CN106582127B - A kind of vacuum filtering system and method for thinned machine - Google Patents
A kind of vacuum filtering system and method for thinned machine Download PDFInfo
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- CN106582127B CN106582127B CN201611148299.0A CN201611148299A CN106582127B CN 106582127 B CN106582127 B CN 106582127B CN 201611148299 A CN201611148299 A CN 201611148299A CN 106582127 B CN106582127 B CN 106582127B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
- B01D2273/28—Making use of vacuum or underpressure
Abstract
The present invention provides the vacuum filtering systems and method of a kind of thinned machine, the vacuum filtering system includes: seal cavity, equipped with vacuum interface, gas source interface and drain interface, vacuum interface is equipped with a vacuum solenoid by the first piping connection to vacuum source, the first pipeline；The gas circuit terminal that gas source interface passes through the second piping connection to thinned machine；By the gas source of third pipeline and the second pipeline connection, third pipeline is equipped with a gas solenoid valve；The drain line connecting with drain interface, drain line are equipped with a liquid electromagnetic valve；The control device being electrically connected with vacuum solenoid, gas solenoid valve and liquid electromagnetic valve.In the present invention program, by the opening and closing for controlling vacuum solenoid, gas solenoid valve and liquid electromagnetic valve, the waste liquid generated in gas circuit terminal may make to enter in seal cavity, realize gas-liquid separation, the cleannes that greatly ensure that vacuum line solve the problems, such as each damage of components caused by due to waste liquid enters vacuum line.
Description
Technical field
The present invention relates to technical field of semiconductors more particularly to a kind of vacuum filtering systems and method of thinned machine.
Background technique
In modern semiconductors special equipment manufacturing process, one that machine is ground in wafer and various types of materials is thinned in wafer
During action, vacuum is provided by vacuum source and is used to adsorb wafer and various types of materials, due in grinding or action process
Need to suck the liquid such as the particles such as silicon powder, abrasive grain and grinding fluid, water, it can be true by flow directions such as vacuum line, channel, cavitys
Empty source can build up or block on each components, it will cause components burn intos for a long time in flow process
Caton, damage.
However existing filter device, need filter core or cleaning.And under normal circumstances, filter device is in vacuum tube
The discharge end on road, pressure regulation is inconvenient, and each components being unable in effective protection vacuum line eventually lead to each components due to damage
The movement of thinned machine cannot effectively be cooperated.
Summary of the invention
In order to overcome in the prior art due to thering is waste liquid to enter vacuum line caused by each damage of components, cannot be effective
The problem of cooperating the movement for the machine of being thinned, the embodiment provides the vacuum filtering systems and method of a kind of thinned machine.
In order to solve the above-mentioned technical problem, the embodiment of the present invention adopts the following technical scheme that
One aspect according to an embodiment of the present invention provides a kind of vacuum filtering system of thinned machine, comprising:
Seal cavity is respectively equipped with vacuum interface, gas source interface and drain interface in the seal cavity, wherein perpendicular
Histogram is upward, and the vacuum interface and height of the gas source interface in the seal cavity are above the drain interface and exist
Height in the seal cavity；
The vacuum interface is equipped with a vacuum solenoid by the first piping connection to vacuum source, first pipeline；
The gas circuit terminal that the gas source interface passes through the second piping connection to thinned machine；
By the gas source of third pipeline and second pipeline connection, the third pipeline is equipped with a gas solenoid valve；
The drain line connecting with the drain interface, the drain line are equipped with a liquid electromagnetic valve；
The control device being electrically connected with the vacuum solenoid, the gas solenoid valve and the liquid electromagnetic valve；
Wherein, the control device is used for: it controls the vacuum solenoid and opens, the gas solenoid valve and the liquid
Solenoid valve simultaneously closes off, and the vacuum for generating the vacuum source reaches the gas circuit terminal by the seal cavity；And when
When the waste liquid that the gas circuit terminal generates enters the seal cavity by second pipeline, the liquid electromagnetic valve is controlled
It opens, the vacuum solenoid is simultaneously closed off with the gas solenoid valve, waste liquid is discharged by the drain line, to carry out
Gas-liquid separation.
Optionally, the control device is also used to: control the gas solenoid valve and open, the vacuum solenoid with it is described
Liquid electromagnetic valve simultaneously closes off, and the gas for generating the gas source reaches the gas circuit terminal by the seal cavity, for
The gas circuit terminal uses.
Optionally, first pipeline is equipped with a vacuum regulator, and the vacuum regulator is set to the vacuum source
Between the vacuum solenoid or the vacuum regulator be set to the vacuum solenoid and the vacuum interface it
Between.
Optionally, the third pipeline be equipped with a gas pressure reducer, the gas pressure reducer be set to the gas source with
Between the gas solenoid valve or the gas pressure reducer is set between the gas solenoid valve and the gas source interface.
Optionally, the end of the third pipeline and second piping connection is equipped with a pressure sensor, for detecting
Gas pressure value in the gas circuit terminal.
Optionally, the vacuum interface and the gas source interface are all set in the top of the seal cavity, the drain
Interface is set to the bottom end of the seal cavity.
Optionally, the quantity of the vacuum interface, the gas source interface and the drain interface is at least one, described
First pipeline, the second pipeline, drain line quantity connect respectively with the vacuum interface, the gas source interface and the drain
The quantity of mouth is identical.
Optionally, the vacuum interface, the gas source interface and the drain interface are fast interface.
Optionally, the gas circuit terminal is wafer-supporting platform, rinsing table or vacuum mechanical-arm.
Other side according to an embodiment of the present invention additionally provides a kind of vacuum filter method of thinned machine, is applied to
The vacuum filtering system of thinned machine as described above, comprising:
First control signal is sent to vacuum solenoid, gas solenoid valve and liquid electromagnetic valve, controls the vacuum electric
Magnet valve is opened, and the gas solenoid valve is simultaneously closed off with the liquid electromagnetic valve, and the vacuum for generating the vacuum source passes through institute
It states seal cavity and reaches the gas circuit terminal；
When the gas circuit terminal generate waste liquid the seal cavity is entered by second pipeline when, to it is described very
Empty solenoid valve, the gas solenoid valve and the liquid electromagnetic valve send second control signal, control the liquid electromagnetic valve
It opens, the vacuum solenoid is simultaneously closed off with the gas solenoid valve, waste liquid is discharged by the drain line, to carry out
Gas-liquid separation.
Optionally, the vacuum filter method further include:
Third, which is sent, to the vacuum solenoid, the gas solenoid valve and the liquid electromagnetic valve controls signal, control
It makes the gas solenoid valve to open, the vacuum solenoid is simultaneously closed off with the liquid electromagnetic valve, generates the gas source
Gas reaches the gas circuit terminal by the seal cavity, for gas circuit terminal use.
The beneficial effect of the embodiment of the present invention is:
In the vacuum filtering system of thinned machine provided in an embodiment of the present invention, since seal cavity is respectively connected to vacuum
Pipeline, gas source pipeline, gas circuit terminal and drain line, therefore the opening and closing shape for the solenoid valve being set on each pipeline by control
State may make that the waste liquid of gas circuit terminal enters in the seal cavity, and be discharged by drain line, realize gas-liquid point
From, it is ensured that in vacuum line only have gas pass through, greatly ensure that the cleannes of vacuum line, solve in the prior art because
Waste liquid enter vacuum line and caused by each damage of components, the problem of cannot effectively cooperating the movement of thinned machine.
Detailed description of the invention
Fig. 1 shows the schematic diagrames for the vacuum filtering system that machine is thinned in the embodiment of the present invention；
Fig. 2 indicates the structural schematic diagram of seal cavity in the embodiment of the present invention.
Wherein in figure: 1, seal cavity；101, vacuum interface；102, gas source interface；103, drain interface；2, vacuum source；
3, vacuum solenoid；4, gas circuit terminal；5, gas source；6, gas solenoid valve；7, liquid electromagnetic valve；8, vacuum regulator；9, gas
Pressure reducing valve；10, pressure sensor.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, right below in conjunction with the accompanying drawings and the specific embodiments
The present invention is described in detail.
Embodiment one
One aspect according to an embodiment of the present invention provides a kind of vacuum filtering system of thinned machine, as shown in Figure 1,
The vacuum filtering system includes:
Seal cavity 1 is respectively equipped with vacuum interface 101, gas source interface 102 and drain interface 103 in seal cavity 1,
In, in the vertical direction, vacuum interface 101 and height of the gas source interface 102 in seal cavity 1 are above drain interface 103
Height in seal cavity 1；
Vacuum interface 101 is equipped with a vacuum solenoid 3 by the first piping connection to vacuum source 2, the first pipeline；
Gas source interface 102 is by the gas circuit terminal 4 of the second piping connection to thinned machine, and generally, gas circuit terminal 4 is to hold piece
Platform, rinsing table or vacuum mechanical-arm；
By the gas source 5 of third pipeline and the second pipeline connection, third pipeline is equipped with a gas solenoid valve 6；
The drain line connecting with drain interface 103, drain line are equipped with a liquid electromagnetic valve 7；
The control device being electrically connected with vacuum solenoid 3, gas solenoid valve 6 and liquid electromagnetic valve 7.
Wherein, which is used for: control vacuum solenoid 3 is opened, and gas solenoid valve 6 and liquid electromagnetic valve 7 are simultaneously
It closes, the vacuum for generating vacuum source 2 reaches gas circuit terminal 4 by seal cavity 1；And the waste liquid when the generation of gas circuit terminal 4
When entering seal cavity 1 by the second pipeline, control liquid electromagnetic valve 7 is opened, and vacuum solenoid 3 and gas solenoid valve 6 are same
When close, make waste liquid by drain line be discharged, to carry out gas-liquid separation.
In embodiments of the present invention, when vacuum solenoid 3 is opened, gas solenoid valve 6 is simultaneously closed off with liquid electromagnetic valve 7,
The vacuum that vacuum source 2 generates is by reaching gas circuit terminal 4 after seal cavity 1, at this point, the first pipeline, the second pipeline and close
Sealing in cavity 1 is vacuum, the waste liquid that generated in gas circuit terminal 4 can be drawn into the second pipeline, and eventually fall into seal cavity 1
Bottom.When the waste liquid that gas circuit terminal 4 generates enters seal cavity 1 by the second pipeline, control liquid electromagnetic valve 7 is opened
When, since in the vertical direction, vacuum interface 101 and height of the gas source interface 102 in seal cavity 1 are above drain interface
103 height in seal cavity 1, therefore waste liquid can be discharged by drain interface 103 from drain line.In addition, when waste liquid not from
Seal cavity 1 is discharged, and can be further formed sealing to the bottom of seal cavity 1, improve the sealing of entire vacuum filtering system
Stability.
Specifically, in embodiments of the present invention, control device is also used to: control gas solenoid valve 6 is opened, vacuum solenoid
3 simultaneously close off with liquid electromagnetic valve 7, and the gas that gas source 5 generates at this time enters seal cavity 1 by third pipeline, and reaches gas circuit
Terminal 4 ensure that entire vacuum filter system at this point, being each filled with gas in the second pipeline, third pipeline and seal cavity first
The spatter property of system, the gas that in addition gas source 5 generates is also for the use of gas circuit terminal 4.
Specifically, as shown in Figure 1, in embodiments of the present invention, the first pipeline is equipped with a vacuum regulator 8, for adjusting
The vacuum pressure that whole vacuum source 2 exports.Wherein, which may be disposed between vacuum source 2 and vacuum solenoid 3, or
Person's vacuum regulator 8 is set between vacuum solenoid 3 and vacuum interface 101.It is understood that in the embodiment of the present invention
In, for position of the vacuum regulator 8 on the first pipeline and without specifically limiting.
Specifically, as shown in Figure 1, in embodiments of the present invention, third pipeline is equipped with a gas pressure reducer 9, for adjusting
The gas pressure that whole gas source 5 exports.Wherein, gas pressure reducer 9 is set between gas source 5 and gas solenoid valve 6 or gas subtracts
Pressure valve 9 is set between gas solenoid valve 6 and gas source interface 102.It is understood that in embodiments of the present invention, for gas
Position of the body pressure reducing valve 9 on third pipeline and without specifically limiting.
Wherein, the opening and closing of above-mentioned vacuum solenoid 3, gas solenoid valve 6 and liquid electromagnetic valve 7 and vacuum regulator 8 with
And the adjusting of gas pressure reducer 9 can be adjusted according to technique, may be implemented to vacuum line used in a variety of satisfy the need into
Row filtering, and be uniformly controlled by control device, it is easy to operate.
Specifically, as shown in Figure 1, in embodiments of the present invention, the end of third pipeline and the second piping connection is equipped with one
Pressure sensor 10 may make the gas pressure of gas circuit terminal 4 to be maintained at for detecting the gas pressure value in gas circuit terminal 4
In working range appropriate, and the gas pressure of gas circuit terminal 4 can be fed back to control device, to ensure that gas circuit terminal 4 reaches
Technique and requirement.
Specifically, as shown in Fig. 2, in embodiments of the present invention, vacuum interface 101 is all set in close with gas source interface 102
The top of cavity 1 is sealed, drain interface 103 is set to the bottom end of seal cavity 1.It is understood that in embodiments of the present invention,
For position in seal cavity 1 of vacuum interface 101, gas source interface 102 and drain interface 103 and without specifically limiting
It is fixed, as long as guaranteeing that the height of vacuum interface 101, gas source interface 102 in seal cavity 1 connects higher than drain in the vertical direction
Height of the mouth 103 in seal cavity 1.
In addition, it is necessary to which explanation, in embodiments of the present invention connects vacuum interface 101, gas source interface 102 and drain
Mouthfuls 103 quantity and without specifically limiting, wherein the quantity of vacuum interface 101, gas source interface 102 and drain interface 103
It is at least one.The first pipeline for being connect with vacuum interface 101, gas source interface 102 and drain interface 103, second
Pipeline, the quantity of drain line are corresponding with the quantity of vacuum interface 101, gas source interface 102 and drain interface 103 respectively.Cause
This, vacuum filtering system provided in an embodiment of the present invention is not merely suitable for independent pipe-line system, for multi-pipeline, more gas circuits
The complex pipeline system of terminal 4 is equally applicable, and is connect as long as accordingly increasing vacuum interface 101, gas source interface 102 and drain
Mouthfuls 103, the first pipeline for being attached thereto, the second pipeline, drain line and it is set to the first pipeline, third pipeline, drain pipe
The solenoid valve of road.
Specifically, in embodiments of the present invention, vacuum interface 101, gas source interface 102 and drain interface 103 are fast
Interface.Fast interface is the connection type of the plug and play of most convenient, and have the advantages that it is small, it is non-in the connection of some tracheaes
Under often inconvenient, difficult space situations, with more certain superiority.Wherein, vacuum interface 101, gas source interface 102 and row
Liquid interface 103 can also be other aqueous vapor road interface elements.It is understood that in embodiments of the present invention, to this and without
It is specific to limit.
To sum up, the vacuum filtering system of the thinned machine provided through the embodiment of the present invention can realize gas-liquid separation, it is ensured that true
Only have gas to pass through in blank pipe road, greatly ensure that the cleannes of vacuum line, solves in the prior art because waste liquid enters
To vacuum line and caused by each damage of components, the problem of cannot effectively cooperating the movement of thinned machine.
Embodiment two
Other side according to an embodiment of the present invention additionally provides a kind of vacuum filter method of thinned machine, is applied to
Such as the vacuum filtering system of the thinned machine in embodiment one, which includes:
First control signal is sent to vacuum solenoid 3, gas solenoid valve 6 and liquid electromagnetic valve 7, controls vacuum electromagnetic
Valve 3 is opened, and gas solenoid valve 6 is simultaneously closed off with liquid electromagnetic valve 7, and the vacuum for generating vacuum source 2 is reached by seal cavity 1
Gas circuit terminal 4 may make and generate in gas circuit terminal 4 at this point, being vacuum in the first pipeline, the second pipeline and seal cavity 1
Waste liquid be drawn into the second pipeline, and eventually fall into 1 bottom of seal cavity, realize gas-liquid separation.
When the waste liquid that gas circuit terminal 4 generates enters seal cavity 1 by the second pipeline, to vacuum solenoid 3, gas
Solenoid valve 6 and liquid electromagnetic valve 7 send second control signal, and control liquid electromagnetic valve 7 is opened, vacuum solenoid 3 and gas
Solenoid valve 6 simultaneously closes off, due in the vertical direction, vacuum interface 101 and height of the gas source interface 102 in seal cavity 1
It is above height of the drain interface 103 in seal cavity 1, therefore waste liquid can be made to be discharged by drain line, it is ensured that vacuum tube
Only have gas to pass through in road, greatly ensure that the cleannes of vacuum line, solve in the prior art because waste liquid enters very
Blank pipe road and caused by each damage of components, the problem of cannot effectively cooperating the movement of thinned machine.
Specifically, in inventive embodiments, the also vacuum filter method further include:
Third is sent to vacuum solenoid 3, gas solenoid valve 6 and liquid electromagnetic valve 7 and controls signal, controls gas electromagnetism
Valve 6 is opened, and vacuum solenoid 3 is simultaneously closed off with liquid electromagnetic valve 7, and the gas for generating gas source 5 reaches gas by seal cavity 1
Road terminal 4, while guaranteeing entire vacuum line high cleanliness, additionally it is possible to be used for gas circuit terminal 4.
Above-described is the preferred embodiment of the present invention, it should be pointed out that the ordinary person of the art is come
It says, can also make several improvements and retouch under the premise of not departing from principle of the present invention, these improvements and modifications also exist
In protection scope of the present invention.
Claims (9)
1. a kind of vacuum filtering system of thinned machine, which is characterized in that the vacuum filtering system includes:
Seal cavity is respectively equipped with vacuum interface, gas source interface and drain interface in the seal cavity, wherein in vertical side
Upwards, the vacuum interface is above the drain interface described with height of the gas source interface in the seal cavity
Height in seal cavity；
The vacuum interface is equipped with a vacuum solenoid by the first piping connection to vacuum source, first pipeline；
The gas circuit terminal that the gas source interface passes through the second piping connection to thinned machine；
By the gas source of third pipeline and second pipeline connection, the third pipeline is equipped with a gas solenoid valve；
The drain line connecting with the drain interface, the drain line are equipped with a liquid electromagnetic valve；
The control device being electrically connected with the vacuum solenoid, the gas solenoid valve and the liquid electromagnetic valve；
Wherein, the control device is used for: it controls the vacuum solenoid and opens, the gas solenoid valve and the liquid electromagnetism
Valve simultaneously closes off, and the vacuum for generating the vacuum source reaches the gas circuit terminal by the seal cavity；And when described
When the waste liquid that gas circuit terminal generates enters the seal cavity by second pipeline, controls the liquid electromagnetic valve and beat
It opens, the vacuum solenoid is simultaneously closed off with the gas solenoid valve, waste liquid is discharged by the drain line, to carry out gas
Liquid separation；
Wherein, the control device is also used to: it controls the gas solenoid valve and opens, the vacuum solenoid and the liquid electric
Magnet valve simultaneously closes off, and the gas for generating the gas source reaches the gas circuit terminal by the seal cavity, for the gas
Road terminal uses.
2. vacuum filtering system as described in claim 1, which is characterized in that first pipeline is equipped with a vacuum decompression
Valve, the vacuum regulator is set between the vacuum source and the vacuum solenoid or vacuum regulator setting
Between the vacuum solenoid and the vacuum interface.
3. vacuum filtering system as described in claim 1, which is characterized in that the third pipeline is equipped with a gas decompression
Valve, the gas pressure reducer is set between the gas source and the gas solenoid valve or the gas pressure reducer is set to
Between the gas solenoid valve and the gas source interface.
4. vacuum filtering system as described in claim 1, which is characterized in that the third pipeline and second piping connection
End be equipped with a pressure sensor, for detecting the gas pressure value in the gas circuit terminal.
5. vacuum filtering system as described in claim 1, which is characterized in that the vacuum interface is all provided with the gas source interface
It is placed in the top of the seal cavity, the drain interface is set to the bottom end of the seal cavity.
6. vacuum filtering system as described in claim 1, which is characterized in that the vacuum interface, the gas source interface and
The quantity of the drain interface is at least one, first pipeline, the second pipeline, drain line quantity respectively with it is described true
The quantity of null interface, the gas source interface and the drain interface is identical.
7. vacuum filtering system as described in claim 1, which is characterized in that the vacuum interface, the gas source interface and
The drain interface is fast interface.
8. vacuum filtering system as described in claim 1, which is characterized in that the gas circuit terminal be wafer-supporting platform, rinsing table or
Person's vacuum mechanical-arm.
9. a kind of vacuum filter method of thinned machine, the vacuum mistake applied to thinned machine as described in any one of claims 1 to 8
Filter system, which is characterized in that the vacuum filter method includes:
First control signal is sent to vacuum solenoid, gas solenoid valve and liquid electromagnetic valve, controls the vacuum solenoid
It opens, the gas solenoid valve is simultaneously closed off with the liquid electromagnetic valve, and the vacuum for generating the vacuum source passes through described close
Envelope cavity reaches the gas circuit terminal；
When the waste liquid that the gas circuit terminal generates enters the seal cavity by second pipeline, to the vacuum electric
Magnet valve, the gas solenoid valve and the liquid electromagnetic valve send second control signal, control the liquid electromagnetic valve and open,
The vacuum solenoid is simultaneously closed off with the gas solenoid valve, and waste liquid is discharged by the drain line, to carry out gas-liquid
Separation；
Wherein, the vacuum filter method further include:
Third is sent to the vacuum solenoid, the gas solenoid valve and the liquid electromagnetic valve and controls signal, controls institute
Gas solenoid valve opening is stated, the vacuum solenoid is simultaneously closed off with the liquid electromagnetic valve, the gas for generating the gas source
Reach the gas circuit terminal by the seal cavity, for gas circuit terminal use.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611148299.0A CN106582127B (en) | 2016-12-13 | 2016-12-13 | A kind of vacuum filtering system and method for thinned machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611148299.0A CN106582127B (en) | 2016-12-13 | 2016-12-13 | A kind of vacuum filtering system and method for thinned machine |
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| CN106582127A CN106582127A (en) | 2017-04-26 |
| CN106582127B true CN106582127B (en) | 2018-12-04 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201897082U (en) * | 2010-11-04 | 2011-07-13 | 浙江吉利汽车有限公司 | Vacuum filling residual liquid separating device |
| CN102580448A (en) * | 2012-03-23 | 2012-07-18 | 深圳市理邦精密仪器股份有限公司 | Gas filter device |
| CN204284944U (en) * | 2014-11-13 | 2015-04-22 | 深圳大宇精雕科技有限公司 | Vaccum drainage means |
| CN205690082U (en) * | 2016-06-02 | 2016-11-16 | 平凉市老兵科技研发有限公司 | A kind of drainage arrangement of thinning machine vacuum line |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2425886B1 (en) * | 2010-09-06 | 2016-06-29 | Sartorius Stedim Biotech GmbH | Filter device test apparatus, filter integrity testing method and computer program product |
-
2016
- 2016-12-13 CN CN201611148299.0A patent/CN106582127B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201897082U (en) * | 2010-11-04 | 2011-07-13 | 浙江吉利汽车有限公司 | Vacuum filling residual liquid separating device |
| CN102580448A (en) * | 2012-03-23 | 2012-07-18 | 深圳市理邦精密仪器股份有限公司 | Gas filter device |
| CN204284944U (en) * | 2014-11-13 | 2015-04-22 | 深圳大宇精雕科技有限公司 | Vaccum drainage means |
| CN205690082U (en) * | 2016-06-02 | 2016-11-16 | 平凉市老兵科技研发有限公司 | A kind of drainage arrangement of thinning machine vacuum line |
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| CN106582127A (en) | 2017-04-26 |
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