CN206583533U - A kind of multispectral sensing device based on Fresnel zone plate - Google Patents
A kind of multispectral sensing device based on Fresnel zone plate Download PDFInfo
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- CN206583533U CN206583533U CN201621279333.3U CN201621279333U CN206583533U CN 206583533 U CN206583533 U CN 206583533U CN 201621279333 U CN201621279333 U CN 201621279333U CN 206583533 U CN206583533 U CN 206583533U
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Abstract
A kind of multispectral sensing device based on Fresnel zone plate.Fresnel zone plate is combined with Cassegrain Telescope, optical signal is collected using Cassegrainian telescope, it is transferred to Fresnel zone plate, converged via Fresnel zone plate, light splitting, by the light wave reflection of different wave length to detector, multispectral sensing, the multispectral sensing device based on Fresnel zone plate are realized, single pixel detector is placed in the converged position of different dispersed lights, multispectral detection simultaneously is realized.Described device includes Fresnel zone plate, Cassegrain Telescope and detector.The utility model is simple and light, calibration is convenient, strong to temperature, aging and vibration resistivity, can be widely applied to ranging, environmental monitoring, food hygiene, biomedicine, semi-conductor industry, and unmanned plane, aerospace detection etc. field, with very high practical value.
Description
Technical field
The utility model is related to optics micro element and prepared and remote sensing field, more particularly to a kind of to be based on Fresnel
The multi-channel spectral Detection Techniques of piece, specifically, are related to one kind and utilize off-axis Fresnel zone plate and Cassegrainian telescope
The multi-channel spectral detection device of system.
Background technology
Spectrometer is also known as spectroscope, is the device that the photo-detectors such as Photoelectric multiplier tube measure spectral line different wave length intensity.
Common spectrometer, is, by the small gaps with grating, the resolution of spectral instrument to be controlled using grating by light
Rate.Diffraction grating, by particular design, the light of different wave length is reflected away at different angles as dispersion element so that
The electromagnetic radiation of radiation source isolate required for wavelength or wavelength region, analysis system (or scans certain on selected wavelength
One wave band) to the light for each wavelength isolated, carry out strength detection.At present, common dispersion light splitting technology includes, grating point
Light, acousto-optic tunable filtering light splitting and prismatic decomposition etc..These schemes, system architecture is more complicated, and device volume and quality are big.
Utility model content
Utility model purpose：Overcome the shortcomings of in existing spectrographic detection technology there is provided a kind of based on Fresnel zone plate
Its device of multispectral sensing, the Fresnel zone plate is supported the use with Cassegrainian telescope, can make full use of Cassegrain
Telescope small field of view, high-gain feature, and Fresnel zone plate light amplification and light splitting effect, improve weak signal luminous intensity,
And reduce bias light interference outside exclusion visual field.The multispectral sensing device is simply light, maintains easily and uses, with very high reality
With value.
The technical solution adopted in the utility model is：A kind of multispectral sensing device based on Fresnel zone plate, including
Fresnel zone plate, Cassegrain Telescope and detector, described Fresnel zone plate are placed in Cassegrainian telescope
On exit aperture；The detector is placed on Fresnel zone plate optical axis, or in the not homochromy of Fresnel zone plate optical axis
Astigmatism converged position, which is placed on, can receive micro-reflector system, it will poly- light is transferred to detector.
In above-mentioned technical proposal, described Fresnel zone plate uses off-axis Fresnel zone plate, off-axis Fresnel
Piece is a part for the off-center interception on complete zone plate.
In above-mentioned technical proposal, described Cassegrainian telescope includes Cassegrainian telescope primary mirror and Cassegrain is hoped
The attached mirror of remote mirror.
In above-mentioned technical proposal, described detector uses single pixel detector.
The utility model is combined Fresnel zone plate with Cassegrain Telescope, is received using Cassegrainian telescope
Collect optical signal, be transferred to Fresnel zone plate, converged via Fresnel zone plate, light splitting, the light wave reflection of different wave length is arrived
Detector, realizes multispectral sensing.
Described Cassegrain Telescope includes Cassegrainian telescope primary mirror and Cassegrainian telescope secondary mirror, institute
State to be combined Fresnel zone plate with Cassegrain Telescope and refer to Fresnel zone plate being placed in Cassegrainian telescope
On exit aperture, the geometric parameter of secondary mirror and primary mirror, makes the light that primary mirror is collected through pair in adjustment card match Glenn telescopic system
After mirror reflection, with directional light vertical incidence Fresnel zone plate.
Micro-reflector system is placed in Fresnel zone plate optical axis diverse location, it will poly- light is transferred to single pixel spy
Device is surveyed, or single pixel detector is placed on Fresnel zone plate optical axis, the target light that direct detection is assembled is realized and led to more
Road spectrum is detected simultaneously.
Realizing the specific steps of the above-mentioned multispectral sensing method based on Fresnel zone plate includes：(1) Fresnel is designed
Zone plate micro-structural, obtains the focal length and light amplification multiplying power of suitable detection wavelength；(2) design is with certain visual field and gain
Cassegrainian telescope, adjustment primary mirror and secondary mirror, obtain the directional light in vertical exit aperture；(3) electron beam evaporation plating is recycled
Film, electron beam exposure and plasma etching technology complete the preparation of micro-structural；(4) by Fresnel zone plate assembling in jam lattice
The exit aperture of human relations telescope, causes Fresnel zone plate to be worked in off-axis mode using diaphragm or directly cutting；(5) Fei Nie
You place micro-reflector system by zone plate optical axis diverse location, it will poly- light is transferred to single pixel detector, or will be single
Pixel detector is placed on Fresnel zone plate optical axis, the target light that direct detection is assembled, and realizes that multi-channel spectral is visited simultaneously
Survey.
The half-wave zone of Fresnel zone plate, the target optical wavelength to detect as needed is designed, and half-wave zone number is determined
The multiplying power of light amplification is determined, half-wave zone number is bigger, and Fresnel chip size is bigger；The focal length and wavelength of Fresnel zone plate
It is inversely proportional, long wave focal length is short.
Fresnel zone plate has powerful convergence and light splitting ability to the directional light of vertical incidence.For with N half
The zone plate of wavestrip, the light intensity of focal point is the 4N of free light intensity2Times, it is possible to achieve the amplification to faint optical signal；
Fresnel zone plate has good spectroscopic behaviour, but the master of the light wave of different wave length to the directional light of vertical incidence
Focus is all on optical axis, when from optical axis direction, and the light wave of different wave length is still mixed, and is unfavorable for detection.Complete
Off-centered place interception is a part of (off-axis Fresnel zone plate) on whole zone plate, then the light wave of different wave length will be complete in original
The focus separated each other on whole Fresnel zone plate optical axis is assembled, it is possible to achieve the light wave of different wave length preferably separates (off-axis
Light splitting)；
When directional light is incident at a certain angle, the convergence ability of Fresnel zone plate will be reduced, and lose light splitting
Effect；When light is with incident zone plate in the form of diffusing scattering, zone plate loses convergence ability substantially, and also loses light splitting
Effect.Cassegrain Telescope is applied in combination with Fresnel zone plate, is Fresnel while optical signal is collected
Piece provides the flashlight of vertical incidence；
Fresnel zone plate is the dispersion beam splitter of spectrographic detection, excellent with small volume, light weight, stability height etc.
Point；Diffraction occurs after Fresnel zone plate for incident light, and flashlight is adapted to detection dim light target by relevant amplification；Using single picture
Plain detector works independently, realize it is multispectral detect simultaneously, with simple in construction, cost is low, signal to noise ratio is high and stability is good etc.
Advantage.
The utility model can carry out interference amplification to weak target optical signal, and simple in construction, compact, reliability is high, is easy to
Operation and maintenance.
Brief description of the drawings
Fig. 1 is Fresnel zone plate diffraction principle figure；
Axial optically focused and light splitting situation when Fig. 2 is directional light vertical incidence zone plate；
Fig. 3 is off-axis Fresnel zone plate schematic diagram.In Fig. 3,11 be one piece of complete Fresnel zone plate, 12 be
On the basis of complete Fresnel zone plate, one piece of circular off-axis Fresnel zone plate of off-center position interception；
Fig. 4 is off-axis Fresnel zone plate light splitting schematic diagram.In Fig. 4, the off-axis Fresnel zone plate of directional light vertical incidence,
The light wave of different wave length is focused at the diverse location of former Fresnel zone plate optical axis, and 21~23 be corresponding 3 different wave lengths respectively
The spectral detector of light wave；
Fig. 5 (a), Fig. 5 (b) are light distribution on main focal plane；Wherein 5 (a) is light wave figure, Fig. 5 before main focal plane vertical incidence
(b) it is light wave figure after main focal plane vertical incidence.
Fig. 6 is Cassegrainian telescope schematic diagram.In Fig. 6, by the distance of reasonable adjusting secondary mirror and primary mirror, secondary mirror is set
Parameter, can be such that light is projected with directional light from system, be provided for subsequent optical element such as Fresnel zone plate preferably vertical
Incident light；
Fig. 7 is that off-axis Fresnel zone plate combines the unit side view with Cassegrainian telescope.In Fig. 7,31 be jam lattice
The primary mirror of human relations telescope, 32 be the secondary mirror of Cassegrainian telescope, and off-axis Fresnel zone plate 12 is located at Cassegrainian telescope
Exit aperture, h1It is the distance on primary mirror top and secondary mirror top, h2It is the thickness of primary mirror apex, h3It is primary mirror edge thickness, h4It is main
Mirror border width, D1It is the outer bore at primary mirror edge, D3It is the diameter of exit aperture on primary mirror；
Fig. 8 is Cassegrainian telescope primary mirror top view.In Fig. 8, D2It is the interior bore at primary mirror edge；
Fig. 9 is Cassegrainian telescope secondary mirror side view.In Fig. 9, h5It is the thickness at secondary mirror edge, h6It is secondary mirror center
Thickness, D4It is the bore of secondary mirror；
Figure 10 is the utility model principle schematic diagram.Marked in figure same with Fig. 7.
Embodiment
Referring to accompanying drawing, the utility model is combined Fresnel zone plate with Cassegrain Telescope, utilizes jam lattice
Human relations telescope collects optical signal, is transferred to Fresnel zone plate, is converged via Fresnel zone plate, light splitting, by different wave length
Light wave reflection realizes multispectral sensing to detector, and described Fresnel zone plate uses off-axis Fresnel zone plate, it is described from
Axle Fresnel zone plate is a part for the off-center interception on complete zone plate, described Cassegrain Telescope bag
Cassegrainian telescope primary mirror and Cassegrainian telescope secondary mirror are included, it is described by Fresnel zone plate and Cassegrainian telescope system
System, which is combined, to be referred to Fresnel zone plate being placed on Cassegrainian telescope exit aperture, in adjustment card match Glenn telescopic system
The geometric parameter of secondary mirror and primary mirror, after the light for collecting primary mirror reflects through secondary mirror, with directional light vertical incidence Fresnel
Piece, places micro-reflector system, it will poly- light is transferred to single pixel detector in Fresnel zone plate optical axis diverse location,
Or single pixel detector is placed on Fresnel zone plate optical axis, the target light that direct detection is assembled realizes multichannel light
Spectrum is detected simultaneously.
Multispectral sensing device of the present utility model based on Fresnel zone plate, including Fresnel zone plate, jam lattice
Human relations telescopic system and detector, described Fresnel zone plate are placed on Cassegrainian telescope exit aperture；The detection
Device is placed on Fresnel zone plate optical axis, or is placed on energy in the different dispersed light converged positions of Fresnel zone plate optical axis
Receive micro-reflector system, it will poly- light is transferred to detector, described Fresnel zone plate uses off-axis Fresnel ripple
Strap, off-axis Fresnel zone plate is a part for the off-center interception on complete zone plate, and described Cassegrain is looked in the distance
Mirror includes Cassegrainian telescope primary mirror and Cassegrainian telescope secondary mirror, and described detector uses single pixel detector.
Multi-channel spectral Detection Techniques of the present utility model based on off-axis Fresnel zone plate and Cassegrainian telescope,
It is that the characteristics of utilizing Cassegrainian telescope heavy caliber, high-gain, the signal of vertical incidence is provided for off-axis Fresnel zone plate
Light, after the light amplification and light splitting of zone plate, the light wave of different wave length is focused at different positions, so as to realize multispectral
Detect simultaneously.
In the half-wave zone cycle of off-axis Fresnel zone plate, it is designed according to filter optical wavelength, the wavestrip number N of zone plate,
According to the Demand Design of device light amplification, output intensity INIt is the 4N of incident intensity2Times.
The shape of off-axis Fresnel zone plate can be circular, square or arbitrary polygon, be looked in the distance according to Cassegrain
The factor such as mirror exit aperture or used diaphragm is determined.
In order to realize that multi-channel spectral is detected, following steps can be used：
(1) simulation calculation, Fresnel zone plate micro-structural reasonable in design；
(2) Fresnel zone plate is prepared using conventional semiconductor processing processing；
(3) design and produce and assembling and setting Cassegrain Telescope；
(4) assembling Fresnel zone plate and Cassegrainian telescope combination unit, and in the focus position of Fresnel zone plate
Install detector.
Zone plate has a variety of preparation methods, and more conventional method is plated film, electron beam exposure and etching, and this technology is
First metal-coated membrane on a transparent substrate, then electron beam exposure formation photoresist mask, recycle etching method remove it is alternate
The metal film of wavestrip part, zone plate is directly carved；Synchrotron radiation light lithography is more accurate, but technical sophistication cost
Height, is making material frequently with gold, feature is that wavestrip ring is supported using fan-shaped bar；Focused ion beam direct etching can also be used
To prepare zone plate；It is with low cost, by painting typically is realized using photographic process with zone plate to the not high experiment of required precision
Figure software (such as Auto CAD) draws zone plate, then prints to shoot again and images in egative film and obtain.
When Fig. 2 is 254nm, 300nm and 400nm directional light vertical incidence zone plate, the diverse location of each comfortable optical axis gathers
Jiao, focus light intensity has 107Magnitude.
Zone plate has good spectroscopic behaviour to the directional light of vertical incidence, but Different lightwave prime focus all in optical axis
On, so when from optical axis direction, Different lightwave is still mixed, 300nm and 400nm light intensity formation ambient noise,
Being completely separated for three kinds of light waves can not be realized.If off-centered place interception is a part of (Fig. 3) on complete zone plate,
The focus separated each other on former optical axis is assembled (Fig. 4) by Different lightwave.
From result shown in Fig. 5 (a), Fig. 5 (b), off-axis zone plate equally has powerful meeting to vertical incidence light wave
Cumulative power, but light splitting is more thorough.
Fresnel zone plate does not assemble amplifying power to veiling glare, can be by zone plate and telescopic system shown in Fig. 6
Assemble with reference to flashlight, telescope emergent light is directional light, zone plate is placed on telescope exit aperture.To jam lattice
Human relations telescope is designed, as shown in Figure 7 and Figure 8, and the design parameter of primary mirror is as follows：
■ faces type：Circular cone coefficient k=-1, parabola, vertex radius 300mm (f=150mm)
The distance on ■ primary mirrors top and secondary mirror top：h1=138.326mm
The thickness of ■ apexes：h2=20mm
The outer bores of ■：D1=206mm
■ exit apertures bore (center drilling)：D3=20mm
■ thickness：h3=36.7mm
■ border widths：h4=3mm
As shown in figures 7 and 9, the design parameter of secondary mirror is as follows：
■ faces type：Circular cone coefficient k=-1.5625, hyperboloid, vertex radius 22.5mm (a=40mm, b=30 mm)
■ bores：D4=15.54mm
■ center thicknesses：h6=6.32mm
■ bottom thickness：h5=5mm
The distance of Cassegrainian telescope secondary mirror and primary mirror is adjusted, can make after light reflects through secondary mirror, to penetrate almost parallelly
To exit aperture.Off-axis zone plate is placed at telescope exit aperture, Cassegrainian telescope and Fresnel ripple is just constituted
The multispectral sensing reception antenna of strap combination.It has the characteristics of small field of view, heavy caliber, higher gain.
Claims (4)
1. a kind of multispectral sensing device based on Fresnel zone plate, it is characterised in that：Including Fresnel zone plate, jam lattice
Human relations telescopic system and detector, described Fresnel zone plate are placed on Cassegrainian telescope exit aperture；The detection
Device is placed on the different dispersed light converged positions of Fresnel zone plate outgoing, or detector is placed on can receive micro-reflector not
With the position of dispersed light.
2. the multispectral sensing device according to claim 1 based on Fresnel zone plate, it is characterised in that：Fresnel ripple
Strap uses off-axis Fresnel zone plate, and off-axis Fresnel zone plate is a part for off-center interception on complete zone plate.
3. the multispectral sensing device according to claim 1 based on Fresnel zone plate, it is characterised in that：Described card
Cassegrain telescope includes Cassegrainian telescope primary mirror and Cassegrainian telescope secondary mirror.
4. the multispectral sensing device according to claim 1 based on Fresnel zone plate, it is characterised in that：Described spy
Survey device and use single pixel detector.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621279333.3U CN206583533U (en) | 2016-11-25 | 2016-11-25 | A kind of multispectral sensing device based on Fresnel zone plate |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621279333.3U CN206583533U (en) | 2016-11-25 | 2016-11-25 | A kind of multispectral sensing device based on Fresnel zone plate |
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| Publication Number | Publication Date |
|---|---|
| CN206583533U true CN206583533U (en) | 2017-10-24 |
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| CN201621279333.3U Active CN206583533U (en) | 2016-11-25 | 2016-11-25 | A kind of multispectral sensing device based on Fresnel zone plate |
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| Country | Link |
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| CN (1) | CN206583533U (en) |
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2016
- 2016-11-25 CN CN201621279333.3U patent/CN206583533U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Jia Honghui Inventor after: Tian Ying Inventor before: Tian Ying |