CN106595864B - A kind of multispectral sensing method and device thereof based on Fresnel zone plate - Google Patents
A kind of multispectral sensing method and device thereof based on Fresnel zone plate Download PDFInfo
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- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 claims 2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
Abstract
A kind of multispectral sensing method and device thereof based on Fresnel zone plate.The method be by Fresnel zone plate in conjunction with Cassegrain Telescope, optical signal is collected using Cassegrainian telescope, it is transferred to Fresnel zone plate, via Fresnel zone plate convergence, light splitting, by the light wave reflection of different wave length to detector, multispectral sensing, the multispectral sensing device based on Fresnel zone plate are realized, single pixel detector is placed in the converged position of different dispersed lights, realization is multispectral to be detected simultaneously.Described device includes Fresnel zone plate, Cassegrain Telescope and detector.The configuration of the present invention is simple is light, calibration is convenient, strong to temperature, aging and vibration resistivity, can be widely applied to ranging, environmental monitoring, food hygiene, biomedicine, semi-conductor industry, and the fields such as unmanned plane, aerospace detection, there is very high practical value.
Description
Technical field
It is the present invention relates to the preparation of optics micro element and remote sensing field, in particular to a kind of based on Fresnel zone plate
Multi-channel spectral Detection Techniques, in particular, being related to a kind of utilization off-axis Fresnel zone plate and Cassegrain Telescope
Multi-channel spectral detection method and device.
Background technique
Spectrometer is also known as spectroscope, is the device of the optical detectors such as Photoelectric multiplier tube measurement spectral line different wave length intensity.
Common spectrometer is that light is controlled the resolution of spectral instrument using grating by the small gaps with grating
Rate.Diffraction grating reflects away the light of different wave length by particular design as dispersion element at different angles, so that
Wavelength or wavelength region required for the electromagnetic radiation of radiation source is isolated, analysis system (or scan certain on selected wavelength
One wave band) to the light for each wavelength isolated, carry out strength detection.Currently, common dispersion light splitting technology includes, grating point
Light, acousto-optic tunable filtering light splitting and prismatic decomposition etc..These schemes, system structure is more complex, and device volume and quality are big.
Summary of the invention
Goal of the invention: overcome the shortcomings of to provide a kind of mostly light based on Fresnel zone plate in existing spectrographic detection technology
Spectrum detecting method and its device, the Fresnel zone plate are matched with Cassegrainian telescope, can make full use of card plug lattice
The effect of human relations telescope small field of view, high-gain feature and Fresnel zone plate light amplification and light splitting improves weak signal light intensity
Degree, and reduce and exclude the outer bias light interference of visual field.The multispectral sensing device is simply light, maintains easily and uses, and has very
High practical value.
The technical solution adopted by the present invention is that: a kind of multispectral sensing method based on Fresnel zone plate, by Fresnel
Zone plate collects optical signal in conjunction with Cassegrain Telescope, using Cassegrainian telescope, is transferred to Fresnel
The light wave reflection of different wave length to detector is realized multispectral sensing via Fresnel zone plate convergence, light splitting by piece.
In above-mentioned technical proposal, the Fresnel zone plate uses off-axis Fresnel zone plate, the off-axis Fresnel
Zone plate is a part for deviateing center interception on complete zone plate.
In above-mentioned technical proposal, the Cassegrain Telescope includes Cassegrainian telescope primary mirror and card plug lattice
Human relations telescope secondary mirror, it is described Fresnel zone plate is referred in conjunction with Cassegrain Telescope Fresnel zone plate is placed in
On Cassegrainian telescope exit aperture, the geometric parameter of secondary mirror and primary mirror, makes primary mirror in adjustment card match Glenn telescopic system
The light of collection is after secondary mirror reflects, with directional light vertical incidence Fresnel zone plate.
In above-mentioned technical proposal, micro-reflector system is placed in Fresnel zone plate optical axis different location, it will poly- light
Line is transferred to single pixel detector, or single pixel detector is placed on Fresnel zone plate optical axis, and direct detection is assembled
Target light, realize multi-channel spectral detect simultaneously.
The specific steps for realizing the above-mentioned multispectral sensing method based on Fresnel zone plate include: (1) design Fresnel
Zone plate micro-structure obtains the focal length and light amplification multiplying power of suitable detection wavelength；(2) design has certain visual field and gain
Cassegrainian telescope adjusts primary mirror and secondary mirror, obtains the directional light in vertical exit aperture；(3) electron beam evaporation plating is recycled
Film, electron beam exposure and plasma etching technology complete the preparation of micro-structure；(4) Fresnel zone plate is assembled in card plug lattice
The exit aperture of human relations telescope, by diaphragm or directly cutting so that Fresnel zone plate is worked in the way of off-axis；(5) Fei Nie
You place micro-reflector system by zone plate optical axis different location, it will poly- light is transferred to single pixel detector, or will be single
Pixel detector is placed on Fresnel zone plate optical axis, the target light that direct detection is assembled, and realizes that multi-channel spectral is visited simultaneously
It surveys.
The half-wave zone of Fresnel zone plate, the target optical wavelength to detect as needed are designed, and half-wave zone number is determined
The multiplying power of light amplification is determined, half-wave zone number is bigger, and Fresnel chip size is bigger；The focal length and wave of Fresnel zone plate
Length is inversely proportional, and long wave focal length is short.
A kind of multispectral sensing device based on Fresnel zone plate, including Fresnel zone plate, Cassegrainian telescope
System and detector, the Fresnel zone plate are placed on Cassegrainian telescope exit aperture；The detector is placed on
On Fresnel zone plate optical axis, or Fresnel zone plate optical axis different dispersed light converged positions be placed on can receive it is micro- anti-
Penetrate mirror system, it will poly- light is transferred to detector.
In above-mentioned technical proposal, the Fresnel zone plate uses off-axis Fresnel zone plate, off-axis Fresnel
Piece is a part for deviateing center interception on complete zone plate.
In above-mentioned technical proposal, the Cassegrainian telescope includes that Cassegrainian telescope primary mirror and Cassegrain are hoped
Remote mirror secondary mirror.
In above-mentioned technical proposal, the detector uses single pixel detector.
Fresnel zone plate has powerful convergence and light splitting ability to the directional light of vertical incidence.For with N number of half
The zone plate of wavestrip, the light intensity of focal point are the 4N of free light intensity2Times, the amplification to faint optical signal may be implemented；
Fresnel zone plate has good spectroscopic behaviour, but the master of the light wave of different wave length to the directional light of vertical incidence
Focus is all on optical axis, and when from optical axis direction, the light wave of different wave length is still mixed, and is unfavorable for detecting.Complete
Off-centered place intercepts a part of (off-axis Fresnel zone plate) on whole zone plate, then the light wave of different wave length will be former complete
The focus being separated from each other on whole Fresnel zone plate optical axis is assembled, and the light wave that different wave length may be implemented preferably separates (off axis
Light splitting)；
When directional light is incident at a certain angle, the convergence ability of Fresnel zone plate will be reduced, and lose light splitting
Effect；When light incidence zone plate in the form of diffusing scattering, zone plate loses convergence ability substantially, and also loses light splitting
Effect.Cassegrain Telescope is applied in combination with Fresnel zone plate, is Fresnel while collecting optical signal
The signal light of piece offer vertical incidence；
Fresnel zone plate is the dispersion beam splitter of spectrographic detection, has small in size, light weight, stability height etc. excellent
Point；Diffraction occurs after Fresnel zone plate for incident light, and signal light is suitble to detection dim light target by relevant amplification；Using single picture
Plain detector works independently, and realization is multispectral to be detected simultaneously, has structure is simple, at low cost, signal-to-noise ratio is high and stability is good etc.
Advantage.
The present invention can carry out interference amplification to weak target optical signal, and structure is simple, compact, high reliablity, be easy to use
And maintenance.
Detailed description of the invention
Fig. 1 is Fresnel zone plate diffraction principle figure；
Axial direction optically focused and light splitting situation when Fig. 2 is directional light vertical incidence zone plate；
Fig. 3 is off-axis Fresnel zone plate schematic diagram.In Fig. 3,11 be one piece of complete Fresnel zone plate, and 12 be complete
On the basis of whole Fresnel zone plate, deviate one piece of circular off-axis Fresnel zone plate of center interception；
Fig. 4 is that off-axis Fresnel zone plate is divided schematic diagram.In Fig. 4, the off-axis Fresnel zone plate of directional light vertical incidence,
The light wave of different wave length is focused at the different location of former Fresnel zone plate optical axis, and 21~23 be to respectively correspond 3 different wave lengths
The spectral detector of light wave；
Fig. 5 is light distribution on main focal plane；
Fig. 6 is Cassegrainian telescope schematic diagram.In Fig. 6, by rationally adjusting secondary mirror at a distance from primary mirror, secondary mirror is set
Parameter can be such that light projects with directional light from system, provide for subsequent optical element such as Fresnel zone plate ideal vertical
Incident light；
Fig. 7 is that off-axis Fresnel zone plate and Cassegrainian telescope combine the unit side view.In Fig. 7,31 be card plug lattice
The primary mirror of human relations telescope, 32 be the secondary mirror of Cassegrainian telescope, and off-axis Fresnel zone plate 12 is located at Cassegrainian telescope
Exit aperture, h1It is primary mirror top at a distance from secondary mirror top, h2It is the thickness of primary mirror apex, h3It is primary mirror edge thickness, h4It is
Primary mirror border width, D1It is the outside diameter at primary mirror edge, D3It is the diameter of exit aperture on primary mirror；
Fig. 8 is Cassegrainian telescope primary mirror top view.In Fig. 8, D2It is the interior bore at primary mirror edge；
Fig. 9 is Cassegrainian telescope secondary mirror side view.In Fig. 9, h5It is the thickness at secondary mirror edge, h6It is secondary mirror center
Thickness, D4It is the bore of secondary mirror；
Figure 10 is structure of the invention schematic illustration.It is marked in figure same with Fig. 7.
Specific embodiment
Referring to attached drawing, a kind of multispectral sensing method based on Fresnel zone plate of the invention, by Fresnel zone plate
In conjunction with Cassegrain Telescope, optical signal is collected using Cassegrainian telescope, is transferred to Fresnel zone plate, via
The light wave reflection of different wave length to detector is realized multispectral sensing, the Fei Nie by Fresnel zone plate convergence, light splitting
Your zone plate uses off-axis Fresnel zone plate, and the off-axis Fresnel zone plate is to deviate center interception on complete zone plate
A part, the Cassegrain Telescope includes Cassegrainian telescope primary mirror and Cassegrainian telescope secondary mirror,
It is described that Fresnel zone plate is referred to that Fresnel zone plate, which is placed in Cassegrain, looks in the distance in conjunction with Cassegrain Telescope
On mirror exit aperture, the geometric parameter of secondary mirror and primary mirror, the light warp for collecting primary mirror in adjustment card match Glenn telescopic system
After secondary mirror reflection, with directional light vertical incidence Fresnel zone plate, micro- reflection is placed in Fresnel zone plate optical axis different location
Mirror system, it will poly- light is transferred to single pixel detector, or single pixel detector is placed on Fresnel zone plate light
On axis, the target light that direct detection is assembled realizes that multi-channel spectral detects simultaneously.
A kind of multispectral sensing device based on Fresnel zone plate, including Fresnel zone plate, Cassegrainian telescope
System and detector, the Fresnel zone plate are placed on Cassegrainian telescope exit aperture；The detector is placed on
On Fresnel zone plate optical axis, or Fresnel zone plate optical axis different dispersed light converged positions be placed on can receive it is micro- anti-
Penetrate mirror system, it will poly- light is transferred to detector, and the Fresnel zone plate uses off-axis Fresnel zone plate, from
Axis Fresnel zone plate is a part for deviateing center interception on complete zone plate, and the Cassegrainian telescope includes card
Cassegrain telescope primary mirror and the attached mirror of Cassegrainian telescope, the detector use single pixel detector.
Multi-channel spectral Detection Techniques based on off-axis Fresnel zone plate and Cassegrainian telescope of the invention are benefits
The characteristics of with Cassegrainian telescope heavy caliber, high-gain, provides the signal light of vertical incidence for off-axis Fresnel zone plate, leads to
After crossing the light amplification and light splitting of zone plate, the light wave of different wave length is focused at different positions, thus realize it is multispectral simultaneously
Detection.
The half-wave zone period of off-axis Fresnel zone plate is designed, the wavestrip number N of zone plate according to filter optical wavelength,
According to the Demand Design of device light amplification, output intensity INIt is the 4N of incident intensity2Times.
The shape of off-axis Fresnel zone plate can be round, rectangular or arbitrary polygon, be looked in the distance according to Cassegrain
The factors such as mirror exit aperture or used diaphragm determine.
In order to realize multi-channel spectral detect, following steps can be used:
(1) simulation calculation designs reasonable Fresnel zone plate micro-structure；
(2) Fresnel zone plate is prepared using conventional semiconductor processing processing；
(3) simultaneously assembling and setting Cassegrain Telescope is designed and produced；
(4) Fresnel zone plate and Cassegrainian telescope combination unit are assembled, and in the focus position of Fresnel zone plate
Install detector.
There are many production methods for zone plate, and more common method is plated film, electron beam exposure and etching, and this technology is
First metal-coated membrane on a transparent substrate, then electron beam exposure forms photoresist exposure mask, and the method for recycling etching removes alternate
Zone plate is directly carved by the metal film of wavestrip part；Synchrotron radiation light lithography is more accurate, but technology complexity cost
Height is making material frequently with gold, and feature is that wavestrip ring is supported using fan-shaped item；Focused ion beam direct etching can also be used
To prepare zone plate；Generally photographic process is used to realize with zone plate the not high test of required precision, it is low in cost, passes through
Zone plate is drawn by mapping software (such as Auto CAD), then prints to shoot again and images in egative film and obtain.
Below by way of specific embodiments of the present invention, in conjunction with attached drawing, the present invention will be further explained.
The special grating that zone plate is made of one group of light transmission and opaque concentric loop alternate intervals, annular radii are full
FootWherein, ρnIt is the radius of n-th of annulus, f is the principal focal distance of zone plate:
F=ρn 2/ n λ=ρ1 2/λ(1)
When vertical incidence and when nonmonochromatic light, dispersion phenomenon will occur, light wave is longer, and focal length is shorter:
F'=λ f/ λ ' (2)
Optical path difference when subwave that the corresponding part of any adjacent two band of fresnel zone is sent out reaches prime focus be λ/
2, do not have to when zone plate or any diaphragm (N → ∞), the conjunction amplitude of prime focus is A∞=a1/ 2, if only allowing odd number half-wave zone saturating
Light closes amplitude and light intensity are as follows:
As shown in Figure 1, P on film viewing screen0Light amplitude at point, is obtained by Fresnel-Kirchhoff diffraction formula:
∑ in formula1It is the annulus area of zone plate light transmission, r01It is ∑1Upper certain point P to P0Distance, U is zone plate glazing
Complex amplitude, U (P0) it is light in point of observation P0Complex amplitude.P0Point is from ∑1It is remote enough, meet r01> > λ, then k > > 1/r01, it obtains:
Xoy plane where light wave incidence zone plate, it is assumed that direction cosines are (cos α, cos β, cos γ), then:
Assuming that ∑1Face z=0, under cylindrical coordinate, integral formula (5) can be rewritten are as follows:
Wherein,X=rcos θ, y=rsin θ.Such as
Fruit takes point of observation P0(r0,θ0,z0)=P0(0,0,z0), formula (6) can simplify are as follows:
Wherein,
It according to formula (6), is programmed, calculate Fresnel zone plate to the convergence of directional light and diffusion light and divided by MATLAB
Light ability.Assume that operation wavelength is 254nm in calculating, zone plate parameter, principal focal distance f=0.2m, wavestrip number are designed with 254nm
N=4000, while investigating two kinds of light waves that wavelength is 300nm and 400nm.Fig. 2 hangs down for 254nm, 300nm and 400nm directional light
When straight incidence zone plate, the different location of each leisure optical axis is focused, and focus light intensity has 107Magnitude.Known f254nm=0.2m, by
Formula (2), f300nm=0.169m, f400nm=0.127m.Time that the corresponding part of any adjacent two band of fresnel zone is sent out
Optical path difference when wave reaches prime focus is λ/2, is not had to when zone plate or any diaphragm (N → ∞), the conjunction amplitude of prime focus is
A∞=a1/ 2, if only allowing odd number half-wave zone light transmission, conjunction amplitude is AN≈Na1/2.Known I∞=| U2=1, thus IN=N2I∞=
1.6×107I∞.Analog result and theory are coincide, it is seen that fresnel's zone plate has the light wave of vertical incidence to be assembled well
And light splitting effect.
Zone plate has good spectroscopic behaviour to the directional light of vertical incidence, but the prime focus of Different lightwave is all in optical axis
On, so Different lightwave still mixes when from optical axis direction, 300nm and 400nm light intensity forms ambient noise,
It can not achieve being completely separated for three kinds of light waves.If off-centered place intercepts a part of (Fig. 3) on complete zone plate,
The focus being separated from each other on former optical axis is assembled (Fig. 4) by Different lightwave.
Assuming that intercepting a part on zone plate (being located at oxy plane) using b as radius, then formula with A (a, 0,0) for the center of circle
(4) it converts are as follows:
F=0.2m, N=62800, λ=254nm are chosen, then R=ρ62800≈ 5.6cm, it is assumed that a=3R/4, b=R/4, benefit
Result shown in Fig. 5 is calculated to obtain with formula (8).As it can be seen that off-axis zone plate equally has powerful convergence ability to vertical incidence light wave,
But it is divided more thorough.
Fresnel zone plate does not assemble amplifying power to stray light, can be by telescopic system shown in zone plate and Fig. 6
Assemble in conjunction with to signal light, telescope emergent light is directional light, and zone plate is placed on telescope exit aperture.To card plug lattice
Human relations telescope is designed, and as shown in Figure 7 and Figure 8, the design parameter of primary mirror is as follows:
The face ■ type: circular cone coefficient k=-1, paraboloid, vertex radius 300mm (f=150mm)
■ primary mirror top is at a distance from secondary mirror top: h1=138.326mm
The thickness of ■ apex: h2=20mm
■ outside diameter: D1=206mm
■ exit aperture bore (center opening): D3=20mm
■ thickness: h3=36.7mm
■ border width: h4=3mm
As shown in figures 7 and 9, the design parameter of secondary mirror is as follows:
The face ■ type: circular cone coefficient k=-1.5625, hyperboloid, vertex radius 22.5mm (a=40mm, b=30mm)
■ bore: D4=15.54mm
■ center thickness: h6=6.32mm
■ bottom thickness: h5=5mm
Cassegrainian telescope secondary mirror is adjusted at a distance from primary mirror, can make light after secondary mirror reflects, penetrate almost parallelly
To exit aperture.Off-axis zone plate is placed at telescope exit aperture, Cassegrainian telescope and Fresnel wave are just constituted
The multispectral sensing receiving antenna of strap combination.It has the characteristics that small field of view, heavy caliber, gain are higher.
Claims (2)
1. a kind of multispectral sensing method based on Fresnel zone plate, by Fresnel zone plate and Cassegrain Telescope
In conjunction with, using Cassegrainian telescope collect optical signal, be transferred to Fresnel zone plate, via Fresnel zone plate convergence, point
The light wave reflection of different wave length to detector is realized multispectral sensing by light；The Cassegrain Telescope includes card
Cassegrain telescope primary mirror and Cassegrainian telescope secondary mirror, it is described by Fresnel zone plate and Cassegrain Telescope knot
Conjunction, which refers to, is placed in Fresnel zone plate on Cassegrainian telescope exit aperture, secondary mirror in adjustment card match Glenn telescopic system
With the geometric parameter of primary mirror, the light for collecting primary mirror is after secondary mirror reflects, with directional light vertical incidence Fresnel zone plate；?
Fresnel zone plate optical axis different location places micro-reflector system, it will and poly- light is transferred to single pixel detector, or
Single pixel detector is placed on Fresnel zone plate optical axis, the target light that direct detection is assembled, realizes that multi-channel spectral is same
When detect；It is characterized by: the Fresnel zone plate uses off-axis Fresnel zone plate, the off-axis Fresnel zone plate
Deviate a part of center interception on the complete zone plate of tail.
2. a kind of multispectral sensing device based on Fresnel zone plate, including Fresnel zone plate, Cassegrainian telescope system
System and detector, the Fresnel zone plate are placed on Cassegrainian telescope exit aperture；The detector is placed on phenanthrene
The different dispersed light converged positions or detector of Nie Er zone plate outgoing, which are placed on, can receive micro-reflector difference dispersed light
Position；The Cassegrainian telescope includes Cassegrainian telescope primary mirror and Cassegrainian telescope secondary mirror；The spy
It surveys device and uses single pixel detector；It is characterized by: Fresnel zone plate uses off-axis Fresnel zone plate, off-axis Fresnel wave
Strap is a part for deviateing center interception on complete zone plate.
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| CN102499648A (en) * | 2011-11-16 | 2012-06-20 | 清华大学 | Spectral-domain optical coherence tomography imaging system based on Fresnel spectrometer |
| CN103411921A (en) * | 2013-07-26 | 2013-11-27 | 成都谱视科技有限公司 | Handheld gas sensing system based on optical remote measuring lenses |
| CN103743719A (en) * | 2013-12-11 | 2014-04-23 | 中国科学院西安光学精密机械研究所 | Remote in-situ integrated test system for planet surface substances and atmosphere |
| CN105629449A (en) * | 2016-01-20 | 2016-06-01 | 电子科技大学 | Novel Fresnel optical antenna emission system |
| CN105891139A (en) * | 2016-06-28 | 2016-08-24 | 中国科学院合肥物质科学研究院 | Device for detecting CO2 and CO gas in rolled steel heating furnace |
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2016
- 2016-11-25 CN CN201611058702.0A patent/CN106595864B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63210631A (en) * | 1987-02-27 | 1988-09-01 | Nippon Steel Corp | Method for detecting electromagnetic wave in state classified by wavelength |
| CN102499648A (en) * | 2011-11-16 | 2012-06-20 | 清华大学 | Spectral-domain optical coherence tomography imaging system based on Fresnel spectrometer |
| CN103411921A (en) * | 2013-07-26 | 2013-11-27 | 成都谱视科技有限公司 | Handheld gas sensing system based on optical remote measuring lenses |
| CN103743719A (en) * | 2013-12-11 | 2014-04-23 | 中国科学院西安光学精密机械研究所 | Remote in-situ integrated test system for planet surface substances and atmosphere |
| CN105629449A (en) * | 2016-01-20 | 2016-06-01 | 电子科技大学 | Novel Fresnel optical antenna emission system |
| CN105891139A (en) * | 2016-06-28 | 2016-08-24 | 中国科学院合肥物质科学研究院 | Device for detecting CO2 and CO gas in rolled steel heating furnace |
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