device for the vacuum coating production line provided by the invention, by adopting a dual protection structure, the windscreen is placed in an inner cavity of the cavity protection and monitoring device, an interval is formed to form a first protection between the observation glass and the vacuum cavity; furthermore, the curtain board is placed in a vacuum cavity to shield a viewport of the cavity protection and monitoring device, so as to form a second protection.
Description
Technical field
The present invention relates to technical field of vacuum plating, specifically a kind of chamber monitoring for protection device for vacuum coating production line.
Background technology
Monitoring for protection device is vital device in vacuum coating film equipment operational process, plays very important effect.Operator uses the operation conditions of monitoring for protection device Real-Time Monitoring vacuum chamber indoor equipment, thus controls plated film progress, ensures the security that coating quality and equipment run.Traditional monitoring for protection apparatus structure is simple, in coating process, has the attachment of a small amount of sputtering thing on the sight glass in vacuum chamber.Along with the continuous deposition of sputtering thing, monitoring for protection device glass can thicken unclear, even cannot observe the working condition in vacuum chamber, has directly had influence on the monitoring of operation, has brought potential safety hazard, safe and reliable not.
Summary of the invention
The present invention is intended to solve deficiency of the prior art, provides a kind of chamber monitoring for protection device for vacuum coating production line of novel structure.
In order to reach above-mentioned purpose; provide a kind of chamber monitoring for protection device for vacuum coating production line, comprise shield, sealing-ring, quick disconnect connecter, magnetic fluid seal, snap ring, handle, block, Steel Cable Baffle Ring, gear glass, sealing-ring, sight glass, rubber cradle and blind flange.Steel Cable Baffle Ring, gear glass, sealing-ring, sight glass, rubber cradle and blind flange form the first operator guards; Shield, sealing-ring, quick disconnect connecter, magnetic fluid seal, snap ring, handle and block form the second operator guards.
In some embodiments; at the inner chamber of chamber monitoring for protection device pedestal; load Steel Cable Baffle Ring, gear glass, sealing-ring, sight glass and rubber cradle from inside to outside successively; described chamber monitoring for protection device pedestal seal welding is on vacuum chamber; gear glass forms interval between chamber monitoring for protection device and vacuum chamber, and fits with sight glass under the effect of Steel Cable Baffle Ring.
In some embodiments, magnetic fluid seal connects firmly on flange coupling connector by quick disconnect connecter and sealing-ring, described flange coupling connector seal welding is on vacuum chamber, in the vacuum chamber of magnetic fluid seal, one end is provided with shield, the other end is provided with snap ring and handle, and shield goes back under gravity automatically until it is lower to connecting with block.
In some embodiments, described Steel Cable Baffle Ring, gear glass, sealing-ring, sight glass and rubber cradle are fixed jointly by the groove of chamber monitoring for protection erection seat inner chamber, blind flange and screw.
In some embodiments, described baffle plate glass is held in chamber monitoring for protection erection seat inner chamber by Steel Cable Baffle Ring, and fits with sight glass.
In some embodiments, described Steel Cable Baffle Ring offers breach, and has curved pawl at breach tail end folding.
In some embodiments, described magnetic fluid seal is as rotating mechanism.
In some embodiments, described quick disconnect connecter carries out sealed attachment to magnetic fluid seal.
According to the chamber monitoring for protection device for vacuum coating production line of the present invention, have employed double protection structures, gear glass is placed in chamber monitoring for protection erection seat inner chamber, between sight glass and vacuum chamber, form interval, forms first and heavily protects.Shield is placed in vacuum chamber, covers chamber monitoring for protection device viewport, forms second and heavily protects.Secondly, gear glass of the present invention is held in chamber monitoring for protection erection seat inner chamber by Steel Cable Baffle Ring, and fits with sight glass, better can protect sight glass.Steel Cable Baffle Ring has breach, and has curved pawl at breach tail end folding.By pinching curved pawl and detachable Steel Cable Baffle Ring, the convenient gear glass that takes out is changed.In addition, the present invention adopts magnetic fluid seal as rotary power Transmission Part, makes transmission rig concision and compact, good airproof performance.Adopt quick disconnect connecter to carry out sealed attachment, be convenient to device dismounting, and good seal performance.Shield under gravity, can going back to until it is lower to connecting with block, being covered completely by chamber monitoring for protection device automatically.
Below in conjunction with accompanying drawing, the description of purport of the present invention is described by example, to know other aspects of the present invention and advantage.
Accompanying drawing explanation
By reference to the accompanying drawings, by detailed description hereafter, above-mentioned and other feature and advantage of the present invention more clearly can be understood, wherein:
Fig. 1 is the structural representation of the chamber monitoring for protection device according to the embodiment of the present invention; And
Fig. 2 uses schematic diagram according to the shield of the chamber monitoring for protection device of the embodiment of the present invention.
Embodiment
See the accompanying drawing of the specific embodiment of the invention, hereafter in more detail the present invention will be described.But the present invention can realize in many different forms, and should not be construed as by the restriction in the embodiment of this proposition.On the contrary, it is abundant and complete open in order to reach for proposing these embodiments, and makes those skilled in the art understand scope of the present invention completely.
Description describes the chamber monitoring for protection device according to the embodiment of the present invention in detail.
Comprise Steel Cable Baffle Ring, gear glass, sealing-ring, sight glass, rubber cradle and blind flange according to the chamber monitoring for protection device of the embodiment of the present invention, described chamber monitoring for protection device also comprises shield, sealing-ring, quick disconnect connecter, magnetic fluid seal, snap ring, handle and block.
First of described chamber monitoring for protection device is heavily protected and is made up of Steel Cable Baffle Ring, gear glass, sealing-ring, sight glass, rubber cradle and blind flange.At the inner chamber of chamber monitoring for protection erection seat, load Steel Cable Baffle Ring, gear glass, sealing-ring, sight glass and rubber cradle from inside to outside successively, these five parts are fixed by the groove of chamber monitoring for protection erection seat inner chamber, blind flange and screw acting in conjunction.Described chamber monitoring for protection erection seat seal welding is on vacuum chamber.Gear glass forms interval between chamber monitoring for protection device and vacuum chamber, and fits with sight glass under the effect of Steel Cable Baffle Ring, protection sight glass.
Second of described chamber monitoring for protection device is heavily protected and is made up of shield, sealing-ring, quick disconnect connecter, magnetic fluid seal, snap ring, handle and block.Magnetic fluid seal uses quick disconnect connecter and sealing-ring to connect firmly on flange coupling connector.Described flange coupling connector seal welding is on vacuum chamber.In the vacuum chamber of magnetic fluid seal, shield is installed in one end, and the other end installs snap ring and handle.Shield goes back under gravity automatically until its lower edge connects with block, is covered completely by chamber monitoring for protection device, protection gear glass and sight glass.
As shown in Figure 1; it is structural representation of the present invention; described chamber monitoring for protection device comprises: Steel Cable Baffle Ring 8, gear glass 9, sealing-ring 10, sight glass 11, rubber cradle 12 and blind flange 13, described chamber monitoring for protection device also comprises shield 1, sealing-ring 2, quick disconnect connecter 3, magnetic fluid seal 4, snap ring 5, handle 6 and block 15.
As shown in Figure 1; at the inner chamber of chamber monitoring for protection erection seat 14; load Steel Cable Baffle Ring 8, gear glass 9, sealing-ring 10, sight glass 11, rubber cradle 12 from inside to outside successively, these five parts are fixed by the groove of chamber monitoring for protection erection seat 14 inner chamber, blind flange 13 and screw acting in conjunction.Magnetic fluid seal 4 is arranged on flange coupling connector 7, uses quick disconnect connecter 3 to connect two parts.Sealing-ring 2 is equipped with between the mounting face of magnetic fluid seal 4 and flange coupling connector 7.One end in the vacuum chamber that shield 1 is arranged on magnetic fluid seal 4, uses key to be fixed.Snap ring 5 is arranged on outer one end of vacuum chamber of magnetic fluid seal 4, uses key and screw to be fixed.Mounting handle 6 on snap ring 5.Block 15 is placed in vacuum chamber inside, on the sidewall of chamber monitoring for protection device, for locating the position of shield 1.
Gear glass 9 is held in chamber monitoring for protection erection seat 14 inner chamber by Steel Cable Baffle Ring 8, and fits with sight glass 11.Between gear glass 9 sight glass 11 and vacuum chamber, form interval, form first and heavily protect.Shield 1 is placed in vacuum chamber, blocks chamber monitoring for protection device viewport, and prevent the sputtering thing directly deposition on gear glass 9 in coating process, indirect protection sight glass 11, forms second and heavily protect.
Steel Cable Baffle Ring 8 is provided with curved pawl structure, pinches curved pawl, can unload Steel Cable Baffle Ring 8, and take out gear glass 9 and change, operating process is simple and efficient.
As shown in Figure 2, shield 1 under gravity, automatically going back to until it is lower to connecting with block 15, being covered completely by chamber monitoring for protection device.Be rotated counterclockwise handle 6, drive shield 1 to rotate by magnetic fluid seal 4, chamber monitoring for protection device viewport can be reopened.
According to the chamber monitoring for protection device for vacuum coating production line of the present invention, have employed double protection structures, gear glass is placed in chamber monitoring for protection erection seat inner chamber, between sight glass and vacuum chamber, form interval, forms first and heavily protects.Shield is placed in vacuum chamber, covers chamber monitoring for protection device viewport, forms second and heavily protects.Secondly, gear glass of the present invention is held in chamber monitoring for protection erection seat inner chamber by Steel Cable Baffle Ring, and fits with sight glass, better can protect sight glass.Steel Cable Baffle Ring has breach, and has curved pawl at breach tail end folding.By pinching curved pawl and detachable Steel Cable Baffle Ring, the convenient gear glass that takes out is changed.In addition, the present invention adopts magnetic fluid seal as rotary power Transmission Part, makes transmission rig concision and compact, good airproof performance.Adopt quick disconnect connecter to carry out sealed attachment, be convenient to device dismounting, and good seal performance.Shield under gravity, can going back to until it is lower to connecting with block, being covered completely by chamber monitoring for protection device automatically.
More than describe preferred embodiment of the present invention in detail.Should be appreciated that those of ordinary skill in the art just design according to the present invention can make many modifications and variations without the need to creative work.All technician in the art, all should by the determined protection domain of claims under this invention's idea on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (8)
1. the chamber monitoring for protection device for vacuum coating production line, comprise shield (1), sealing-ring (2), quick disconnect connecter (3), magnetic fluid seal (4), snap ring (5), handle (6), block (15), Steel Cable Baffle Ring (8), gear glass (9), sealing-ring (10), sight glass (11), rubber cradle (12) and blind flange (13), it is characterized in that, Steel Cable Baffle Ring, gear glass, sealing-ring, sight glass, rubber cradle and blind flange form the first operator guards; Shield, sealing-ring, quick disconnect connecter, magnetic fluid seal, snap ring, handle and block form the second operator guards.
2. chamber monitoring for protection device according to claim 1; it is characterized in that; at the inner chamber of chamber monitoring for protection device pedestal; load Steel Cable Baffle Ring, gear glass, sealing-ring, sight glass and rubber cradle from inside to outside successively; described chamber monitoring for protection device pedestal seal welding is on vacuum chamber; gear glass forms interval between chamber monitoring for protection device and vacuum chamber, and fits with sight glass under the effect of Steel Cable Baffle Ring.
3. chamber monitoring for protection device according to claim 2; it is characterized in that; magnetic fluid seal connects firmly on flange coupling connector by quick disconnect connecter and sealing-ring; described flange coupling connector seal welding is on vacuum chamber; in the vacuum chamber of magnetic fluid seal, one end is provided with shield; the other end is provided with snap ring and handle, and shield goes back under gravity automatically until it is lower to connecting with block.
4. chamber room as claimed in claim 1 monitoring for protection device, is characterized in that, described Steel Cable Baffle Ring, gear glass, sealing-ring, sight glass and rubber cradle are fixed jointly by the groove of chamber monitoring for protection erection seat inner chamber, blind flange and screw.
5. chamber monitoring for protection device as claimed in claim 1, it is characterized in that, described baffle plate glass is held in chamber monitoring for protection erection seat inner chamber by Steel Cable Baffle Ring, and fits with sight glass.
6. chamber monitoring for protection device as claimed in claim 1, it is characterized in that, described Steel Cable Baffle Ring offers breach, and has curved pawl at breach tail end folding.
7. chamber monitoring for protection device as claimed in claim 1, it is characterized in that, described magnetic fluid seal is as rotating mechanism.
8. chamber monitoring for protection device as claimed in claim 1, it is characterized in that, described quick disconnect connecter carries out sealed attachment to magnetic fluid seal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510120799.2A CN104694902A (en) | 2015-03-19 | 2015-03-19 | Cavity protection and monitoring device for vacuum coating production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510120799.2A CN104694902A (en) | 2015-03-19 | 2015-03-19 | Cavity protection and monitoring device for vacuum coating production line |
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| Publication Number | Publication Date |
|---|---|
| CN104694902A true CN104694902A (en) | 2015-06-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510120799.2A Withdrawn CN104694902A (en) | 2015-03-19 | 2015-03-19 | Cavity protection and monitoring device for vacuum coating production line |
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| Country | Link |
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| CN (1) | CN104694902A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106639791A (en) * | 2017-01-24 | 2017-05-10 | 京东方科技集团股份有限公司 | Observing window seal structure and device with the same structure thereof |
| CN111703582A (en) * | 2020-06-29 | 2020-09-25 | 中国人民解放军第五七一九工厂 | Repairing method for observation window of high-temperature photosensimeter of aircraft engine |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202705459U (en) * | 2012-07-09 | 2013-01-30 | 中国建材国际工程集团有限公司 | Vacuum chamber observation window with double protection structures |
-
2015
- 2015-03-19 CN CN201510120799.2A patent/CN104694902A/en not_active Withdrawn
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202705459U (en) * | 2012-07-09 | 2013-01-30 | 中国建材国际工程集团有限公司 | Vacuum chamber observation window with double protection structures |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106639791A (en) * | 2017-01-24 | 2017-05-10 | 京东方科技集团股份有限公司 | Observing window seal structure and device with the same structure thereof |
| CN106639791B (en) * | 2017-01-24 | 2018-08-03 | 京东方科技集团股份有限公司 | Observation window sealing structure and equipment with the sealing structure |
| CN111703582A (en) * | 2020-06-29 | 2020-09-25 | 中国人民解放军第五七一九工厂 | Repairing method for observation window of high-temperature photosensimeter of aircraft engine |
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| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20150610 |
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| WW01 | Invention patent application withdrawn after publication |