CN106639791B - Observation window sealing structure and equipment with the sealing structure - Google Patents
Observation window sealing structure and equipment with the sealing structure Download PDFInfo
- Publication number
- CN106639791B CN106639791B CN201710054587.8A CN201710054587A CN106639791B CN 106639791 B CN106639791 B CN 106639791B CN 201710054587 A CN201710054587 A CN 201710054587A CN 106639791 B CN106639791 B CN 106639791B
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- Prior art keywords
- observation
- glass
- sealing structure
- chamber
- observation window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/54—Fixing of glass panes or like plates
- E06B3/58—Fixing of glass panes or like plates by means of borders, cleats, or the like
- E06B3/62—Fixing of glass panes or like plates by means of borders, cleats, or the like of rubber-like elastic cleats
Abstract
The present invention provides a kind of observation window sealing structure and the equipment with the observation window sealing structure, the observation window sealing structure are used to be installed on the observation channel of chamber, and observation channel includes step fitting surface；The observation window sealing structure includes：Cricoid first washer, the first washer, which is adjacent to, to be assemblied on step fitting surface；It is installed on the observation glass of side of first washer far from chamber, observes first surface and second surface that glass includes opposite, first surface is formed between the edge of second surface and the inner wall for observing channel and had the gap towards chamber；Sealing ring, sealing ring are placed in gap, and are completely attached to the inner wall of observation glass and observation channel；And the block of the surrounding setting around observation channel, block is installed on the wall body of chamber, and block at least covers gap, is sealed between the first surface of observation glass.Observation window sealing structure provided by the invention is easy for installation, and readily removable except sealing ring, good seal performance.
Description
Technical field
The present invention relates to a kind of observation window sealing structure and with the equipment of the sealing structure.
Background technology
(Plasma Enhanced Chemical Vapor Deposition, plasma enhanced chemical are meteorological by PECVD
Precipitation equipment) often apply in TFT-LCD (Thin Film Transistor-Liquid Crystal Display, film crystal
Pipe liquid crystal display), in thin film solar industry, act as the plated film on substrate.Coating process is in closed processing chamber
It carries out, in some cases, the indoor state of process cavity, such as：Substrate breakage, center pin cap (Center pin cap) are de-
Fall, be grounded (Grounding) fracture etc., need naked eyes to confirm.In general, observation window (View is arranged on processing chamber wall body
Window), for checking chamber interior the case where.Since PECVD device carries out plasma chemistry under vacuum, hot environment
The features such as vapor deposition, this observation window needs to have vacuum sealing, high temperature resistant, corrosion-resistant, filter UV radiation, energy light transmission.
It is as shown in Figure 1 the structural schematic diagram of observation window sealing structure in PECVD device in the prior art.As shown in Figure 1,
In the prior art, the channel for installing observation window, the channel are offered on the chamber wall body of the processing chamber of PECVD device
For stepped passageway, the aperture on the inside of abluminal compartment is less than the aperture on the outside of abluminal compartment, and sealing structure is pacified on the outside of chamber
Dress.Observation window sealing structure includes mainly：Washer 10, thin sheet glass 20, O-ring seal (O-ring) 30, filtering UV glass
40, block 50, block washer 60 and block lock screw 70 etc..
The installation process of observation window sealing structure is in prior art PECVD device：
The first step, the mounting gasket 10 on the cascaded surface of stepped passageway；Second step installs thin sheet glass outside washer 10
20；Third walks, and the O-ring seal 30 that seals is installed in the surrounding of thin sheet glass 20；4th step, installation filtering UV glass
40；5th step installs outermost block washer 60 and block 50, and block 50 inwardly squeezes under the effect of lock screw 70, into
And the inclined surface of filtering UV glass 40 is made to squeeze O-ring seal 30, O-ring seal 30 is contacted with thin sheet glass 20 and vias inner walls
To reach sealing effect.
5~8 observation windows are housed in usual PECVD device, with being used in long-time high temperature, corrosive environment, O-shaped sealing
Circle is corroded, and leakage (Leak) occurs, so O-ring seal needs to regularly replace.
Observation window sealing structure has the following problems in prior art PECVD device：
1), O-ring seal is difficult to install：O-ring seal is installed on the inside of channel, is needed in advance by O-ring seal and thin slice
Glass and the surrounding wall body in channel are bonded completely, but O-ring seal is easily sagging, when filtering UV glass inwardly squeezes, O-shaped sealing
It encloses sagging part to contact with filtering UV glass fronts, O type sealing rings are not carried out to be contacted with wall body extruding, cannot be reached close
Envelope acts on, and repeated disassembled and assembled increases task difficulty；
2), O-ring seal is removed difficult：O-ring seal under long-time high temperature extrusion, usually with vias inner walls and thin slice
Glass sticks together, and is not easily taken out.Block is removed in outside, no stress point, and current method can only be struck with hard object on the inside of chamber
It hits；
3) it, filters UV glass and thin sheet glass is easily rupturable, loss is big：When removing operation, filtering UV glass and thin slice glass
Glass is easily broken, and is caused damages, and processing chamber is more in PECVD device, per chamber observation window quantity again it is more, and filter UV glass with
The cost of thin sheet glass is again high, and this considerably increases loss amounts；
4) operation after, can only beginning to speak：External block removes, and filtering UV glass is without stress point, will from inside after can only beginning to speak
The glass of bonding taps.
It can be seen that in the prior art PECVD device there are O-ring seal take out it is difficult, easily cause filtering UV glass and
The problems such as thin sheet glass ruptures, and the replacement operation time is long.
Invention content
The purpose of the present invention is to provide a kind of observation window sealing structure and with the equipment of the sealing structure, installation side
Just, and it is readily removable except sealing ring, good seal performance.
Technical solution provided by the present invention is as follows：
A kind of observation window sealing structure, the observation channel for being installed on chamber, the observation channel include around shape
At the step fitting surface on the inner wall in the observation channel, the step fitting surface is towards on the outside of the chamber；The observation
Window sealing structure includes：
Cricoid first washer, first washer, which is adjacent to, to be assemblied on the step fitting surface；
It is installed on the observation glass of the side far from the chamber of first washer, the observation glass includes opposite
First surface and second surface, the first surface is towards the chamber, the edge of the second surface and the sight
It examines to be formed between the inner wall in channel and have the gap；
Sealing ring, the sealing ring are placed in the gap, and in the observation glass and the observation channel
Wall completely attaches to；
And the block of the surrounding setting around the observation channel, the block are installed on the wall body of the chamber,
And the block at least covers the gap, is sealed between the second surface of the observation glass.
Further, it is completely attached between the surrounding and first washer of the first surface of the observation glass.
Further, the observation glass is formed with step structure, the step in the edge of the second surface
The step surface of structure is located at the step surface and described second towards the outside of the chamber on the peripheral surface of the observation glass
Part between surface forms the first side wall, the sealing ring and the first side wall, the step surface and the observation channel
Inner wall completely attach to.
Further, the outer diameter of sealing ring preset value smaller than the width in the gap, the preset value can
So that the sealing ring is extruded in the gap.
Further, the second pad to seal is provided between the block and the second surface of the observation glass
Circle.
Further, the block is fixed on by block fastener on the wall body of the chamber.
Further, width of the gap at any position along the surrounding in the observation channel is predetermined width
Value.
Further, the observation glass includes multiple sides, wherein the chamfer shape between two neighboring side is circle
Sliding easement curve shape, and the shape in the observation channel and the edge shape of the observation glass match, so that the seam
Width of the gap at any position along the surrounding in the observation channel is predetermined width value.
Further, the sealing ring is O-ring seal；First washer is Teflon washer；The observation glass
For can filter preset wavelength light filter glass.
A kind of equipment with observation window sealing structure, the equipment include chamber and are installed on as above on the chamber
The observation window sealing structure.
Beneficial effects of the present invention are as follows：
Observation window sealing structure provided by the present invention, compared to the prior art in observation window sealing structure, installation step
It is rapid few, can minimum four step complete installation process, installation is more easy；When needing to remove replacement sealing ring, it is only necessary to will most
The block in outside is dismantled, and can be taken out sealing ring with point hook, without that will observe the taking-ups such as glass and the first washer, easy dismounting
Operation；Without beginning to speak, it can be sealed the replacement operation of circle on the outside of chamber, promote operating efficiency；In addition, in the prior art
Observation window sealing structure compare, sealing ring is farther away from chamber interior environment, resistance to corrosion enhancing；In addition, with existing skill
Observation window sealing structure in art is compared, and one piece of thin glass can be saved, cost-effective, and completely avoids tearing open in the prior art
The possibility that glass ruptures when sealing ring takes out glass is changed, greatly saves and uses consuming cost；In addition, provided by the present invention
Observation window sealing structure, sealing ring form sealing, ensure close by being squeezed into observation glass and observing the gap between channel
Effect is sealed, and under the differential pressure action of chamber medial and lateral, sealing effect is more preferably.
Description of the drawings
Fig. 1 shows the structural schematic diagrams of the observation window sealing structure in PECVD device in the prior art；
Fig. 2 indicates the structural schematic diagram of the observation window sealing structure provided in the embodiment of the present invention；
Fig. 3 indicates structural representation of the observation window sealing structure when not installing sealing ring provided in the embodiment of the present invention
Figure；
Fig. 4 indicates the side view of Fig. 3.
Specific implementation mode
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
Attached drawing, the technical solution of the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is this hair
Bright a part of the embodiment, instead of all the embodiments.Based on described the embodiment of the present invention, ordinary skill
The every other embodiment that personnel are obtained, shall fall within the protection scope of the present invention.
The problems such as difficult there are O-ring seal dismounting for observation window sealing structure in PECVD device in the prior art, this
Invention provides a kind of observation window sealing structure, easy for installation, and readily removable except sealing ring, good seal performance.
The observation window sealing structure that the embodiment of the present invention is provided can be applied to the PECVD high to sealing requirements
On the chamber wall body of equipment, it can also be applied in the equipment that other need installation observation window.It is often necessary to install observation window
Observation channel for installing observation window is set on the wall body of chamber, in general, which is designed as stepped passageway,
Its aperture on the inside of abluminal compartment is less than the aperture on the outside of abluminal compartment, forms the platform being looped around on the inner wall in the observation channel
Rank fitting surface, and the step fitting surface is towards on the outside of the chamber.
As shown in Fig. 2, the observation window sealing structure that the embodiment of the present invention is provided includes：
Cricoid first washer 100, first washer 100, which is adjacent to, to be assemblied on the step fitting surface；
It is installed on the observation glass 200 of the side far from the chamber of first washer 100, the observation glass
200 include opposite first surface 201 and second surface 202, and the first surface 201 is towards the chamber, second table
It is formed between the edge in face 202 and the inner wall of the observation channel A and has the gap 700；
Sealing ring 300, the sealing ring 300 are placed in the gap 700, and with the observation glass 200 and described
The inner wall for observing channel A completely attaches to；
And the block 400 of the surrounding setting around the observation channel A, the block 400 are installed on the chamber
On wall body, and the block 400 at least covers the gap 700, between the second surface 202 of the observation glass 200
Sealing.
First, cricoid first washer 100 is assemblied in when mounted for observation window sealing structure provided by the present invention
In observation channel A on apparatus cavity wall body, and it is close to the step fitting surface in observation channel A；Then, then glass will be observed
Observation glass 200 is installed in the observation channel A (as shown in Figure 3) by 200 first surface 201 towards chamber inside；
Then, sealing ring 300 (preferably O types sealing ring 300) is filled in the edge of the second surface 202 of observation glass 200 with
It observes in the gap 700 formed between the inner wall of channel A, and complete with the inner wall of the observation glass 200 and the observation channel A
Full connected, to reach sealing effect；Finally, outermost block 400 is installed, glass 200 will be observed and be fixed on observation channel
In A.When needing to remove replacement sealing ring 300, it is only necessary to outermost block 400 be dismantled, being hooked with point can be by sealing ring 300
It takes out, it is not necessary that the taking-up such as glass 200 and the first washer 100 will be observed, you can remove sealing ring 300.
It can be seen that observation window sealing structure provided by the present invention, compared to the prior art in observation window sealing knot
Structure, installation steps are few, can minimum four step complete installation process, installation is more easy；
When needing to remove replacement sealing ring 300, it is only necessary to outermost block 400 be dismantled, can will be sealed with point hook
Circle 300 takes out, and is taken out without that will observe glass 200 and the first washer 100 etc., simplicity dismounting operation；
Also, without beginning to speak, it can be sealed the replacement operation of circle 300 on the outside of chamber, promote operating efficiency；
In addition, compared with observation window sealing structure in the prior art, in observation window sealing structure provided by the present invention
Sealing ring 300 farther away from chamber interior environment, for example, in the chamber of PECVD device high temperature Plasma (plasma) ring
Border, resistance to corrosion enhancing；
In addition, observation window sealing structure provided by the present invention is compared with observation window sealing structure in the prior art, it is close
It is different to seal principle, one piece of thin glass can be saved, it is cost-effective, and completely avoid changeing the general of sealing ring 300 in the prior art
The possibility of glass rupture when glass takes out, greatly saves and uses consuming cost；
In addition, observation window sealing structure provided by the present invention, sealing ring 300 by be squeezed into observation glass 200 with
The gap 700 between the A of channel is observed, sealing is formed, ensures sealing effect, and under the differential pressure action of chamber medial and lateral, sealing effect
Fruit is more preferably；In addition, it is different from the sealing principle of observation window sealing structure in the prior art, when outside stopper 400 is installed, block
400 are not subject to extruding force substantially, still can guarantee sealing effect.
In embodiment provided by the present invention, it is preferred that as shown in Fig. 2, the first surface of the observation glass 200
It is completely attached between 201 surrounding and first washer 100.
Using the above scheme, between the surrounding and the first washer 100 of the first surface 201 of the observation glass 200 directly
Contact sealing, wherein Teflon washer may be used in first washer 100, when the sealing structure is applied in PECVD device
When, blocking F ion (fluorine ion) can be played, corrosion of the F ion to sealing ring 300 is slowed down, in addition, outermost side block blocks 400 are pacified
After dress, its effect for stopping fluorine ion can be improved by squeezing the first washer 100 of inside.
It should be understood that in practical applications, can also the observation glass 200 and first washer 100 it
Between other structures are added according to actual demand, the present invention is defined this not to this.
In addition, in embodiment provided by the present invention, it is preferred that as shown in Fig. 2, the observation glass 200 is described
The edge of second surface 202 is formed with step structure, and the step surface 2021 of the step structure is towards the outer of the chamber
Side, part shape between the step surface 2021 and the second surface 202 on the peripheral surface of the observation glass 200
At the first side wall 2022, the sealing ring 300 and the first side wall 2022, the step surface 2021 and the observation channel A
Inner wall completely attach to.
Using the above scheme, the observation glass 200 is designed as the glass blocks of stepped ramp type, the four of its second surface 202
Step structure is formed in circumferential edges, by forming the gap between the observation channel A on the step structure and chamber wall body
700, this structure is relatively simple, and the observation glass 200 is easy to manufacture, and sealing ring 300 is easy to fill in；And sealing ring 300 can
To observe the inner wall of channel A and observe close between the first side wall 2022 of glass 200, the step surface 2021
Contact forms the sealing of 3 faces, ensures sealing effect.
It should be noted that in other embodiments of the invention, for the second surface 202 of the observation glass 200
Edge and it is described observation channel A between formed gap 700 concrete form be not defined, other can also be used
Structure, such as：The neighboring of the observation glass 200 can also be to be formed close to the position of the second surface 202
Tapered slope structure so that the area of second surface 202 is less than the area of first surface 201, and forms the gap 700.
In addition, in embodiment provided by the present invention, it is preferred that the outer diameter of the sealing ring 300 is than the seam
The small preset value of width of gap 700, the preset value enable to the sealing ring 300 to be extruded in the gap 700.
Using the above scheme, the outer diameter for designing the sealing ring 300 is more smaller than the width in gap 700 so that sealing
Circle 300, which can be squeezed just, to be filled in gap 700, ensure that the sealing ring 300 and the first side wall 2022, the step
The inner wall of face 2021 and the observation channel A are in close contact, and form 3 face sealing effects.
In addition, in embodiment provided by the present invention, it is preferred that as shown in Fig. 2, the block 400 and the observation
The second packing ring 500 to seal is provided between the second surface 202 of glass 200.
Using the above scheme, second surface of the second packing ring 500 in the block 400 and the observation glass 200
Play the role of sealing function between 202, also acts as extruding of the buffer block 400 to observation glass 200.
In addition, in embodiment provided by the present invention, the block 400 is fixed on described by 400 fastener of block
On the wall body of chamber.Preferably, as shown in Fig. 2, 400 fastener of the block includes for being screwed the block 400 in institute
State the fastening bolt 600 on the wall body of chamber.Using the above scheme, block 400 can be screwedly mounted on by fastening bolt 600
It is easy to disassemble on the wall body of chamber.
In addition, in embodiment provided by the present invention, it is preferred that as shown in Figure 3 and Figure 4, the gap 700 is along institute
The width stated at any position of the surrounding of observation channel A is predetermined width value.Preferably, the observation glass 200 includes
Multiple sides, wherein the chamfer shape between two neighboring side is round and smooth easement curve shape, and the shape of the observation channel A
The edge shape of shape and the observation glass 200 matches, so that the gap 700 is in the surrounding along the observation channel A
Width at any position is predetermined width value.
Using the above scheme, by being designed to the shape for observing glass 200, glass 200 will be observed in the prior art
Right angle angle between two neighboring side is improved to round and smooth easement curve shape, accordingly by the observation channel on chamber wall body
A is designed as matching with the edge shape of the observation glass 200, is formed between glass 200 and observation channel A inner walls to observe
Gap 700 it is uniform, it is ensured that sealing performance.
As shown in figure 4, in a kind of specific embodiment provided by the present invention, the observation glass 200 can be a length
Strip comprising two opposite long sides and two opposite short sides, two of which long side are straight flange, and two short sides are circular arc
Side, and the junction of long side and short side is rounding off curve-like.
Of course, it should be understood that in practical applications, the observation glass 200 can also be that four sides are straight flange,
Alternatively, the observation glass 200 can also be two long sides and two short sides be arc-shaped (such as：Outside the observation glass 200
Shape is ellipse or round), alternatively, two long sides of the observation glass 200 are arc-shaped, two short sides are straight flange etc., only need to be
It is smooth curve shape at the chamfering on adjacent both sides, to ensure that the gap 700 is uniform.
In addition it is also necessary to which explanation is, it is preferred that the observation glass 200 is the mistake for the light that can filter preset wavelength
Filter glass.The light of the wherein described preset wavelength can be UV light, can also be and needed according to physical device and to filter out other pre-
The light of standing wave length.
In addition, additionally providing a kind of equipment with observation window sealing structure, the equipment packet in the embodiment of the present invention
The observation window sealing structure as described above for including chamber and being installed on the chamber.The equipment can be PECVD device,
Can be that other need to install observation window, and to the higher equipment of sealing requirements.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvement and replacement can also be made, these improve and replace
Also it should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of observation window sealing structure, the observation channel for being installed on chamber, the observation channel include around formation
Step fitting surface on the inner wall in the observation channel, the step fitting surface is towards on the outside of the chamber；It is characterized in that,
The observation window sealing structure includes：
Cricoid first washer, first washer, which is adjacent to, to be assemblied on the step fitting surface；
It is installed on the observation glass of the side far from the chamber of first washer, the observation glass includes opposite the
One surface and second surface, for the first surface towards the chamber, the edge of the second surface and the observation are logical
It is formed and is had the gap between the inner wall in road；
Sealing ring, the sealing ring are placed in the gap, and complete with the inner wall of the observation glass and the observation channel
Full connected；
And the block of the surrounding setting around the observation channel, the block is installed on the wall body of the chamber, and institute
It states block and at least covers the gap, sealed between the second surface of the observation glass.
2. observation window sealing structure according to claim 1, which is characterized in that
It is completely attached between the surrounding and first washer of the first surface of the observation glass.
3. observation window sealing structure according to claim 1, which is characterized in that
The observation glass is formed with step structure, the step surface court of the step structure in the edge of the second surface
To the outside of the chamber, the part on the peripheral surface of the observation glass between the step surface and the second surface
The first side wall is formed, the inner wall of the sealing ring and the first side wall, the step surface and the observation channel connects completely
It touches.
4. observation window sealing structure according to claim 1, which is characterized in that
The outer diameter of sealing ring preset value smaller than the width in the gap, the preset value enable to the sealing ring
It is extruded in the gap.
5. observation window sealing structure according to claim 1, which is characterized in that
It is provided with the second packing ring to seal between the block and the second surface of the observation glass.
6. observation window sealing structure according to claim 1, which is characterized in that
The block is fixed on by block fastener on the wall body of the chamber.
7. observation window sealing structure according to claim 1, which is characterized in that
Width of the gap at any position along the surrounding in the observation channel is predetermined width value.
8. observation window sealing structure according to claim 7, which is characterized in that
The observation glass includes multiple sides, wherein the chamfer shape between two neighboring side is round and smooth easement curve
Shape, and the shape in the observation channel and the edge shape of the observation glass match, so that the gap is along the sight
It is predetermined width value to examine the width at any position of the surrounding in channel.
9. observation window sealing structure according to claim 1, which is characterized in that
The sealing ring is O-ring seal；First washer is Teflon washer；The observation glass is default for that can filter
The filter glass of the light of wavelength.
10. a kind of equipment with observation window sealing structure, which is characterized in that the equipment includes chamber and is installed on the chamber
Observation window sealing structure as described in any one of claim 1 to 9 on room.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710054587.8A CN106639791B (en) | 2017-01-24 | 2017-01-24 | Observation window sealing structure and equipment with the sealing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710054587.8A CN106639791B (en) | 2017-01-24 | 2017-01-24 | Observation window sealing structure and equipment with the sealing structure |
Publications (2)
| Publication Number | Publication Date |
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| CN106639791A CN106639791A (en) | 2017-05-10 |
| CN106639791B true CN106639791B (en) | 2018-08-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710054587.8A Expired - Fee Related CN106639791B (en) | 2017-01-24 | 2017-01-24 | Observation window sealing structure and equipment with the sealing structure |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109702447B (en) * | 2019-02-20 | 2020-04-07 | 中国船舶科学研究中心（中国船舶重工集团公司第七0二研究所） | Spherical crown type observation window sealing ring replacing device and replacing method |
| CN111703582A (en) * | 2020-06-29 | 2020-09-25 | 中国人民解放军第五七一九工厂 | Repairing method for observation window of high-temperature photosensimeter of aircraft engine |
| CN114876325B (en) * | 2022-05-12 | 2023-09-19 | 安徽唯嵩光电科技有限公司 | Quick-change glass window and color selector |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19918802A1 (en) * | 1998-01-17 | 2000-11-02 | Robby Ebert | Large area vacuum laser beam processing apparatus, e.g. for micro structuring semiconductor wafer surfaces, has a rotating window disk sealed by an O-ring seal and provided with a smaller window |
| CN201545908U (en) * | 2009-08-25 | 2010-08-11 | 东莞宏威数码机械有限公司 | Cavity observation window |
| CN202483386U (en) * | 2011-12-19 | 2012-10-10 | 深圳市中兴昆腾有限公司 | Self-fastening type observation window structure |
| CN202832007U (en) * | 2012-09-13 | 2013-03-27 | 沈阳远大铝业工程有限公司 | Two-dimensional adjustable unit window |
| CN204002412U (en) * | 2014-08-14 | 2014-12-10 | 中国船舶重工集团公司第七一九研究所 | A kind of airtight withstand voltage observation port under water |
| CN104694902A (en) * | 2015-03-19 | 2015-06-10 | 中国建材国际工程集团有限公司 | Cavity protection and monitoring device for vacuum coating production line |
-
2017
- 2017-01-24 CN CN201710054587.8A patent/CN106639791B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19918802A1 (en) * | 1998-01-17 | 2000-11-02 | Robby Ebert | Large area vacuum laser beam processing apparatus, e.g. for micro structuring semiconductor wafer surfaces, has a rotating window disk sealed by an O-ring seal and provided with a smaller window |
| CN201545908U (en) * | 2009-08-25 | 2010-08-11 | 东莞宏威数码机械有限公司 | Cavity observation window |
| CN202483386U (en) * | 2011-12-19 | 2012-10-10 | 深圳市中兴昆腾有限公司 | Self-fastening type observation window structure |
| CN202832007U (en) * | 2012-09-13 | 2013-03-27 | 沈阳远大铝业工程有限公司 | Two-dimensional adjustable unit window |
| CN204002412U (en) * | 2014-08-14 | 2014-12-10 | 中国船舶重工集团公司第七一九研究所 | A kind of airtight withstand voltage observation port under water |
| CN104694902A (en) * | 2015-03-19 | 2015-06-10 | 中国建材国际工程集团有限公司 | Cavity protection and monitoring device for vacuum coating production line |
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|---|---|
| CN106639791A (en) | 2017-05-10 |
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