CN106525669B - Light momentum excited nano beam nano-particle apparatus for measuring quality and method - Google Patents
Light momentum excited nano beam nano-particle apparatus for measuring quality and method Download PDFInfo
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- CN106525669B CN106525669B CN201610971404.4A CN201610971404A CN106525669B CN 106525669 B CN106525669 B CN 106525669B CN 201610971404 A CN201610971404 A CN 201610971404A CN 106525669 B CN106525669 B CN 106525669B
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- 239000002105 nanoparticle Substances 0.000 title claims abstract description 15
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- 238000005259 measurement Methods 0.000 claims description 13
- 230000000694 effects Effects 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 230000008859 change Effects 0.000 abstract description 11
- 238000001514 detection method Methods 0.000 abstract description 9
- 230000009471 action Effects 0.000 abstract description 3
- 230000010355 oscillation Effects 0.000 abstract description 3
- 238000010183 spectrum analysis Methods 0.000 abstract description 3
- 238000004364 calculation method Methods 0.000 abstract description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011859 microparticle Substances 0.000 description 2
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- 235000007164 Oryza sativa Nutrition 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/1031—Investigating individual particles by measuring electrical or magnetic effects thereof, e.g. conductivity or capacity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N2015/0038—Investigating nanoparticles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N2015/03—Electro-optical investigation of a plurality of particles, the analyser being characterised by the optical arrangement
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- G01N2015/1021—
Abstract
The present invention provides a kind of smooth momentum excited nano beam apparatus for measuring quality, generating means and micro- quality detection device are encouraged including class sine light momentum, the monochromatic light of upper laser and lower laser irradiates disk and lower disc light hole respectively, drive motor band moving axis rotates, similar Sine distribution light momentum excitation can be generated, excited nano beam vibration, nano beam generates forced vibration under alternation light momentum incentive action, the resistive layer resistance for being pasted on nano beam root changes, the signal can be exported using wheatstone bridge circuits, after signal amplifier amplifies, it can carry out spectrum analysis, obtain vibration time domain and frequency domain vibration information image, obtain the vibration parameters such as vibration amplitude and vibration frequency.Change light momentum and encourages generating means driving motor rotating speed, light momentum driving frequency is with changing, when nano beam resonates, output current signal value is maximum, the resonant oscillation frequency of nano beam can be detected by measuring voltage change peak value, the size of the additional mass of nano beam end adherency is obtained by calculation, achievees the purpose that measure nano-particle quality.
Description
Technical field
Patent of the present invention is that one kind receives micro- quality detection device, especially a kind of for receiving micro- apparatus for measuring quality, is belonged to
Receive micro- quality testing field.
Background technology
For mechanical resonator, micro-cantilever of receiving is the important device for detecting low force signal.It is higher in order to realize
Mechanical Sensitivity needs to use smaller micro-oscillator, however how to drive and detect the vibration of micro-oscillator, becomes system
About measure one of the problem that nano-particle Mass accuracy improves.Based on quantum-mechanical basic principle, in driving and measurement process
In, driving and measuring apparatus can cause measurand to disturb and destroy, and introduce extra noise, reduce the accuracy of measurement.
Receive micro-resonator vibration signal extraction in terms of, generally use detect displacement signal method, by displacement signal be converted into light,
The signals such as electricity, magnetic realize highly sensitive displacement measurement, however these means shake to tested machinery by measuring these signals
The size and geometry of son have harsh requirement, it is difficult to it is applied to the measurement of nanometer, sub-nanometer scale mechanical oscillator, it is potential
Constrain the measurement work of high-precision quality.The driving of light momentum is a kind of non_contact drive method, as receiving the drive of micro-resonator
Dynamic driving source reduces influence of the driving to measurand, can encourage smaller micro-oscillator, and micro- mass measurement is received in raising
The resolution ratio of accuracy and measurement.
The present invention can be widely applied to bacterium, viral diagnosis, and particulate detection work is received in the fields such as atmosphere pollution analyte detection
Make, it might even be possible to be detected for unimolecule or atomic mass.
Invention content
The present invention is difficult to the present situation measured for nano-particle quality, proposes a kind of nano-particle apparatus for measuring quality and side
Method.
Scheme is used by the present invention solves its technical problem：The light momentum excited nano beam mass measurement dress
It sets, including class sine light momentum excitation generating means and micro- quality detection device, it is characterised in that：
The smooth momentum excitation generating means is from top to bottom followed successively by fixing end, upper bearing (metal), axis, upper disk, lower disc, under
Bearing and drive motor, upper laser is located above upper disk, lower laser is located at below lower disc, upper disk and lower disc
It is fixed on axis centre position, a bearing is installed in the top and bottom of axis respectively, and axis lower end is hinged a drive motor, driving
Motor band moving axis rotates；Upper disk and lower disc radius are 12mm, and upper disk and lower disc disk are along apart from axle center etc.
Distance opens the light hole of homalographic square, and the square light hole length of side is 5 μm, and the length of side is much larger than the wavelength of light, with radius
Arrange that adjacent two thang-kngs distance between borehole is equal for line centered on the circumference of 10mm, two neighboring thang-kng distance between borehole is thang-kng
Four times of hole width, upper disk and the adjacent two thang-kngs distance between borehole of lower disc are twice of thang-kng hole width.Upper laser is under
Laser is fixed on the base, and when the monochromatic light of upper laser and lower laser irradiates light hole respectively, drive motor drives
Axis rotates, and can generate similar Sine distribution light momentum excitation, excited nano beam vibration.
The nano-particle that micro- quality detection device is measured by nano beam, resistive layer resistance, Wheatstone bridge and needs
Composition, it is characterised in that：
Described nano beam one end is fixed, and the other end is free, and nano beam makes of silicon single crystal material, length, width and height
Respectively 40 μm, 5 μm and 0.8 μm, nanometer beam width are less than the length of side of square light hole, and measured nano-particle is placed in
Nano beam end, sinusoidal light stimulus act on nano beam near at a quarter of end.
The nano beam upper layer by argon ion sputtering, forms a thin layer resistive layer resistance close to fixed end part, argon from
Sub- sputter depth 10- 50nm, the resistive layer resistance value change with the deformation of nano beam, when resistive layer length,
Resistance becomes larger, and then becomes smaller on the contrary, and resistive layer resistance initial resistance 15k Ω, the other resistance of Wheatstone bridge are 15k Ω.
The Wheatstone bridge is connected on resistive layer resistance both ends, other two terminal of Wheatstone bridge connects constant external voltage,
Voltage source voltage is 5 volts；The sine light momentum incentive action is received in the upper and lower surface of nano beam, photon movement momentum driving
Rice vibration of beam, when nanometer beam vibration, change with nano beam resistive layer resistance, and resistance variations cause Wheatstone bridge
Current signal changes in circuit, and the variation of sensed current signal can detect the vibration frequency of nano beam.
Nano beam generates forced vibration under alternation light momentum incentive action, is pasted on the resistive layer resistance of nano beam root
Resistance value changes, and can be exported the signal using wheatstone bridge circuits, can be into line frequency after signal amplifier amplifies
Spectrum analysis obtains vibration time domain and frequency domain vibration information image, obtains the vibration parameters such as vibration amplitude and vibration frequency.Change light
Momentum encourages generating means driving motor rotating speed, and light momentum driving frequency is with changing, when nano beam resonates, output current
Signal value is maximum, and the resonant oscillation frequency of nano beam can be detected by measuring voltage change peak value, and nano beam end is obtained by calculation
The size for holding the additional mass of adherency achievees the purpose that measure nano-particle quality.
In the upper surface of nano beam, the light momentum exciting force that light radiation is generated by light hole is monochromatic light vertical irradiationIn formula, P is the power of the incident light across light hole, and α is the effect force efficiency of incident light, and n is week
The refractive index of medium is enclosed, c is the light velocity, and k is light hole number on disk, and ω is disc rotation speed, and t is time parameter.
When nano beam resonates, measurement obtains disc rotation speed ω numerical value when resonance, and the quality of nano-particle isWherein,ρ is the line density of nano beam, and E is the bullet of nano beam
Property modulus, l be nano beam length, the width of b nano beams, h be nanometer depth of beam.
The present invention has the following advantages that compared with prior art：
1. smooth momentum driving is a kind of non_contact drive method, mechanical noise not will produce, measurement disturbing factor is few, surveys
Measure high sensitivity.
2. double plate light transmission device can generate similar Sine distribution light momentum excitation, excited nano beam vibration carries out frequency sweep survey
Amount.
Description of the drawings
Fig. 1 nano beam nano-particle detection devices；
Fig. 2 thang-kng disk light momentum excitation switch figure；
Fig. 3 light momentum excitation demonstration schematic diagram.
In figure, 1, fixing end 2, upper bearing (metal) 3, upper disk 4, lower disc 5, nano-particle 6, lower laser 7, axis
8, drive motor 9, lower bearing 10, monochromatic light 11, pedestal 12, nano beam 13, resistive layer resistance 14, Wheatstone bridge
15, voltage source 16, signal amplifier 17, upper laser 18, light hole 19, the excitation of light momentum
Specific implementation mode
It is described in further detail below in conjunction with attached drawing：
The agent structure of the present embodiment includes that class sine light momentum encourages 19 generating means and micro- quality detection device.It is described
Light momentum encourages 19 generating means to be from top to bottom followed successively by fixing end 1, upper bearing (metal) 2, axis 7, upper disk 3, lower disc 4, lower bearing 9
With drive motor 8, upper laser 17 is located at 3 top of upper disk, lower laser 6 is located at 4 lower section of lower disc, and upper disk 3 is under
Disk 4 is fixed on 7 centre position of axis, and a bearing is installed in the top and bottom of axis 7 respectively, and the top and bottom of axis 7 are pacified respectively
A bearing is filled, 7 lower end of axis is hinged a drive motor 8, and drive motor 8 is rotated with moving axis 7；Upper disk 3 and lower disc
4 radiuses are 12mm, upper disk 3 and 4 disk of lower disc along apart from the equidistant light hole 18 for opening homalographic square in axle center,
18 length of side of light hole of square is 5 μm, and the length of side is much larger than the wavelength of light, is line cloth centered on the circumference of 10mm by radius
It sets, distance is equal between adjacent two light hole 18, and distance is four times of 18 width of light hole between two neighboring light hole 18, upper disk
Two thang-kng distance between borehole adjacent with lower disc is twice of thang-kng hole width.Upper laser 17 and lower laser 6 are fixed on pedestal
On 11, when the monochromatic light 10 of upper laser 17 and lower laser 6 irradiates light hole 18 respectively, drive motor 8 is revolved with moving axis 7
Turn, similar Sine distribution light momentum excitation 19, excited nano beam vibration can be generated.
Micro- quality detection device is by nano beam 12, resistive layer resistance 13, Wheatstone bridge 14 and needs what is measured to receive
Microparticle 5 forms.12 one end of the nano beam is fixed, and the other end is free, and nano beam 12 makes of silicon single crystal material, length, width
Degree and height are respectively 40 μm, 5 μm and 0.8 μm, and 12 width of nano beam is less than the length of side of square light hole 18, is measured and receives
Microparticle 5 is placed in 12 end of nano beam, and sinusoidal light stimulus acts on nano beam 12 near at a quarter of end.
12 upper layer of the nano beam, by argon ion sputtering, forms a thin layer resistive layer resistance 13 close to fixed end part,
Argon ion sputtering depth 10- 50nm, the resistive layer resistance value change with the deformation of nano beam 12, resistive layer length
When elongated, resistance becomes larger, and then becomes smaller on the contrary, 13 initial resistance 15k Ω of resistive layer resistance, and 14 other resistance of Wheatstone bridge are
15kΩ。
The Wheatstone bridge 14 is connected on 13 both ends of resistive layer resistance, other two terminal of Wheatstone bridge 14 connects constant outer
Voltage, 15 voltage of voltage source are 5 volts；The sine light momentum excitation 19 acts on 12 upper and lower surface of nano beam, photon fortune
The vibration of dynamic momentum driving nano beam 12, nano beam 12 change when vibrating with 13 resistance value of nano beam resistive layer resistance, resistance
Variation causes current signal in 14 circuit of Wheatstone bridge to change, and the variation of sensed current signal can detect nano beam
12 vibration frequency.
Nano beam 12 generates forced vibration under 19 effect of alternation light momentum excitation, is pasted on the resistance of 12 root of nano beam
Layer 13 resistance value of resistance changes, and can be exported the signal using 14 circuit of Wheatstone bridge, amplifies through signal amplifier 16
Afterwards, spectrum analysis can be carried out, vibration time domain and frequency domain vibration information image is obtained, obtains vibration amplitude and vibration frequency etc. and shake
Dynamic parameter.Change light momentum and encourage 19 generating means driving motor, 8 rotating speed, light stimulus frequency is with changing, nano beam 12
When resonance, output current signal value is maximum, and the resonant oscillation frequency of nano beam 12 can be detected by measuring voltage change peak value, be passed through
The size of the additional mass of 12 end of nano beam adherency is calculated, achievees the purpose that measure molecular mass.
The light momentum exciting force that monochromatic light vertical irradiation is generated in the upper surface of nano beam 12, light radiation by light hole 18
ForIn formula, P is the power of the incident light across light hole 18, and α is the effect force efficiency of incident light, n
For the refractive index of surrounding medium, c is the light velocity, and k is light hole number on disk, and ω is disc rotation speed, and t is time parameter.
When nano beam 12 resonates, measurement obtains disc rotation speed ω numerical value when resonance, and the quality of nano-particle isWherein,ρ is the line density of nano beam 12, and E is nano beam 12
Elasticity modulus, l be nano beam 12 length, the width of b nano beams 12, h be nano beam 12 height.
Example 1：For monochromatic light vertical irradiation in the upper surface of nano beam 12, it is 1 to pass through the power P of the incident light of light hole 18
×10-6The effect force efficiency α of w, incident light are 0.8, and the refractive index n of surrounding medium is 1, and light velocity c is 3 × 108M/s, on disk
Light hole number k is 1256, and the line density of nano beam 12 is 9.32 × 10-9The elastic modulus E of kg/m, nano beam 12 is
The length l of 170GPa, nano beam 12 are 40 μm, and the width b of nano beam 12 is 5 μm, and it is 0.8 μm that the height of nano beam 12, which is h,.
Light radiation is 2.0 × 10 by the light momentum exciting force amplitude that light hole 18 generates-3nN。
When nano beam 12 resonates, it is 1700 revolution per seconds, the quality of nano-particle 5 that measurement, which obtains disc rotation speed when resonance,
It is 2.7358 × 10-15 kg。
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the scope of the present invention.It is all
Within the spirit and principles in the present invention, made by any modification, equivalent replacement and improvement, should be included in of the present invention
Within protection domain.
Claims (3)
1. a kind of smooth momentum excited nano beam apparatus for measuring quality, including class sine light momentum excitation (19) generating means and micro- matter
Amount detecting device；Described smooth momentum excitation (19) generating means is from top to bottom followed successively by fixing end (1), upper bearing (metal) (2), axis (7),
Upper disk (3), lower disc (4), lower bearing (9) and drive motor (8), upper laser (17) is located above upper disk (3), under
Laser (6) is located at below lower disc (4), and upper disk (3) and lower disc (4) are fixed on axis (7) centre position, axis (7) it is upper
A bearing is installed in end and lower end respectively, and axis (7) lower end is hinged a drive motor (8), drive motor (8) band moving axis
(7) it rotates；Upper disk (3) and lower disc (4) radius are 12mm, and upper disk (3) and lower disc (4) disk are along apart from axle center
The equidistant light hole (18) for leaving homalographic square, square light hole (18) length of side are 5 μm, and the length of side is much larger than the wave of light
It is long, it is arranged for line centered on the circumference of 10mm by radius, distance is equal between adjacent two light hole (18), two neighboring light hole
(18) distance is four times of light hole (18) width between, and upper disk and the adjacent two thang-kngs distance between borehole of lower disc are thang-kng hole width
Twice；Upper laser (17) and lower laser (6) are fixed on pedestal (11), when upper laser (17) and lower laser (6)
Monochromatic light (10) irradiate light hole (18) respectively, drive motor (8) band moving axis (7) rotates, and can generate similar sinusoidal point
Lighting momentum encourages (19), excited nano beam vibration.
2. according to 1 described device of claims, it is characterised in that：Monochromatic light vertical irradiation in the upper surface of nano beam (12),
The light momentum exciting force that light radiation is generated by light hole (18) isIn formula, P is across light hole
(18) power of incident light, α are the effect force efficiency of incident light, and n is the refractive index of surrounding medium, and c is the light velocity, and k is disk
Upper light hole number, ω are disc rotation speed, and t is time parameter.
3. according to 1 described device of claims, it is characterised in that：When nano beam (12) resonates, when measurement obtains resonance
Disc rotation speed ω numerical value, the quality of nano-particle areWherein,ρ
For the line density of nano beam (12), E is the elasticity modulus of nano beam (12), and l is the length of nano beam (12), b nano beams (12)
Width, h be nano beam (12) height.
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| CN108225544B (en) * | 2017-11-27 | 2020-02-18 | 东南大学 | Double-layer multiplexing type triangular folded beam mass block resonance system and trace detection method thereof |
| CN108132085B (en) * | 2017-12-21 | 2019-05-28 | 山东理工大学 | It is a kind of that micro- apparatus for measuring quality and method are received based on tunnel-effect |
| CN108132084B (en) * | 2017-12-21 | 2019-06-07 | 山东理工大学 | A kind of micro- apparatus for measuring quality of receiving based on FET grid displacement sensitivity |
| FR3076290B1 (en) * | 2018-01-03 | 2020-02-07 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | DEVICE FOR MICRO OR NANOMECHANICAL DETECTION OF PARTICLES |
| CN111224639B (en) * | 2020-01-19 | 2020-11-27 | 中国人民解放军军事科学院国防科技创新研究院 | Resonant frequency self-adaptive control system based on two-dimensional heterogeneous thin film |
| CN113804606A (en) * | 2021-08-26 | 2021-12-17 | 之江实验室 | Suspended light trap nanoparticle quality measurement method based on electric field calibration |
| CN113820265B (en) * | 2021-09-28 | 2023-06-23 | 北京卫星环境工程研究所 | Combined dust multi-parameter detection method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101717066A (en) * | 2009-11-24 | 2010-06-02 | 天津大学 | Method and nano balance for weighing viruses |
| CN102269615A (en) * | 2011-05-07 | 2011-12-07 | 大连理工大学 | Micro mass sensor based on groove-shaped cantilever beam structure |
| CN104135186A (en) * | 2013-05-03 | 2014-11-05 | 纳米新能源（唐山）有限责任公司 | Cantilever beam structure friction generator and generator set |
| CN105444872A (en) * | 2016-01-04 | 2016-03-30 | 南京大学 | Vibration sensor based on nanoparticle lattice quantum transport characteristic |
-
2016
- 2016-10-28 CN CN201610971404.4A patent/CN106525669B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101717066A (en) * | 2009-11-24 | 2010-06-02 | 天津大学 | Method and nano balance for weighing viruses |
| CN102269615A (en) * | 2011-05-07 | 2011-12-07 | 大连理工大学 | Micro mass sensor based on groove-shaped cantilever beam structure |
| CN104135186A (en) * | 2013-05-03 | 2014-11-05 | 纳米新能源（唐山）有限责任公司 | Cantilever beam structure friction generator and generator set |
| CN105444872A (en) * | 2016-01-04 | 2016-03-30 | 南京大学 | Vibration sensor based on nanoparticle lattice quantum transport characteristic |
Non-Patent Citations (3)
| Title |
|---|
| Characterization of vaccinia virus particles using microscale silicon cantilever resonators and atomic force microscopy;Luke Johnson等;《Sensors and Actuators B》;20061231;第189-197页 * |
| Single virus particle mass detection using microresonators with nanoscale thickness;A. Gupta,等;《APPLIED PHYSICS LETTERS》;20040315;第1975-1978页 * |
| Ultrasensitive mass sensing using mode localization in coupled microcantilevers;Arvind Raman;《Applied Physics Letters》;20060630;第1-3页 * |
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