CN106546937A - A kind of validated measurement systems whether in steady statue method - Google Patents
A kind of validated measurement systems whether in steady statue method Download PDFInfo
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- CN106546937A CN106546937A CN201611052643.6A CN201611052643A CN106546937A CN 106546937 A CN106546937 A CN 106546937A CN 201611052643 A CN201611052643 A CN 201611052643A CN 106546937 A CN106546937 A CN 106546937A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
- G01R35/007—Standards or reference devices, e.g. voltage or resistance standards, "golden references"
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a kind of validated measurement systems whether in steady statue method.Using measurer R＆R research (intersection) instruments of MINITAB 16, method of analysis of variance is further selected to measure systematic analysiss, it is determined that the variability that measurement is produced is caused by the variability between measurer itself or operator.The present invention breaks through in the past only whether stable to verify ATE by calibrating present situation, take into full account the impact of the factors such as people, machine, material, method, ring, survey, it is to include measurer, survey crew, the measuring system of tested metering device, program and method to define evaluation object.And first Application is in integrated circuit testing field, the test data of analysis wafer scale, it is determined that what whether the variability that measurement is produced was caused in itself by measuring system, so as to the stability for validated measurement systems, it is ensured that product quality and reliability provide a kind of effective digital means.
Description
Technical field
The present invention relates to a kind of integrated circuit testing field, more particularly to whether a kind of validated measurement systems are in stablizing shape
The method of state.
Background technology
The test data obtained from ATE can help decide to receive or refuse measured device, and it provides manufacture
The information that the useful information of process and design are not enough.To ensure test quality, it is that device selects ATE meeting according to device
The clock frequency of part, time precision, number of pins etc..
It is traditionally calibrating by the cycle or calibration operation to the efficiency evaluation of ATE realizing.But
Also need to consider the impact of the factors such as people, machine, material, method, ring, survey in actual measurement.Therefore, evaluation object should not survey automatically
The measuring system of examination equipment itself, and should include measurer, survey crew, tested metering device, program and method.
Measurement System Analysis are the resolution and error of measuring system to be carried out point using the method for mathematical statisticss and chart
Analysis, to assess the resolution and error of measuring system for whether measured parameter is suitable, and determines the master of measurement system error
Want composition.Measurement System Analysis are just progressively promoted by the market demand and are applied in Enterprises Quality Management.The personal reality of some enterprises
Trample and also demonstrate that measurement System Analysis can ensure that the stable effective operation of quality system, in order to be active in following market,
Many enterprises also have begun to implement measurement System Analysis in quality management.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of method of validated measurement systems whether in steady statue.
In order to solve this technical problem, the invention provides whether a kind of validated measurement systems are in the side of steady statue
Method, is analyzed to the resolution and error of measuring system using the method for mathematical statisticss and chart, to assess measuring system
Whether resolution and error are suitable for measured parameter, and determine the main component of measurement system error.
In the past only whether stable to verify ATE by calibrating present situation is broken through, because while tester table school
It is accurate pass through but cannot comprehensively reflect measuring system in production process it may happen that various problems.Take into full account people,
The impact of the factors such as machine, material, method, ring, survey, defines evaluation object and is not only ATE itself, and should include measurer,
The measuring system of survey crew, tested metering device, program and method., in integrated circuit testing field, analysis is brilliant for first Application
Circle level test data.
It is analyzed using MINITAB 16, the method for measurer R＆R researchs (intersection), the repetition of analytical measurement system emphatically
Property and repeatability, the method be used for analysis when each unit under test can by multiple operator's repeated measure when measurer R＆R
Analysis, further selects method of analysis of variance to measure the analysis of system, it is determined that the variability that measurement is produced is measurer itself going back
It is that variability between operator causes.
When studying the method for (intersection) using measurer R＆R, the general discontinuous part for choosing 10 covering process abilities, by
2 or 3 operators, respectively to each unit test 2 to 3 times.With reference to integrated circuit testing field, here with two, workshop J750
As a example by tester table, confirm that two boards whether there is difference by measuring system repeatability and reproducibility studies.Due to J750
Board automaticity is very high, therefore can ignore the impact of operator, and practical operation person is the two tester tables.Separately
Outward, part is tube core, and measured value is the numerical value of certain test item of a product successfully developed on J750.
Description of the drawings
Concrete data of the Fig. 1 for certain test item of stie0；
Fig. 2 is data analysis scheme；
Graph results of the Fig. 3 for measurer R＆R researchs (intersection) of site0；
Mathematical statisticss results of the Fig. 4 for measurer R＆R researchs (intersection) of site0；
Fig. 5 is the acceptable value that measurer R＆R studies (intersection)；
Fig. 6 is the mathematical statisticss result of measurer R＆R researchs (intersection) of 4 site；
Explanation of nouns
site：Generally insider refers to a chip position on wafer a site；
Multi-site concurrent testings：Multi-site parallel test techniques are referred to can be while to more on a test machine
Individual IC chip carries out fully-automated synthesis, can be while being connected to multiple chips by the probe card for specially designing and producing
On pin so that test machine can carry out the test of multiple chips simultaneously, and the test result of multiple chips is recorded, by unit
Increase the quantity of chip under test in time to improve the throughput of test machine, reduce test machine slack resources, improve test and set
Standby utilization rate, greatly reduces energy consumption, reduces the floor space of test Factory Building.
Measurer R＆R studies (intersection)：Abbreviations of the R＆R for Repeatability and Reproducibility, is repeatability
And repeatability.
Specific embodiment
From two Teradyne J750 ATEs, A and B is respectively designated as, is calibrated, it is ensured that calibration is logical
Cross.The magnitude of voltage for being chosen on Teradyne J750 the output pin of a product successfully developed is Data Source, the voltage
The value test specification upper limit is 3.5V, and lower limit is 2.95V.This product is taken 4site and surveys pattern.Test machine A and B are using same
Block exploration card carries out 4Site to same piece of wafer respectively and surveys, and tests altogether twice.4 that 10 tube cores are chosen from test result
2 measured values of Site are used for carrying out follow-up measurement System Analysis.With reference to this area, due to J750 boards automaticity very
Height, therefore the impact of operator can be ignored, practical operation person is the two tester tables.Only with the data instance of site0,
Concrete data refer to Fig. 1.Data analysis scheme is shown in Fig. 2.
Measurement capability evaluation index has a component of variance contribution rate, % researchs variation (%SV) and % tolerances (SV/Toler) and
Differentiable classification number four.Computing formula is as follows：
Component of variance contribution rate：
% researchs variation (%SV)：
% tolerances (SV/Toler)：
Differentiable classification number：
2 measured values of 4 Site of 10 tube cores are changed into into the data form needed for MINITAB.Using MINITAB
Measurer R＆R research (intersection) instruments in 16, you can obtain the analysis result of each site, have two kinds of mathematical statisticss and chart
Presentation mode, the analysis result of site0 refer to Fig. 3, Fig. 4.The result compared between 4 site is shown in Fig. 6.
Acceptable value by mathematical statisticss result with graph results with measurer Repeatability and Reproducibility is compared, so as to
Definitive variation is by measuring that different parts cause or measuring system causes in itself.The precision of measuring system and total process
Errors of the percentage ratio %GR＆R of deviation less than 10%, shows that presently used measuring system is acceptable.It is differentiable
Classification number is all higher than 5, illustrates that measuring system reliably can be classified to process variations.Measurer Repeatability and Reproducibility connects
Fig. 5 be refer to by criterion.
Can be seen by the result of site0, precision and total process variations of % researchs variation (%SV) for measuring system
Percentage ratio, i.e.,：%GR＆R, specially 2.03%, less than 10%, illustrate that measurer can be to connect for the measurement capability of process variations
Receive；The precision of measuring system and the ratio (SV/Toler) of process specification are 2.02%, again smaller than 10%, illustrate measurer for
The measurement capability of specification can be acceptance[11].Difference classification number is 69, illustrates that measuring system reliably can be entered to process variations
Row classification.Based on ratio and difference classification number to giving specification tolerance, it can be seen that measuring system can be acceptance.By 4
Comparison result between individual site can see that % studies the value of variation (%SV) and % tolerances (SV/Toler), though 4 site
Slightly difference, but 10% error is below, show that presently used measuring system is acceptable.4 site's can area
The classification number for dividing is all higher than 5, illustrates that measuring system reliably can be classified to process variations.Therefore, although different site's
Slightly have difference between measured value, but current test system stablizes controlled on the whole.
Claims (1)
1. a kind of validated measurement systems whether in steady statue method, it is characterised in that comprise the steps：
Using J750 test machines, by 4site and survey, obtain 2 measured values；
2 measured values are changed into into the data form needed for MINITAB, using the measurer R＆R research works in MINITAB16
Tool, obtains the analysis result of each site, and the analysis result includes mathematical statisticss result and graph results；
Acceptable value of the mathematical statisticss result with the graph results with measurer Repeatability and Reproducibility is compared,
So that it is determined that variation is measuring system caused by the different parts of measurement or described causing in itself.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611052643.6A CN106546937A (en) | 2016-11-24 | 2016-11-24 | A kind of validated measurement systems whether in steady statue method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611052643.6A CN106546937A (en) | 2016-11-24 | 2016-11-24 | A kind of validated measurement systems whether in steady statue method |
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| CN106546937A true CN106546937A (en) | 2017-03-29 |
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| CN201611052643.6A Pending CN106546937A (en) | 2016-11-24 | 2016-11-24 | A kind of validated measurement systems whether in steady statue method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108593258A (en) * | 2018-01-17 | 2018-09-28 | 浙江江山三友电子有限公司 | A kind of test system stability appraisal procedure of light source and lamps and lanterns |
| CN112462233A (en) * | 2020-11-25 | 2021-03-09 | 北京确安科技股份有限公司 | Site control method and system in integrated circuit test |
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| CN102156271A (en) * | 2011-03-15 | 2011-08-17 | 上海宏力半导体制造有限公司 | Method for detecting semiconductor parameter measuring system |
| CN102346242A (en) * | 2010-07-26 | 2012-02-08 | 梅特勒-托利多桑顿公司 | Calibration of conductivity measurement system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102346242A (en) * | 2010-07-26 | 2012-02-08 | 梅特勒-托利多桑顿公司 | Calibration of conductivity measurement system |
| CN102156271A (en) * | 2011-03-15 | 2011-08-17 | 上海宏力半导体制造有限公司 | Method for detecting semiconductor parameter measuring system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108593258A (en) * | 2018-01-17 | 2018-09-28 | 浙江江山三友电子有限公司 | A kind of test system stability appraisal procedure of light source and lamps and lanterns |
| CN108593258B (en) * | 2018-01-17 | 2019-12-27 | 浙江江山三友电子有限公司 | Stability evaluation method for test system of light source and lamp |
| CN112462233A (en) * | 2020-11-25 | 2021-03-09 | 北京确安科技股份有限公司 | Site control method and system in integrated circuit test |
| CN112462233B (en) * | 2020-11-25 | 2023-11-17 | 北京确安科技股份有限公司 | Site control method and system in integrated circuit test |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Tan Xue Inventor after: Shi Zhigang Inventor after: Liu Wei Inventor after: Wang Yanping Inventor before: Tan Xue Inventor before: Shi Zhigang Inventor before: Liu Wei |
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| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170329 |