CN106595857A - Monochromatic light generating device - Google Patents
Monochromatic light generating device Download PDFInfo
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- CN106595857A CN106595857A CN201611192651.0A CN201611192651A CN106595857A CN 106595857 A CN106595857 A CN 106595857A CN 201611192651 A CN201611192651 A CN 201611192651A CN 106595857 A CN106595857 A CN 106595857A
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- generating device
- light generating
- gratings
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- 238000003384 imaging method Methods 0.000 claims abstract description 30
- 230000003287 optical effect Effects 0.000 claims description 24
- 238000001914 filtration Methods 0.000 claims description 9
- 230000004313 glare Effects 0.000 claims description 9
- 238000001228 spectrum Methods 0.000 claims description 8
- 230000011514 reflex Effects 0.000 claims description 6
- 241000237858 Gastropoda Species 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 230000013011 mating Effects 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000005457 optimization Methods 0.000 description 3
- 206010073261 Ovarian theca cell tumour Diseases 0.000 description 2
- 102100025490 Slit homolog 1 protein Human genes 0.000 description 2
- 101710123186 Slit homolog 1 protein Proteins 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 208000001644 thecoma Diseases 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J3/1804—Plane gratings
Abstract
The present invention discloses a monochromatic light generating device. The monochromatic light generating device at least comprises an entrance slit, a collimating lens, a grating device, an imaging lens and an exit slit; light entering from the entrance slit is emitted into the collimating lens; and the light is reflected by the collimating lens so as to form parallel light; the parallel light is emitted into the grating device; the imaging lens receives diffracted light generated by the grating device and converges the diffracted light to the exit slit; the diffracted light is emitted out from the exit slit; the grating device comprises at least two gratings which are distributed around a central axis; and the grating device can rotate around the central axis so as to switch the gratings used for receiving the parallel light generated by the collimating lens. According to the monochromatic light generating device of the invention, the grating device comprises the at least two gratings which are distributed symmetrically relative to the central axis; the grating device can rotate around the central axis, so that grating scanning and the switching of different gratings can be realized, and therefore, wide band output can be realized; and the design of each gating can be optimized, so that spectral resolution can be improved.
Description
Technical field
The present invention relates to technical field of optical instrument, more particularly to a kind of monochromatic light generating device.
Background technology
With reference to shown in Fig. 1, traditional grating monochromator includes entrance slit 1, collimating mirror 2, grating 3, imaging lens 4 and outgoing
Slit 5, concrete structure is as shown in the figure.The collimated mirror 2 of light entered by entrance slit 1 is transformed to directional light, incides grating 3,
The diffraction of Jing gratings 3, diffraction light is converged by imaging lens 4, is projected by exit slit 5.But for the monochromator of this structure is filled
Put, broadband and high-resolution are a pair of intrinsic contradictions, and broadband and high-resolution can not be realized simultaneously.
The content of the invention
It is an object of the invention to provide a kind of monochromatic light generating device, can realize that broadband is exported, spectrum can be also improved
Resolution ratio.
For achieving the above object, the present invention provides following technical scheme：
A kind of monochromatic light generating device, at least including entrance slit, collimating mirror, grating device, imaging lens and exit slit；
The light entered by the entrance slit is incident to the collimating mirror, is reflected as directional light, incides the light
Grid device, by the imaging lens diffraction light that the grating device is produced is received, and diffraction light is converged to into the exit slit,
Projected by the exit slit；
The grating device includes at least two blocks gratings around central shaft arrangement, and the grating device can be turned with central shaft
It is dynamic, to switch the grating for receiving the directional light produced by the collimating mirror.
Alternatively, at least two blocks gratings are distributed uniformly and circumferentially.
Alternatively, at least the grating constant of two blocks of gratings is increased successively with multiple.
Alternatively, the grating device includes three blocks of gratings, and three blocks of gratings are with equilateral triangle arrangement.
Alternatively, also including the first speculum and the second speculum；
First speculum is used to for the light entered by the entrance slit to reflex to the collimating mirror；
Second speculum is used to for the converged light formed by the imaging lens to reflex to the exit slit；
First speculum, the collimating mirror, the grating device, the imaging lens and second speculum are formed
W type light paths.
Alternatively, the entrance slit and the exit slit are oppositely arranged, and both have default bias distance.
Alternatively, also including be arranged on the exit slit light inlet side, for filtering second order spectrum and veiling glare
Filtering apparatus；
The filtering apparatus be optical filter wheel, the optical filter wheel be provided with it is being distributed uniformly and circumferentially, for pacifying
The hole of dress optical filter, the quantity in the hole is consistent with the quantity of the grating.
Alternatively, the central shaft of the grating device deviates the middle axial ray and the imaging lens of the collimating mirror emergent light
The symmetry axis of the middle axial ray of incident light.
Alternatively, also including turntable and worm and gear；
At least two blocks gratings are arranged on the turntable, around turntable center arrangement, are driven by the worm and gear
The dynamic turntable is rotated.
Alternatively, the predeterminated position in the turntable arranges optocoupler catch, and on the grating device casing optocoupler is arranged
Sensor, by optocoupler catch described in the optocoupler sensor sensing, to determine the rotation position of the turntable.
As shown from the above technical solution, monochromatic light generating device provided by the present invention, at least including entrance slit, collimation
Mirror, grating device, imaging lens and exit slit.The light entered by entrance slit is incident to collimating mirror, is reflected as directional light,
The grating device is incided, by imaging lens the diffraction light that grating device is produced is received, and diffraction light is converged to into exit slit,
Projected by exit slit.Monochrome light generating device of the invention, grating device includes at least two blocks gratings around central shaft arrangement,
By grating device with central axis, raster scanning and the different gratings of switching are realized, be capable of achieving broadband output；To per block
Grating optimization design can improve spectral resolution.
Description of the drawings
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the structural representation of traditional raster monochromator；
Fig. 2 is a kind of schematic diagram of monochromatic light generating device provided in an embodiment of the present invention；
The schematic diagram of a kind of monochromatic light generating device that Fig. 3 is provided for further embodiment of this invention；
Fig. 4 is a kind of schematic diagram of optical filter wheel provided in an embodiment of the present invention；
Fig. 5 is coaxially disposed to be arranged with off-axis for grating device in embodiment of the present invention monochrome light generating device carries out optical scanning
Contrast schematic diagram.
Specific embodiment
In order that those skilled in the art more fully understand the technical scheme in the present invention, below in conjunction with of the invention real
The accompanying drawing in example is applied, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described enforcement
Example is only a part of embodiment of the invention, rather than the embodiment of whole.Based on the embodiment in the present invention, this area is common
The every other embodiment that technical staff is obtained under the premise of creative work is not made, should all belong to protection of the present invention
Scope.
Broadband output and high-resolution defect can not be taken into account for traditional raster monochromator, the embodiment of the present invention is provided
A kind of monochromatic light generating device, refer to Fig. 2, at least including entrance slit 10, collimating mirror 11, grating device 12, imaging lens 13
With exit slit 14；
The light entered by the entrance slit 10 is incident to the collimating mirror 11, is reflected as directional light, incides institute
Grating device 12 is stated, by the imaging lens 13 diffraction light that the grating device 12 is produced is received, and diffraction light is converged to into institute
Exit slit 14 is stated, is projected by the exit slit 14；
The grating device 12 includes at least two blocks gratings 120 around central shaft arrangement, and the grating device 12 can be with
Central axis, to switch the grating for receiving the directional light produced by the collimating mirror 11.
Wherein, collimating mirror 11 is used to for the light entered by entrance slit 10 to switch to directional light, and makes directional light be incident to light
Grid device 12.
The grating device 12 includes at least two blocks gratings 120 around central shaft arrangement, and directional light incides grating dress
12 grating is put, Jing optical grating diffractions face occurs diffraction.The diffraction light of generation is received by imaging lens 13, and diffraction light is converged to into institute
Exit slit 14 is stated, is projected by exit slit.
The present embodiment monochrome light generating device by drive grating device with central axis, incident light to raster scanning,
As the incidence angle that directional light reaches optical grating diffraction face changes, the emergent light of different wave length is obtained；By grating device with center
Axle is rotated, in a scan switchable grating, is capable of achieving wide-band spectrum output.
Therefore the present embodiment monochrome light generating device, grating device includes at least two blocks gratings around central shaft arrangement,
By grating device with central axis, raster scanning and the different gratings of switching are realized, be capable of achieving wide-band spectrum output；It is right
Every piece of grating optimization design can improve spectral resolution.
The present embodiment monochrome light generating device is described further with reference to specific embodiment.
Refer to Fig. 2, in the present embodiment monochrome light generating device, grating device 12 is included around central shaft (O points pair in figure
Should be cental axial position) at least two blocks gratings 120 of arrangement, grating 120 adopts plane balzed grating, and directional light incides grating
There is diffraction in diffraction surfaces.
The quantity of grating 120 can flexibly be arranged according to use demand in grating device 12.
Preferably, at least two blocks gratings 120 are distributed uniformly and circumferentially, be so easy to device Machine Design and
To the drive control of grating in scanning.
Preferably, the grating constant of at least two blocks of gratings 120 is increased successively with multiple described in arranging, and makes each grating output light
Wavelength band into multiple proportion.According to raster scanning equation：
Wherein, δ represents the angle between incident light and diffraction light, and φ represents the corner of grating, and λ represents optical wavelength, and d is represented
Grating constant.Increased with multiple successively by arranging the grating constant of each grating, the corresponding wave band of each grating correspondence output can be made
Monochromatic light when, required angle scanning scope is identical, be easy to Machine Design and electricity control, also make processing and debug
With simplification.
In a kind of specific embodiment, the grating device 12 can be set including three blocks of gratings 120, three blocks of gratings 120
Arranged with equilateral triangle, as shown in Figure 2.Rotated by driving grating device 12, realize the scanning to grating and switching grating,
Realize that continuous spectrum is exported.
Wherein, the grating constant of three blocks of gratings 120 is increased successively with multiple, for example the grating constant of three blocks of gratings 120 point
Be not set to 2400gr/mm, 1200gr/mm, 600gr/mm, respectively correspond to output 280nm-560nm, 560nm-1120nm,
The monochromatic light of 1120nm-2240nm wavelength bands, it is so ingenious that the broadband of 280nm-2240nm is divided into into into multiple proportion
Three wave bands.
Spectral resolution can be improved by each grating of optimization design.Each grating carried out in this specific embodiment excellent
Change design, the first grating resolution ratio at 420nm wavelength is better than 0.05nm, and the second grating resolution ratio at 840nm wavelength is better than
0.1nm, the 3rd grating resolution ratio at 1680nm wavelength is better than 0.2nm.
The present embodiment monochrome light generating device, can pass through the eccentric angle for rationally arranging collimating mirror 11 and imaging lens 13, disappear
Except the coma of the centre wavelength of output waveband corresponding to every block of grating, so as to balance the coma of edge wavelength, whole output wave is made
Section is uniform as matter.Collimating mirror eccentric angle refers to the normal of collimating mirror reflecting surface and the angle of collimating mirror incident light；Imaging lens are inclined
Heart angle refers to the normal of imaging lens reflecting surface and the angle of imaging lens incident light.
Further, on the basis of above content, the present embodiment monochrome light generating device is optimized layout to light path.
Specifically, the monochromatic light generating device also sets up the first speculum 15 and the second speculum 16, refer to Fig. 3.
First speculum 15 is used to for the light entered by the entrance slit 10 to reflex to the collimating mirror 11；It is described
Second speculum 16 is used to for the converged light formed by the imaging lens 13 to reflex to the exit slit 14；First reflection
Mirror 15, the collimating mirror 11, the grating device 12, the imaging lens 13 and second speculum 16 form W type light paths.It is logical
This type light path of turning back is crossed, is conducive to the layout to each position of optical element and system architecture, make system architecture compact.
Wherein, the entrance slit 10 and the exit slit 14 are oppositely arranged, and exit slit 14 is located at entrance slit 10
Opposite, and both are set with default bias distance.Entrance slit 10 can be for example set and exit slit 14 has 1/4 focal length
Offset distance, the focal length is the focal length of imaging lens 13.Entrance slit 10 and exit slit 14 are shifted to install, and can be avoided due to entering
Penetrate veiling glare caused by light is mismatched with the numerical aperture of this monochromatic light generating device directly to project from exit slit, and can be effective
Avoid the veiling glare from grating.
Further, the monochromatic light generating device is also set up for filtering secondary light in the light inlet side of exit slit 14
The filtering apparatus 17 of spectrum and veiling glare.
The filtering apparatus 17 can adopt optical filter wheel, refer to Fig. 4, a kind of optical filter wheel provided for the present embodiment
Schematic diagram, the optical filter wheel is provided with hole 170 be distributed uniformly and circumferentially, for installing optical filter, the hole 170
Quantity it is consistent with the quantity of the grating.
Specifically, two laminates can be designed for installing optical filter in each hole.According to the work of each grating in this device
Wave band, in each hole position the bandpass filter of corresponding wave band is assembled, also can be with the use of high-pass filter or low pass filter.
Wherein, can optocoupler catch be set on optical filter wheel 17, by the optocoupler on optocoupler sensor sensing optical filter wheel
Catch, it may be determined that the position of each optical filter.During different grating operations, switching respective filter filters two grades to operating position
Spectrum and veiling glare, effectively improve output to-noise ratio.
In a kind of preferred embodiment of the present embodiment monochrome light generating device, on the basis of above-described embodiment content
On, the central shaft of the grating device 12 deviates the middle axial ray and the incident light of the imaging lens 13 of the emergent light of collimating mirror 11
Middle axial ray symmetry axis, refer to shown in Fig. 2 and Fig. 3.When light path design is carried out to monochromatic light generating device, in collimation
In mirror 11, grating device 12, the propagation light path of imaging lens 13, the middle axial ray and imaging lens 13 of the emergent light of collimating mirror 11 is can determine whether
The symmetrical shaft position of the middle axial ray of incident light.
The monochromatic light generating device, the central shaft of grating device 12 may be configured as intersecting with the symmetry axis of middle axial ray,
I.e. the central point of grating device 12 overlaps with middle axial ray symmetry axis, but in the case of coincidence, grating can be brought in scanning process
Effective aperture loses the impact with veiling glare.With reference to shown in Fig. 5, in figure (1) (2) (3) for grating device central point and axis
The symmetrical overlapping of axles of light is arranged, the central point and the misaligned setting of middle axial ray symmetry axis of (4) (5) (6) for grating device.In figure
Grating device is rotated in a clockwise direction, and can be seen by comparison diagram, and in the case of coaxial, scanning angle of light degree is bigger, light
The effective aperture loss of grid is bigger；And adopting off-axis to arrange, grating effective aperture is only in scanning light minimum incident angle and maximum
There is the effective aperture loss of very little near incident angle, and collimated light can expire irradiation grid at middle wavelength corresponding angle.
Therefore the present embodiment monochrome light generating device, by the middle axial ray of grating device central shaft and collimating mirror emergent light with
The symmetry axis of the middle axial ray of the incident light of imaging lens 13 deviates setting, and the damage of grating effective aperture can be reduced compared with being coaxially disposed
Lose, it is ensured that when the centre wavelength light of corresponding wave band is exported in scanning process, the directional light from collimating mirror can completely shine
Grating, so that the aperture loss in scanning process at the wavelength of two edges is balanced, effectively reduces whole wave band veiling glare, overall
Performance is greatly improved compared to the situation that not off-axis is installed.
In the various embodiments described above, grating device 12 is installed to grating and fixed using turntable and worm and gear, extremely
Few two blocks of gratings are arranged on the turntable, around turntable center arrangement, by the worm and gear turntable are driven
Rotate.Realize the switching and scanning between each grating.
Further in the present embodiment, optocoupler catch 18 is set in the predeterminated position of the turntable, in the grating device 12
Optocoupler sensor is set on casing, by optocoupler catch 18 described in the optocoupler sensor sensing, to determine the rotation of the turntable
Indexing is put, so that it is determined that the rotation position of each grating, it is ensured that the precision of scanning and the switching of grating in the course of work.
The present embodiment monochrome light generating device in scanning process, by each optocoupler sensor sensing turntable on casing
Optocoupler catch, determine the initial position of turntable, and demarcate by number of motor steps, control worm and gear drives turntable to rotate, and sweeps
Required grating is retouched, while controlling optical filter wheel rotates the optical filter for being switched to corresponding wave band, you can monochromatic light needed for output.
In sum, present invention monochrome light generating device can realize broadband by the improvement to grating device structure
Output, while can also improve spectral resolution；And ingehious design is carried out to light channel structure, the optical property of system is optimized；
In addition, grating device center is arranged with optical axis deviation, the loss of grating effective aperture in scanning process is reduced, it is ensured that system
Relative aperture, and effectively reduce veiling glare, improve systematic entirety energy.Monochrome light generating device of the invention has design skilful
The characteristics of wonderful, compact conformation, low stray light, wide service band and high spectral resolution.
A kind of monochromatic light generating device provided by the present invention is described in detail above.It is used herein specifically
Individual example is set forth to the principle and embodiment of the present invention, and the explanation of above example is only intended to help and understands the present invention
Method and its core concept.It should be pointed out that for those skilled in the art, without departing from of the invention former
On the premise of reason, some improvement and modification can also be carried out to the present invention, these are improved and modification also falls into right of the present invention and wants
In the protection domain asked.
Claims (10)
1. a kind of monochromatic light generating device, it is characterised in that at least including entrance slit, collimating mirror, grating device, imaging lens and
Exit slit；
The light entered by the entrance slit is incident to the collimating mirror, is reflected as directional light, incides the grating dress
Put, by the imaging lens diffraction light that the grating device is produced is received, and diffraction light is converged to into the exit slit, by institute
State exit slit injection；
The grating device include around central shaft arrangement at least two blocks gratings, the grating device can with central axis,
To switch the grating for receiving the directional light produced by the collimating mirror.
2. monochromatic light generating device according to claim 1, it is characterised in that at least two blocks gratings are along the circumferential direction
It is uniformly distributed.
3. monochromatic light generating device according to claim 2, it is characterised in that at least grating constant of two blocks of gratings
Increased with multiple successively.
4. monochromatic light generating device according to claim 3, it is characterised in that the grating device includes three blocks of light
Grid, three blocks of gratings are with equilateral triangle arrangement.
5. monochromatic light generating device according to claim 1, it is characterised in that also including the first speculum and the second reflection
Mirror；
First speculum is used to for the light entered by the entrance slit to reflex to the collimating mirror；
Second speculum is used to for the converged light formed by the imaging lens to reflex to the exit slit；
First speculum, the collimating mirror, the grating device, the imaging lens and second speculum form W types
Light path.
6. monochromatic light generating device according to claim 5, it is characterised in that the entrance slit and the exit slit
It is oppositely arranged, and both have default bias distance.
7. monochromatic light generating device according to claim 1, it is characterised in that also including being arranged on the exit slit light
Incident side, filtering apparatus for filtering second order spectrum and veiling glare；
The filtering apparatus be optical filter wheel, the optical filter wheel be provided with it is being distributed uniformly and circumferentially, for install filter
The hole of mating plate, the quantity in the hole is consistent with the quantity of the grating.
8. the monochromatic light generating device according to any one of claim 1-7, it is characterised in that the center of the grating device
Axle deviates the middle axial ray of the collimating mirror emergent light and the symmetry axis of the middle axial ray of the imaging lens incident light.
9. the monochromatic light generating device according to any one of claim 1-7, it is characterised in that also including turntable and worm gear snail
Bar；
At least two blocks gratings are arranged on the turntable, around turntable center arrangement, by the worm and gear institute are driven
State turntable rotation.
10. monochromatic light generating device according to claim 9, it is characterised in that arrange in the predeterminated position of the turntable
Optocoupler catch, arranges optocoupler sensor on the grating device casing, is kept off by optocoupler described in the optocoupler sensor sensing
Piece, to determine the rotation position of the turntable.
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| CN201611192651.0A CN106595857A (en) | 2016-12-21 | 2016-12-21 | Monochromatic light generating device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107588363A (en) * | 2017-08-24 | 2018-01-16 | 中国电子科技集团公司第四十研究所 | The polarized monochromatic light source generation system and method for a kind of Programmable and Variable wavelength |
| CN107631983A (en) * | 2017-10-23 | 2018-01-26 | 杭州希玛诺光电技术股份有限公司 | A kind of multispectral parallel generation device of sample for water analysis |
| CN107782446A (en) * | 2017-10-27 | 2018-03-09 | 中国科学院上海技术物理研究所杭州大江东空间信息技术研究院 | A kind of design method of optical glass for hyperspectral imager |
| CN110031411A (en) * | 2019-04-17 | 2019-07-19 | 南京邮电大学 | A kind of spectrum imaging system |
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| US5767965A (en) * | 1996-05-31 | 1998-06-16 | Instruments S.A., Inc. | Apparatus and method for driving diffraction gratings |
| CN201016804Y (en) * | 2007-03-23 | 2008-02-06 | 北京赛凡光电仪器有限公司 | Multiple grating rotating platform, monochrometer and spectrometer having the same |
| CN101726359A (en) * | 2008-10-30 | 2010-06-09 | 北京信息科技大学 | Multiple-grating monochrometer and calibration method thereof |
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| US5280338A (en) * | 1992-10-30 | 1994-01-18 | Oriel Corporation | Multi-grating spectrograph and method of changing gratings |
| US5767965A (en) * | 1996-05-31 | 1998-06-16 | Instruments S.A., Inc. | Apparatus and method for driving diffraction gratings |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107588363A (en) * | 2017-08-24 | 2018-01-16 | 中国电子科技集团公司第四十研究所 | The polarized monochromatic light source generation system and method for a kind of Programmable and Variable wavelength |
| CN107631983A (en) * | 2017-10-23 | 2018-01-26 | 杭州希玛诺光电技术股份有限公司 | A kind of multispectral parallel generation device of sample for water analysis |
| CN107782446A (en) * | 2017-10-27 | 2018-03-09 | 中国科学院上海技术物理研究所杭州大江东空间信息技术研究院 | A kind of design method of optical glass for hyperspectral imager |
| CN110031411A (en) * | 2019-04-17 | 2019-07-19 | 南京邮电大学 | A kind of spectrum imaging system |
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Application publication date: 20170426 |