CN106569116B - A kind of probe station and low temperature test system - Google Patents
A kind of probe station and low temperature test system Download PDFInfo
- Publication number
- CN106569116B CN106569116B CN201610883879.8A CN201610883879A CN106569116B CN 106569116 B CN106569116 B CN 106569116B CN 201610883879 A CN201610883879 A CN 201610883879A CN 106569116 B CN106569116 B CN 106569116B
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- sample
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
Abstract
The present invention relates to a kind of probe station and low temperature test systems, low temperature test system includes low-temperature test platform and the refrigerating plant for low-temperature test platform refrigeration, low-temperature test platform includes testboard chamber and the probe station that can be put into testboard chamber, testboard chamber includes the test platform for being located at testboard chamber lower portion and the cavity top cover being located on test platform, probe station includes sample stage, sample stage is equipped with the probe for connecting with sample, probe rear end and the removable connection of the indoor electrode of testboard chamber, the sample clamp for fixing sample is additionally provided on sample stage, there is sample stage the sample from sample stage upper surface to lower recess to place groove.Using probe station and low temperature test system of the invention, probe station is independently arranged, and is not only facilitated the contraposition of probe and sample electrode, is guaranteed the accuracy and safety of contraposition, but also joint efficiency is high.It can solve the problems, such as to cause electrode damage when connection is difficult when the measurement of traditional sample and connects.
Description
Technical field
The present invention relates to the low-temperature test fields of semiconductor devices, and in particular to a kind of probe station and low temperature test system.
Background technique
Low temperature test system is widely used in material microstructure and macroscopic view as a kind of important investigation of materials equipment
Performance study field.Linkam low temperature test system mainly includes cryogenic refrigerating system and low-temperature test platform, low-temperature test platform packet
It includes the test platform for placing sample and test platform is wrapped up into testboard chamber therein, cryogenic refrigerating system passes through high pure nitrogen
Low-temperature test environment is provided for testboard chamber, there is circular metal track, the needle handle portion connection of two probes on test platform
Magnet block, magnet block are adsorbed on circuit orbit and can slide in orbit, to realize the adjusting to probe tie point.Conventional measurement
When test stand tests sample to be tested, first by outside low-temperature test platform test equipment (such as voltage source table, current source table or
Other test instrumentations) incoming end connect with testboard incoming end, testboard is realized and two spies by metal track and magnet
The connection of needle.Then the upper cover of testboard chamber is opened, sample is placed on test platform, by two probes on testboard
It being overlapped on sample, then closes the upper cover of testboard chamber, cryogenic refrigerating system is that testboard chamber manufactures low-temperature test environment,
Sample can be measured.
This test macro has the disadvantage in that (1) is only tested there are two probe, since two probes can only connect
The positive and negative polarities of one externally measured instrument, and a measuring instrumentss cannot achieve the requirement of four-end method measuring resistance, therefore tradition
Two probe modes are not suitable for and four-end method measuring resistance；(2) since the size of sample and the diversification of distribution of electrodes position will lead to sample
Product may not be in testboard center portion, and such testboard upper cover will lead to sample sliding during closing tight, because
It is to be overlapped on sample, and the overlapped points of probe are very sharp keen for probe, the mobile electrode driven on probe relative sample of sample
Offset, will damage sample electrode in this way, also result in probe and sample connection failure；(3) since the process that probe is adjusted is
Manual toggle probe is moved or is rotated on the circuit orbit of probe, manually control it is unstable, it is thin especially by manually controlling
Small probe is docked with microelectrode, slightly probe will be made to scrape damage to electrode accidentally, while will also result in rosin joint；(4) due to
Probe and electrode are excessively small, may when being visually not easy whether tentatively resolution has connected, and not connecting by observation instrument visually
Needing repeatedly to connect correctly to align, and repeatedly connection scratch will cause the damage to electrode, it is therefore desirable to see by microscope
The connection to realize probe and sample electrode is surveyed, but since sample is attached in the testboard chamber of low-temperature test platform,
Need to move on in microscope low-temperature test platform top, process is cumbersome laborious, inconvenient.
Summary of the invention
The purpose of the present invention is to provide a kind of low temperature test systems, to need to put in sample when solving traditional sample measurement
Set the technical issues of causing electrode damage when being attached in testboard chamber and causing connection difficult and connection.
To achieve the above object, the technical solution of low temperature test system of the present invention is: low temperature test system includes that low temperature is surveyed
Test stand and the refrigerating plant to freeze for low-temperature test platform, low-temperature test platform include testboard chamber and can be put into testboard chamber
Probe station, testboard chamber include being located on test platform and the chamber being located on test platform of testboard chamber lower portion
Lid, probe station include sample stage, and sample stage is equipped with the probe for connecting with sample, and probe rear end and testboard chamber are indoor
The removable connection of electrode, the sample clamp for fixing sample is additionally provided on sample stage, and sample stage has from sample stage upper surface
Groove is placed to the sample of lower recess.
Further, the sample clamp includes at least two spring top flats being oppositely arranged.Using two spring top flats
As the fixture of sample, it is not only simple in structure, it is easy to operate, and occupy little space, and be conveniently connected by screw to realize
The adjusting of sample clamp.
Further, the probe includes needle handle and syringe needle, and the needle handle long hole of perforation upper and lower surface, syringe needle are provided on needle handle
End has the contact bent downward, passes through the needle handle long hole by screw and needle handle is pressed on sample stage.Using this knot
The probe of structure not only facilitates fixation, and structure is simple, and the adjusting of probe only can be realized by a screw, specially logical
Cross that screw is elastic and the upper and lower position of probe flexible adjustment probe tips contact, by screw in the needle handle long hole on needle handle
Radial expansion of the slidable adjustment probe on sample stage, the rotation by needle handle long hole relative to a screw adjust probe tips
The position of contact in the horizontal direction.
Further, the fixture long hole of perforation upper and lower surface is provided on the spring top flat, it is long to pass through fixture by screw
Spring top flat is pressed on the sample stage by hole.The fixture of setting strip is long in the middle part of two spring top flats of sample clamp
Hole not only passes through so that sample clamp to be fixed for screw, also can guarantee radial expansion of the sample clamp on sample stage
With the rotation in horizontal direction, it is fixedly clamped with realizing to sample multi-angle.
Further, the sample stage is rotary table, and it is cylinder shape groove that the sample, which places groove, and sample stage is additionally provided with certainly
Sample stage outer peripheral surface is penetrated through to the fixture mounting hole of cylinder shape groove, and fixture mounting hole is interior to pass through the fixed specimen holder of screw
Tool, the probe are compressed it on the upper surface of sample stage by screw.Cylindrical sample platform and cylinder shape groove guarantee sample
Sample platform central symmetry, it is circumferential not have to distinguish direction, and more applicable and testboard chamber internal cavity, sample clamp are mounted on sample stage
In fixture mounting hole on side wall, when cylinder shape groove is deeper, sample is in bottom portion of groove, in order to keep sample clamp preferably solid
Random sample product, Gu the mounting groove of sample clamp must be positioned at the middle and lower part of sample stage, and in order to guarantee the integrally-built jail of sample stage
Solidity energy, therefore scallop hole is dug out on sample stage side wall, rather than open up from sample stage both ends to sample stage intermediate recess
Groove.In addition, fixture mounting hole ensure that sample clamp can not only stretch wherein, but also can be in fixture mounting hole
Fastening screw around sample clamp rotates, more preferably to fix sample.
Further, heat release hole is laid on the inner wall of the sample placement groove.Since sample placing groove is bottom envelope
Space is closed, when refrigeration system freezes to it, heat conduction is slower, and it adds multiple heat release holes and guarantees that heat conduction is rapider, with
It improves efficiency.
The object of the invention is also to provide a kind of probe stations.
The technical solution of probe station of the present invention is: a kind of probe station, including sample stage, and sample stage is equipped with and is used for and sample
The probe of connection, the rear end of probe have the connection structure for connecting with the indoor electrode of testboard chamber, also set on sample stage
There is the sample clamp for fixing sample, there is sample stage the sample from sample stage upper surface to lower recess to place groove.
Further, the sample clamp includes at least two spring top flats being oppositely arranged.Using two spring top flats
As the fixture of sample, it is not only simple in structure, it is easy to operate, and occupy little space, and be conveniently connected by screw to realize
The adjusting of sample clamp.
Further, the probe includes needle handle and syringe needle, and the needle handle long hole of perforation upper and lower surface, syringe needle are provided on needle handle
End has the contact bent downward, passes through the needle handle long hole by screw and needle handle is pressed on sample stage.Using this knot
The probe of structure not only facilitates fixation, and structure is simple, and the adjusting of probe only can be realized by a screw, specially logical
Cross that screw is elastic and the upper and lower position of probe flexible adjustment probe tips contact, by screw in the needle handle long hole on needle handle
Radial expansion of the slidable adjustment probe on sample stage, the rotation by needle handle long hole relative to a screw adjust probe tips
The position of contact in the horizontal direction.
Further, the fixture long hole of perforation upper and lower surface is provided on the spring top flat, it is long to pass through fixture by screw
Spring top flat is pressed on the sample stage by hole.The fixture of setting strip is long in the middle part of two spring top flats of sample clamp
Hole not only passes through so that sample clamp to be fixed for screw, also can guarantee radial expansion of the sample clamp on sample stage
With the rotation in horizontal direction, it is fixedly clamped with realizing to sample multi-angle.
Further, the sample stage is rotary table, and it is cylinder shape groove that the sample, which places groove, and sample stage is additionally provided with certainly
Sample stage outer peripheral surface is penetrated through to the fixture mounting hole of cylinder shape groove, and fixture mounting hole is interior to pass through the fixed specimen holder of screw
Tool, the probe are compressed it on the upper surface of sample stage by screw.Cylindrical sample platform and cylinder shape groove guarantee sample
Sample platform central symmetry, it is circumferential not have to distinguish direction, and more applicable and testboard chamber internal cavity, sample clamp are mounted on sample stage
In fixture mounting hole on side wall, when cylinder shape groove is deeper, sample is in bottom portion of groove, in order to keep sample clamp preferably solid
Random sample product, Gu the mounting groove of sample clamp must be positioned at the middle and lower part of sample stage, and in order to guarantee the integrally-built jail of sample stage
Solidity energy, therefore scallop hole is dug out on sample stage side wall, rather than open up from sample stage both ends to sample stage intermediate recess
Groove.In addition, fixture mounting hole ensure that sample clamp can not only stretch wherein, but also can be in fixture mounting hole
Fastening screw around sample clamp rotates, more preferably to fix sample.
Further, heat release hole is laid on the inner wall of the sample placement groove.Since sample placing groove is bottom envelope
Space is closed, when refrigeration system freezes to it, heat conduction is slower, and it adds multiple heat release holes and guarantees that heat conduction is rapider, with
It improves efficiency.
The beneficial effect of low temperature test system of the present invention is: using low temperature test system of the invention, probe station is independently set
Set and with the removable connection of the indoor electrode of testboard chamber, guarantee probe station can be moved freely in testboard chamber, measuring
When sample, even if sample can also be such that sample is in and survey because size is too big or placement location is compared with deflection by adjusting probe station position
The center position of test stand chamber guarantees the changing of the relative positions that will not lead to sample and probe when closing testboard cavity top cover, protects
Demonstrate,prove the safety of sample electrode.Simultaneously as probe station is independent, during connecting sample electrode, probe station can be taken
Testboard chamber places the contraposition for realizing probe and sample electrode under the microscope out, and contraposition is completed and fixed by sample clamp
After place into testboard chamber and be attached test, it is easy to operate and will not be because being not easy aligning electrodes in testboard chamber
Position and cause sample electrode to be damaged.In addition, settable four probes of probe station and realize four-end method measuring resistance.In addition, by
In the independence of probe station, other electrical testings can be carried out in the case where being changed without electrode points.
Probe station of the present invention has and low-temperature test system of the present invention when being used cooperatively with low-temperature test platform and refrigeration system
It unites identical beneficial effect, to avoid repeating, details are not described herein again.
Detailed description of the invention
Fig. 1 is the specific embodiment top view of probe station of the present invention；
Fig. 2 is cross-sectional view at A-A in Fig. 1；
Fig. 3 is the top view of sample stage in Fig. 1；
Fig. 4 is cross-sectional view at B-B in Fig. 3；
Fig. 5 is the top view of Fig. 1 middle probe；
Fig. 6 is the cross-sectional view in Fig. 5 at C-C；
Fig. 7 is the top view of card sample elastic slice in Fig. 1；
Fig. 8 is cross-sectional view at D-D in Fig. 7；
In figure: 1- sample stage, 11- sample place groove, 12- fixture mounting hole, 13- clamp bolt hole, 14- probe screw
Hole, 2- probe, 21- needle handle, 212- needle handle long hole, 22- syringe needle, 221- contact, 3- sample clamp, 31- fixture long hole, 4- spiral shell
Nail, 5- sample.
Specific embodiment
Embodiments of the present invention are described further with reference to the accompanying drawing.
The specific embodiment of low temperature test system of the invention, as shown in Figures 1 to 8, low temperature test system include low temperature
Testboard (not shown) and the refrigerating plant (not shown) of low temperature environment, low-temperature test platform are provided for low-temperature test platform
Including testboard chamber (not shown) and the probe station that can be put into testboard chamber, testboard chamber includes being located at testboard
The test platform (not shown) of chamber lower portion and the cavity top cover (not shown) being located on test platform.
Probe station be independently arranged and with the removable connection of the indoor electrode of testboard chamber, guarantee probe station can be in testboard chamber
Interior moves freely, when measuring sample 5, even if sample 5 because size is too big or placement location is compared with deflection, can also be by adjusting spy
Needle platform position makes sample 5 be in the center position of testboard chamber, guarantees to lead when closing testboard cavity top cover
The changing of the relative positions for causing sample 5 and probe 2, guarantees the safety of sample electrode.During connecting sample electrode, probe station can be taken out
The placement of testboard chamber realizes that the contraposition of probe 2 and sample electrode, contraposition are completed and fixed by sample clamp 3 under the microscope
After place into testboard chamber and be attached test, it is easy to operate and will not be because being not easy aligning electrodes in testboard chamber
Position and cause sample electrode to be damaged.Settable four probes 2 of probe station and realize four-end method measuring resistance.In addition, due to visiting
The independence of needle platform can carry out other electrical testings in the case where being changed without electrode points.
As shown in Figure 1 to Figure 2, probe station includes sample stage 1, is located on sample stage 1 for fixing the sample clamp of sample 5
3, it is located on sample stage 1 for the probe 2 with 5 connecting test of sample.
As shown in Figure 3 to Figure 4, sample stage 1 is rotary table, and in other embodiments, 1 shape of sample stage can also be regular hexagon
Equal polygonized structures.Sample stage 1 is 5mm high, and the cylinder shape groove for being provided with 4mm depth downwards from 1 upper surface of sample stage is put as sample
Groove 11 is set, sample 5 can be placed in sample placement groove 11 and measure.In other embodiments, sample places groove 11
3mm or 2mm etc. can also can also be adjusted to as needed for polygonized structures, depth such as regular hexagons.
Set on the annular surface of 1 upper surface of sample stage there are four for fixing the probe screw hole 14 of probe 2, can be used for
The screw 4 of M2 is used cooperatively, and in other embodiments, screw 4 and 14 size of probe screw hole can be adjusted as needed.
Sample stage 1 penetrates through to sample to place in groove 11 from its outer peripheral surface is additionally provided with two opposite fixture mounting holes 12,
It is adjusted for being put into, fixing for sample clamp 3 in it.In other embodiments, fixture mounting hole 12 may also set up three
Or four etc., the spring top flat of corresponding settable three or four sample clamps 3 is placed wherein, is fixed with better multi-angle
Sample 5；Fixture mounting hole 12 also can be replaced the groove opened up downwards from 1 upper end of sample stage, the bullet of corresponding sample clamp 3
It is directly placed from the top down when spring top flat is placed, corresponding clamp bolt hole 13 can also change therewith.Fixture mounting hole 12
For the fan-shaped scallop hole in horizontal cross-section, and fan-shaped opening is towards the axle center of sample stage 1, to guarantee to be mounted on fixture mounting hole
The spring top flat of sample clamp 3 in 12 has bigger slewing area, and in other embodiments, fixture mounting hole 12 can also be
Rectangular hole or kidney slot etc. on the horizontal cross-section of scope of activities needed for the enough sample clamps 3 of size.
Sample stage 1 is additionally provided with from 1 upper surface of sample stage and penetrates through to the clamp bolt hole 13 of 12 lower part of fixture mounting hole, so as to
Sample clamp 3 is pressed on the bottom surface of fixture mounting hole 12 in screw 4, in other embodiments, clamp bolt hole 13 can also
It penetrates through using from 1 lower end surface of sample stage to 12 top of fixture mounting hole, sample clamp 3 is pressed on the upper of fixture mounting hole 12
On surface.
The inner wall that the sample of sample stage 1 places groove 11 is equipped with heat release hole, for sample placement groove 11 and wherein
Sample radiate, heat release hole be evenly arranged on sample place groove 11 bottom wall and side wall on, in other embodiments, can also be only
The bottom wall of groove 11 is placed in sample or heat release hole is arranged in side wall.
As shown in Figure 5 to Figure 6, probe 2 includes needle handle 21 and syringe needle 22.Whole needle handle 21 is in cuboid, length and width
High size is respectively 10mm, 3mm, 0.5mm, and in other embodiments, needle handle 21 can also be kidney-shaped thin slice or oval thin slice, needle
The size of handle 21 can adjust as needed.The needle handle long hole of rectangle is opened up on 21 maximum two faces of needle handle, so that screw 4 is to it
It is fixed, and so that screw 4 is slided or is rotated in the needle handle long hole after screw 4 can be loosened, to guarantee that probe 2 can be adjusted freely
Section, in other embodiments, needle handle long hole can also be kidney slot or slotted eye or other facilitate the shape of adjusting.Needle handle long hole
Length, width and height size be respectively 8mm, 2mm, 0.5mm, in other embodiments, specific size can be adjusted as needed, for example be selected
When being fastened with the screw 4 of M1.5, the size of needle handle long hole can accordingly become smaller, and width may be configured as 1.5mm etc..
Syringe needle 22 is connected to one end on 21 length direction of needle handle, extends 3mm on the length direction of needle handle 21, then to
Lower 90 degree of bending, re-extends 4mm, and in other embodiments, orthogonal two segment length of syringe needle 22 can be adjusted as needed,
For example, upper surface distance after probe 2 is installed from sample 5 is 2mm, then one section of the length that can be bent downward syringe needle 22 is set
For 2-3mm, it is suitable to guarantee after probe 2 is fixed that its syringe needle 22 is pressed in the power size on sample 5, it specifically can also be elastic by screw 4
It is finely adjusted；One section of length being connected directly on syringe needle 22 with needle handle 21 can be adjusted suitably, need to cooperate probe 2 when adjusting
Integral installation position and the needle handle long hole on needle handle 21 length, need to guarantee that the needle handle long hole of needle handle 21 covers on screw 4
When stretching motion, the syringe needle 22 of probe 2 can reach any position on sample 5.One section of the end that syringe needle 22 is bent downward
With contact 221, for overlapping with the electrode on sample 5, realization probe 2 is conducted with sample electrode.
As shown in Fig. 7 to Fig. 8, sample clamp 3 includes two spring top flats being oppositely arranged, for sample to be fixed on sample
In sample platform 1.In other embodiments, sample clamp 3 can also be made of three, four or more spring top flat, spring top flat number
Mesh increases the multi-faceted fixation to sample 5 of achievable multi-angle.Spring top flat generally rectangular sheet shape, in other embodiments
In, spring top flat shape also can be replaced kidney-shaped or ellipse etc..The length, width and height size of spring top flat be respectively 8mm, 3mm,
1mm can also be adjusted to other sizes in other embodiments as needed.The folder of perforation is provided on spring top flat upper and lower surface
Have long hole 31, so that it is fixed in screw 4, and so that screw 4 is slided or is turned in the fixture long hole 31 after screw 4 can be loosened
Dynamic, to guarantee that sample clamp 3 is freely adjustable, in other embodiments, fixture long hole 31 can also be kidney slot or slotted eye
Or other facilitate the shape of adjusting.The size of fixture long hole 31 is 6mm, 2mm, 1mm, in other embodiments, fixture long hole 31
Size can adjust as needed.
It is respectively 5mm, 5mm, 0.5mm that the present embodiment, which is for 5 length, width and height size of sample, and sample 5 becomes near the size
When dynamic, it can be adjusted and be carried out by the cooperation of the needle handle long hole on screw 4 and needle handle 21, the fixture long hole 31 on sample clamp 3
Appropriate adjustment.
Low temperature test system of the invention is in use:
When sample electrode and probe 2 align, since probe 2 and sample electrode are very small, visually it is not easy directly to observe, it can
The probe station being independently arranged directly is taken out into testboard chamber, and places and is carrying out sample electrode and probe 2 just under the microscope
Really contraposition, contraposition are accurate rapid.Probe station is put under the microscope first when contraposition, guarantees the probe fixing screws on probe station
It is in loosening state with 3 fixing screws of sample clamp, sample 5 is placed on suitable position on probe station, with sample clamp 3 by sample
Product 5 are fixed, tighten the fixing screws of sample clamp 3, and by probe 2 one by one with the electrode alignment on sample 5, every probe 2 aligned
Afterwards by tightening the fixing screws of probe 2 so that probe 2 is fixed.During specific contraposition, the elastic to spy of screw 4 can be passed through
The pressing force that needle 2 is pressed on sample 5 is finely adjusted, and can pass through sliding of the screw 4 in the needle handle long hole of needle handle 21 or opposite turn
The horizontal position of dynamic adjustment probe 2 by position of the screw 4 in the fixture long hole 31 of sample clamp 3 or can relatively rotate tune
The position of whole sample 5 and angle.
When adjustment, four probes 2 can adjust 5 position of sample at any time as needed during contraposition, so that sample 5 is in
Suitable position, when adjustment, need to first unclamp the fixing screws of probe 2, then remove probe 2, unclamp again the fixation of sample clamp 3
Screw repeats above-mentioned sample electrode and 2 contraposition process of probe after sample 5 is placed in suitable position.
Probe station can be integrally placed on the indoor test platform of testboard chamber after the completion of contraposition, will survey by connection procedure
Indoor four electrode wires of test stand chamber are connect with the rear end of the probe 2 on probe station respectively, and the rear end of probe 2 has and electrode wires
The connection structure of connection.Probe station is placed in the rational position of testboard chamber after the completion of connection, guarantees that probe station does not contact
Chamber inner wall covers cavity top cover, can manually adjust at any time during lid cavity top cover as probe station position is improper.It covers
External various test equipments can be connected thereto to the measurement for carrying out data, connection can realize four when connecting a ammeter after cavity top cover
Hold-carrying measuring resistance.
The specific embodiment of probe station of the present invention and the probe station in each specific embodiment of low temperature test system of the present invention
Each specific embodiment is identical, and details are not described herein again.
Claims (12)
1. a kind of probe station, it is characterised in that: including sample stage, sample stage is equipped with the probe for connecting with sample, probe
Rear end there is connection structure for connecting with the indoor electrode of testboard chamber, be additionally provided on sample stage for fixing sample
There is the sample from sample stage upper surface to lower recess to place groove for sample clamp, sample stage；Probe station be independently arranged and with survey
The removable connection of the indoor electrode of test stand chamber；Sample stage is wholely set with probe station.
2. probe station according to claim 1, it is characterised in that: the sample clamp includes at least two being oppositely arranged
Spring top flat.
3. probe station according to claim 1 or 2, it is characterised in that: the probe includes needle handle and syringe needle, is opened on needle handle
There is the needle handle long hole of perforation upper and lower surface, needle has the contact bent downward, passes through the needle handle long hole by screw
Needle handle is pressed on sample stage.
4. probe station according to claim 2, it is characterised in that: be provided with the folder of perforation upper and lower surface on the spring top flat
Have long hole, fixture long hole is passed through by screw, spring top flat is pressed on the sample stage.
5. probe station according to claim 1 or 2, it is characterised in that: the sample stage is rotary table, and the sample is placed recessed
Slot is cylinder shape groove, and sample stage is additionally provided with from sample stage outer peripheral surface and penetrates through to the fixture mounting hole of cylinder shape groove, fixture peace
It fills by the fixed sample clamp of screw in hole, the probe is compressed it on the upper surface of sample stage by screw.
6. probe station according to claim 1,2 or 4, it is characterised in that: laid on the inner wall of the sample placement groove
There is heat release hole.
7. low temperature test system, it is characterised in that: including low-temperature test platform and be the refrigerating plant of low-temperature test platform refrigeration, low temperature
Testboard includes testboard chamber and the probe station that can be put into testboard chamber, and testboard chamber includes being located under testboard chamber
The test platform in portion and the cavity top cover being located on test platform, probe station include sample stage, sample stage be equipped with for
The probe of sample connection, probe rear end and the removable connection of the indoor electrode of testboard chamber are additionally provided with for fixing on sample stage
There is the sample from sample stage upper surface to lower recess to place groove for the sample clamp of sample, sample stage；Probe station is independently arranged
And with the removable connection of the indoor electrode of testboard chamber；Sample stage is wholely set with probe station.
8. low temperature test system according to claim 7, it is characterised in that: the sample clamp includes at least two opposite
The spring top flat of setting.
9. low temperature test system according to claim 7 or 8, it is characterised in that: the probe includes needle handle and syringe needle, needle
The needle handle long hole of perforation upper and lower surface is provided on handle, needle has the contact bent downward, passes through the needle by screw
Needle handle is pressed on sample stage by handle long hole.
10. low temperature test system according to claim 8, it is characterised in that: be provided with perforation on the spring top flat up and down
The fixture long hole on two sides passes through fixture long hole by screw and spring top flat is pressed on the sample stage.
11. low temperature test system according to claim 7 or 8, it is characterised in that: the sample stage is rotary table, the sample
It is cylinder shape groove that product, which place groove, and sample stage is additionally provided with from sample stage outer peripheral surface and penetrates through to the fixture installation of cylinder shape groove
Hole, fixture mounting hole is interior by the fixed sample clamp of screw, and the probe is compressed it by screw in the upper of sample stage
On surface.
12. according to low temperature test system described in claim 7,8 or 10, it is characterised in that: the sample places the interior of groove
Heat release hole is laid on wall.
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| CN201610883879.8A CN106569116B (en) | 2016-10-10 | 2016-10-10 | A kind of probe station and low temperature test system |
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| CN201610883879.8A CN106569116B (en) | 2016-10-10 | 2016-10-10 | A kind of probe station and low temperature test system |
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| CN113495352A (en) * | 2020-04-08 | 2021-10-12 | 上海柯舜科技有限公司 | Workpiece containing and carrying cavity of low-temperature probe station |
| CN111596154B (en) * | 2020-05-18 | 2023-01-03 | 哈尔滨工业大学 | Auxiliary clamp for testing temperature-changing electrical property of small sample |
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