CN106629051A - Storage container - Google Patents
Storage container Download PDFInfo
- Publication number
- CN106629051A CN106629051A CN201610289391.2A CN201610289391A CN106629051A CN 106629051 A CN106629051 A CN 106629051A CN 201610289391 A CN201610289391 A CN 201610289391A CN 106629051 A CN106629051 A CN 106629051A
- Authority
- CN
- China
- Prior art keywords
- lid
- container body
- container
- receiving hole
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/20—External fittings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D43/00—Lids or covers for rigid or semi-rigid containers
- B65D43/02—Removable lids or covers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D55/00—Accessories for container closures not otherwise provided for
- B65D55/02—Locking devices; Means for discouraging or indicating unauthorised opening or removal of closure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67363—Closed carriers specially adapted for containing substrates other than wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D2255/00—Locking devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D2585/00—Containers, packaging elements or packages specially adapted for particular articles or materials
- B65D2585/68—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form
- B65D2585/86—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form for electrical components
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The present invention provides a storage container for storing a substrate, which improves the opening and closing of the lid body and improves the airtightness of the container itself. The container is provided with a storage container for storing a substrate on an inlet and outlet of the substrate and accommodating a substrate from an inlet and the outlet, comprising: an opening provided on the other end side of the container main body and an opening from the other end side An inlet and outlet fan filter unit and a lid for opening and closing the inlet and outlet are formed with a cover mounting arm engaged with the container main body, and a lid body mounting arm is formed on the container main body so as to engage with the lid mounting arm. The lid body mounting arm has a protrusion which is formed in an acute angle with respect to the height direction of the container main body when the cover body is provided on the container body, and the cover body has a cover receiving hole. The cover receiving hole can be fitted to the projection and formed in an acute angle shape with respect to the height direction of the container main body.
Description
Technical field
The present invention relates to a kind of opening portion of the side in container body possess the gateway for accessing substrate and from
Receive the accommodating container of the substrate reception of the substrate in the gateway.
Background technology
At present, during the liquid crystal glass base used in liquid crystal panel is to be accommodated in the accommodating container that can carry out multilayer storage
State is conveyed or keeping is in dustless interior.In the accommodating container of the substrate reception, it is provided with the gateway for being used to access substrate
The lid (door, gate) that can freely load and unload relative to container body.For the accommodating container of substrate reception, except requiring to improve
Air-tightness inside container, prevent beyond the generation of the foreign matters such as particulate, with the maximization of glass substrate, manufacture device it is automatic
Change etc., also require that the opening and closing for improving lid.From from the aspect of such, accommodating container as Patent Document 1 is developed.
Accommodating container shown in patent document 1 includes：Inside is configured with the box main body portion of substrate, is formed in box main body portion
A part and access substrate box opening portion, including closure box opening portion sealing plate gate structure, box main body is located in portion
It is formed with along the opening and closing direction of sealing plate respectively on the position of the periphery of box opening portion and the face relative to each other with gate structure convex
Rise, positioned at the raised of box main body portion side and positioned at the raised separated from one another of gate structure side.
Patent document
Patent document 1：International Publication No. 2010/134492
The content of the invention
However, the accommodating container of patent document 1 by the groove of guide part set on sealing plate because be inserted in box main body portion
Upper set roller bearing is simultaneously arranged on sealing plate in box main body portion, so there is the groove of roller bearing and guide part becoming a little
Contact and make sealing plate relative to the bad stability in box main body portion, the problem of the air-tightness reduction of container itself.
Therefore, it is an object of the present invention to provide it is a kind of improve lid opening and closing and improve the airtight of container itself
The accommodating container of the substrate reception of property.
It is above problem to be solved by this invention, below, the scheme to being used to solve the problem is illustrated.
That is, accommodating container of the invention is that possess the discrepancy for accessing substrate in the opening portion of a side of container body
The accommodating container of mouth and the substrate reception from the gateway storage substrate, it includes：Fan filter uints, are located at
The opening portion of the another side of the container body, and divulge information to the gateway from the opening portion of the another side, and
Lid, is located at the gateway, and is opened and closed the gateway；The card engaged with the container body is formed with the lid
Conjunction portion, is formed with the fastener that the lid is engaged and engaged with the holding section, the holding section on the container body
With projection, the short transverse quilt of the container body when projection is located on the container body relative to the lid
Be formed as acute angle-shaped, the fastener has receiving hole, the receiving hole can be chimeric with the projection, and relative to the appearance
The short transverse of device main body is formed acute angle-shaped.
In above-mentioned composition, relative to container body short transverse be formed it is acute angle-shaped raised and relative to container master
The short transverse of body is formed acute angle-shaped receiving hole and is fitted together to, and thus lid is installed on container body.
The present invention accommodating container on the basis of above-mentioned accommodating container, the receiving hole it is chimeric described projection side
Open end be formed as skewed.
In above-mentioned composition, the projection of lid (holding section) is while in the open end slip of receiving hole, one side and receiving hole
It is chimeric.
On the basis of above-mentioned accommodating container, the receiving hole is in the chimeric projection for the accommodating container of the present invention
The end of the contrary side in side has opening portion.
In above-mentioned composition, the foreign matter produced at the fastener of container body is discharged from the opening portion.
On the basis of above-mentioned accommodating container, the holding section is located at the appearance to the accommodating container of the present invention along the lid
The short transverse of lid when in device main body is provided with multiple, the engaging above in the short transverse of the lid
Portion is formed in the way of the length of its horizontal direction is longer than the length of the horizontal direction of underlying holding section in contrast.
The accommodating container of the present invention is formed with for making on the basis of above-mentioned accommodating container in the end of the lid
State the lug boss that lid is lifted along the short transverse of the container body.
In above-mentioned composition, lid is set to lift along the short transverse of container body by lug boss.
On the basis of above-mentioned accommodating container, the fan filter uints are arranged to phase to the accommodating container of the present invention
For the container body is loaded and unloaded, the engaging engaged with the container body is formed with the fan filter uints
Portion, is formed with the container body and engages and engage the fan filter with the holding section of the fan filter uints
The fastener of unit, the holding section has projection, and the projection is located at the container relative to the fan filter uints
The short transverse of container body when in main body is formed acute angle-shaped, and the fastener has receiving hole, the undertaking
Hole can be chimeric with the projection, and relative to the container body short transverse be formed it is acute angle-shaped.
In above-mentioned composition, relative to container body short transverse be formed it is acute angle-shaped raised and relative to container master
The short transverse of body is formed acute angle-shaped receiving hole and is fitted together to, and thus fan filter uints are installed on container body.
Accommodating container of the invention, because making to be formed relative to the short transverse of container body acute angle-shaped convex
Rise and be formed acute angle-shaped receiving hole and be fitted together to relative to the short transverse of container body, so raised and receiving hole is connect with face
Tactile mode is fitted together to.Therefore, lid having good stability relative to container body, the air-tightness of accommodating container itself improves.
In addition, because the projection for making fore-end thin is embedded in the wide receiving hole of intake section, it is possible to making projection easily be fitted together to
In receiving hole.Therefore, it is possible to lid is easily installed at into container body.
Description of the drawings
Fig. 1 is the stereogram of the accommodating container of the present invention.
Fig. 2 is the exploded perspective view of the accommodating container of the present invention.
Fig. 3 be the present invention accommodating container lid installing arm (filter installing arm) and lid undertaking body (filter holds
Junctor) side view.
Fig. 4 is the stereogram of the lid undertaking body (filter undertaking body) of the accommodating container of the present invention.
Fig. 5 (a) is the stereogram of protruding part set on the lid of the accommodating container of the present invention, (b) is to constitute gate
The stereogram of the lifting arm of the lowering or hoisting gear of opening and closing device.
Fig. 6 (a) be open the present invention accommodating container lid before (after closing) shutter opening and closing apparatus front view,
(b) be open the present invention accommodating container lid after (before closing) shutter opening and closing apparatus front view.
Symbol description：
10 accommodating containers
11 container bodies
12 lids
13 fan filter uints
14 gateways
20 lid installing arms (holding section)
22nd, 32 is raised
25 lid undertaking body (fastener)
27 lid receiving holes (receiving hole)
27c, 37c opening portion
30 filter installing arms (holding section)
35 filter undertaking body (fastener)
37 filter receiving holes (receiving hole)
40 protruding parts (lug boss)
Specific embodiment
The accommodating container 10 of the present invention is illustrated.It is explained, in the following description, before and after accommodating container 10
Direction is X-direction, and the side (side of gateway described later 14) of substrate (not shown) is accessed with accommodating container 10 as face side,
With its opposition side as rear side.Further, from terms of the front of accommodating container 10, with left and right directions as Y direction, with lid described later
12 and fan filter with framework 19 be arranged on container body 11 on when accommodating container 10 (container body 11) short transverse
(above-below direction) is Z-direction.
As shown in Figures 1 and 2, accommodating container 10 is the container for receiving the substrate reception of substrate with multilayer.Base
Plate is, for example, the glass substrate used in liquid crystal panel.
Accommodating container 10 is by the container body 11 of the main body for constituting accommodating container 10, a side of opening and closing container body 11
The lid 12 of opening portion (gateway 14 described later), opening portion (the filter peace described later of the another side of container body 11
Dress mouth 15) constitute to the fan filter uints 13 of opening portion (gateway 14) ventilation of a side.
Container body 11 is formed to lay across the flat column of posture.Possesses use in the opening portion of a side of container body 11
In the gateway 14 of access substrate, and substrate is received from gateway 14.In the inside of container body 11, in above-below direction (Z axis side
To) multiple substrates are kept with the state of spaced apart arrangement.Possess for pacifying in the opening portion of the another side of container body 11
The filter installing port 15 of dress fan filter uints 13.Left and right sides in the side of gateway 14 of container body 11 possess narrow
Seam 16.Slit 16 is the elongated hole that is upwardly formed of upper and lower in container body 11, when the container body 11 of lid 12 is unloaded
It can be seen that the mode of the inside of container body 11 is constituted.
Lid 12 is constituted using plate-shaped member.The upper end of lid 12 and left and right end portions have the bending part of vertical bending
12a.Bending part 12a is constituted in the way of on the gateway 14 that can be entrenched in container body 11.
Fan filter uints 13 are made up of fan filter 18 and fan filter framework 19.Fan filter 18 is
The one-piece type filter of fan from filter installing port 15 to gateway 14 that divulge information from.
Fan filter framework 19 is the filter installing port for fan filter 18 to be arranged on container body 11
15 framework.Fan filter is constituted with framework 19 using plate-shaped member.The left and right end portions of fan filter framework 19 have
The bending part 19a of vertical bending.Bending part 19a structures in the way of on the filter installing port 15 that can be entrenched in container body 11
Into.The upper end of fan filter framework 19 is formed with what is abutted with the upper end of the filter installing port 15 of container body 11
Abutment portion 19b.
In accommodating container 10, lid 12 and fan filter uints 13 relative to container body 11 can freely load and unload
Mode is installed.Specifically, the gateway 14 (opening portion of a side of container body 11) of container body 11 is provided with lid
12, the filter installing port 15 (opening portion of the another side of container body 11) of container body 11 is provided with fan filter list
The fan filter framework 19 of unit 13.Accommodating container 10 on container body 11 with by pulling down lid 12 and fan filter
The mode for being capable of easily cleaning container main body 11 with framework 19 is constituted.
There is the lid engaged with container body 11 to install on the top and bottom of the bending part 12a of the left and right sides of lid 12
Arm 20 (one of " holding section "), lid 12 is arranged on container body 11.Similarly, fan filter framework 19
The top and bottom of the bending part 19a of the left and right sides has the filter installing arm 30 engaged with fan filter framework 19
(one of " holding section "), fan filter is arranged on container body 11 with framework 19.
As shown in figure 3, lid installing arm 20 is by the arm main body 21 of the main part for forming lid installing arm 20, arm main body 21
Projection 22 set on leading section is constituted.Similarly, filter installing arm 30 is by the main part for forming filter installing arm 30
Set projection 32 is constituted in arm main body 31, the leading section of arm main body 31.
The arm main body 21 of lid installing arm 20 is arranged to from the bending part 12a of the left and right sides of lid 12 towards lid 12 is pacified
Installation direction (fore-and-aft direction of accommodating container 10) loaded on container body 11 is prominent.Similarly, the arm of filter installing arm 30
Main body 31 is arranged to from the bending part 19a of the left and right sides of fan filter framework 19 towards fan filter framework 19 is pacified
Installation direction (fore-and-aft direction of accommodating container 10) loaded on container body 11 is prominent.
The projection 22 (projection 32 of filter installing arm 30) of lid installing arm 20 is made up of the part of triangle, for example
Formed using resinous part.Raised 22 (raised 32) are with short transverse (above-below direction) quilt relative to container body 11
Be formed as acute angle-shaped top 22c (top 32c).Raised 22 (raised 32) are relative with its acute angle-shaped top 22c (top 32c)
Arrange in arm main body 21 (arm main body 31) mode prominent downwards.Specifically, raised 22 (raised 32) are by relative to arm master
It is side 22a (side 32a) that body 21 (arm main body 31) is vertically formed, sharp to be formed relative to its side 22a (side 32a)
Inclined inclined plane 22b of the mode (inclined plane 32b) at angle is formed, with by side 22a (side 32a) and (inclination of inclined plane 22b
Face 32b) constitute top 22c (top 32c).Raised 22 (raised 32) with its project footpath from the base end part forward end of arm side by
Decrescence little mode is formed.
In addition, the top 22c (top 32c) of raised 22 (raised 32) is formed to be curved shape.Thereby, it is possible to mitigate projection
The generation of foreign matter when 22 (raised 32) contact with container body 11 (lid receiving hole 27 (filter receiving hole 37) described later),
Also, when by lid 12 (fan filter framework 19) on container body 11, raised 22 (raised 32) easily with
Container body 11 (lid receiving hole 27 (filter receiving hole 37)) engages.
As shown in Figures 1 and 2, lid installing arm 20 (filter installing arm 30) is with (the fan filter frame of lid 12
Frame 19) the length of horizontal direction (projected direction) of arm main body 21 (arm main body 31) that formed of top be longer than in (the wind of lid 12
Machine filter framework 19) bottom formed arm main body 21 (arm main body 31) horizontal direction (projected direction) length side
Formula is formed.Thus, when lid 12 (fan filter framework 19) is loaded and unloaded relative to container body 11, in (the blower fan of lid 12
Filter framework 19) bottom the lid installing arm 20 (filter installing arm 30) and the top shape in container body 11 that are formed
Into lid receiving hole 27 (filter receiving hole 37) do not interfere.
It is provided with the top and bottom of the left and right sides of the side of gateway 14 of container body 11 and pacifies with the lid of lid 12
Fill the lid undertaking body 25 (of " fastener ") that arm 20 engages and engages lid 12.Install in the filter of container body 11
The top and bottom of the left and right sides of mouthful 15 sides be provided with engage with the filter installing arm 30 of fan filter framework 19 and
The filter undertaking body 35 (one of " fastener ") of locking fan filter uints 13 (fan filter framework 19).
As shown in Figures 3 and 4, lid undertaking body 25 accepts main body by the lid of the main part for forming lid undertaking body 25
26th, (one of " receiving hole ") composition of the lid receiving hole 27 that the top for accepting main body 26 from lid is formed towards bottom.Equally
Ground, filter undertaking body 35 is accepted main body 36, is accepted from filter by the filter of the main part for forming filter undertaking body 35
(one of " receiving hole ") composition of the filter receiving hole 37 that the top of main body 36 is formed towards bottom.
The lid of lid undertaking body 25 accepts the left and right sides that main body 26 is arranged on the side of gateway 14 of container body 11
The projection 22 of upper cover body installing arm 20 can be entrenched in the position in lid receiving hole 27.Similarly, filter undertaking body 35
Filter accepts main body 36 and is arranged on filter installing arm in the left and right sides of the side of filter installing port 15 of container body 11
30 projection 32 can be fastened on the position in filter receiving hole 37.
Lid accepts the plate that main body 26 (filter accepts main body 36) is projected using the left and right sides of container body 11
Shape part is constituted.The substantially central portion that the plate-shaped member of the protrusion of main body 26 (filter accepts main body 36) is accepted in lid is formed
There is lid receiving hole 27 (filter receiving hole 37).
Being formed as can for the lid receiving hole 27 (the filter receiving hole 37 of filter undertaking body 35) of lid undertaking body 25
It is chimeric with the projection 22 of lid installing arm 20 (projection 32 of filter installing arm 30), it is fitted together to raised 22 from the opening portion on its top
(raised 32).That is, the top of lid receiving hole 27 (filter receiving hole 37) becomes the side of chimeric raised 22 (raised 32), its
Bottom becomes the side contrary with the side of chimeric raised 22 (raised 32).Lid receiving hole 27 (filter receiving hole 37) is relative
It is formed in the short transverse (above-below direction) of container body 11 acute angle-shaped.Specifically, (filter holds lid receiving hole 27
Connect hole 37) with from the side when accept the hole that main body 26 (filter accept main body 36) is formed in above-below direction relative to lid
Face 27a (hole face 37a) and in the way of being formed acute angle relative to hole face 27a (hole face 37a) it is inclined inclination hole face 27b
(inclining hole face 37b), lid receiving hole 27 (filter receiving hole 37) is gradually reduced from top with its A/F to bottom
Mode is formed.The A/F of lid receiving hole 27 (filter receiving hole 37) determines according to the shape of raised 22 (raised 32).
The bottom of lid receiving hole 27 (filter receiving hole 37) has opening portion 27c (opening portion 37c).Specifically
For, opening portion 27c (opening portion 37c) is by the hole face 27a (hole face of lid receiving hole 27 (filter receiving hole 37)
It is 37a) convex with the part that is, lid installing arm 20 (filter installing arm 30) for inclining hole face 27b (inclining hole face 37b) abutting
Play what the chimeric parts of top 22c (top 32c) of 22 (raised 32) formed opening and formed.By in lid receiving hole 27
The bottom of (filter receiving hole 37) arranges opening portion 27c (opening portion 37c), will make (the filter of lid installing arm 20
Installing arm 30) projection 22 (raised 32) be entrenched in lid receiving hole 27 (filter receiving hole 37) it is interior when the foreign matter that produces from opening
Oral area point 27c (opening portion 37c) is discharged, so as to not be deposited in the bottom of lid receiving hole 27 (filter receiving hole 37).
In the upper side ((filtration of projection 22 of chimeric lid installing arm 20 of lid receiving hole 27 (filter receiving hole 37)
The projection 32 of device installing arm 30) side) open end be formed with skewed face (beveled face 27d (beveled faces
37d)).Specifically, beveled face 27d (beveled face 37d) is in the hole of lid receiving hole 27 (filter receiving hole 37)
The upper end of face 27a (hole face 37a) and inclination hole face 27b (inclining hole face 37b), the side of container body 11 is towards lid receiving hole
27 (filter receiving holes 37) are formed skewed.By opening on the top of lid receiving hole 27 (filter receiving hole 37)
Mouthful end forms beveled face 27d (beveled face 37d), and the projection 22 of lid installing arm 20 be (filter installing arm 30
, 32) easily by lid receiving hole 27 (filter receiving hole 37) guiding, lid 12 (fan filter framework 19) is easily for projection
On container body 11.Even if in addition, lid installing arm 20 projection 22 (projection 32 of filter installing arm 30) from
Lid receiving hole 27 (filter receiving hole 37) somewhat stagger and it is chimeric in the case of, raised 22 (raised 32) also can be because of lid 12
The deadweight of (fan filter framework 19) and be entrenched in the appropriate location of lid receiving hole 27 (filter receiving hole 37).
As shown in Figure 1, Figure 2 and shown in Fig. 5 (a), lid 12 and fan filter framework 19 be provided with for make lid 12 or
A pair of protruding parts 40 (one of " lug boss ") that person's fan filter is lifted with framework 19.Protruding part 40 is relative to lid
The bending part 12a (bending part 19a) of the left and right sides of body 12 (fan filter framework 19) vertically prominent lug boss.It is raised
Part 40 is chimeric with the frame support member 58 of the lifting arm 54 in the lifting unit 53 of shutter opening and closing apparatus described later 50.
Protruding part 40 has the fitting portion 41 chimeric with the frame support member 58 of lifting arm 54 and in protruding part 40
Central portion be formed skewed raised rake 42.Fitting portion 41 is located at the leading section of protruding part 40, with base end part
Compare, diameter is formed less.Raised rake 42 is formed to incline from the lateral fitting portion 41 of cardinal extremity of protruding part 40
Shape.By arranging skewed raised rake 42 on protruding part 40, even if staggering from fitting portion 41 in protruding part 40
And in the case of the frame support member 58 of lifting arm 54 is embedded at raised rake 42, because frame support member 58 is borrowed
The sliding gomphosis of raised rake 42 are helped in the side of fitting portion 41, so protruding part 40 also can be with the frame support of lifting arm 54
Part 58 is easily fitted together to.
In addition, the front end of a protruding part 40 in a pair of protruding parts 40, is set in the way of it can freely rotate
There is roller 43.Roller 43 be when protruding part 40 is entrenched in the frame support member 58 of lifting arm 54 with shutter opening and closing described later
The part that the sensor 60 of the lifting unit 53 of device 50 is abutted.Protruding part is formed by using the roller 43 that can freely rotate
40 front end, can suppress to produce foreign matter when abutting with the sensor 60 of shutter opening and closing apparatus 50.
As shown in fig. 6, lid 12 and fan filter framework 19 pass through shutter opening and closing apparatus 50 relative to container body
11 are loaded and unloaded.Shutter opening and closing apparatus 50 are mainly transported to inside and outside device by the shell 51 of constituent apparatus main body, by accommodating container 10
Delivery section 52, lifting lid 12 and the lifting unit 53 of fan filter framework 19 constitute.
Shutter opening and closing apparatus 50 make accommodating container 10 be transported in device at delivery section 52, make the accommodating container 10 of conveying
Lid 12 and fan filter framework 19 lift in lifting unit 53, thus make lid 12 and fan filter framework 19
Load and unload relative to container body 11.
Delivery section 52 moves into the accommodating container 10 for being delivered to shutter opening and closing apparatus 50 in device, will unload lower cover 12 and wind
The container body 11 of machine filter framework 19 is taken out of in the cleaning device (not shown) of cleaning container main body 11.In addition, defeated
Send portion 52 container body 11 terminated by cleaning device cleaning (not shown) to be moved into device, lid 12 and wind will be mounted with
The container body 11 (accommodating container 10) of machine filter framework 19 is taken out of outside device.
Lifting unit 53 is respectively provided at the left and right sides of shutter opening and closing apparatus 50, to pass through the lifting unit 53 of the left and right sides from a left side
The mode of right clamping lid 12 (fan filter framework 19) is constituted.Lifting unit 53 is main by making (the fan filter of lid 12
With framework 19) lifting arm 54, the actuator 55, the side be freely lifted can lifting arm 54 that make the action of lifting arm 54 of lifting
The lifting guiding parts 56 of formula guiding lifting arm 54 is constituted.
As shown Fig. 5 (b), lifting arm 54 is main to be lifted lifting arm main body 57 and the support lid that guiding parts 56 is lifted by edge
The frame support member 58 of the protruding part 40 of body 12 (fan filter framework 19) is constituted.
The base end part of lifting arm main body 57 is supported in the way of it can be freely lifted relative to lifting guiding parts 56
Lifting guiding parts 56, in the upper support frame support member 58 of its front.
A pair of recesses 59 are formed with the top of frame support member 58.(the fan filter of lid 12 is fitted together on recess 59
With framework 19) protruding part 40 in fitting portion 41.In addition, the side of a recess 59 in a pair of recesses 59 is provided with biography
Sensor 60.
The roller 43 of the protruding part 40 of detection lid 12 of sensor 60 (fan filter framework 19).That is, sensor
Fitting portion 41 in the protruding parts 40 of 60 detections lid 12 (fan filter framework 19) whether with frame support member 58
Recess 59 be fitted together to, so as to detect whether lid 12 (fan filter framework 19) is supported by lifting arm 54.Sensor 60 is sharp
Constituted with the sensor of switching regulator, by load roller 43 and ON switch detecting roller 43.It is explained, sensor 60
It is connected with the control and regulation device (not shown) of regulating gate opening and closing device 50.Detection signal from sensor 60 is sent to this
Control and regulation device.The control and regulation device judges (the fan filter frame of lid 12 by the detection signal from sensor 60
Frame 19) supported by lifting arm 54.
Actuator 55 is constituted using the cylinder or hydraulic cylinder of such as vapour-pressure type or hydraulic type, and using its driving lifting is made
Arm 54 is lifted.
Left and right both ends vertically extending setting of the lifting guiding parts 56 in shutter opening and closing apparatus 50.
Then, the handling to the lid 12 in accommodating container 10 are illustrated.It is explained, because fan filter frame
The handling of frame 19 are identical with lid 12, so the description thereof will be omitted.
As shown in Fig. 6 (a), if accommodating container 10 is moved in shutter opening and closing apparatus 50, the lifting arm of lifting unit 53
54 engage with the protruding part 40 of lid 12.Now, the recess 59 of the frame support member 58 of lifting arm 54 is embedded in from below
The fitting portion 41 of the protruding part 40 of lid 12.It is explained, recess 59 is chimeric with fitting portion 41, so as to the rolling of protruding part 40
Wheel 43 is abutted with sensor 60, thereby turns on the switch of sensor 60, detects that lid 12 is supported by lifting arm 54.
As shown in Fig. 6 (b), lifting unit 53 is so that the state that lifting arm 54 engages with the protruding part 40 of lid 12 makes lifting
Arm 54 rises to the removed position of lid 12.Thus, lid 12 rises upward, so as to the container body 11 of lid 12 is split
Under.
On the other hand, shown in such as Fig. 6 (b), if the accommodating container 10 being cleaned after device cleaning (not shown) is moved to
In shutter opening and closing apparatus 50, then lifting unit 53 is so that the state that lifting arm 54 engages with the protruding part 40 of lid 12 makes lifting arm
54 installation sites for dropping to lid 12.
As shown in Fig. 6 (a), if lifting arm 54 drops to the installation site of lid 12, the lid installing arm of lid 12
Projection 22 on 20 is entrenched in the lid receiving hole 27 in the lid undertaking body 25 of container body 11.Now, lid installing arm
20 projection 22 is entrenched in the lid receiving hole 27 of lid undertaking body 25 because of the deadweight of lid 12.Specifically, with projection
22 side 22a is contacted with the hole face 27a face of lid receiving hole 27, also, inclined plane 22b of projection 22 and lid receiving hole 27
Inclination hole face 27b face contact mode be fitted together to.Thus, lid 12 is installed on container body 11.
So, for accommodating container 10, because making short transverse (above-below direction) quilt relative to container body 11
Be formed as acute angle-shaped projection 22 (raised 32) and the short transverse relative to container body 11 is formed acute angle-shaped lid
Receiving hole 27 (filter receiving hole 37) is fitted together to, so raised 22 (raised 32) and lid receiving hole 27 (filter receiving hole 37)
It is fitted together in the way of the contact of face.Therefore, lid 12 (fan filter framework 19) is good relative to the stability of container body 11
Well, the air-tightness of itself of accommodating container 10 improves.In addition, because the thin projection 22 of fore-end (raised 32) and intake section
Wide lid receiving hole 27 (filter receiving hole 37) is fitted together to, it is possible to making raised 22 (raised 32) easily accept with lid
Hole 27 (filter receiving hole 37) is fitted together to.Therefore, it is possible to lid 12 is easily installed at into container body 11.
For accommodating container 10, because the openend of the upper side in lid receiving hole 27 (filter receiving hole 37)
Portion is formed with skewed beveled face 27d (beveled face 37d), so, even if by lid 12 (fan filter use
Framework 19) on container body 11 when, the projection 22 (raised 32) of lid installing arm 20 (filter installing arm 30) is embedding
In the case of closing on the position somewhat staggered from the center of lid receiving hole 27 (filter receiving hole 37), raised 22 is (raised
32) leading section also can be because of the deadweight of lid 12 (fan filter framework 19) while (inclination is held in beveled face 27d
Mouthful face 37d) on slide, while be entrenched in lid receiving hole 27 (filter receiving hole 37), always can make raised 22 (raised
32) it is fitted together in position with lid receiving hole 27 (filter receiving hole 37).Therefore, container body 11 and the (wind of lid 12
Machine filter framework 19) adaptation improve so that accommodating container 10 itself air-tightness improve.
For accommodating container 10, because can be by (the filter undertaking body of lid undertaking body 25 of container body 11
35) foreign matter that place produces is discharged from the opening portion 27c (37c) of lid receiving hole 27 (filter receiving hole 37), it is possible to
Prevent from piling up foreign matter in accommodating container 10.
For accommodating container 10, lid installing arm 20 (filter installing arm 30) and container body 11 can not made
Lid undertaking body 25 (filter undertaking body 35) occur in the case of raw the interference that (filter is pacified using multiple lid installing arms 20
Dress arm 30) lid 12 (fan filter framework 19) is reliably mounted on container body 11.Therefore, the He of container body 11
The adaptation of lid 12 (fan filter framework 19) is improved, so that the air-tightness of accommodating container 10 itself is improved.
For accommodating container 10, (fan filter is used to make lid 12 by the lifting unit 53 of shutter opening and closing apparatus 50
Framework 19) protruding part 40 lift, thus, it is possible to relative to container body 11 easily load and unload lid 12 (fan filter use
Framework 19).
It is explained, in present embodiment, along the short transverse (upper and lower of lid 12 (fan filter framework 19)
To) in 2 lid installing arms 20 (filter installing arm 30) of each setting in left and right of lid 12 (fan filter framework 19), but
This is not limited to, as long as lid 12 (fan filter framework 19) closely sealed can be installed on container body 11, then can also be
The left and right of lid 12 (fan filter framework 19) respectively arranges (the filter installation of lid installing arm 20 of 1 or more than 3
Arm 30).
In present embodiment, using the protruding part of a pair of protruding parts composition lid 12 (fan filter framework 19)
40, but this is not limited to, as long as being the composition lifted using the lifting unit 53 of shutter opening and closing apparatus 50, then can also utilize
The protruding part of 1 or more than 3 constitutes protruding part 40.
In present embodiment, the handling of lid 12 (fan filter framework 19) are carried out using shutter opening and closing apparatus 50,
But this is not limited to, as long as being the device with lifting unit, (the fan filter frame of lifting unit liftable lid 12
Frame 19) protruding part 40.
Claims (6)
1. a kind of accommodating container, its be the opening portion of a side of container body possess the gateway for accessing substrate and from
Receive the accommodating container of the substrate reception of the substrate in the gateway, it is characterised in that include：
Fan filter uints, are located at the opening portion of the another side of the container body, and from the opening of the another side
Portion to the gateway is divulged information, and
Lid, is located at the gateway, and is opened and closed the gateway；
The holding section engaged with the container body is formed with the lid,
The fastener that the lid is engaged and engaged with the holding section is formed with the container body,
The holding section has projection, the container master when projection is located on the container body relative to the lid
The short transverse of body be formed it is acute angle-shaped,
The fastener has receiving hole, and the receiving hole can be chimeric with the projection, and relative to the container body
Short transverse is formed acute angle-shaped.
2. accommodating container according to claim 1, it is characterised in that
The open end of the chimeric described raised side of the receiving hole is formed as skewed.
3. the accommodating container according to claim 1 or claim 2, it is characterised in that
The receiving hole has opening portion in the end of the side contrary with the chimeric raised side.
4. the accommodating container according to claim 1 or claim 2, it is characterised in that
The holding section along the lid be located on the container body when the lid short transverse be provided with it is multiple,
Holding section above is to be longer than position in contrast with the length of its horizontal direction in the short transverse of the lid
Formed in the mode of the length of the horizontal direction of the holding section of lower section.
5. the accommodating container according to claim 1 or claim 2, it is characterised in that
The lug boss for making the lid lift along the short transverse of the container body is formed with the end of the lid.
6. the accommodating container according to claim 1 or claim 2, it is characterised in that
The fan filter uints are arranged to be loaded and unloaded relative to the container body,
The holding section engaged with the container body is formed with the fan filter uints,
It is formed with the container body and engages and engage the blower fan filtering with the holding section of the fan filter uints
The fastener of device unit,
The holding section has projection, when the projection is located on the container body relative to the fan filter uints
The short transverse of the container body be formed it is acute angle-shaped,
The fastener has receiving hole, and the receiving hole can be chimeric with the projection, and relative to the container body
Short transverse is formed acute angle-shaped.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015211361A JP6414535B2 (en) | 2015-10-28 | 2015-10-28 | Storage container |
| JP2015-211361 | 2015-10-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106629051A true CN106629051A (en) | 2017-05-10 |
| CN106629051B CN106629051B (en) | 2020-01-07 |
Family
ID=58714304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610289391.2A Active CN106629051B (en) | 2015-10-28 | 2016-05-04 | Storage container |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6414535B2 (en) |
| KR (1) | KR102362497B1 (en) |
| CN (1) | CN106629051B (en) |
| TW (1) | TWI688029B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2126221U (en) * | 1992-06-06 | 1992-12-30 | 俞希平 | Store case |
| DE4443212A1 (en) * | 1994-12-05 | 1996-06-13 | Neidhart Clip Lok Gmbh & Co Kg | Container for transporting automobile parts |
| JPH08324544A (en) * | 1995-05-29 | 1996-12-10 | Nakatsugawa Hoso Kogyo Kk | Body structure of large sized housing box made of corrugated fiberboard |
| DE19938142A1 (en) * | 1998-08-17 | 2000-02-24 | Shinetsu Polymer Co | Wafer container for semiconductor wafers, aluminum discs and glass mask substrates has opening with hermetically-sealing lid with guides assisting correct closure |
| WO2010134492A1 (en) * | 2009-05-20 | 2010-11-25 | シャープ株式会社 | Cassette |
| WO2012003240A3 (en) * | 2010-06-30 | 2012-04-12 | Crossing Automation, Inc. | Port door positioning apparatus and associated methods |
| CN202687019U (en) * | 2012-04-10 | 2013-01-23 | 詍华有限公司 | Storage box with grip button groups |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3526808B2 (en) | 2000-04-18 | 2004-05-17 | 株式会社カープ | Box for cassette |
| CN1486388A (en) | 2000-12-13 | 2004-03-31 | 恩特格里斯开曼有限公司 | Laterally floating latch hub assembly |
| JP4953010B2 (en) * | 2006-09-13 | 2012-06-13 | 株式会社ダイフク | Storage container for substrate storage |
| JP2010064887A (en) * | 2008-09-12 | 2010-03-25 | Daifuku Co Ltd | Substrate conveyance facility |
-
2015
- 2015-10-28 JP JP2015211361A patent/JP6414535B2/en active Active
-
2016
- 2016-04-08 TW TW105110980A patent/TWI688029B/en active
- 2016-04-19 KR KR1020160047430A patent/KR102362497B1/en active IP Right Grant
- 2016-05-04 CN CN201610289391.2A patent/CN106629051B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2126221U (en) * | 1992-06-06 | 1992-12-30 | 俞希平 | Store case |
| DE4443212A1 (en) * | 1994-12-05 | 1996-06-13 | Neidhart Clip Lok Gmbh & Co Kg | Container for transporting automobile parts |
| JPH08324544A (en) * | 1995-05-29 | 1996-12-10 | Nakatsugawa Hoso Kogyo Kk | Body structure of large sized housing box made of corrugated fiberboard |
| DE19938142A1 (en) * | 1998-08-17 | 2000-02-24 | Shinetsu Polymer Co | Wafer container for semiconductor wafers, aluminum discs and glass mask substrates has opening with hermetically-sealing lid with guides assisting correct closure |
| WO2010134492A1 (en) * | 2009-05-20 | 2010-11-25 | シャープ株式会社 | Cassette |
| WO2012003240A3 (en) * | 2010-06-30 | 2012-04-12 | Crossing Automation, Inc. | Port door positioning apparatus and associated methods |
| CN202687019U (en) * | 2012-04-10 | 2013-01-23 | 詍华有限公司 | Storage box with grip button groups |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017084952A (en) | 2017-05-18 |
| CN106629051B (en) | 2020-01-07 |
| KR20170049352A (en) | 2017-05-10 |
| TWI688029B (en) | 2020-03-11 |
| TW201715634A (en) | 2017-05-01 |
| KR102362497B1 (en) | 2022-02-14 |
| JP6414535B2 (en) | 2018-10-31 |
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