CN106531593A - Exhaust device for manufacturing photomultiplier tube and operation method - Google Patents
Exhaust device for manufacturing photomultiplier tube and operation method Download PDFInfo
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- CN106531593A CN106531593A CN201611143807.6A CN201611143807A CN106531593A CN 106531593 A CN106531593 A CN 106531593A CN 201611143807 A CN201611143807 A CN 201611143807A CN 106531593 A CN106531593 A CN 106531593A
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- electron
- base plate
- spherical shell
- tube core
- cathod
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
- H01J9/385—Exhausting vessels
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
The invention provides an exhaust device for manufacturing a photomultiplier tube and an operation method. A three-station object stage is arranged on a bottom plate; various stations are mutually independent and can rotate; glass ball shells carry out rotary translation between a cathode system and an electronic cleaning system through rotation of the object stage; the electronic cleaning system is provided with a lifting and translation mechanism; the cathode system is provided with a cathode assembly lifting mechanism; and the cathode system lifts cathode assemblies to the glass ball shells on the object stage to manufacture photocathodes. According to the exhaust device, in the process of manufacturing the photomultiplier tube, tube cores are not in the glass ball shells and are located in other chambers when the photocathodes are manufactured, so that the pollution to electron multipliers is avoided; and meanwhile, the tube cores are put into the glass ball shells in a vacuum environment and airtight sealing is completed, so that the pollution of alkali vapor to the electron multipliers in the tube cores can be significantly reduced, and meanwhile, the work efficiency is significantly improved.
Description
Technical field
The present invention relates to photomultiplier tube technical field, in particular to a kind of aerofluxuss for manufacturing photomultiplier tube
Device and operational approach.
Background technology
Photomultiplier tube is a kind of vacuum tube, for the detection of faint optical signal.Photomultiplier tube is entered by exhaust apparatus
Row makes, and the process of making includes bakeout degassing, photocathode making, electron scrubbing, sealing-in etc..Conventional art makes photoelectricity times
When increasing pipe, in photocathode manufacturing process, tube core is located at the inside of photomultiplier tube, it is impossible to carry out electron scrubbing, while photoelectricity
When negative electrode makes, alkali source steam can pollute the electron multiplier in tube core, and then affect gain and the noise of photomultiplier tube.This
Newly-designed exhaust apparatus is invented, when photomultiplier tube photocathode makes, tube core is located at outside photomultiplier tube, photoelectricity times
It is detached with tube core to increase pipe glass spherical shell, after photocathode completes, then tube core is put in glass spherical shell, and completes envelope
Connect.
The content of the invention
Technical problem solved by the invention is：According to the structure of photomultiplier tube, there is provided a kind of novel ventilation device, energy
Enough when photocathode makes, glass spherical shell and tube core are separated, it is to avoid the electron multiplier in tube core is subject to the dirt of alkali steam
Dye, while carry out electron scrubbing to the electron multiplier in tube core.
For reaching above-mentioned purpose, the present invention proposes a kind of exhaust apparatus for photomultiplier tube manufacture, including：Bell jar,
Base plate, frame, electron scrubbing system, cathod system, molecular pump, dry pump and electric-control system, wherein：
The bell jar is provided with bell jar lifting/lowering mechanism, can lift, and has heating function, is provided with above the base plate
Object stage, object stage include three stations, can rotate, and are provided with cathod system, electron scrubbing system, described the moon below base plate
Electrode systems have a cathode assembly elevating mechanism, and the electron scrubbing system has lifting, a translation mechanism, and by butterfly with
Bell jar is isolated.
Compared with prior art, its remarkable advantage is the present invention：1) exhaust apparatus of the structure, makes photomultiplier tube mistake
Cheng Zhong, when photocathode makes, tube core not in glass spherical shell, positioned at other within the chambers, it is to avoid alkali source steam is in tube core
The pollution of electron multiplier；2), in photomultiplier tube manufacturing process, tube core can be put into into glass spherical shell under vacuum conditions
It is interior, and complete seal；3) device has three stations, high working efficiency.
As long as it should be appreciated that all combinations of aforementioned concepts and the extra design for describing in greater detail below are at this
A part for the subject matter of the disclosure is can be viewed as in the case that the design of sample is not conflicting.In addition, required guarantor
All combinations of the theme of shield are considered as a part for the subject matter of the disclosure.
Can be more fully appreciated with reference to accompanying drawing from the following description present invention teach that foregoing and other aspect, reality
Apply example and feature.The feature and/or beneficial effect of other additional aspects such as illustrative embodiments of the present invention will be below
Description in it is obvious, or by according to present invention teach that specific embodiment practice in learn.
Description of the drawings
Accompanying drawing is not intended to drawn to scale.In the accompanying drawings, identical or approximately uniform group of each for illustrating in each figure
Can be indicated by the same numeral into part.For clarity, in each figure, not each ingredient is labeled.
Now, by example and the embodiment of various aspects of the invention will be described in reference to the drawings, wherein：
Fig. 1 is the structural representation of the exhaust apparatus for photomultiplier tube manufacture according to certain embodiments of the invention.
Fig. 2 is the schematic diagram of the base plate according to certain embodiments of the invention.
Fig. 3 is base plate underlying cathode system flange, the distribution of electron scrubbing system flange according to certain embodiments of the invention
Structural representation.
Fig. 4 is the electron scrubbing system structure diagram according to certain embodiments of the invention.
Fig. 5 is the cathod system structural representation according to certain embodiments of the invention.
Specific embodiment
In order to know more about the technology contents of the present invention, especially exemplified by specific embodiment and institute's accompanying drawings are coordinated to be described as follows.
Each side with reference to the accompanying drawings to describe the present invention in the disclosure, shown in the drawings of the embodiment of many explanations.
Embodiment of the disclosure must not be intended to include all aspects of the invention.It should be appreciated that various designs presented hereinbefore and reality
Apply example, and those designs for describing in more detail below and embodiment can in many ways in any one comes real
Apply, this is because design disclosed in this invention and embodiment are not limited to any embodiment.In addition, disclosed by the invention one
A little aspects can be used alone, or otherwise any appropriately combined using with disclosed by the invention.
With reference to shown in Fig. 1-Fig. 5, embodiments in accordance with the present invention, a kind of exhaust apparatus for manufacturing photomultiplier tube,
Including bell jar 1, base plate 3, frame 4, molecular pump 5, electron scrubbing system 6, cathod system 7 and dry pump 8, the exhaust apparatus is also
Including electric-control system, for controlling the operation of the molecular pump, electron scrubbing system, cathod system and dry pump.
The top of base plate 3 is liftably installed and covered to the bell jar 1, and has heating function, can heat loading
Glass spherical shell 2 on platform 303.The upper surface of base plate 3 is provided with object stage 303, and object stage 303 includes three stations, and can revolve
Turn, electron scrubbing system 6 and cathod system 7 are installed below base plate 3, the cathod system 7 has cathode assembly elevating mechanism
703, the electron scrubbing system 6 has lifting, translation mechanism, and is isolated with bell jar 1 by butterfly 301.
The bell jar 1 is provided with bell jar lifting/lowering mechanism 101, can lift.
With reference to Fig. 1, Fig. 2, Fig. 3, object stage 303 is provided with three stations, and each station is separate.Photomultiplier tube is in manufacture
During, glass spherical shell 2 can rotate translation by object stage 303 between cathod system 7 and electron scrubbing system 6.
In cathode fabrication process, glass spherical shell 2 is located above cathod system 7 photomultiplier tube, and tube core 601 is located at electronics
Clean with water in system 6, electron scrubbing system 6 is isolated with bell jar 1 by butterfly 301.
Cathod system 7 is located on the downside of base plate 3, is connected with base plate 3 by cathod system flange 305, and cathod system 7 can be by
Cathode assembly 705 is raised on object stage 303 in glass spherical shell 2, makes photocathode.
Electron scrubbing system 6 is located on the downside of base plate 3, is connected with base plate 3 by electron scrubbing system flange 304, and electronics is clear
Tube core 601 can be risen up in the glass spherical shell 2 on object stage 303 by brush system 6, and tube core 601 and glass spherical shell 2 are entered row metal
Sealing-in.
Fig. 2 show the example arrangement schematic diagram of base plate 3, and base plate 3 includes butterfly 301, polyfluoroprene circle 302, loading
Platform 303.Base plate 3 is located at below bell jar 1, is sealed using polyfluoroprene circle 302 between base plate 3 and bell jar 1, and polyfluoroprene circle 302 is located at
3 top edge position of base plate.3 top of base plate is disposed with object stage 303, and object stage 303 has three stations, and three stations are uniform
Distribution, separate, for fixing photomultiplier tube glass spherical shell 2, the present embodiment is described in detail with elliposoidal glass spherical shell
The present invention, but it is not intended to limit protection scope of the present invention.
Object stage 303 can be rotated around central shaft, by the Serve Motor Control anglec of rotation, can be from cathod system 7
Top is rotated to above electron scrubbing system 6.Butterfly 301 is located above electron scrubbing system flange 304, can be rotated,
For blocking electron scrubbing system 6.
Fig. 3 show the cathod system flange 305 below base plate 3,304 distributed architecture of electron scrubbing system flange and illustrates
Figure, including three cathod system flanges, 305, three electron scrubbing system flanges 304, cathod system flange 305 and electron scrubbing
304 cross-distribution of system flange, is evenly distributed on below base plate 3.Cathod system flange 305,304 institute of electron scrubbing system flange
Circle diameter and object stage 303 the circle diameter that is located of three stations it is identical.
Fig. 4 show the example arrangement schematic diagram of electron scrubbing system 6, and electron scrubbing system 6 is distributed under base plate 3
Side, including tube core 601, magnetic fluid 602, tube core elevating mechanism 603, electron gun translation mechanism 604.Tube core elevating mechanism 603 leads to
Crossing servomotor drives turn-screw control tube core 601 to lift, and turn-screw is located inside electron scrubbing system 6, by magnetic current
Body 602 carries out vacuum sealing.Electron scrubbing system 6 controls the translation of 601 electron gun of tube core by electron gun translation mechanism 604.
Fig. 5 show the example arrangement schematic diagram of cathod system 7, and cathod system 7 is distributed in below base plate 3, including the moon
Pole component 705, turn-screw 701, corrugated tube 702, cathode assembly lifting structure 703, guide post 704, cathode assembly elevator
Structure 703 drives 701 Spin Control cathode assembly 705 of turn-screw to lift by motor, ensures to lift by guide post 704
Stability, carries out vacuum sealing using corrugated tube 702.
In embodiments of the invention, bell jar 1 and base plate 3, cathod system 7,6 groups of the electron scrubbing system of above-mentioned exhaust apparatus
Into sealing vacuum chamber, it is evacuated by molecular pump 5, the backing pump of molecular pump 5 is dry pump 8.The bell jar that 1 both sides of bell jar are arranged
Lifting body 101, is rotated by leading screw, drives bell jar 1 to rise, decline.The inwall arrangement armouring silk heater of bell jar 1, passes through
Electric-control system carries out intensification control.Base plate 3 is located at below bell jar 1, is carried out using polyfluoroprene circle 302 close between base plate 3 and bell jar 1
Envelope, polyfluoroprene circle 302 are located at 3 top edge position of base plate.3 top of base plate is disposed with object stage 303, and object stage 303 has three
Station, three stations are uniformly distributed, separate, for fixing photomultiplier tube glass spherical shell 2.Object stage 303 can be surrounded
Central shaft rotates, and by the Serve Motor Control anglec of rotation, can be rotated to electron scrubbing system 6 from above cathod system 7
Side.Cathod system 7 is located at below base plate 3, is fixed on base plate 3 by cathod system flange 305, with three stations, three
Station is uniformly distributed on base plate 3, separate, and cathod system 7 has cathode assembly elevating mechanism 703, by motor
Drive 701 Spin Control cathode assembly 705 of turn-screw to lift, lifting stability is ensured by guide post 704, using corrugated tube
702 carry out vacuum sealing.Electron scrubbing system 6 is located at below base plate 3, is fixed on base plate 3 by electron scrubbing system flange 304
On, with three stations, three stations are uniformly distributed on base plate 3, have tube core elevating mechanism 603 in electron scrubbing system 6
With electron gun translation mechanism 604, tube core elevating mechanism 603 by servomotor drive turn-screw control tube core 601 lift, pass
Dynamic silk is shouldered inside electron scrubbing system 6, carries out vacuum sealing by magnetic fluid 602.Above electron scrubbing system flange 304
Butterfly 301 is installed.Cathod system 7 and electron scrubbing system 6 cross-distribution below the base plate 3, is uniformly distributed, mutually solely
It is vertical.
The mode of operation of the exhaust apparatus of present invention is as follows：By 1 elevating mechanism of bell jar rise bell jar 1,
Glass spherical shell 2 is arranged on object stage 303, tube core 601 is arranged in electron scrubbing system 6, cathode assembly 705 is arranged on the moon
In electrode systems 7, rotatable stage 303 moves to glass spherical shell 2 above cathod system 7, cathode assembly 705 is risen up into glass
In spherical shell 2, tube core 601 is risen up in bell jar 1, fall bell jar 1, this clock mask 1 is formed with cathod system 7, electron scrubbing system 6
Vacuum chamber, opens dry pump 8 and molecular pump 5, carries out vacuum suction, when reaching certain vacuum and spending, opens 1 inner heating device of bell jar,
Bakeout degassing is carried out to glass spherical shell 2, tube core 601, cathode assembly 705.After the completion of bakeout degassing, tube core 601 is down to into electronics
Clean with water in system 6, close butterfly 301, moved to electron gun above tube core 601 by electron gun translation mechanism 302, entered
Row electron scrubbing, while be deposited with photocathode in glass spherical shell 2.After negative electrode completes, cathode assembly 705 is down to into negative electrode
In system 7.After the completion of electron scrubbing, electron gun is moved to above 601 side of tube core by electron gun translation mechanism 604.Open
Butterfly 301, rotatable stage 303 rotate glass spherical shell 2 to above electron scrubbing system 6 from above cathod system 7,
Tube core 601 is risen up in glass spherical shell 2, tube core 601 is docked with glass spherical shell 2, completes seal.Every ring described above
Section, is controlled by electric-control system.
As described above, compared with traditional exhaust station, the exhaust apparatus for making photomultiplier tube proposed by the present invention,
In photomultiplier tube manufacturing process, pollution of the alkali steam to electron multiplier in tube core is significantly reduced, while operation side
Face is more quick effective, is remarkably improved work efficiency.
Although the present invention is disclosed above with preferred embodiment, so which is not limited to the present invention.Skill belonging to of the invention
Has usually intellectual in art field, without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations.Cause
This, protection scope of the present invention ought be defined depending on those as defined in claim.
Claims (7)
1. a kind of exhaust apparatus for manufacturing photomultiplier tube, it is characterised in that clear including bell jar, base plate, molecular pump, electronics
Brush system, cathod system and dry pump, the exhaust apparatus also include that electric-control system is used for controlling the molecular pump, electron scrubbing
The operation of system, cathod system and dry pump, wherein：
The upper surface of the base plate is provided with object stage, and object stage includes three stations, and each station is separate and rotatable；
The top of base plate is liftably installed and covered to the bell jar, and on its inwall is provided with heater, for adding
Glass spherical shell of the thermal potential on the object stage above base plate；Glass spherical shell is caused in cathod system and electricity by the rotation of object stage
Son cleans rotation translation between system with water；
The electron scrubbing system has lifting, translation mechanism, and is isolated with bell jar by butterfly；Electron scrubbing system position
In baseplate underside, it is connected with base plate by electron scrubbing system flange, electron scrubbing system is for rising up into object stage by tube core
Glass spherical shell in, tube core and glass spherical shell are carried out into metal sealing；
The cathod system has cathode assembly elevating mechanism, and the cathod system is located at baseplate underside, by cathod system method
Orchid is connected with base plate, and cathod system is configured in the glass spherical shell that cathode assembly is raised on object stage, makes photocathode.
2. the exhaust apparatus for manufacturing photomultiplier tube according to claim 1, it is characterised in that the base plate includes
Butterfly, polyfluoroprene circle and object stage；Base plate is located at below bell jar, is sealed using polyfluoroprene circle between base plate and bell jar,
Polyfluoroprene circle is located at base plate top edge position；Base plate top is disposed with object stage, and object stage has three stations, and three stations are equal
Even distribution, it is separate, for fixing photomultiplier tube glass spherical shell.
3. the exhaust apparatus for manufacturing photomultiplier tube according to claim 2, it is characterised in that the object stage sets
It is set to and rotates around central shaft, by the Serve Motor Control anglec of rotation, can rotates from above cathod system to electron scrubbing system
System top；Butterfly is above electron scrubbing system flange and rotatable, for blocking electron scrubbing system.
4. the exhaust apparatus for manufacturing photomultiplier tube according to Claims 2 or 3, it is characterised in that the aerofluxuss
Device includes three cathod system flanges, three electron scrubbing system flanges, cathod system flange and electron scrubbing system flange
Cross-distribution, is evenly distributed on below base plate；Circle diameter and loading that cathod system flange, electron scrubbing system flange are located
The circle diameter that three stations of platform are located is identical.
5. the exhaust apparatus for manufacturing photomultiplier tube according to claim 1, it is characterised in that the electron scrubbing
System is distributed in below base plate, including tube core, magnetic fluid, tube core elevating mechanism and electron gun translation mechanism, tube core elevator
Structure drives turn-screw to control tube core lifting by servomotor, and turn-screw is located at electron scrubbing internal system, by magnetic current
Body carries out vacuum sealing；Electron scrubbing system controls the translation of die electronic rifle by electron gun translation mechanism.
6. the exhaust apparatus for manufacturing photomultiplier tube according to claim 1, it is characterised in that the cathod system
It is distributed in below base plate, including cathode assembly, turn-screw, corrugated tube, cathode assembly lifting structure and guide post, cathode sets
Part elevating mechanism drives the lifting of turn-screw Spin Control cathode assembly by motor, ensures that lifting is stable by guide post
Property, vacuum sealing is carried out using corrugated tube.
7. a kind of operational approach for manufacturing the exhaust apparatus of photomultiplier tube described in claim 1, it is characterised in that bag
Include following step：
Bell jar is risen by bell jar lifting/lowering mechanism；
Glass spherical shell is arranged on object stage；
Tube core is arranged in electron scrubbing system；
Cathode assembly is arranged in cathod system；
Rotatable stage, glass spherical shell is moved to above cathod system；
Cathode assembly is risen up in glass spherical shell；
Tube core is risen up in bell jar, bell jar is fallen, this clock mask forms vacuum chamber with cathod system, electron scrubbing system；
Dry pump and molecular pump is opened, vacuum suction is carried out, when reaching the vacuum of setting, bell jar inner heating device is opened, to glass
Glass spherical shell, tube core, cathode assembly carry out bakeout degassing；
After the completion of bakeout degassing, tube core is down in electron scrubbing system, closes butterfly, will by electron gun translation mechanism
Electron gun is moved to above tube core, carries out electron scrubbing, while being deposited with photocathode in glass spherical shell；
After negative electrode completes, cathode assembly is down in cathod system；
After the completion of electron scrubbing, electron gun is moved to above die-side by electron gun translation mechanism；
Butterfly is opened, rotatable stage rotates glass spherical shell to above electron scrubbing system from above cathod system, will
Tube core is risen up in glass spherical shell, and tube core is docked with glass spherical shell, completes seal.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611143807.6A CN106531593B (en) | 2016-12-13 | 2016-12-13 | For manufacturing the exhaust apparatus and operating method of photomultiplier |
| PCT/CN2017/071995 WO2018058870A1 (en) | 2016-09-28 | 2017-01-21 | High-quantum efficiency microchannel plate photomultiplier, and manufacturing device and method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611143807.6A CN106531593B (en) | 2016-12-13 | 2016-12-13 | For manufacturing the exhaust apparatus and operating method of photomultiplier |
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| Publication Number | Publication Date |
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| CN106531593A true CN106531593A (en) | 2017-03-22 |
| CN106531593B CN106531593B (en) | 2018-03-13 |
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| CN201611143807.6A Active CN106531593B (en) | 2016-09-28 | 2016-12-13 | For manufacturing the exhaust apparatus and operating method of photomultiplier |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107706072A (en) * | 2017-08-25 | 2018-02-16 | 北方夜视技术股份有限公司 | The indium encapsulation method and prepared photomultiplier of photomultiplier based on negative electrode transfer equipment |
| CN111261475A (en) * | 2020-01-29 | 2020-06-09 | 北方夜视技术股份有限公司 | Integrated multifunctional exhaust device for manufacturing photomultiplier and use method |
| CN111261474A (en) * | 2020-01-29 | 2020-06-09 | 北方夜视技术股份有限公司 | Exhaust apparatus for high temperature uniformity in microchannel plate type photomultiplier fabrication |
| CN111584325A (en) * | 2020-05-09 | 2020-08-25 | 北方夜视技术股份有限公司 | Nitrogen protection system for multi-station large-scale cathode transfer equipment and operation method |
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| CN203871298U (en) * | 2014-05-26 | 2014-10-08 | 北方夜视技术股份有限公司 | Exhaust device structure for photomultiplier cathode making and sealing |
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| US5487689A (en) * | 1994-08-15 | 1996-01-30 | Itt Corporation | High throughput assembly station and method for image intensifier tubes |
| CN103715034A (en) * | 2013-12-30 | 2014-04-09 | 中国科学院西安光学精密机械研究所 | Photoelectric detector transfer manufacturing system and manufacturing method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107706072A (en) * | 2017-08-25 | 2018-02-16 | 北方夜视技术股份有限公司 | The indium encapsulation method and prepared photomultiplier of photomultiplier based on negative electrode transfer equipment |
| CN111261475A (en) * | 2020-01-29 | 2020-06-09 | 北方夜视技术股份有限公司 | Integrated multifunctional exhaust device for manufacturing photomultiplier and use method |
| CN111261474A (en) * | 2020-01-29 | 2020-06-09 | 北方夜视技术股份有限公司 | Exhaust apparatus for high temperature uniformity in microchannel plate type photomultiplier fabrication |
| CN111584325A (en) * | 2020-05-09 | 2020-08-25 | 北方夜视技术股份有限公司 | Nitrogen protection system for multi-station large-scale cathode transfer equipment and operation method |
| CN111584325B (en) * | 2020-05-09 | 2022-08-16 | 北方夜视技术股份有限公司 | Nitrogen protection system for multi-station large-scale cathode transfer equipment and operation method |
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